TW344124B - Process for controlling the line width of an integrated circuit - Google Patents

Process for controlling the line width of an integrated circuit

Info

Publication number
TW344124B
TW344124B TW086116603A TW86116603A TW344124B TW 344124 B TW344124 B TW 344124B TW 086116603 A TW086116603 A TW 086116603A TW 86116603 A TW86116603 A TW 86116603A TW 344124 B TW344124 B TW 344124B
Authority
TW
Taiwan
Prior art keywords
line width
photoresist
controlling
integrated circuit
polysilicon
Prior art date
Application number
TW086116603A
Other languages
Chinese (zh)
Inventor
Jia-Shyong Tsay
Horng-Yeuan Taur
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW086116603A priority Critical patent/TW344124B/en
Application granted granted Critical
Publication of TW344124B publication Critical patent/TW344124B/en

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

A process for controlling the line width of an integrated circuit, which is used to control the line width of a polysilicon line and comprises the following steps: (a) covering a photoresist on a preformed polysilicon layer; (b) defining locations of polysilicon lines by a photolithography technique; (c) irradiating the developed photoresist with an UV light thereby suitably shrinking the volume of the photoresist; (d) etching the polysilicon layer using the shrunk photoresist as the protective layer thereby forming polysilicon lines.
TW086116603A 1997-11-07 1997-11-07 Process for controlling the line width of an integrated circuit TW344124B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086116603A TW344124B (en) 1997-11-07 1997-11-07 Process for controlling the line width of an integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086116603A TW344124B (en) 1997-11-07 1997-11-07 Process for controlling the line width of an integrated circuit

Publications (1)

Publication Number Publication Date
TW344124B true TW344124B (en) 1998-11-01

Family

ID=58263709

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086116603A TW344124B (en) 1997-11-07 1997-11-07 Process for controlling the line width of an integrated circuit

Country Status (1)

Country Link
TW (1) TW344124B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108231548A (en) * 2016-12-15 2018-06-29 台湾积体电路制造股份有限公司 The production method of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108231548A (en) * 2016-12-15 2018-06-29 台湾积体电路制造股份有限公司 The production method of semiconductor device

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