TW344124B - Process for controlling the line width of an integrated circuit - Google Patents
Process for controlling the line width of an integrated circuitInfo
- Publication number
- TW344124B TW344124B TW086116603A TW86116603A TW344124B TW 344124 B TW344124 B TW 344124B TW 086116603 A TW086116603 A TW 086116603A TW 86116603 A TW86116603 A TW 86116603A TW 344124 B TW344124 B TW 344124B
- Authority
- TW
- Taiwan
- Prior art keywords
- line width
- photoresist
- controlling
- integrated circuit
- polysilicon
- Prior art date
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
A process for controlling the line width of an integrated circuit, which is used to control the line width of a polysilicon line and comprises the following steps: (a) covering a photoresist on a preformed polysilicon layer; (b) defining locations of polysilicon lines by a photolithography technique; (c) irradiating the developed photoresist with an UV light thereby suitably shrinking the volume of the photoresist; (d) etching the polysilicon layer using the shrunk photoresist as the protective layer thereby forming polysilicon lines.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086116603A TW344124B (en) | 1997-11-07 | 1997-11-07 | Process for controlling the line width of an integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086116603A TW344124B (en) | 1997-11-07 | 1997-11-07 | Process for controlling the line width of an integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
TW344124B true TW344124B (en) | 1998-11-01 |
Family
ID=58263709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086116603A TW344124B (en) | 1997-11-07 | 1997-11-07 | Process for controlling the line width of an integrated circuit |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW344124B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108231548A (en) * | 2016-12-15 | 2018-06-29 | 台湾积体电路制造股份有限公司 | The production method of semiconductor device |
-
1997
- 1997-11-07 TW TW086116603A patent/TW344124B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108231548A (en) * | 2016-12-15 | 2018-06-29 | 台湾积体电路制造股份有限公司 | The production method of semiconductor device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |