TW343238B - Aluminum or aluminum alloy member for vacuum chamber, method of processing the surface of the member and material for the member - Google Patents

Aluminum or aluminum alloy member for vacuum chamber, method of processing the surface of the member and material for the member

Info

Publication number
TW343238B
TW343238B TW084111487A TW84111487A TW343238B TW 343238 B TW343238 B TW 343238B TW 084111487 A TW084111487 A TW 084111487A TW 84111487 A TW84111487 A TW 84111487A TW 343238 B TW343238 B TW 343238B
Authority
TW
Taiwan
Prior art keywords
aluminum
vacuum chamber
processing
aluminum alloy
alloy member
Prior art date
Application number
TW084111487A
Other languages
English (en)
Inventor
Jun Hisamoto
Hiroshi Wada
Mituki Ikeda
Masahiro Yanagigawa
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP28231494A external-priority patent/JP2943634B2/ja
Priority claimed from JP6623295A external-priority patent/JPH08260088A/ja
Priority claimed from JP6823295A external-priority patent/JP2900822B2/ja
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Application granted granted Critical
Publication of TW343238B publication Critical patent/TW343238B/zh

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
TW084111487A 1994-11-16 1995-10-30 Aluminum or aluminum alloy member for vacuum chamber, method of processing the surface of the member and material for the member TW343238B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28231494A JP2943634B2 (ja) 1994-11-16 1994-11-16 ＡｌまたはＡｌ合金製真空チャンバ部材の表面処理方法
JP6623295A JPH08260088A (ja) 1995-03-24 1995-03-24 耐ガス腐食性及び耐プラズマ性に優れた真空チャンバ部材用材料
JP6823295A JP2900822B2 (ja) 1994-11-16 1995-03-27 ＡｌまたはＡｌ合金製真空チャンバ部材

Publications (1)

Publication Number Publication Date
TW343238B true TW343238B (en) 1998-10-21

Family

ID=58263624

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084111487A TW343238B (en) 1994-11-16 1995-10-30 Aluminum or aluminum alloy member for vacuum chamber, method of processing the surface of the member and material for the member

Country Status (1)

Country Link
TW (1) TW343238B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7005194B2 (en) 2003-01-23 2006-02-28 Kobe Steel, Ltd. Aluminum alloy member superior in corrosion resistance and plasma resistance
CN109763159A (zh) * 2019-03-18 2019-05-17 徐靖才 一种2024铝合金阳极氧化膜及制备方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7005194B2 (en) 2003-01-23 2006-02-28 Kobe Steel, Ltd. Aluminum alloy member superior in corrosion resistance and plasma resistance
CN109763159A (zh) * 2019-03-18 2019-05-17 徐靖才 一种2024铝合金阳极氧化膜及制备方法

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