TW340877B - The method by using plasma chemical to envaporize diamond like carbon - Google Patents
The method by using plasma chemical to envaporize diamond like carbonInfo
- Publication number
- TW340877B TW340877B TW086111514A TW86111514A TW340877B TW 340877 B TW340877 B TW 340877B TW 086111514 A TW086111514 A TW 086111514A TW 86111514 A TW86111514 A TW 86111514A TW 340877 B TW340877 B TW 340877B
- Authority
- TW
- Taiwan
- Prior art keywords
- envaporized
- article
- carbon
- reaction furnace
- diamond
- Prior art date
Links
Abstract
A method by using plasma chemical to envaporize diamond like carbon (DLC) with high adhesion, its steps are as following: Vacuum step, it is vacuum the reaction furnace that has placed envaporized article inside; Heating step, it is heating the reaction furnace into setting temperature; Diffusion step, it is by flowing N2 and H2 into reaction furnace to generate plasma nitridation diffusion reaction, to form nitride diffusion on surface of envaporized article; The junction envaporized step, it is by flowing TiCl4, N2 and H2, to grow TiN on surface of envaporized article; Transition envaporized step, it is by flowing CH4 into reaction furnace, to grow TiCN with well unity on TiN layer; Bonding envaporized step, it stops to supply N2 into reaction furnace, to grow TiC with well adhesion on TiCN layer; Forming diamond like carbon step, it is by cooling down envaporized article, which has envaporized nitride, TiN, TiCN and TiC layer, to 100℃ at H2 environment, then rising the temperature into 150℃, and flowing CH4 and H4, to form diamond like carbon on surface of envaporized article.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086111514A TW340877B (en) | 1997-08-12 | 1997-08-12 | The method by using plasma chemical to envaporize diamond like carbon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086111514A TW340877B (en) | 1997-08-12 | 1997-08-12 | The method by using plasma chemical to envaporize diamond like carbon |
Publications (1)
Publication Number | Publication Date |
---|---|
TW340877B true TW340877B (en) | 1998-09-21 |
Family
ID=58263461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086111514A TW340877B (en) | 1997-08-12 | 1997-08-12 | The method by using plasma chemical to envaporize diamond like carbon |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW340877B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110218971A (en) * | 2019-07-02 | 2019-09-10 | 重庆文理学院 | A kind of nano-multilayer film and preparation method thereof suitable for titanium alloy surface |
-
1997
- 1997-08-12 TW TW086111514A patent/TW340877B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110218971A (en) * | 2019-07-02 | 2019-09-10 | 重庆文理学院 | A kind of nano-multilayer film and preparation method thereof suitable for titanium alloy surface |
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