TW340056B - Gas excitation device - Google Patents

Gas excitation device

Info

Publication number
TW340056B
TW340056B TW086107304A TW86107304A TW340056B TW 340056 B TW340056 B TW 340056B TW 086107304 A TW086107304 A TW 086107304A TW 86107304 A TW86107304 A TW 86107304A TW 340056 B TW340056 B TW 340056B
Authority
TW
Taiwan
Prior art keywords
gas
supply source
excitation
excitation device
gas excitation
Prior art date
Application number
TW086107304A
Other languages
English (en)
Inventor
Sindzingre Thierry
Rabia Stephane
Original Assignee
L Air Liquide Sa Pournl Etude Et L Exploitatio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by L Air Liquide Sa Pournl Etude Et L Exploitatio filed Critical L Air Liquide Sa Pournl Etude Et L Exploitatio
Application granted granted Critical
Publication of TW340056B publication Critical patent/TW340056B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
TW086107304A 1996-07-02 1997-05-29 Gas excitation device TW340056B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9608229A FR2750620B1 (fr) 1996-07-02 1996-07-02 Dispositif d'excitation de gaz

Publications (1)

Publication Number Publication Date
TW340056B true TW340056B (en) 1998-09-11

Family

ID=9493638

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086107304A TW340056B (en) 1996-07-02 1997-05-29 Gas excitation device

Country Status (14)

Country Link
US (1) US5858312A (zh)
EP (1) EP0815936A3 (zh)
JP (1) JPH10151338A (zh)
KR (1) KR980009507A (zh)
CN (1) CN1173412A (zh)
AR (1) AR007113A1 (zh)
BR (1) BR9703826A (zh)
CA (1) CA2209309A1 (zh)
FR (1) FR2750620B1 (zh)
ID (1) ID19707A (zh)
MA (1) MA24238A1 (zh)
MY (1) MY133552A (zh)
SG (1) SG76516A1 (zh)
TW (1) TW340056B (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2750622B1 (fr) * 1996-07-02 1998-09-25 Air Liquide Procede de traitement de surface par voie seche et dispositif pour la mise en oeuvre d'un tel procede
US6174500B1 (en) * 1998-06-02 2001-01-16 Mitsubishi Denki Kabushiki Kaisha Negative ion generating apparatus
US6193135B1 (en) * 1999-09-13 2001-02-27 Lucent Technologies Inc. System for providing back-lighting of components during fluxless soldering
US6196446B1 (en) * 1999-09-13 2001-03-06 Lucent Technologies Inc. Automated fluxless soldering using inert gas
US6468833B2 (en) * 2000-03-31 2002-10-22 American Air Liquide, Inc. Systems and methods for application of substantially dry atmospheric plasma surface treatment to various electronic component packaging and assembly methods
US6776330B2 (en) 2001-09-10 2004-08-17 Air Products And Chemicals, Inc. Hydrogen fluxless soldering by electron attachment
US8361340B2 (en) 2003-04-28 2013-01-29 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
US7079370B2 (en) * 2003-04-28 2006-07-18 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation
US7387738B2 (en) 2003-04-28 2008-06-17 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment for wafer bumping applications
US7897029B2 (en) * 2008-03-04 2011-03-01 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
US7434719B2 (en) * 2005-12-09 2008-10-14 Air Products And Chemicals, Inc. Addition of D2 to H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment
US8454850B2 (en) * 2009-09-02 2013-06-04 Air Products And Chemicals, Inc. Method for the removal of surface oxides by electron attachment
US9053894B2 (en) 2011-02-09 2015-06-09 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment
US9006975B2 (en) 2011-02-09 2015-04-14 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE721749C (de) * 1939-10-31 1942-06-17 Maschf Augsburg Nuernberg Ag Vorrichtung zur Einfuehrung pulverfoermigen Brennstoffes, insbesondere Kohlenstaub, in eine luftverdichtende Brennkraftmaschine
GB955702A (en) * 1959-08-26 1964-04-15 Ici Ltd Method of conducting gaseous reactions
NL6705166A (zh) * 1966-04-14 1967-10-16
JP2531772B2 (ja) * 1989-01-09 1996-09-04 株式会社東芝 オゾン発生装置
US5002739A (en) * 1990-09-11 1991-03-26 Trineos Ozone cell with cooling bellows
FR2692730B1 (fr) * 1992-06-19 1994-08-19 Air Liquide Dispositif de formation de molécules gazeuses excitées ou instables et utilisations d'un tel dispositif.
FR2713528B1 (fr) * 1993-12-15 1996-01-12 Air Liquide Procédé et dispositif de fluxage par voie sèche de surfaces métalliques avant brasage ou étamage.

Also Published As

Publication number Publication date
SG76516A1 (en) 2000-11-21
EP0815936A3 (fr) 1998-01-14
US5858312A (en) 1999-01-12
CA2209309A1 (fr) 1998-01-02
JPH10151338A (ja) 1998-06-09
CN1173412A (zh) 1998-02-18
MY133552A (en) 2007-11-30
ID19707A (id) 1998-07-30
FR2750620A1 (fr) 1998-01-09
FR2750620B1 (fr) 1998-09-25
MA24238A1 (fr) 1997-12-31
BR9703826A (pt) 1998-11-03
KR980009507A (ko) 1998-04-30
EP0815936A2 (fr) 1998-01-07
AR007113A1 (es) 1999-10-13

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