TW333690B - The method for preventing polysilicon peeling in SRAM process of (4T+2R) - Google Patents

The method for preventing polysilicon peeling in SRAM process of (4T+2R)

Info

Publication number
TW333690B
TW333690B TW086106578A TW86106578A TW333690B TW 333690 B TW333690 B TW 333690B TW 086106578 A TW086106578 A TW 086106578A TW 86106578 A TW86106578 A TW 86106578A TW 333690 B TW333690 B TW 333690B
Authority
TW
Taiwan
Prior art keywords
peeling
polysilicon
sram process
preventing
preventing polysilicon
Prior art date
Application number
TW086106578A
Other languages
Chinese (zh)
Inventor
Horng-Jer Liaw
Shean-Wei Jin
Jyh-Ming Chen
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW086106578A priority Critical patent/TW333690B/en
Application granted granted Critical
Publication of TW333690B publication Critical patent/TW333690B/en

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  • Semiconductor Memories (AREA)

Abstract

A method for preventing polysilicon at back side of Si wafer peeling in SRAM process of (4T + 2R), it includes: Form polysilicon layer on substrate; Form oxide at back side of substrate; Form dielectric on polysilicon layer.
TW086106578A 1997-05-16 1997-05-16 The method for preventing polysilicon peeling in SRAM process of (4T+2R) TW333690B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086106578A TW333690B (en) 1997-05-16 1997-05-16 The method for preventing polysilicon peeling in SRAM process of (4T+2R)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086106578A TW333690B (en) 1997-05-16 1997-05-16 The method for preventing polysilicon peeling in SRAM process of (4T+2R)

Publications (1)

Publication Number Publication Date
TW333690B true TW333690B (en) 1998-06-11

Family

ID=58262920

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086106578A TW333690B (en) 1997-05-16 1997-05-16 The method for preventing polysilicon peeling in SRAM process of (4T+2R)

Country Status (1)

Country Link
TW (1) TW333690B (en)

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