TW330344B - Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor - Google Patents

Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor

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Publication number
TW330344B
TW330344B TW086108168A TW86108168A TW330344B TW 330344 B TW330344 B TW 330344B TW 086108168 A TW086108168 A TW 086108168A TW 86108168 A TW86108168 A TW 86108168A TW 330344 B TW330344 B TW 330344B
Authority
TW
Taiwan
Prior art keywords
inp
manufacturing process
type iii
schottky diode
complex semiconductor
Prior art date
Application number
TW086108168A
Other languages
Chinese (zh)
Inventor
Lian-Bin Jang
Horng-Tzong Wang
Original Assignee
Nat Science Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Council filed Critical Nat Science Council
Priority to TW086108168A priority Critical patent/TW330344B/en
Application granted granted Critical
Publication of TW330344B publication Critical patent/TW330344B/en

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Abstract

A manufacturing process for Schottky diode utilizing SF4 and InP-type III-V com plex semiconductor including a complex semiconductor plate and a Schottky contact metal characterized at:form a SF4 and PF3-containing film between the comple x semiconductor plate and Schottky contact metal.
TW086108168A 1997-06-13 1997-06-13 Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor TW330344B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086108168A TW330344B (en) 1997-06-13 1997-06-13 Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086108168A TW330344B (en) 1997-06-13 1997-06-13 Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor

Publications (1)

Publication Number Publication Date
TW330344B true TW330344B (en) 1998-04-21

Family

ID=58262613

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086108168A TW330344B (en) 1997-06-13 1997-06-13 Manufacturing process for Schottky diode utilizing SF4 and InP-type III-V complex semiconductor

Country Status (1)

Country Link
TW (1) TW330344B (en)

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