TW329534B - The surface treatment method for evaluating the semiconductor substrate - Google Patents

The surface treatment method for evaluating the semiconductor substrate

Info

Publication number
TW329534B
TW329534B TW084112407A TW84112407A TW329534B TW 329534 B TW329534 B TW 329534B TW 084112407 A TW084112407 A TW 084112407A TW 84112407 A TW84112407 A TW 84112407A TW 329534 B TW329534 B TW 329534B
Authority
TW
Taiwan
Prior art keywords
semiconductor substrate
evaluating
surface treatment
treatment method
cleaning
Prior art date
Application number
TW084112407A
Other languages
Chinese (zh)
Inventor
Hirotaka Katou
Hiroji Satou
Kei Matsumoto
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6247234A external-priority patent/JPH0888259A/en
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW329534B publication Critical patent/TW329534B/en

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Abstract

A surface treatment method for evaluating the semiconductor substrate is claimed and its features are: During the evaluation of the heavy metal contamination, such as Fe, Cr etc., on semiconductor substrate, through mixed acid to expose bared Si layer on the substrate; then proceed buffering HF cleaning and SC-1 cleaning to stabilize the testing value of minority carrier diffusion length in SPV method.
TW084112407A 1994-09-14 1995-11-22 The surface treatment method for evaluating the semiconductor substrate TW329534B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6247234A JPH0888259A (en) 1994-09-14 1994-09-14 Surface treating method of semiconductor substrate evaluation

Publications (1)

Publication Number Publication Date
TW329534B true TW329534B (en) 1998-04-11

Family

ID=58262533

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112407A TW329534B (en) 1994-09-14 1995-11-22 The surface treatment method for evaluating the semiconductor substrate

Country Status (1)

Country Link
TW (1) TW329534B (en)

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