TW329020B - Thin-film transistor electron microscope specimen preparation technique - Google Patents

Thin-film transistor electron microscope specimen preparation technique

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Publication number
TW329020B
TW329020B TW086107111A TW86107111A TW329020B TW 329020 B TW329020 B TW 329020B TW 086107111 A TW086107111 A TW 086107111A TW 86107111 A TW86107111 A TW 86107111A TW 329020 B TW329020 B TW 329020B
Authority
TW
Taiwan
Prior art keywords
thin
preparation technique
stack
specimen
film transistor
Prior art date
Application number
TW086107111A
Other languages
Chinese (zh)
Inventor
Ruey-Long Chiou
Suh-Mei Chen
Ming-Kuang Liang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW086107111A priority Critical patent/TW329020B/en
Application granted granted Critical
Publication of TW329020B publication Critical patent/TW329020B/en

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Abstract

A preparation technique for electron-microscope specimens of thin-film transistors includes the following steps: Stack a plurality of glass specimens having thin-film transistors with a plurality of silicon crystals from bottom up along a first direction to form a specimen stack, where one silicon crystal is inserted between any two glass specimens; Grind the stack specimen along a second direction perpendicular to the first direction to make a thin slice and observe the ground cross section using an optical microscope till the silicon crystal portion on the ground cross section becomes dark red; and Following the traditional manufacturing method, fix the ground thin slice on a support to finish preparing the specimen.
TW086107111A 1997-05-26 1997-05-26 Thin-film transistor electron microscope specimen preparation technique TW329020B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086107111A TW329020B (en) 1997-05-26 1997-05-26 Thin-film transistor electron microscope specimen preparation technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086107111A TW329020B (en) 1997-05-26 1997-05-26 Thin-film transistor electron microscope specimen preparation technique

Publications (1)

Publication Number Publication Date
TW329020B true TW329020B (en) 1998-04-01

Family

ID=58262481

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086107111A TW329020B (en) 1997-05-26 1997-05-26 Thin-film transistor electron microscope specimen preparation technique

Country Status (1)

Country Link
TW (1) TW329020B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7169627B2 (en) 2003-06-05 2007-01-30 National Tsing Hua University Method for inspecting a connecting surface of a flip chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7169627B2 (en) 2003-06-05 2007-01-30 National Tsing Hua University Method for inspecting a connecting surface of a flip chip

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees