TW329020B - Thin-film transistor electron microscope specimen preparation technique - Google Patents
Thin-film transistor electron microscope specimen preparation techniqueInfo
- Publication number
- TW329020B TW329020B TW086107111A TW86107111A TW329020B TW 329020 B TW329020 B TW 329020B TW 086107111 A TW086107111 A TW 086107111A TW 86107111 A TW86107111 A TW 86107111A TW 329020 B TW329020 B TW 329020B
- Authority
- TW
- Taiwan
- Prior art keywords
- thin
- preparation technique
- stack
- specimen
- film transistor
- Prior art date
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
A preparation technique for electron-microscope specimens of thin-film transistors includes the following steps: Stack a plurality of glass specimens having thin-film transistors with a plurality of silicon crystals from bottom up along a first direction to form a specimen stack, where one silicon crystal is inserted between any two glass specimens; Grind the stack specimen along a second direction perpendicular to the first direction to make a thin slice and observe the ground cross section using an optical microscope till the silicon crystal portion on the ground cross section becomes dark red; and Following the traditional manufacturing method, fix the ground thin slice on a support to finish preparing the specimen.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086107111A TW329020B (en) | 1997-05-26 | 1997-05-26 | Thin-film transistor electron microscope specimen preparation technique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086107111A TW329020B (en) | 1997-05-26 | 1997-05-26 | Thin-film transistor electron microscope specimen preparation technique |
Publications (1)
Publication Number | Publication Date |
---|---|
TW329020B true TW329020B (en) | 1998-04-01 |
Family
ID=58262481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086107111A TW329020B (en) | 1997-05-26 | 1997-05-26 | Thin-film transistor electron microscope specimen preparation technique |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW329020B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7169627B2 (en) | 2003-06-05 | 2007-01-30 | National Tsing Hua University | Method for inspecting a connecting surface of a flip chip |
-
1997
- 1997-05-26 TW TW086107111A patent/TW329020B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7169627B2 (en) | 2003-06-05 | 2007-01-30 | National Tsing Hua University | Method for inspecting a connecting surface of a flip chip |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |