TW328612B - Automatic semiconductor element manufacturing process equipment - Google Patents

Abstract

Production equipment that can prevent semiconductor wafers from artificial contamination during process include: a closed building; an operation room, located in the closed building, enclosed by side walls each of which has multiple openings and a tool for keeping the environment inside the operation room clean; a plurality of passages connected to the operation room, where each passage is connected to at least one opening of the operation room; tools for keeping the environment in the passages clean, making the environment in the passages cleaner than that in the operation room; manufacturing process tools located inside or near the passages; automatic transporting vehicles, located in the passages, for transporting wafers from one manufacturing apparatus to another apparatus through the openings; measurement and testing equipment located in the operation room; a material handling system, located in the operation room, for receiving wafers from and conveying wafers to automatic transporting vehicles through the openings, and conveying wafers to the measurement and testing equipment; and computer system for controlling and assembling operation procedures of manufacturing equipment such as the automatic transporting vehicles and the automatic material handling system.