TW326556B - SOG planarization process using anti-reflective coating - Google Patents

SOG planarization process using anti-reflective coating

Info

Publication number
TW326556B
TW326556B TW085112371A TW85112371A TW326556B TW 326556 B TW326556 B TW 326556B TW 085112371 A TW085112371 A TW 085112371A TW 85112371 A TW85112371 A TW 85112371A TW 326556 B TW326556 B TW 326556B
Authority
TW
Taiwan
Prior art keywords
sog
reflective coating
planarization process
forming
sog planarization
Prior art date
Application number
TW085112371A
Other languages
Chinese (zh)
Inventor
Guang-Jau Chen
Yuh-Tarng Twu
Geeng-Huei Liaw
Yuh-Wei Chyr
Original Assignee
Mos Electronics Taiwan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mos Electronics Taiwan Inc filed Critical Mos Electronics Taiwan Inc
Priority to TW085112371A priority Critical patent/TW326556B/en
Application granted granted Critical
Publication of TW326556B publication Critical patent/TW326556B/en

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

A SOG planarization process using anti-reflective coating includes a. forming a metal layer on the substrate b. forming an anti-reflective coating on the metal layer c. defining the pattern of the anti-reflective coating and the metal layer to form the metal line structure d. forming a SOG on the metal line structure e. removing the SOG to make the surface of the SOG flat f. forming a dielectric layer on the SOG.
TW085112371A 1996-10-09 1996-10-09 SOG planarization process using anti-reflective coating TW326556B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085112371A TW326556B (en) 1996-10-09 1996-10-09 SOG planarization process using anti-reflective coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085112371A TW326556B (en) 1996-10-09 1996-10-09 SOG planarization process using anti-reflective coating

Publications (1)

Publication Number Publication Date
TW326556B true TW326556B (en) 1998-02-11

Family

ID=58262281

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085112371A TW326556B (en) 1996-10-09 1996-10-09 SOG planarization process using anti-reflective coating

Country Status (1)

Country Link
TW (1) TW326556B (en)

Similar Documents

Publication Publication Date Title
HUP0100097A3 (en) Process and apparatus for forming a coating on a conductive substrate and coated conductive substrate
AU4245589A (en) A thermosetting covering sheet and a method of forming hard coating on the surface of substrates using the same
AU2360897A (en) Method of producing opaque adherent coating on the surface of substantially hydrated cemetitious substrate
IT1282106B1 (en) TRANSPARENT PHOTOCROMATIC SUBSTRATE INCLUDING AN ANTI-REFLECTIVE SURFACE COATING
HU9502462D0 (en) Surface coating layer and process for its formation
WO2001071067A3 (en) An energy enhanced process for treating a conductive surface and products formed thereby
YU95081A (en) Process for the manufacturing of a multilayer protecting and/or decorating coating on the surface of a metal substrate
EP0615256A3 (en) Method of manufacturing a pattern of an electrically conductive polymer on a substrate surface and method of metallizing such a pattern.
MX9604291A (en) Process for electrostatic enameling of non-conductive surfaces.
IL119355A0 (en) Method of forming a conductive coating on a substrate
TW346736B (en) Chemically grafted electrical devices
WO1998043282A3 (en) Decals and methods for providing an antireflective coating and metallization on a solar cell
CA2336918A1 (en) Improved method for forming conductive traces and printed circuits made thereby
MX9700602A (en) Metal finishing process.
TW337590B (en) Manufacture of semiconductor device having reliable and fine connection hole
EP0238929A3 (en) Process for providing circuit lines on a substrate
TW328167B (en) Method for manufacturing lead frame
MY141591A (en) Metal pattern formation
TW326556B (en) SOG planarization process using anti-reflective coating
EP0724000A3 (en) Method of forming an insoluble coating on a substrate
EP0785917A4 (en) Method of treating an anti-reflective coating on a substrate
GB2323855B (en) Method and apparatus for depositing a coating on a conductive substrate
TW365700B (en) Method of manufacture of plugs
TW344102B (en) Additive metallization process and structure
AU3058299A (en) Process for coating a surface with a layer having a stone pattern