TW326497B - The acceleration sensor and its manufacturing method - Google Patents
The acceleration sensor and its manufacturing methodInfo
- Publication number
- TW326497B TW326497B TW086103828A TW86103828A TW326497B TW 326497 B TW326497 B TW 326497B TW 086103828 A TW086103828 A TW 086103828A TW 86103828 A TW86103828 A TW 86103828A TW 326497 B TW326497 B TW 326497B
- Authority
- TW
- Taiwan
- Prior art keywords
- length
- acceleration sensor
- detection device
- central portion
- manufacturing
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000001514 detection method Methods 0.000 abstract 3
- 230000002093 peripheral effect Effects 0.000 abstract 2
- 230000010287 polarization Effects 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
Abstract
An acceleration sensor includes a dimorph detection device. The detection device has a freely deflectable length X at longitudinal direction, and is longitudinally divided into central portion that has a length Y at longitudinal direction and several peripheral portions. The polarization direction at central portion is opposite with the polarization direction at peripheral portion. In which, the ratio Y/X is the overall length Y at central portion to the freely deflectable length X at longitudinal detection device, and is limited from 44% to 73%.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07601596A JP3183158B2 (en) | 1996-03-29 | 1996-03-29 | Acceleration sensor and method of manufacturing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
TW326497B true TW326497B (en) | 1998-02-11 |
Family
ID=13593007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086103828A TW326497B (en) | 1996-03-29 | 1997-03-26 | The acceleration sensor and its manufacturing method |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3183158B2 (en) |
DE (1) | DE19712789C2 (en) |
SG (1) | SG50014A1 (en) |
TW (1) | TW326497B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5144004B2 (en) * | 2005-04-27 | 2013-02-13 | 京セラクリスタルデバイス株式会社 | Inertial sensor element |
CN102937137B (en) * | 2012-11-20 | 2015-01-14 | 浙江大学 | Piezoelectric power generation rolling bearing unit |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0616221B1 (en) * | 1993-03-19 | 1998-11-25 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
JP2780594B2 (en) * | 1993-03-19 | 1998-07-30 | 株式会社村田製作所 | Acceleration sensor |
-
1996
- 1996-03-29 JP JP07601596A patent/JP3183158B2/en not_active Expired - Lifetime
-
1997
- 1997-03-26 TW TW086103828A patent/TW326497B/en not_active IP Right Cessation
- 1997-03-26 DE DE1997112789 patent/DE19712789C2/en not_active Expired - Lifetime
- 1997-03-27 SG SG1997001001A patent/SG50014A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE19712789A1 (en) | 1997-11-06 |
JP3183158B2 (en) | 2001-07-03 |
SG50014A1 (en) | 1998-06-15 |
JPH09264902A (en) | 1997-10-07 |
DE19712789C2 (en) | 2002-08-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0653718A3 (en) | Device and method for detecting measured date specific to the body. | |
EP0183585A3 (en) | Flexible plastic tube for endoscopes and the like | |
EP0631309A3 (en) | Semiconductor device with contact structure and method of manufacturing the same. | |
DE68923536D1 (en) | Oxygen sensor element and device for the production thereof. | |
DE59404912D1 (en) | High speed article separator and aligner | |
TR28004A (en) | Integrated carbon fuel drying and gasification process and device. | |
EP0549807A4 (en) | Sensor for force, acceleration and magnetism using piezoelectric devices | |
EP0311439A3 (en) | Ozone gas sensor and ozone gas detecting device having ozone gas sensor | |
FR2746919B1 (en) | CONSTRAINED GAUGE SENSOR USING THE PIEZORESISTIVE EFFECT AND ITS MANUFACTURING METHOD | |
EP0617267A3 (en) | A semiconductor device with a piezoresistive pressure sensor. | |
FR2750181B1 (en) | ORIENTATION BEARING WITH INTEGRATED SENSOR | |
FR2693795B1 (en) | Strain gauge on flexible support and sensor fitted with said gauge. | |
CA2023511A1 (en) | Conveyor belt with textured edge | |
EP0525549A3 (en) | Acceleration sensor with self-test, and circuit therefor | |
DE69503746T2 (en) | Slip limited differential with reduced preload | |
DE69021819D1 (en) | Air / fuel ratio sensor. | |
EP0523732A3 (en) | Acceleration sensor with self-test, and circuit therefor | |
ZA966120B (en) | Device adapted to be fixed and sealed to at least one cylindrical member. | |
DE3784160T2 (en) | VAPOR PRESSURE MEASURING DEVICE AND METHOD. | |
TR199800216A3 (en) | Method and arrangement to control the electrical output. | |
DE58901612D1 (en) | PRESSURE OR FORCE MEASURING DEVICE. | |
TW326497B (en) | The acceleration sensor and its manufacturing method | |
IT1230033B (en) | UNIVERSAL METHOD TO ELIMINATE THE TWIST IN A YARN, DISTRICT IT AND DISSOLVE IT, AND A DEVICE TO REALIZE THE SAME METHOD. | |
GB2281126B (en) | Semiconductor capacitive acceleration sensor | |
IT211431Z2 (en) | EYEBROW COVER ELEMENT SUITABLE TO BE APPLIED TO THE EYEBROWS ITSELF IN ORDER TO ALLOW THEIR COVERAGE. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |