SG50014A1 - Acceleration sensor and manufacturing method therefor - Google Patents

Acceleration sensor and manufacturing method therefor

Info

Publication number
SG50014A1
SG50014A1 SG1997001001A SG1997001001A SG50014A1 SG 50014 A1 SG50014 A1 SG 50014A1 SG 1997001001 A SG1997001001 A SG 1997001001A SG 1997001001 A SG1997001001 A SG 1997001001A SG 50014 A1 SG50014 A1 SG 50014A1
Authority
SG
Singapore
Prior art keywords
manufacturing
acceleration sensor
method therefor
therefor
acceleration
Prior art date
Application number
SG1997001001A
Inventor
Jun Tabota
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of SG50014A1 publication Critical patent/SG50014A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
SG1997001001A 1996-03-29 1997-03-27 Acceleration sensor and manufacturing method therefor SG50014A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07601596A JP3183158B2 (en) 1996-03-29 1996-03-29 Acceleration sensor and method of manufacturing the same

Publications (1)

Publication Number Publication Date
SG50014A1 true SG50014A1 (en) 1998-06-15

Family

ID=13593007

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997001001A SG50014A1 (en) 1996-03-29 1997-03-27 Acceleration sensor and manufacturing method therefor

Country Status (4)

Country Link
JP (1) JP3183158B2 (en)
DE (1) DE19712789C2 (en)
SG (1) SG50014A1 (en)
TW (1) TW326497B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5144004B2 (en) * 2005-04-27 2013-02-13 京セラクリスタルデバイス株式会社 Inertial sensor element
CN102937137B (en) * 2012-11-20 2015-01-14 浙江大学 Piezoelectric power generation rolling bearing unit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69414739T2 (en) * 1993-03-19 1999-07-01 Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto Accelerometer
JP2780594B2 (en) * 1993-03-19 1998-07-30 株式会社村田製作所 Acceleration sensor

Also Published As

Publication number Publication date
JPH09264902A (en) 1997-10-07
TW326497B (en) 1998-02-11
JP3183158B2 (en) 2001-07-03
DE19712789A1 (en) 1997-11-06
DE19712789C2 (en) 2002-08-29

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