TW326279U - Heat treatment apparatus - Google Patents

Heat treatment apparatus

Info

Publication number
TW326279U
TW326279U TW086207725U TW86207725U TW326279U TW 326279 U TW326279 U TW 326279U TW 086207725 U TW086207725 U TW 086207725U TW 86207725 U TW86207725 U TW 86207725U TW 326279 U TW326279 U TW 326279U
Authority
TW
Taiwan
Prior art keywords
heat treatment
treatment apparatus
heat
treatment
Prior art date
Application number
TW086207725U
Other languages
Chinese (zh)
Inventor
Kenichi Yamaga
Toshiki Kobayashi
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW326279U publication Critical patent/TW326279U/en

Links

TW086207725U 1993-07-07 1994-08-19 Heat treatment apparatus TW326279U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19277193A JP3256037B2 (en) 1993-07-07 1993-07-07 Heat treatment equipment

Publications (1)

Publication Number Publication Date
TW326279U true TW326279U (en) 1998-02-01

Family

ID=16296757

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086207725U TW326279U (en) 1993-07-07 1994-08-19 Heat treatment apparatus

Country Status (2)

Country Link
JP (1) JP3256037B2 (en)
TW (1) TW326279U (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09283512A (en) * 1996-04-15 1997-10-31 Taiwan Moseki Denshi Kofun Yugenkoshi Structure of semiconductor furnace pipe
GB9614849D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scubbing of noxious substances
JP2000068259A (en) 1998-08-19 2000-03-03 Tokyo Electron Ltd Heat treatment apparatus
JP3998354B2 (en) 1998-11-24 2007-10-24 信越ポリマー株式会社 Transport container, lid opening / closing method and lid opening / closing device
JP2000243747A (en) * 1999-02-18 2000-09-08 Kokusai Electric Co Ltd Substrate preparing apparatus
JP4268069B2 (en) 2003-10-24 2009-05-27 東京エレクトロン株式会社 Vertical heat treatment equipment

Also Published As

Publication number Publication date
JPH0729841A (en) 1995-01-31
JP3256037B2 (en) 2002-02-12

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