TW325584B - Method of forming anti-reflection coating - Google Patents

Method of forming anti-reflection coating

Info

Publication number
TW325584B
TW325584B TW085114787A TW85114787A TW325584B TW 325584 B TW325584 B TW 325584B TW 085114787 A TW085114787 A TW 085114787A TW 85114787 A TW85114787 A TW 85114787A TW 325584 B TW325584 B TW 325584B
Authority
TW
Taiwan
Prior art keywords
reflection coating
forming anti
layer
forming
middle layer
Prior art date
Application number
TW085114787A
Other languages
Chinese (zh)
Inventor
Yeuan-Ching Perng
Lih-Jiunn Chen
Yuh-Ru Yang
Wenn-Yih Shieh
Jenn-Tarng Lin
Shu-Ying Liu
Yung-Fen Shie
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW085114787A priority Critical patent/TW325584B/en
Application granted granted Critical
Publication of TW325584B publication Critical patent/TW325584B/en

Links

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Abstract

A method of forming the anti-reflection coating including the following steps a. Form a Al-Cu-Si layer b. Form a Ti middle layer on the above Al-Cu-Si layer c. Form a anti-reflection coating on the above Ti middle layer.
TW085114787A 1996-11-29 1996-11-29 Method of forming anti-reflection coating TW325584B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085114787A TW325584B (en) 1996-11-29 1996-11-29 Method of forming anti-reflection coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085114787A TW325584B (en) 1996-11-29 1996-11-29 Method of forming anti-reflection coating

Publications (1)

Publication Number Publication Date
TW325584B true TW325584B (en) 1998-01-21

Family

ID=58262185

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085114787A TW325584B (en) 1996-11-29 1996-11-29 Method of forming anti-reflection coating

Country Status (1)

Country Link
TW (1) TW325584B (en)

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