TW324107B - A field isolation method in semiconductor devices - Google Patents

A field isolation method in semiconductor devices

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Publication number
TW324107B
TW324107B TW085104294A TW85104294A TW324107B TW 324107 B TW324107 B TW 324107B TW 085104294 A TW085104294 A TW 085104294A TW 85104294 A TW85104294 A TW 85104294A TW 324107 B TW324107 B TW 324107B
Authority
TW
Taiwan
Prior art keywords
areas
semiconductor devices
isolation method
field isolation
forming
Prior art date
Application number
TW085104294A
Other languages
Chinese (zh)
Inventor
Kwon Lee Chang
Original Assignee
Hyundai Eletronics Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Eletronics Ind Co Ltd filed Critical Hyundai Eletronics Ind Co Ltd
Priority to TW085104294A priority Critical patent/TW324107B/en
Application granted granted Critical
Publication of TW324107B publication Critical patent/TW324107B/en

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Abstract

A field isolation method to make semiconductor devices. The processes include: a) forming an antioxidation film on a wafers, b) etching some areas of antioxidation film to form active areas, c) implanting dopant ion to active areas to form channel-stop areas, d) forming field oxidation film on those areas, e) removing antioxidation film, f) forming high concentration dopant area at both ends of channel-stop areas.
TW085104294A 1996-04-11 1996-04-11 A field isolation method in semiconductor devices TW324107B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW085104294A TW324107B (en) 1996-04-11 1996-04-11 A field isolation method in semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW085104294A TW324107B (en) 1996-04-11 1996-04-11 A field isolation method in semiconductor devices

Publications (1)

Publication Number Publication Date
TW324107B true TW324107B (en) 1998-01-01

Family

ID=58262070

Family Applications (1)

Application Number Title Priority Date Filing Date
TW085104294A TW324107B (en) 1996-04-11 1996-04-11 A field isolation method in semiconductor devices

Country Status (1)

Country Link
TW (1) TW324107B (en)

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