A7 312757 B7 五、發明説明（y ) 〔發明之技術領域〕 本發明係有關一種藉由將複數個物體光與參考光之干 涉條紋記錄，而將該物體光之波面，記錄於全息膠片之記 錄方法及記錄裝置。 〔習用技術及發明之解決課題] 按，全息膠Η中，藉由記錄複數個物體光與參考光之 干涉條紋，而記錄有該複數個物體光之波面。 此處，作為全息膠片之材料，通常係使用銀塩感光材 料、感光聚合物等，記錄上述干涉條紋，就各種感光材料 ，決定感光之曝光範圍。因此，強度強之干涉條紋或強度 弱之干涉條紋，係在曝光範圍外，因此有無法記錄的特性 0 是以，在記錄於全息膠片時，為了使物體光易由參考 光平均干涉，通常物體光與參考光之光量強度比係設定於 1 : 1〜1 : 4之間。 複數個物體光之波面，因與參考光之千涉而被記錄之 全息膠片的利用例，有一種係開示於日本特開平7 — 2 4 7658號（特願平6 — 237804號）中。 圖6係其概略圖，表示應用共焦點光學糸之三次元形 狀計測裝置。 於此装置中，全息膠片3係作為光學系統之點光源陣 列及透過受光光之光學零件發揮機能。 -3- 本紙張尺度適用中國國家標準（CNS ) Α4規格（—210X297公釐） --n I - - I - - I - I (請先閱讀背面之注意事項再填寫本莧) 訂 經濟部中央標準局員工消費合作社印製 31^757 A7 B7____ 五、發明説明（>) 具體而言，全息膠Η 3係作為點光源光之產生機構使 用，藉由出自作為光源之雷射振盪器9的參考光入射’再 生宛如由針孔陣列Ρ Η之各針孔ρ 1〜ρ η出射般之光。 如此，全息膠片3係藉參考光再生物體光、物體光係 由針孔陣列Ρ Η之各針孔ρ 1〜ρ η出射的複數涸波面° 根據此一實施形態，係假想有由透鏡4變換之複數個平行 光。 再生之複數個物體光，係藉透鏡被集光於被計測物體 7之檢查面，由物體7所反射之光’係介以透鏡5、全息 膠Η 3 、透鏡4，由針孔陣列Ρ Η背後之光檢測器陣列8 檢出。 又，光檢測器陣列8之各光檢測器的輸出，係輸入至 圖未示之三次元計測部，藉由此三次元計測部，伴隨著由 圖未示移動控制部之控制所造成的移動台6之朝Ζ方向的 移動，將光檢測器陣列8之各檢測器的輸出依序取樣，將 各輸出最大時之Ζ方向位置，作為被計測物體7的表面位 置檢出。 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 圖1係使用於圖6装置中之全息膠片3曝光時之装置 構成圖。 如該圖1所示，具有由雷射振盪器9所出射之直線偏 光的特性之光，係由1/2波長板1 2Κ致偏光方向旋轉 ，入射至偏光半透明反射鏡1 4。 是Κ，藉由將1 / 2波長板1 2之旋轉位置調節，可 -4- 本紙張尺度適用中國國家標準（CNS ) Α4規格（_210Χ297公釐） A7 B7 312757 五、發明説明（j ) (請先閱讀背面之注意事項再填寫本頁) 將於半透明反射鏡1 4被分吱成二方向之光的分吱比，調 節成所期望之值。換言之，可將物體光與參考光之強度比 調節。 作為由偏光半透明反射鏡1 4所分歧之物體光使用的 光，係藉1 / 2波長板1 3調節成與參考光相同偏光方向 之光。又，也可在參考光側置入同樣之波長板，配合物體 光調節參考光之偏光方向，也可在兩側置入相同之波長板 ，也可將兩側調節成偏光方向相同。重要的是，只要參考 光與物體光之偏光方向一致，可採用任何構成。 物體光係介於反射鏡1 5、1 6、透鏡1 7、1 8、 針孔陣列PH之各針孔p 1〜ρ η、透鏡4入射至全息膠 片3 ，作為複數個角度之不同物體光記錄。又，上述特願 平7 — 247658號（特願平6 — 237804號）中 ，係開示在_ 1之米1 、2所示的位置配置有全息膠片3 經濟部中央標準局員工消費合作社印製 之光學糸統，不管是任何一種，在全息膠片3上記錄非為 平行光之複數個波面此點，係屬相同。又，在全息膠片曝 光時，並無配置透鏡5 、被計測物體7、移動台6等只在 三次元計測時使用之零件。 於Κ此方式曝光之全膠片3中，若將記錄時之物體光 與參考光之光量強度比設定成上述般之通常值，與物體光 與參考光之干涉所造成的條紋同時，物體光之複數個波面 之干涉所造成的條紋也被記錄。 此處，物體光之複數個波面的干涉條紋，如圖4所示 本紙乐尺度適用中國國家標準（CNS ) Α4規格（210X 297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（/) ，例如作為物體光，若假定A、B之兩個波面之場合，指 此等A與B之波面干涉成之條紋C。又，圖4中，為使說 明簡單化之故，參考光係以虛線表示，在其中省略。 此處，藉由物體光A、B記錄於全息膠片3上之干涉 條紋C，此一全息膠Η 3 ，具有如圖5 ( a )〜（c )所 示之特性。 具體言之，記錄於全息膠片3之干涉條紋C ί系一個， 此一干涉條紋C，具有在Μ物體光Α將物體光Β再生的同 時，Μ物體光B將物體光A再生之特性，因此， (a) 在具有因物體光A之入射而再生物體光外，又 因物體光B而再生物體光A之特性的干涉條紋中， 又入射有物體光A，藉此而又再生複次光（虛線） (請參見圖5 ( a ))； (b) 在具有因物體光B之入射而再生物體光AM外，又 因物體光A而再生物體光B之特性的干涉條紋中， 又入射有物體光B，藉此而又再生複次光（虛線） (請參見圖5 ( b ))； (c) 因物體光A、B之同時入射，再生物體光A繞射成 之物體光B與複次光，K及物體光B繞射成之物體 光A與複次光（虛線）等合計四個光。 若物體光A、B之數目增加，此一複次光會爆發性地 增加。又，於圖5 (a)〜（c)中，為說明簡軍起見， 係省路物體光A、B之透過光。 -6- 本紙張尺度適用中國國家標準（CNS ) A私見格Π10Χ297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印製 312757 • A7 B7 五、發明説明（Γ ) 此種複次光，在全息膠片3之記錄中，隨著物體光之 複數個波面的干涉條紋c之記錄，逐漸由物體光再生，是 K，該複次光係由參考光記錄。換言之，複次光（虚線） 與參考光之干涉所造成的條紋也被記錄。 如此，全息膠片3中，Μ下之三種干涉條紋，係落於 全息膠片材之曝光範圍内記錄。 (α)物體光與參考光所造成之干涉條紋（反射型全息膠 片） (/?)物體光之複數的波面所造成之干涉條紋（透過全息 膠片） (ί )由物體光之複數個波面所形成的干涉條紋所再生之 複次光與參考光所造成之干涉條紋（反射型全息照 片） 此處，將該全息膠片3以參考光再生之場合，（α ) 之干涉條紋係再生物體光，（/3) 、 ( 7 )之干涉條紋， 係將與物體光不同之光再生。因此，有： (1 )參考光之一部份繞射而作為對於再生物體光之干擾 光被觀測。 (2 )將參考光之一部份作為干擾光繞射，因此，再生物 體光之繞射效率變低 之問題。 又，此種透過全息膠片3之光，係因由物體光之複數 個波面記錄之干涉條紋（)，而有 本紙張尺度適用中國國家標準（CNS ) A4規格1210 X 297公釐） (請先閲讀背面之注意事項再填寫本頁) 、·!! 經濟部中央標準局員工消費合作社印製 A7 ——___BZ_ 五'、發明説明（厶） (3)透過光之—部份繞射，而以相對透過光之干擾光被 観測之問題；及 因干涉條紋（Θ) 、 ( 7 )，而有 (4 )透過光之一部份係作為干擾光繞射，以致，透過光 之透過率變低之問題。 〔課題之解決手段及效果〕 是Μ ’本發明之主要發明，係一種藉由將複數個物體 光與參考光之干涉條紋記錄，而將該複數涸物體光之波面 含己錄於全息膠片的全息膠Η之記錄方法；其特徵係在： 為使物體光與參考光所造成之干涉條紋，成為上述全 息膨片之曝光範圍内的適切之第一強度， 使物體光之複數個波面所造成之干涉條紋的第二強度 之相對上述第一強度之比，在一定值以下， 使物體光之複數個波面的干涉條紋所再生之複次光與 參考光所造成之干涉條紋的第三強度之相對上述第一強度 之比’在一定‘值以下， 將全息膠片記錄時之參考光的強度、參考光之強度與 物體光之強度的比，予以決定者。 根據此一構成，在全息膠片記錄時，藉由將參考光的 強度、參考光之強度與物體光之強度的比，調整成適切之 值’在全息膠片上，只記錄由上述（α)之物體光與參考 光所造成的干涉條紋；上述（々）之物體光的複數個波面 -8 - 本紙張尺度適用中國國家標準（CNS ) Α4規格C 210Χ297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 A7 312757 B7 五、發明説明（/ ) (請先閲讀背面之注意事項再填寫本頁) 之干涉條紋與上述（7)之物體光的複數個波面之干涉條 紋所再生的複次光與參考光所造成之干涉條紋，其強度會 減小，並無記錄。 因此，在再生、透過時，可對市場提供干擾光少、高 品質之全息膠片。 〔發明之實施形態〕 Μ下，茲佐K圖面將本發明全息膠片之記錄裝置及記 錄方法的實施形態說明之。 全息膠片3曝光時之装置構成，係如上述圖1所示。 具體言之，如同圖1所示，由雷射振盪器9出射之光 ，係介Μ 1 / 2波長板1 2透過偏光半透明反射鏡1 4， 再介Κ透鏡1 0、1 1作為參考光入射至全息膠片3。由 雷射振盪器9出射之光，係介以1 / 2波長板1 2由偏光 半透明反射鏡1 4反射，再介Κ反射鏡1 5、1 6、透鏡 17、1 8、針孔陣列ΡΗ之各針孔p i〜ρη ，介Μ透 鏡4，作為物體光人射至全息膠Η3。 經濟部中央標準局員工消費合作社印製 是Μ，參考光之強度（光量）R，可藉調節雷射振盪 器9之振盪輸出而調整。 雷射振盪器9之振盪輸出的調節，可藉調節雷射振盪 器9本身之振盪強度而控制，也可在雷射振盪器9之出射 口配置透過率可變之濾波器予Κ控制。 物體光強度之相對參考光的強度之比r ，藉由調節1 本紙張尺度適用中國國家標孪（CNS > A4規格（210X 29*7公釐） 經濟部中央榡準局員工消費合作衽印製 A7 _____B7 五、發明説明（9 ) /2波長板12的旋轉位置而調節分歧成二方向之光的分 歧比而可調整。 此種參考光之強度R及強度比r的調整，可藉控制雷 射振盪器9及1 / 2波長板的控制器自動地簧施，又，也 可Μ手動實施。 其次，茲就決定上述強度R、強度比Γ之條件說明。 如上所述，記錄於全息膠片3之三種干涉條紋，亦即 («)由物體光與參考光所造成之干涉條紋（反射型全息 膠片） (β )由物體光之複數個波面所造成之干涉條紋（透過型 全患膠片） (7 )由物體光之複數涸波面所造成之干涉條紋所再生的 複次光與參考光所建立之干涉條紋（反射型全息膠 片） 此等之條紋的強度，係因應記錄時之參考光、物體光的強 度而變化。 胃設一個物體光之平均強度為s ，物體光之數目為m ’物體光之總和強度為S之場合， S = Σ s = m s........(1) S = r R...........( 2 ) ® S °此處，上述三種干涉條紋的相對強度之大小係： (a)SR.......(3) (幻 S2.......( 4 ) -10- 本紙張尺度適用巾1•时縣（CNS ) A4規格（21G X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 'νβ 1 |_ 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（？） (7 ) a s 2 R.....( 5 ) 。此處，a係曝光中因（/?)之干涉條紋而再生之複次光 的繞射效率，其係1以下之小值。在上述（3 )〜（5 ) 式中，代入上述（1) 、 （2)式，獲得 (a ) r R 2............( 6 ) (β ) r 2 R 2 / m 2........(7) (7 ) ar2R3/m2.......(8) 。此處，若以參考光之強度R為一定，強度比r為IK下 之數，則r愈小* (7) 式 / (6)式= r/ m2 (8) 式 / (6)式= arR/m2 係單調地減少，且 (6)式> (7)式> (8)式 成立，因此，相對（cx )干涉條紋的強度之（点）干涉條 紋的強度之比，K及相對（α )之干涉條紋的強度之（7 )干涉條紋的強度之比，係變小。 是以，為使原本應記錄於全息膠片3之（α )千涉條 紋的強度，落於全息膠片材之曝光範圍内，若將參考光之 強度，選取於適切之值，將強度比r選取於1 Μ下之適切 之值，使（6 )式> > (7 )式> (8 )式的話，則只有 (α)干涉條紋被記錄，而干擾光之原因的（yS) 、 ( 7 )干涉條紋，因其強度小之故，並無記錄。 換言之，為了使 -1 1 - 本紙張尺度適用中國國家標準（CNS ) A4規格（ 210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 312757 A7 B7 五、發明説明（（叫 (α )之r R 2成為全息膠Η材之曝光範圍的適切強度， (β )之r 2 R 2 / m 2較上述f R 2為小，成為全息膠 片材之曝光範圍外（K下）之強度 (7 )之ar2及R3/m2較上述rR2為小，成為全 息膠片材之曝光範圍外（K下）之強度， 係調整參考光之強度R、強度比r ，進行全息膠片3之記 錄，藉此在全息膠片3再生、透過時，可使干擾光減少。 換言之，可製造高品質之全息膠片3。 〔實施Μ ] 其次，茲就更'詳细之實施例進行說明。 在將全息膠片3曝光時之装置構成，假定係上述圖1 0 此處，參考光之強度R及強度比1、之調整，係藉控制 雷射搌盪器9及1 / 2波長板之控制器而自動。 又，也可將1 / 2波長波1 3自動控制，使參考光與 物體光之偏光方向一致。 控制器上記憶有圖3所述之關係，實行圖2所示之處 理〇 具體言之，圖3係表示參考光之強度R為一定之場合 ，令物體光之相對參考光的強度比r ，在1 Μ下之小的值 中變化（横軸），將其記錄於全息膠片中，將其再生時之 相對再生之物體光的強度S R之干擾光的強度Ν之強度比 -12- 本紙張尺度適用中國國家標準（CNS ) A4規格（ 210X297公釐） 1 -i _^n^— nn In ^ 1.^1 I— I - I -!! ml n 一eJ (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明（ // ) 1 1 I N / S R ( 縱 軸 ) 〇 橫 軸 之 刻 度 係 洌 示 之 值 0 1 1 1 於 此 強 度 S R 係 原 本 應 記 錄 於 全 息 膠 片 3 中 >λ ( α ^-Ν ! I 請 1 | ) 的 干 涉 條 紋 所 再 生 之 光 的 強 度 強 度 N 係 由 干 擾 光 之 原 先 1 I 讀 1 因 ( β ) 、 ( 7 ) 之 干 涉 條 紋 所 再 生 之 光 的 強 度 0 背 1 | 如 同 圖 3 所 示 若 使 強 度 比 Γ 減 小 干 擾 光 Ν 之 相 對 之 注 | 意 I 再 生 物 體 光 S R 的 強 度 比 N / S R 會 變 小 但 若 較 臨 界 值 事 項 1 I 再 1 I Γ C 為 小 原 本 應 記 錄 之 ( α ) Γ R 2 的 強 度 係 成 為 全 填 % 本 息 膠 片 材 之 曝 光 範 圍 外 ( Μ 下 ) 之 強 度 因 此 得 Μ 法 頁 1 I 記 録 欲 記 錄 ( a ) 之 干 涉 條 紋 本 身 1 1 I 是 Μ 為 了 使 可 使 干 擾 光 之 強 度 Ν 相 對 再 生 物 體 光 之 1 1 強 度 S R 的 強 度 比 在 一 定 值 Ν C 以 下 之 ( β ) 、 ( 7 ) 1 訂 之 干 涉 條 紋 的 強 度 成 為 全 息 膠 片 材 之 曝 光 範 圍 外 ( Κ 下 ) 1 I 之 強 度 ) Γ 〇 P t 的 範 圍 内 且 原 本 應 記 錄 之 ( 7 ) Γ R 1 I 2 成 為 全 息 膠 片 材 之 曝 光 範 圍 内 的 適 切 強 度 有 必 要 決 定 1 1 強 度 比 r 0 1 是 Μ 如 圖 2 所 示 參 考 光 之 強 度 R 係 設 定 於 一 定 值 1 I ( 步 驟 1 〇 1 ) 將 強 度 比 Γ 在 Γ 〇 D t 内 變 化 逐 次 判 1 I 斷 ( a ) Γ R 2 是 否 落 於 全 息 膠 Η 材 之 曝 光 範 圍 内 ( 步 驟 1 1 1 1 0 2 、 1 0 3 、 1 0 5 ) 〇 1 1 此 處 即 使 強 度 比 3 5 在 Γ 〇 Ρ t 之 範 圍 内 變 化 在 1 1 ( α ) Γ R 2 不 會 成 為 全 息 膠 片 3 之 曝 光 範 園 内 的 適 切 強 1 1 度 之 場 合 ( 步 驟 1 〇 5 之 判 斷 ” 是 ” ) 再 轉 移 至 上 述 步 1 1 1 驟 1 0 1 再 設 定 參 考 光 之 強 度 R 的 大 小 後 重 複 同 樣 之 1 1 - 13 - 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（2l〇X29*7公釐） • A 7 B7 五、發明説明（/>) 處理。 是Μ，在強度r落於r opt之範圍内，當（a) r R 2成為全息膠片3之曝光範圍內的適切強度之場合（步 驟1 0 3之判斷”是”），將該時之強度比r及步驟1 0 1最終設定之參考光的強度R作為最終值決定（步驟1 0 4 )。 又，有關步驟1 0 1中之參考光的強度R之再設定方 法|當（a) rR2為超過全息膠片3的曝光範圍之強度 時，可考慮將再設定值R減小，在低於全息膠片的曝光範 圍之強度時，可考慮將再設定值R增大。 如此，為了能獲得由步驟1 0 4所決定之強度比r及 步驟1 0 1最終設定之參考光的強度R ·控制器係控制雷 射振盪器9及1/2波長板1 2。 又，Μ上之說明，參考光係假定為平行光，無疑也可 為擴散光。 另，也可在圖1之米1 、米2所示之位置，配置全息 膠片3 。 經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 再者，複數個物體光不限於平行光、擴散光、或是由 針孔所射出之光。例如，複數之鏠隙光、由透鏡陣列所造 成之複數個點狀光等其他之光也可。 〔圖面之簡單說明] 圖1係本發明全息膠片之記錄方法及記錄裝置簧施中 -1 4 - 本紙伕尺度適用中國國家標準（CNS ) Α4規格（2Ι0Χ297公釐） 312757 A7 B7 五、發明説明（/々） 所使用之光學系统的構成例圖。 (請先閱讀背面之注意事項再填寫本頁) 圖2係圖1裝置中入射至全息膠片之參考光的強度及 物體光的強度，與參考光的強度之比決定的處理手缡之流 程圖。 圖3係Μ物體光之強度相對參考光之強度的比為橫軸 ，以干擾光之強度相對再生物體光之強度的比為縱軸之曲 線圖。 圖4係記錄於全息膠片之干涉條紋之說明圖。 圖5 ( a ) 、 ( b ) 、 ( c )係由圖4所示之干涉條 紋所再生的複數光之說明圖。 圖6係使用全息膠Η進行三次元形狀計測之共焦點光 學装置之構成圖。 〔符號之說明] 3 全息膠片 9 雷射振盪器 12 1 / 2波長板 經濟部中央標準局員工消費合作社印製 -1 5- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐）A7 312757 B7 V. Description of the invention (y) [Technical field of the invention] The present invention relates to a recording in which a wave surface of the object light is recorded on a holographic film by recording interference fringes of a plurality of object light and reference light Method and recording device. [Problem Solved by Conventional Techniques and Inventions] It is noted that in the holographic glue H, by recording interference fringes of a plurality of object lights and reference lights, the wavefronts of the plurality of object lights are recorded. Here, as the material of the holographic film, usually a silver film photosensitive material, a photopolymer, etc. are used to record the above interference fringes, and the exposure range of the photosensitive is determined for various photosensitive materials. Therefore, the interference fringes with strong intensity or the interference fringes with weak intensity are outside the exposure range, so there are unrecordable characteristics. Therefore, in order to make the object light easily interfere with the reference light evenly when recording on the holographic film, usually the object The light intensity ratio of light to reference light is set between 1: 1 ~ 1: 4. An example of the use of a holographic film in which multiple wave surfaces of object light are recorded as a result of intertwining with reference light is shown in Japanese Patent Application No. 7-2 4 7658 (Japanese Patent Application No. 6-237804). Fig. 6 is a schematic diagram showing a three-dimensional shape measuring device using a confocal optical fiber. In this device, the holographic film 3 functions as a point light source array of the optical system and optical parts that transmit the received light. -3- This paper scale applies the Chinese National Standard (CNS) Α4 specification (—210X297 mm) --n I--I--I-I (please read the precautions on the back before filling in this amaranth) 31 ^ 757 A7 B7____ Printed by the Staff Consumer Cooperative of the Bureau of Standards V. Description of the invention (>) Specifically, the holographic glue Η 3 is used as a point light source light generation mechanism by the laser oscillator 9 as a light source The reference light incident 'regeneration is like the light exiting from each pinhole ρ 1 ~ ρ η of the pinhole array PH. In this way, the holographic film 3 reproduces the object light from the reference light, and the object light is the complex wave surface exiting from each pinhole ρ 1 to ρ η of the pinhole array P H. According to this embodiment, it is assumed that the lens 4 transforms Multiple parallel lights. The regenerated multiple object lights are collected by the lens on the inspection surface of the object to be measured 7, the light reflected by the object 7 is through the lens 5, the holographic glue H 3, the lens 4, and the pinhole array P H The photodetector array 8 behind is detected. In addition, the output of each photodetector of the photodetector array 8 is input to a three-dimensional measurement unit not shown, and the three-dimensional measurement unit is accompanied by the movement caused by the control of the movement control unit not shown The movement of the stage 6 in the Z direction samples the output of each detector of the photodetector array 8 in sequence, and the position in the Z direction at the maximum output of each is detected as the surface position of the object 7 to be measured. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page). Figure 1 shows the structure of the device when the holographic film 3 used in the device in Figure 6 is exposed. As shown in FIG. 1, the light having the characteristic of linear polarization emitted by the laser oscillator 9 is rotated by the polarization direction of the 1/2 wavelength plate 12 2K and enters the polarization translucent mirror 14. It is Κ. By adjusting the rotation position of 1/2 wave plate 1 2, this paper size is applicable to China National Standard (CNS) Α4 specification (_210Χ297 mm) A7 B7 312757 5. Description of the invention (j) ( Please read the precautions on the back before filling in this page) The semi-transparent mirror 14 will be divided into two directions of light, and adjusted to the desired value. In other words, the intensity ratio of the object light to the reference light can be adjusted. The light used as the object light diverged by the polarized translucent mirror 14 is adjusted to light of the same polarization direction as the reference light by the 1/2 wavelength plate 13. In addition, the same wavelength plate can be placed on the reference light side to adjust the polarization direction of the reference light according to the object light, or the same wavelength plate can be placed on both sides, or both sides can be adjusted to the same polarization direction. It is important that any configuration can be adopted as long as the polarization direction of the reference light and the object light are the same. The object light is between the mirror holes 15 and 16, the lenses 17 and 18, the pinholes p 1 ~ ρ η of the pinhole array PH, and the lens 4 is incident on the holographic film 3 as different angles of object light recording. In addition, in the above-mentioned No. 7-247658 (No. 6-237804), it is shown that holographic film is arranged at the positions indicated by _1 meters 1 and 2. 3 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs No matter what kind of optical system it is, it is the same to record multiple wavefronts on the holographic film 3 that are not parallel light. In addition, when the holographic film is exposed, there are no parts such as the lens 5, the object to be measured 7, and the mobile station 6, which are only used for three-dimensional measurement. In the full film 3 exposed in this way, if the light intensity ratio of the object light and the reference light at the time of recording is set to the above-mentioned normal value, and the streaks caused by the interference of the object light and the reference light, the object light Fringes caused by the interference of multiple wave surfaces are also recorded. Here, the interference fringes of the multiple wave surfaces of the object light, as shown in Figure 4, the paper paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210X 297 mm). The A7 B7 is printed by the Employees Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. Description of the invention (/) For example, if object light is assumed to be two wave surfaces of A and B, it refers to a fringe C caused by interference between the wave surfaces of A and B. In Fig. 4, the reference light system is indicated by a broken line for simplification of explanation, and is omitted. Here, the interference fringes C recorded on the holographic film 3 by the object lights A and B. This holographic glue H 3 has the characteristics shown in FIG. 5 (a) to (c). Specifically, the interference fringe C recorded on the holographic film 3 is one. This interference fringe C has the characteristics that the M object light A regenerates the object light A while the M object light A regenerates the object light B. Therefore, , (A) In the interference fringe that has the characteristics of regenerating the object light due to the incidence of the object light A and regenerating the object light A due to the object light B, the object light A is also incident, thereby regenerating the complex light (Dashed line) (please refer to Figure 5 (a)); (b) In addition to the object light AM which is regenerated by the object light B, the interference fringe which has the characteristics of the object light A and the object light B is regenerated There is object light B, from which multiple secondary light (dotted line) is reproduced (see Figure 5 (b)); (c) Because object light A and B are incident at the same time, object light B diffracted by regenerated object light A A total of four lights, including object light A and complex light (broken line) diffracted by multiple light, K and object light B. If the number of object lights A and B increases, this repeated light will increase explosively. In addition, in FIG. 5 (a) to (c), for the sake of simplicity, it is the transmission light of the provincial road object lights A and B. -6- This paper scale is applicable to the Chinese National Standard (CNS) A private view grid Π10Χ297 mm) (please read the precautions on the back before filling out this page) Printed by the Ministry of Economic Affairs Central Standards Bureau Employee Consumer Cooperatives 312757 • A7 B7 V. DESCRIPTION OF THE INVENTION (Γ) In the recording of the holographic film 3, with the recording of the interference fringe c of a plurality of wave surfaces of the object light, it is gradually reproduced from the object light, which is K. Optical recording. In other words, the fringes caused by the interference of the complex light (dashed line) with the reference light are also recorded. In this way, in the holographic film 3, the three kinds of interference fringes under M are recorded within the exposure range of the holographic film material. (α) Interference fringes caused by object light and reference light (reflective holographic film) (/?) Interference fringes caused by complex wavefronts of object light (through holographic film) (ί) Caused by multiple wavefronts of object light Interference fringes caused by the complex secondary light and the reference light reproduced by the formed interference fringes (reflective hologram) Here, when the holographic film 3 is reproduced with the reference light, the interference fringes of (α) are the object light, The interference fringes of (/ 3) and (7) regenerate light different from the object light. Therefore, there are: (1) Part of the reference light is diffracted and observed as interference light to the light of the regenerated object. (2) A part of the reference light is diffracted as interference light, therefore, the diffraction efficiency of the regenerative light becomes low. In addition, this light passing through the holographic film 3 is due to interference fringes () recorded by a plurality of wave surfaces of the object light, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification 1210 X 297 mm) (please read first (Notes on the back and then fill out this page), · !! A7 printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs ___BZ_ Five ', Description of Invention (厶) (3) Partial diffraction through light, and relative The problem of interference of transmitted light is detected; and due to interference fringes (Θ), (7), and part of (4) transmitted light is diffracted as interference light, so that the transmittance of transmitted light becomes lower problem. [The solution and effect of the problem] is the main invention of the present invention. It is a method of recording the interference fringes of a plurality of object lights and reference lights by recording the interference fringes of the plurality of object lights on the holographic film. The recording method of holographic glue Η; its characteristics are: In order to make the interference fringes caused by the object light and the reference light become the appropriate first intensity within the exposure range of the above holographic film, and caused by the multiple wave surfaces of the object light The ratio of the second intensity of the interference fringe to the first intensity is below a certain value, so that the third intensity of the interference fringe caused by the complex secondary light regenerated by the interference fringes of the multiple wavefronts of the object light and the reference light Relative to the above-mentioned first intensity ratio is below a certain value, the intensity of the reference light during recording of the holographic film, the intensity of the reference light and the intensity of the object light are determined. According to this configuration, during the recording of the holographic film, by adjusting the intensity of the reference light, the intensity of the reference light and the intensity of the object light to a suitable value, on the holographic film, only the record of (α) above is recorded. Interference fringes caused by the object light and the reference light; the plural wave surfaces of the object light (々) above-This paper scale is applicable to the Chinese National Standard (CNS) Α4 Specification C 210Χ297 mm) (Please read the notes on the back first (Fill in this page again) Order A7 312757 B7 5. Description of the invention (/) (Please read the precautions on the back before filling in this page) The interference fringes and the interference fringes of the multiple wavefronts of the object light of (7) above are reproduced The interference fringes caused by the complex light and the reference light will decrease in intensity and will not be recorded. Therefore, during reproduction and transmission, high-quality holographic film with little interference light can be provided to the market. [Embodiment of the invention] Below, the Z-K diagram will describe the embodiment of the recording device and the recording method of the holographic film of the present invention. The structure of the device when the holographic film 3 is exposed is as shown in FIG. 1 above. Specifically, as shown in FIG. 1, the light emitted by the laser oscillator 9 is transmitted through the polarizing translucent mirror 14 through the M 1/2 wavelength plate 12, and the K lens 10 0, 1 1 is used as a reference The light is incident on the holographic film 3. The light emitted by the laser oscillator 9 is reflected by the polarized translucent mirror 14 through the 1/2 wavelength plate 12 and then the K mirror 15, 16, lenses 17, 18, and pinhole array Each pinhole pi ~ ρη of PH, through the M lens 4, as an object light hits the holographic glue H3. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is Μ, with reference to the light intensity (light quantity) R, which can be adjusted by adjusting the oscillation output of the laser oscillator 9. The adjustment of the oscillation output of the laser oscillator 9 can be controlled by adjusting the oscillation intensity of the laser oscillator 9 itself, or a filter with variable transmittance can be arranged at the exit of the laser oscillator 9 for K control. The ratio r of the light intensity of the object to the intensity of the reference light is adapted to the Chinese national standard (CNS> A4 specification (210X 29 * 7mm) by adjusting 1 paper scale). System A7 _____B7 V. Description of the invention (9) The rotation position of the / 2 wavelength plate 12 can be adjusted by adjusting the divergence ratio of light diverging into two directions. The adjustment of the intensity R and intensity ratio r of this reference light can be controlled by The controllers of the laser oscillator 9 and the 1/2 wave plate are automatically applied, and can also be implemented manually. Next, the conditions for determining the above-mentioned intensity R and intensity ratio Γ are described here. Three kinds of interference fringes of film 3, that is («) interference fringes caused by object light and reference light (reflective holographic film) (β) interference fringes caused by multiple wave surfaces of object light (transmissive film) ) (7) The interference fringes created by the interference fringes generated by the complex light wave surface of the object light and the interference fringes created by the reference light (reflective holographic film) The intensity of these fringes is due to the reference light at the time of recording ,object The intensity of the light varies depending on the intensity of the stomach. Let the average intensity of an object light be s, and the number of object lights be m. When the total intensity of object light is S, S = Σ s = m s ... (1 ) S = r R .............. (2) ® S ° Here, the relative intensity of the above three interference fringes is: (a) SR ....... (3) (Magic S2 ....... (4) -10- This paper size is suitable for towels 1 · Shixian (CNS) A4 specification (21G X 297mm) (Please read the precautions on the back before filling this page) 'νβ 1 | _ A7 B7 printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy V. Description of invention (?) (7) as 2 R ..... (5). Here, a is the cause of exposure (/? ) The diffraction efficiency of the complex secondary light reproduced by the interference fringes is a small value below 1. In the above formulas (3) to (5), substituting the above formulas (1) and (2) to obtain (a) r R 2 ............ (6) (β) r 2 R 2 / m 2 ........ (7) (7) ar2R3 / m2 ... .. (8). Here, if the intensity R of the reference light is constant and the intensity ratio r is a number under IK, then the smaller r is * (formula 7) / formula (6) = formula r / m2 (8) / (6) formula = arR / m2 is monotonously reduced, and (6) formula > (7) formula > (8) The formula holds, therefore, the ratio of the intensity of (cx) interference fringes (points) of interference fringes, the ratio of K and the intensity of (α) interference fringes (7) of interference fringes, becomes smaller. Therefore, in order to make the intensity of the (α) thousand-wading fringe that should be recorded on the holographic film 3 fall within the exposure range of the holographic film material, if the intensity of the reference light is selected at a suitable value, the intensity ratio r is selected At a suitable value under 1 μM, if (6), (7), (8), only (α) interference fringes are recorded, and the reason for disturbing light (yS), (7) The interference fringe has no record because of its low intensity. In other words, in order to make -1 1-this paper scale apply the Chinese National Standard (CNS) A4 specification (210X297mm) (please read the precautions on the back before filling out this page) Order 312757 A7 B7 V. Invention description ((called ( r) of α) becomes the proper cut strength of the exposure range of the holographic adhesive H material, and (2) r 2 R 2 / m 2 is smaller than the above f R 2 and becomes outside the exposure range of the holographic film material (under K) The ar2 and R3 / m2 of the intensity (7) are smaller than the above-mentioned rR2, which becomes the intensity outside the exposure range (under K) of the holographic film material. The intensity R and the intensity ratio r of the reference light are adjusted to record the holographic film 3. In this way, when the holographic film 3 is reproduced and transmitted, interference light can be reduced. In other words, a high-quality holographic film 3 can be manufactured. [Implementation Μ] Next, a more detailed embodiment will be described. 3 Device configuration during exposure, assuming the above-mentioned Fig. 10. Here, the adjustment of the intensity R and intensity ratio 1 of the reference light is automatic by controlling the controller of the laser oscillator 9 and the 1/2 wavelength plate. In addition, the 1/2 wavelength wave 1 3 can also be automatically controlled so that the reference light and the object The polarization direction of the light is consistent. The relationship described in Figure 3 is memorized on the controller, and the processing shown in Figure 2 is executed. Specifically, Figure 3 shows the occasion where the intensity R of the reference light is a certain value, so that the relative reference of the object light The light intensity ratio r changes in a small value below 1 Μ (horizontal axis), record it in a holographic film, and reproduce it relative to the intensity of the regenerated object light SR and the intensity of the interference light intensity N Than -12- This paper scale applies the Chinese National Standard (CNS) A4 specification (210X297mm) 1 -i _ ^ n ^ — nn In ^ 1. ^ 1 I— I-I-!! ml n one eJ (please Read the precautions on the back first and then fill out this page) Printed by the Ministry of Economic Affairs Central Standards Bureau Employee Consumer Cooperative A7 B7 Printed by the Ministry of Economic Affairs Central Standards Bureau Employee Consumer Cooperative V. Invention description (//) 1 1 IN / SR (vertical axis) 〇The scale of the horizontal axis is the value shown 0 1 1 1 Here the intensity SR is the intensity of the light regenerated by the interference fringes that should have been recorded in the holographic film 3 > λ (α ^ -Ν! I Please 1 |)The intensity N is the intensity of the light regenerated by the interference fringes of (β) and (7) from the original 1 I read 1 of the disturbing light. 0 Back 1 | As shown in FIG. 3, if the intensity ratio Γ is reduced, the relative amount of the disturbing light Ν Note | Italian I The intensity of the light SR of the regenerated object will be smaller than N / SR, but if it is more than the critical value, 1 I then 1 I Γ C is small. The intensity of (α) Γ R 2 should be recorded. The intensity outside the exposure range (under M) of this interest film is thus obtained from the M method page 1 I Record the interference fringe itself to be recorded (a) 1 1 I is M In order to make the intensity of the interference light N relative to the light of the regenerated object 1 1 The intensity ratio of the intensity SR is (β), (7) below a certain value NC 1 The intensity of the interference fringe specified becomes the exposure range of the holographic film Outer (under Κ) 1 I intensity) within the range of Γ 〇P t and should be recorded (7) Γ R 1 I 2 becomes the appropriate intensity within the exposure range of the holographic film. It is necessary to determine 1 1 intensity ratio r 0 1 is M. As shown in Figure 2, the intensity of the reference light R is set at a certain value 1 I (step 1 〇1) The intensity ratio Γ changes within Γ 〇D t successively judge 1 I off (a) Γ R 2 falls Within the exposure range of the holographic glue Η material (steps 1 1 1 1 0 2, 1 0 3, 1 0 5) 〇1 1 Here, even if the intensity ratio 3 3 changes within the range of Γ 〇Ρ t within 1 1 (α ) Γ R 2 will not become the appropriate cut strength of 1 1 degree in the exposure range of hologram film 3 (the judgment of step 1 〇5 "Yes") and then move to the above step 1 1 1 step 1 0 1 and then set the reference light Repeat the same after strength R 1 1-13-1 1 This paper size is suitable for China Of Standards (CNS) A4 size (2l〇X29 * 7 mm) • A 7 B7 V. invention is described in (/ >) process. It is Μ. When the intensity r falls within the range of ropt, when (a) r R 2 becomes the appropriate intensity within the exposure range of the holographic film 3 (the judgment of step 1 0 3 is "Yes"), then The intensity ratio r and the intensity R of the reference light finally set in step 1 0 1 are determined as final values (step 1 0 4). In addition, the method of resetting the intensity R of the reference light in step 101 | When (a) rR2 is an intensity that exceeds the exposure range of the hologram film 3, consider reducing the reset value R below the hologram When the intensity of the exposure range of the film can be considered, the reset value R may be increased. In this way, in order to obtain the intensity ratio r determined by step 104 and the intensity R of the reference light finally set at step 101, the controller controls the laser oscillator 9 and the 1/2 wavelength plate 12. In addition, as stated in M, the reference light system is assumed to be parallel light, and it can also be diffuse light. Alternatively, the holographic film 3 may be arranged at the positions shown in meters 1 and 2 of FIG. 1. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page) Furthermore, the light of multiple objects is not limited to parallel light, diffused light, or light emitted from pinholes. For example, other types of light, such as plural gap lights and plural point lights made of a lens array, may be used. [Simple description of the drawing] Figure 1 is the recording method and recording device of the holographic film of the present invention. Shi Shizhong-1 4-The paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (2Ι0Χ297 mm) 312757 A7 B7 V. Invention Description (/ 々) An example of the configuration of the optical system used. (Please read the precautions on the back before filling in this page) Figure 2 is a flow chart of the processing hand determined by the ratio of the intensity of the reference light incident on the holographic film and the intensity of the object light in the device of Figure 1 to the intensity of the reference light . Fig. 3 is a graph of the ratio of the intensity of the object light to the intensity of the reference light on the horizontal axis, and the ratio of the intensity of the interference light to the intensity of the regenerated object light on the vertical axis. 4 is an explanatory diagram of interference fringes recorded on holographic film. Fig. 5 (a), (b), (c) are explanatory diagrams of complex light reproduced by the interference stripes shown in Fig. 4. Fig. 6 is a configuration diagram of a confocal optical device for performing three-dimensional shape measurement using holographic glue H. [Description of Symbols] 3 Holographic Film 9 Laser Oscillator 12 1/2 Wavelength Plate Printed by Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs -1 5- This paper size is applicable to China National Standard (CNS) Α4 specification (210Χ297 mm)