3^7〇863 ^ 7〇86
經濟部中央標準局員工消費合作社印裝 本發明是有關於半㈣製程設備之檢驗，特別是有關 種針對易脆材質構成之管線，以其内含氣體或澄度狀 4爲基準之測漏方法。 、、在：導體製程中’常須以耐高溫的石英管承裝晶圓， 以進行高溫處理。而爲能增進製程條件控制，石英管内須 机通適當種類與壓力的氣體。因此，密閉性佳的石英管乃 維持半導體製程高良率的重要條件。 以任，爲了檢測石英管的密閉性，常以高壓氣的導入 石英管之方式測漏。然而’石英管是易脆材質，稍有不愼 就會導致石英管破壞，不僅無法測得密閉狀況，反而破壞 了製程設備。或有採用鍍有欽金屬的晶圓在石英管中加 溫，依鈦的氧化程度判斷石英管的漏氣狀況。但憑鈦的反 應情況並不易確實掌握漏氣的程度，並且，爲了檢视密閉 性，原先的正常製程必須中斷，對於工廠大量製造的流程 造成阻礙，將影響產品的供應時效。 因此，本發明乃提出一種可以即時測得易脆管線密閉 程度的方法，能夠在正常製程流程中檢視管線狀況，維 製程流暢。 、侍 本發明之易脆管線測漏方法只需在正常壓力下進行， 不會對管線造成損害。 又本發明之易脆管線測漏方法能夠測出相對量値，浐 藉以判斷管線漏氣程度，有助於製程設備之保養維護。于 本發明之易脆管線測漏方法更能連結自動控制電路 於漏氣程度大於一定標準時，立即停止製程設備之運作 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇x297公釐 —- 1^ (請先閲讀背面之注意事項再填寫本頁) 訂 《-線 A7 B7 五、發明説明（2 ) 以減少不良產品之製造浪費，更能防止危險發生。 依照本發明一較佳實施例之測漏氣方法係以一測漏氣 裝置連接土製程設備的排氣管線上。製程設備先以人爲設 定模擬漏氣狀態，而將測漏氣裝置測得之數値讀出記錄。 由不同漏氣模擬狀態和測得的數値做圖，即可取得一個漏 氣臨界數値。若以漏氣臨界數値經過檢驗無誤，就可以設 疋下來’供操作貝監控製程設備漏氣狀況之依據，或提供 自動控制電路做爲緊急停止製程設備的設定値。一旦測漏 氣裝置測得高於臨界數値之氣體含量或溼度’就能即時對 製程設備進行處理，防止不正常運作發生。 由於測漏氣裝置係連接在製程設備之排氣管線上，並 不會影響製程設備的正常運作，特別對於易脆管線有利。 而測漏氣裝置以連續方式檢測氣體或水份含量，隨時反應 檢測結果’能發揮即時監視之效果。 爲讓本發明之上述目的、特徵、和優點能更明顯易懂 ，下疋特舉一較佳實施例，並配合所附圖式，作詳細説明 如下： 圖式之簡單説明： 第1圖爲本發明測漏氣方法之裝置配置示意圖； 第2圖是本發明一較佳實施例之快速退火爐石英管測 漏氣方法之裝置配置示意圖； 第3圖爲第2圖裝置在不同漏氣狀況下對含氣八 所做之示意圖；以及 第4圖爲第3圖示意圖之局部放大圖。 本紙張尺妓(CNS )_錢格 ! ϊ - - I --"·-· -- i In - (請先閱讀背面之注意事項再填寫本頁)The present invention is printed by the staff consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. This invention relates to the inspection of half-process equipment, especially related to pipelines made of brittle materials. The leak detection method is based on the content of gas or clarity 4 . 2. In the conductor manufacturing process, it is often necessary to use high-temperature-resistant quartz tubes to carry wafers for high-temperature processing. In order to improve the control of the process conditions, the quartz tube must be ventilated with the appropriate type and pressure of gas. Therefore, a quartz tube with good airtightness is an important condition for maintaining a high yield in the semiconductor process. In any case, in order to detect the tightness of the quartz tube, leakage is often measured by introducing high-pressure gas into the quartz tube. However, the 'quartz tube is a brittle material, and a little unresponsiveness will cause the quartz tube to be damaged. Not only can the sealed condition not be measured, but the process equipment will be destroyed. Alternatively, wafers coated with Chin metal may be used to heat the quartz tube, and the leakage state of the quartz tube may be judged according to the degree of titanium oxidation. However, due to the reaction of titanium, it is not easy to accurately grasp the degree of air leakage, and in order to check the tightness, the original normal process must be interrupted, which hinders the mass manufacturing process of the factory and will affect the timeliness of product supply. Therefore, the present invention proposes a method for instantaneously measuring the degree of tightness of the brittle pipeline, which can check the pipeline status in the normal process flow and maintain a smooth process. 3. The method for leak detection of the brittle pipeline of the present invention only needs to be performed under normal pressure, and will not cause damage to the pipeline. In addition, the brittle pipeline leak detection method of the present invention can measure the relative quantity value, so as to judge the degree of pipeline leakage, which is helpful for the maintenance of the process equipment. The leak detection method of the brittle pipeline of the present invention can further connect an automatic control circuit to stop the operation of the process equipment immediately when the degree of air leakage is greater than a certain standard. This paper standard is applicable to the Chinese National Standard (CNS) A4 specification (21〇x297 mm- 1 ^ (Please read the precautions on the back before filling in this page) Order "-line A7 B7 V. Description of invention (2) To reduce the manufacturing waste of bad products and prevent the occurrence of danger. According to a preferred embodiment of the present invention The leak detection method is to connect a leak detection device to the exhaust line of the soil processing equipment. The process equipment first sets the simulated leak status manually, and reads the recorded value of the leak detection device. Different leakage simulation states and measured values can be plotted to obtain a critical leakage value. If the critical leakage value is verified, it can be set up for operation to monitor the leakage status of process equipment Basis, or provide an automatic control circuit as the setting value of the emergency stop process equipment. Once the gas detection device detects a gas content or humidity higher than the critical value, the process can be set immediately Process to prevent abnormal operation. Since the leak detection device is connected to the exhaust line of the process equipment, it will not affect the normal operation of the process equipment, especially for the brittle pipeline. The leak detection device is in a continuous manner Detect the gas or moisture content, and respond to the test results at any time can play the effect of real-time monitoring. In order to make the above objects, features, and advantages of the present invention more obvious and understandable, we will give you a preferred embodiment and cooperate with all The drawings are described in detail as follows: Brief description of the drawings: FIG. 1 is a schematic diagram of the device configuration of the gas leak detection method of the present invention; FIG. 2 is a leak detection gas of a quartz tube of a rapid annealing furnace according to a preferred embodiment of the present invention Schematic diagram of the device configuration of the method; Fig. 3 is a schematic diagram of the device of Fig. 2 for the gas-containing eight under different air leakage conditions; and Fig. 4 is a partially enlarged view of the schematic diagram of Fig. 3. This paper ruler (CNS) _ 钱 格! Ϊ--I-" ·-·-i In-(Please read the precautions on the back before filling this page)
、1T 丨線, 1T 丨 line
-m I 經濟部中央樣準局員工消費合作社印製 297086 A7 ---——_______B7 五、發明説明（3^ "~~~' ---—· 實施例 請參照第1圖所示依照本發明—實施例的測漏方法所 需裝置之配以㈣。本發以核是㈣裝程設備1〇 和排氣裝置15之連接管線13中所含切定氣體含量或産 度大小爲依據，藉測漏氣裝置20判斷製程設備ι〇之密閉 狀態’以即時提供操作員有關製程條件異動情況，或於漏 氣現象嚴重發生時’以訊號線24傳料止製程之指令至製 程設備ίο，而得防止危險發生。 由於測漏氣裝置初與製程管線連接時，並不能馬上提 供具有實質意義的數據資料。其原因在於製程設備規格不 -’使用時的控制條件也不盡㈣。故而每於初次使用本 發明之測漏方法時，必先預測製程設備的氣體含量或渔度 狀態’並设定爲基準値，做爲後續即時監測之參考依據。 因此，本發明之測漏氣方法當包括下列步驟： ‘至由閥門22將測漏氣裝置20連接至製程設備 10之排氣管線。 一、 打開閥門22，以模擬設定製程設備10之漏氣狀 態，並將測漏氣裝置20測得之數値記錄。 二、 依照漏氣狀態及測漏氣裝置20測得之數値做圖， 從圖中取得漏氣之臨界數値。 四、 檢驗漏氣臨界數値的正確度。 五、 製程設備10正常運作，測漏氣裝置20連續檢測 管線13疋狀態，以即時監測裝程設備10之漏氣情況，並 於漏氣嚴重時，適時經電路24停止製程設備1〇之運行。 本紙张纽適财關家標準（ I n n n I— I 1^^-111 (請先閱讀背面之注意事項再填寫本頁) 線--------- A7 B7 經濟部中央樣準局員工消費合作社印裝 五、發明説明（4 ) 爲了使前述測漏氣方法得使具體明瞭，下乃舉一快速 退火（RTA)製程設備及利用氧氣含量爲標準之測漏氣裝置 爲例如以説明。此例之裝置配置概如第2圖之示意圖所 示。其中，快速退火爐30内含有石英管32，用以封閉氣 流並承裝晶圓，以達控制製程條件之目的。爐内氣體是由 A端供入石英管32中，而由B端排出至排氣裝置5〇。連 接快速退火爐30和排氣裝置5〇的管線34具有—支管％。 用以測漏的測氧計40即以一閥門42和支管36相連接。 由於快速退火爐30係以b端之開口 38做爲晶圓進出 石英管32之通道，開口 38是否得密閉完全亦將影響爐内 的漏氣狀況。本實施例即利用此一特性做漏氣臨界數値之 設定。又以大氣中的氧氣對高溫中的金屬材料易生氧化作 用，是檢測漏氣的最佳指標，本實施例亦以爐内含氧量爲 漏氣檢測之依據。當然，其他氣體或水份含量亦得採用爲 本發明之測漏指標，相對地，測氧計4〇就需更換爲其他氣 體檢測計或溼度檢測計。此乃熟習此技藝人士皆能依本發 明精神做修正，無須在此詳述。 測氧計40具有連續吸氣（c〇ntinu〇us sucti〇n)及檢測低 氧含量的功能。以一般市售之LC75〇L/pc l2〇機 (TORAY公司製）爲例，其可測得低氧含量至1〇ppm以下 即可做爲本發明之測氧計。於是，若將LC 75〇L/pc_ 之氣體樣本入口（sample iniet)連接閥門42，而與支管 形成連通’即完成本發明之裝置配置。 其次，以氮氣自快速退火爐30之a端供入石英管32 型 120 36 (請先閲讀背面之注意事項再填寫本頁}-m I Printed 297086 A7 by Employee Consumer Cooperative of the Central Prototype Bureau of the Ministry of Economic Affairs -------_______ B7 V. Description of the invention (3 ^ " ~~~ '----- · For examples, please refer to the illustration shown in Figure 1 The present invention—the equipment required for the leak detection method of the embodiment is equipped with (iv). The present invention is based on the determination of the cut gas content or production size contained in the connection line 13 of the process equipment 10 and the exhaust device 15 The leak detection device 20 can be used to determine the closed state of the process equipment 10 to provide the operator with real-time changes in the process conditions, or when the leak is serious, the signal line 24 should be used to transmit the instruction to stop the process to the process equipment. In order to prevent danger. Because the leak detection device is initially connected to the process pipeline, it cannot immediately provide meaningful data. The reason is that the process equipment specifications are not-'and the control conditions during use are not endless. Therefore, Every time the leak detection method of the present invention is used for the first time, the gas content or fishery status of the process equipment must be predicted and set as a reference value, which is used as a reference for subsequent real-time monitoring. Therefore, the leak detection gas of the present invention The method should include the following steps: 'To connect the leak detection device 20 to the exhaust line of the process equipment 10 by the valve 22. 1. Open the valve 22 to simulate and set the leak status of the process equipment 10, and connect the leak detection device Record the measured value of 20. 2. Make a graph according to the state of leakage and the measured value of the leak detection device 20. Obtain the critical value of leakage from the graph. 4. Check the accuracy of the critical value of leakage 5. The process equipment 10 is operating normally, and the gas leak detection device 20 continuously detects the state of the pipeline 13 to monitor the air leak of the process equipment 10 in real time, and when the air leak is severe, stop the process equipment 10 via the circuit 24 in a timely manner. Operation. This paper is the New Zealand Finance Standard (I nnn I- I 1 ^^-111 (please read the precautions on the back before filling out this page) Line --------- A7 B7 Central Sample of the Ministry of Economic Affairs Printed by the Quasi-Administrative Staff Consumer Cooperative V. Description of the invention (4) In order to make the aforementioned gas leak detection method more specific, the following is a rapid annealing (RTA) process equipment and a gas leak detection device using oxygen content as a standard, for example To illustrate, the device configuration in this example is as the 2nd The schematic diagram shows. Among them, the rapid annealing furnace 30 contains a quartz tube 32, which is used to seal the gas flow and support the wafer, so as to control the process conditions. The furnace gas is fed into the quartz tube 32 from the A end, and It is discharged from the end B to the exhaust device 50. The line 34 connecting the rapid annealing furnace 30 and the exhaust device 50 has a branch pipe%. The oxygen meter 40 for leak detection is connected to the branch pipe 36 by a valve 42. Since the rapid annealing furnace 30 uses the opening 38 at the b end as a channel for the wafer to enter and exit the quartz tube 32, whether the opening 38 is completely sealed will also affect the air leakage in the furnace. In this embodiment, this feature is used for air leakage Setting of critical value. In addition, the oxygen in the atmosphere easily oxidizes the metal materials at high temperature, which is the best indicator for detecting gas leakage. In this embodiment, the oxygen content in the furnace is also used as the basis for the gas leakage detection. Of course, other gas or moisture content can also be used as the leak detection indicator of the present invention. In contrast, the oxygen meter 40 needs to be replaced with another gas detector or humidity detector. This is because those skilled in the art can make corrections in accordance with the spirit of the present invention, and need not be detailed here. The oxygen meter 40 has the functions of continuous inhalation (continuus suction) and detection of low oxygen content. Taking a generally commercially available LC75〇L / pc l20 machine (manufactured by TORAY) as an example, it can measure a low oxygen content to less than 10 ppm and can be used as the oxygen meter of the present invention. Therefore, if the gas sample inlet of the LC 75〇L / pc_ is connected to the valve 42, and communication with the branch pipe is established, the device configuration of the present invention is completed. Secondly, the nitrogen tube is fed into the quartz tube 32 type 120 36 from the a end of the rapid annealing furnace 30 (please read the precautions on the back before filling this page)
L -裝- 、» 線 A7 經濟部中央標準局員工消費合作社印製 五'發明説明（ 内部，而經管線34排至棑氣裝置50。此時，爲了設定漏 氣標準，就將開口施以不同的壓力。由於開口 ％和爐 管之間是由Ο型環（〇-ring%3提供密閉功能，開口 ％受到 的壓力就會傳遞到Ο型環，造成密閉程度差異。如前所述， 因爲開口 38的密閉程度的影響進入石英管32内的大氣 量，而造成不同程度的漏氣現象，本例即藉開口 ％的壓力 調整，設定模擬實際的爐管漏氣情況，而經 爐内^氣渗入所具有之氧氣含量，並予以記^40檢測 前述藉不同的壓力施加在開口 38上，而造成爐管内含 氧量變化之數値，經過記錄整理後，得繪示如第3圖。其 中，橫軸爲施於開口 38之壓力値，縱軸則表示測氧計4'〇 測得的氧氣含量百分比。從圖中可見得，當開口 ％承受的 壓力高於20PSI後，氧含量百分比低於5〇ppm，並且隨著 壓力增大，百分比下降的幅度相當有限。第4圖是以開口 38所受壓力在1〇PSI至2〇psi之間做更詳細的氧含量圖 不，很清楚地可以見到在llpsi和12psi之間，氧氣含量 百分比曲線具有一個轉折，而漸趨乎穩。因此，從圖中可 斷言，漏氣之臨界數値約爲5〇ppm之氧氣含量百分比。一 旦測漏氣裝置（即測氧計4〇)測得之爐管内氧含量低於 5〇ppm，就可認定此時的密閉程度良好，沒有嚴重的漏氣 情形發生。 當然，前述以預檢測過程建立之臨界數値仍須經由實 際製琴檢驗。例如，可在石英管32内置-錢有欽的晶片， 通入氮氣’並控制石英管32内的含氧百分比在臨界數値之L-装-, »Line A7 The Ministry of Economic Affairs Central Standards Bureau employee consumer cooperative printed the 5 'invention description (internally, and discharged through pipeline 34 to the venting device 50. At this time, in order to set the leak standard, the opening is applied Different pressures. Since the O-ring (〇-ring% 3 provides the sealing function between the opening% and the furnace tube, the pressure at the opening% will be transmitted to the O-ring, causing a difference in the degree of sealing. As mentioned above, Because the airtightness of the opening 38 is influenced by the amount of air entering the quartz tube 32, resulting in various degrees of air leakage. In this example, the pressure of the opening% is adjusted to set the actual furnace tube air leakage to simulate the actual furnace tube leakage. ^ The oxygen content of the gas infiltration is recorded. ^ 40 Detect the number of changes in the oxygen content in the furnace tube caused by the different pressure applied to the opening 38. After recording and sorting, it can be plotted as shown in Figure 3. Among them, the horizontal axis is the pressure value applied to the opening 38, and the vertical axis represents the percentage of oxygen content measured by the oxygen meter 4'〇. As can be seen from the figure, when the pressure at the opening% is higher than 20PSI, the oxygen content Percentage below 5 〇ppm, and as the pressure increases, the percentage drop rate is quite limited. Figure 4 is based on the pressure of the opening 38 between 1〇PSI to 20psi to do a more detailed oxygen content map, it is clear Seeing that between 11 psi and 12 psi, the percentage curve of oxygen content has a turning point, which gradually stabilizes. Therefore, it can be asserted from the figure that the critical number of leaks is about 50 ppm oxygen percentage. Once the leak is measured The oxygen content in the furnace tube measured by the gas device (that is, the oxygen meter 4〇) is less than 50ppm, it can be considered that the sealing is good at this time, and no serious air leakage occurs. Of course, the foregoing is established by the pre-test process The critical value still needs to be checked by the actual piano maker. For example, a quartz tube 32 can be built-in with Qian Youqin's chip, and nitrogen can be introduced to control the percentage of oxygen in the quartz tube 32 to the critical value.
匕紙張尺度賴巾咖家標準（CNS 210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 裝- --° 線 五、發明説明（ό ) ~ ---- 内而施以向/Jtt處理。因爲嚴重的爐管漏氣會使氧含量增 7 ’使鈦在高溫下氧化。若是經由前述方法控制含氧量在 臨界數値内’並無氧化鈦產生，那麼前設定之臨界數値即 澄實具有效用，堪爲後續正常製程採用。反之，若是有氧 化鈦生成，就必須重新建立臨界數値，以求確實監視爐内 漏氣現象。 已獲驗證的臨界數値得設定於測漏氣裝置中，隨時供 祛作員監控快速退火爐内的漏氣情況，亦得經由控制電 路，在測得高於臨界數値之含氧容量時，即停止快速退火 爐之運行，以防止不良產品繼續生A，或可避免不當漏氣 造成之危險。 ， 前述實例係以快逹退火爐爲説明，其他傳統高溫爐管 或任何含有易脆如石英材質之製程設備亦皆適用本發明之 測漏方法。雖然本發明雖以較佳實施例揭露如上，然其並 非用以限定本發明，任何熟習此項技藝者，在不脱離本發 明之精神和範圍内，當可作些許之更動與潤飾，因此本發 明之保護範圍當視後附之申請專利範圍所界定者爲準。 經濟部中央標準局員工消費合作社印裝 8 本紙張尺度適用中國國家標準（CNS )八4麟（210X297公釐）Dagger paper standard Laijin coffee house standard (CNS 210X297mm) (Please read the notes on the back before filling in this page) 装--° 线 Fifth, the description of invention (ό) ~ ---- inside and give direction / Jtt processing. Because severe furnace tube leaks will increase the oxygen content by 7 'and oxidize titanium at high temperatures. If the oxygen content is controlled within the critical value through the aforementioned method, and no titanium oxide is produced, then the previously set critical value will be effective and can be used for subsequent normal processes. Conversely, if titanium oxide is produced, the critical value must be re-established in order to monitor the gas leakage in the furnace. The verified critical value can be set in the leak detection device, which can be used at any time for the operator to monitor the leak in the rapid annealing furnace, and also through the control circuit when the oxygen content above the critical value is measured. , That is, stop the operation of the rapid annealing furnace to prevent bad products from continuing to produce A, or to avoid the danger caused by improper gas leakage. The foregoing example is illustrated by a fast annealing furnace. Other traditional high-temperature furnace tubes or any process equipment containing brittle materials such as quartz are also applicable to the leak detection method of the present invention. Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone who is familiar with this skill can make some changes and retouching without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the attached patent application. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 8 This paper standard applies to the Chinese National Standard (CNS) Ba Si Lin (210X297mm)