TW294857B - The driving circuit for traveling-wave type ultrasonic motor - Google Patents

Abstract

A driving circuit, which is two-phase chopper inverter combination, is proposed to provide two-phase balance voltage for the traveling-wave type ultrasonic motor(USM). The two-phase chopper-inverter driving circuit is proposed in Fig 1. Each chopper-inverter driving circuit is composed of one boost chopper cascading with one half bridge series resonant capacitor-parallelload inverter. Thereby, the two-phase sinusoid output voltage, VA and VB with a phase difference of 90 degrees, can be maintained at the same constant peak values at the same switching frequency. The function of the chopper, which is implemented with MOSFET, is to regulate the inverter output voltage with PWM direct-dutycycle control. The resonant inverter using parasitic impedance of the USM to provide sinusoidal voltage source is also implemented with MOSFETs. The Lr1 and Lr2 inductance are inserted in series with the load for each inverter, respectively, in order to become resonant with the inherent parasitic capacitance, Cdl and Cd2, of the USM. The driving frequency of the inverters is the major control variable and the rotor rotating direction can be controlled by the phase difference between the two-phase outputvoltages of the inverter.

Description

2948S7 A7 B7 V. Description of the invention (i) Printed by the Employee Consumer Cooperative of the Central Standard Falcon Bureau of the Ministry of Economic Affairs The present invention is a drive circuit for traveling wave type ultrasonic motors λ conventional ultrasonic motors, in terms of structure and driving principle It is quite different from the traditional electromagnetic motor that generally uses electromagnetic theory to produce rotation. It is a kind of elastic vibration that uses ultrasonic waves on the stator to obtain driving force, and then uses friction to drive the hand (R.t.r.r ) While driving the motor. The present invention aims to design a driving circuit that provides the normal operation of a traveling wave type ultrasonic motor. Generally speaking, it is composed of a DC-DC boost type mud changer belonging to the two phases of A and B and a DC-AC: ¾Zhonglian The resonant converter is composed of two sets of cascade configuration. The function of the DC-DC boost converter is to connect the resonant converter through DC AC: the output feedback signal of the converter regulates the output DC voltage, and The first use of the DC-AC _resonant converter is to switch the resonant tank of the converter through a sequence of switching elements. The tank generates a high-frequency AC output voltage for the traveling wave type. The working voltage of the ultrasonic motor, and the parasitic capacitance of the super-wave motor-c is used as the resonance capacitor in this series resonance tank circuit. For a clearer understanding of the features and purposes of the present invention, please refer to the following drawings and Detailed description of embodiments of the present invention. The diagrams listed in the present invention are briefly described as follows: FIG. 1 shows the block diagram of the ultrasonic motor drive disclosed in the present invention. FIG. 2 shows the main structure of the traveling wave type ultrasonic motor. FIG. 3 shows the traveling wave type ultrasonic motor. Fig. 4 shows the stator piezoelectric ceramics under no voltage and deformation under applied voltage. 'Figure 5 shows the driving principle diagram of the traveling wave type ultrasonic motor.' Figure 6 shows the traveling wave type ultrasonic motor. The single-phase equivalent circuit diagram of the sonic motor I ^-(please read the precautions on the back before filling in this page) Threading · 4 This paper scale is applicable to the Chinese National Standard (CNS) (2 丨 〇 > < 297 公 嫠83. 3. 〇〇〇〇 五, invention description (A7 B7 Ministry of Economic Affairs Bureau of Central Standards Zhengong Consumer Cooperative Printed Figure 7 shows-generally used a group of DC-DC boost type chopper and a group of two Fig. 8 shows the basic structure of the boosted chopper. Fig. 9 shows the basic working principle of the boosted chopper. Fig. 10 shows the basic working principle of the boosted chopper. Fig. 10 shows the high-frequency series resonant. Basic structure of inverter 1 1 Table TF South Frequency Series Resonant Inverter The basic working principle of the drive frequency is greater than and less than the resonance frequency, respectively. Figure 2 shows the two sets of DC-DC boost type chopper and two sets of single Multi-phase high-frequency _ connected resonant converter composed of a continuous circuit architecture · f Fig. 13 Table tf the output voltage amplitude closed loop control block diagram disclosed by the present invention Figure 14 Table π pulse width modulation disclosed by the present invention Basic working principle of controlFig. 5 shows one embodiment of the closed-loop control circuit of the driving voltage output voltage amplitude for the traveling wave type ultrasonic motor disclosed in the present invention. FIG. 16 shows the phase separation and driving circuit disclosed in the present invention. —The block diagram of the embodiment FIG. 17 shows one embodiment of the voltage control frequency circuit and phase splitting circuit 'steering control circuit disclosed in the present invention. FIG. 18 shows the voltage control frequency circuit disclosed in the present invention when the ultrasonic motor rotates clockwise , A phase-splitting circuit and an embodiment of the steering control circuit. Working waveforms. FIG. 19 shows the y-control frequency circuit, the phase-splitting circuit, and the steering control disclosed by the present invention when the ultrasonic horse rotates the hour hand. One embodiment of the circuit is the working signal waveform. The electrical side and the pressure of {—install ------ order ------- ^ Travel J (please read the precautions on the back before filling in this page) This paper Concentrated; JL applies to the Chinese National Sample (CNS) eight 4 said grid (210X297々 :: ^ 7 83. 3. 10,000 A7 ^^ 4857 B7 V. Description of the invention (3) Figure 2 0 represents the lockout disclosed by the present invention One embodiment of the circuit Figure 21 shows the operating signal waveforms at various points of the A-phase part of the latch circuit. Figure 22 is a diagram showing the meaning of the main part numbers of the illustration of an embodiment of the isolated driving circuit disclosed in the present invention as follows: 10 DC-DC step-up chopper 11: DC-AC series resonant converter _ 12: output voltage amplitude control circuit. 1 3: split-phase and drive circuit 14: basic equivalent circuit of ultrasonic motor 2 0: Piezoelectric ceramic 21: Elastomer '1 22: Rotor 2 3: Pressure applied by the spring mechanism 30: Feedback pole of piezoelectric ceramic on the stator 31: Ground electrode of piezoelectric ceramic on the stator 32: Positive polarized piezoelectric on the stator Ceramic 33: Negative piezoelectric ceramics on the stator 60: Equivalent circuit of ultrasonic motor rotor 61 ': Ultrasonic horse Equivalent circuit up to the stator 70: a set of boost-type chopper is an input two-phase series resonant converter 150: half-wave rectifier filter circuit 151: voltage follower circuit 152: pulse width modulation control circuit '\ 153: Optocoupler isolation circuit, 15 4: Drive signal output circuit ·' 6 This paper standard is applicable to China National Standard (CNS) Α4ϋ grid (210X29? Mm) ------- 『'—installed-- ---- order ------ line (please read the precautions on the back before filling in this page) Printed 83.3. 10,000 'Instructions for Invention by the Ministry of Economic Affairs Central Standards Bureau Beigong Consumer Cooperative (A7 B7 Central Standards Bureau of the Ministry of Economic Affairs ΚΕ: Industrial and Consumer Cooperative Printing 170. Voltage control frequency circuit 171: Split-phase circuit 1 7 2 • Steering control circuit 200: Click trigger circuit 2 01 • Delay circuit 220: Full-wave rectification and voltage stabilizing circuit 221 • Light conversion Isolation circuit 222 · Push-pull current amplification drive circuit The detailed description of the present invention is as follows: Figure 2 is the main structure of the ultrasonic motor ............ is a multi-chip pressure rabbit pottery ^ (Piezoelectric ceramic) 20 It is attached to the structure of copper and other metals. Basically, the ultrasonic motor system uses piezoelectric ceramics. The generated ultrasonic vibration drives the metal surface to travel & because μ &: the surface produces a stretching movement when the piezoelectric ceramic vibrates, so it is called elastic when the surface of 21 elastomer has a tooth-like structure, it has amplified elasticity The effect of the longitudinal amplitude on the body surface 'The material of the piezoelectric cryo is made of piezoelectric materials called (Pb), zirconium (Zr) and titanium (Tι) oxides, which are generally called m. Effect material. The rotor 22 is made of Ming alloy. It withstands the traveling waves generated on the surface of the elastomer and rotates by the action of friction. In order to make the rotor and the stator closely contact, use between the rotor and the predetermined: spring yellow mechanism 23 A certain degree of pressure is applied so that the traveling wave of the stator can drive the rotor to rotate by friction. Therefore, the amount of pressure applied by the spring mechanism directly affects the static friction between the rotor and the stator. Since the "mot force" must be overcome, the motor starts to rotate. It is related to the applied voltage. In other words, the input voltage must be large enough to allow the motor to start rotating. Figure, it has a ring structure (please read the precautions on the back before filling this page)-installed. -Subscribe I-I.-I 1 1 1 Μ 录 ΛΑϋ [财 _ 家 プ （CNS） Α4ΜμΓ (210X297 ^-[83. 3. 10,000

S94SS 7 A7 B7 V. Description of the invention (The vibration source of the ultrasonic motor printed by the Central Standard Falcon Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs is excited by the piezoelectric ceramics on the stator to generate @frequency mechanical vibration, so when losing two people The high-frequency AC voltage of the phase is applied to the piezoelectric ceramic on the surface of the stator, and a flexural elastic wave (Fiexure wave) will be generated on the surface of the elastic body. Figure 3 shows the polarized arrangement of the piezoelectric ceramic. The AC voltage is added separately. On the two sets of piezoelectric ceramics, the two sets of piezoelectric ceramics belong to two phases of A and B, the two-phase piezoelectric ceramics of α and B add the feedback electrode (Feedback elcctrode) 3 and the ground terminal. (GND) 31 buckling elastic waves with 9 wave heads are formed on the surface of the stator ring. Piezoelectric ceramics are a kind of piezoelectric material with piezoelectric effect. Each piece of piezoelectric ceramics has been polarized beforehand. The treatment is divided into anodizing treatment and anodizing treatment according to the polarization direction, and the arrangement method is that the anodized piezoelectric ceramic (/) 32 and the anodized piezoelectric ceramic (―) 33 are arranged alternately. As shown in Figure 4 (a) As shown, when no voltage is applied, both (+) and (―) piezoelectric ceramics are It will be deformed. As shown in Figure 4⑻, but when positive voltage is applied, the piezoelectric ceramics of (1) and (1) will expand and contract respectively. As shown in Figure 4 (e), when negative voltage is applied, (1 and (- ) The piezoelectric ceramic materials are stretched and contracted in the opposite direction as when a positive voltage is applied. Similarly, when the input voltage is a high-frequency two-phase AC voltage, two piezoelectric ceramics are adjacent to each phase with the power frequency To form a ultrasonic vibration of one wavelength, in order to make the buckling elastic wave travel on the stator surface, the two-phase piezoelectric ceramics of α and β must be spaced apart by λ / 4 in space arrangement, which is equivalent to the spatial angle of π / 2, and the other two The excitation power of the phase must be separated by a redundant electrical angle of / 2 in time, so that the standing wave generated by the two phases generates a traveling wave on the stator ring after synthesis. This paper ruler is suitable for the Chinese National Falcon (CNi; ) A4 specifications (2 丨 X297 male sauce) 83. 3.! 〇, 〇〇〇f I installed ------ order ----- γ line J (please read the notes on the back before filling in this Page), invention description (6) u (x, t) = Acoskx * cos0t ⑴ In the above formula, the amplitude U of the wave is a function of time (t) and space (X), and k is defined as the wave Number (= 2ττ / λ), ω is the angular frequency (> 2πί), A is the wave value of the wave, and the mathematical formula of the traveling wave is printed by the Central Ladder Bureau of the Ministry of Economic Affairs Beigong Consumer Cooperatives u (x, t) = Acos (kx-®t) Equation (2) can be expressed as: u (xt) = Acoskx · costot + 'A cos (kx-π / 2) · cos (cot-π / 2) (3) From the equation ( 3) It can be seen that two standing waves with a phase difference of π / 2 each in time and space phases will also form a traveling wave after overlapping each other. Therefore, the spatial difference between the two groups of piezoelectric ceramics A and B in the spatial arrangement is λ / 4 The space is a distance of π / 2, and the two-phase high-frequency AC voltage applied to the two-phase piezoelectric ceramics of A and β has an electrical angle different by π / 2 in time. As shown in FIG. 5 is a driving principle diagram of a traveling wave type motor. When a and B two-phase south-frequency AC voltage is applied to the piezoelectric ceramic 2 and a traveling wave is generated on the surface of the elastic body 21, the spring mechanism 23 is received above the rotor 22 Due to the magical effect of friction, the same particles on the surface of the elastomer will produce a counterclockwise elliptical orbital movement. The apex of the elliptical trajectory is in contact with the rotor. The horizontal universal component of the circular movement moves the rotor to the left The characteristic of the buckling elastic wave is that it is easy to produce large displacements, which makes it easy to excite elliptical displacements when applied to ultrasonic motors. Due to the elliptical motion, horizontal displacements are generated. The horizontal displacements cause the elliptical apex to rotate the rotor when it touches the rotor. , Because the electrical signals of the interrogation frequency produce mechanical output, the piezoelectric equation of the mechanical resonance system of piezoelectric ceramics is (2) ------- f --installation ------ order --- --- "Line (please read the precautions on the back before filling in this page) 9 (210x297mm) 83. 3. 10,000 (5) 5. Description of the invention (7) Α7 Β7

I = YdV + Av In formulas (4) and (5), F: Force generated at the mechanical end V: Speed generated at the mechanical end V: Voltage at the electrical end I: Current at the electrical end: Mechanical impedance of the piezoelectric ceramic: Stopping admittance (B1 〇cking A: Force factor) is the electromechanical conversion factor. Its assembly varies depending on the shape, size and type of piezoelectric material of the motor. There are two explanations: (1) plus The force per unit voltage (1 v) is A. The unit is N / V. ⑵ When generating unit velocity (lm / s) ^ A, the unit is C / m. It is known from the piezoelectric equation that the traveling wave $ Gudu When the material Poma receives a torque output, its early phase effect circuit can be obtained from equation (4). For F = 〇: AZ Yd Y = — = γ,-| ---— V d Z — j «Cd + admittance) It's other! 1-ml-I— -I 1. I It— called '-_ (please read the notes on the back before filling out this page) -Subscribe: jwCd +-(6) --- `` Ministry of Economic Affairs, Central Bureau of Standards, Beigong Consumer Cooperatives, Incheon r〇 + j®Ln ~ Sichuan (6) The physical meaning of each element is Cd: suppression capacitance, which is the capacitance of piezoelectric ceramic dielectric m · pressure% ceramic The quality of Zizi and Xuanzi ring The equivalent inductance converted by the function --- 10 paper rulers / 1 thorn towel (CNS) ^ threat (training ------- 83. 3. 10,000 V. Description of the invention (8) A7 B7 Central Ministry of Economic Affairs Printed by 搮 鐼 局 贝 工 consuming cooperatives cm: Piezoelectricity «The equivalent capacitance of the stator _ Γ〇: Piezoelectric ceramics and the loss generated inside the stator ring are represented by the resistance of the rotor torque. After the Taxi, due to the use of one between the rotor and the stator: the hand mechanism plus the pressure of Buding, the rounding point generated by the traveling wave on the stator surface is in contact with the rotor, and its horizontal component makes the rotor along the contact surface. The movement in the horizontal direction forms the driving source of the rotor, but the rotor will slip to some extent during actual operation, and there will be friction loss and heat generation. In addition, the friction loss caused by the friction and viscosity of the other parts and other parts, As well as the friction and sliding caused by the rotation of the rotor, as well as other losses due to rotation are factors that need to be considered. Figure 6 shows the single-phase equivalent circuit diagram of the ultrasonic $ up to which the electric paste belongs to the reading part Part of the equivalent circuit, circuit 61 is In the equivalent circuit of the stator part, _ shows the resistance equivalent to the stator due to sliding and friction, which is generally a function of spring pressure and load torque, which will be lower under higher load torque Resistance value, Table ^ Due to mechanical losses such as friction and viscosity generated by the bearings and related parts when the rotor moves, acr represents the equivalent resistance corresponding to the load torque. The rotation characteristics of the ultrasonic motor are driven by the drive frequency and drive The influence of three variables such as the voltage and the phase angle of the two phases. The main purpose of the present invention is to design the driving circuit for the traveling wave type ultrasonic motor. One embodiment of the present invention is the rated design of the USR-60 type ultrasonic motor. Drive circuit, the rated value of this type of ultrasonic motor is: (1) drive frequency) = 4〇ΚΗζ, (2) drive voltage (E) = l〇〇VRMS, (3) the phase angle of the two phases (φ) = 9〇. , (4) its rated speed (N) = 100rpm. Under the condition of fixed driving electroacoustic and phase angle at the rated value, the frequency (f) -speed (N) characteristic curve can be obtained, and the f-N characteristic curve r can be moved in the form of a fixed f I ----- -Order ----- "Line (please read the precautions on the back before filling in this page) 11 This paper size is applicable to the Chinese National Standard (CNS) 84 4 grid (21〇X π.mm) 83. 3. 10,000 5. Description of the invention (9) A7 B7 Printed by the SBC Industrial and Consumer Cooperative of the Ministry of Economic Affairs, the mechanical resonance frequency is about 39KHz > the range of about 40 ~ 44ΚΗζ on the right side of the mechanical resonance point is relatively gentle Negative slope, in this range, the rotation speed range can be changed from zero to the rated speed, in other words, the lower the frequency in this frequency range, the higher the speed, so this frequency range is the working area of the ultrasonic motor 'and is controlled by frequency The rotation speed can obtain a wide rotation speed range, so the present invention designs the drive circuit for this feature of the ultrasonic motor. In addition, its forward and reverse rotations can be driven by the input two-phase drive, and the A phase before the β phase and the A phase before the β phase over. Control. About the ultrasonic motor drive system Discussion, such as SFuruya et al., IEEE-PESCrecordl 990, pages 17-24, entitled, Ultrasonic Motor Two-Phase Resonant Inverter! Load Adaptation and Frequency Control 〃 I Circuit Architecture As shown in FIG. 7, it is composed of a group of DC-DC step-up chopper 10 and a group of two-phase high-frequency series load resonant converter 70. This structure is based on the ultrasonic motor The two-phase equivalent circuit is simplified to contain only two suppression capacitors (Blocking capaciatc) r) Cdl, DC-DC boost type chopper is used to adjust the voltage of the tuna series resonant converter, the ultrasonic motor is adjusted by The electronic switch of the series resonant converter is driven by the switching frequency to change its rotational speed, and this two-phase series resonant converter uses two inductors Lrl, Lr2 as the resonant inductance of its resonant tank circuit to compensate for the suppression = combined Cdl, Cd2 The driving energy is provided by the voltage across both ends of the capacitor. The aforementioned architecture is provided by a-group boost type chopper to provide the DC input thunderbolt of the two-phase resonant converter at the same time. May be used when forward and reverse change The equivalent circuit and load are not common (_ 找 .4,, χ, • J ·% 'When the speed is low, it is more asymmetric than when the speed is lower-more asymmetric, this will make Shenlian jJL according to the rule, P /, The output voltage of the vibrating mud changer (that is, the voltage at both ends of the suppression) is also asymmetric, and the positive and negative rotation speeds at the driving frequency are also 12 copies. The paper ruler and the Chinese national standard (CNS) A4 regulations are applicable ^ 83. 3. 10,000 (. Meal lτ ------ ^ ί.ii (Please read the notes on the back before filling this page) S〇485 ^

3. Description of the invention (10) The printing and printing of the Consumer Labor Cooperative of the Central Department of Economics of the Ministry of Economic Affairs are different, and it is impossible to make the ultrasonic motor a good control.

: Out of 1 asymmetry, the circuit architecture disclosed by the present invention is shown in the figure below:-a set of straight mud-DC boost type chopper 10 and two sets of single-phase high-frequency Shenlian self-loading resonant commutation μ The composition is characterized by the use of two sets of straight t DC boost choppers to adjust the output voltage of the two sets of single-phase high-frequency series resonant converters to a set value so that the suppression capacitors ecu and Cd2 across the ultrasonic motor The voltage can be controlled separately to achieve the input voltage setting value of the ultrasonic motor. If the input voltage setting value can be maintained, the frequency is used as a single variable for controlling the ultrasonic motor, so that the control circuit can simply handle this variable in design . In Figure i, S1 and S4 belong to the two sets of DC-DC step-up chopper on the electric power switch, the ^ dynamic signal is generated by the two sets of output voltage amplitude control circuit 12 variable duty cycle ratio (Duty rati0) drive signal to adjust the output DC voltage of the boost chopper, and the duty cycle ratio of the aforementioned drive signal is determined by comparing the command voltage v • with the terminal voltage (VA, VB) of the ultrasonic motor The width modulation (PWM) process generates a square wave with a variable duty cycle ratio to adjust VA and VB to a fixed value. S2, S3 and S5, S6 belong to the A and B two-phase DC-AC resonant resonant converter! On the electronic switch, the speed and rotation direction are controlled by the phase splitting and driving circuit 13. The operating principle is to input a control voltage u * to generate a variable frequency drive signal square wave to drive 4 electronic switches. The direction of rotation is controlled by the forward or backward phase of phase A, respectively controlling the forward and reverse rotation of the ultrasonic motor D-as shown in Figure 8 is a boost type chopper, this type of inverter is often used as an adjustable DC power supply , Its output voltage is greater than the input voltage. As shown in Figure 9 (a), when S1 · _'Όη ", the two ends of the electronic switch S1 are equivalent to a short circuit state, 13 丨 install ------ order -----> line (please read first Note on the back and then fill out this page) This paper scale is applicable to China Solid State Standard (CNS) Α4 specification (210Χ297mm) 83. 3.! 〇, 〇〇〇A7 B7

5. Description of the invention (U: =: biased output pole isolation, input energy is stored in the inductor ... ⑺ As shown in Fig. 9㈦, # S1 ".fr, when the two ends of the electronic switch are equivalent to a short circuit state, stored in the inductor And the energy input to the DC power supply is sent to the output at the same time, the relationship is Vd ~ v = Li _ ° * (B) During steady-state operation, covering the entire switching cycle, the time integral of the inductor voltage is 0, so Vdt〇n + (Vd-V〇) t〇fF = 〇⑻ In the above formula, 't〇n is the time when the electronic switch S1 is turned on, and the time when the electronic switch S1 is turned off, divided by Ts ( = t〇n + t〇ff) and sorted out-Ts _ 1

Yi t〇ff 1-D In the above formula, I) is the duty cycle ratio, and its value is between t 1 and (please read the precautions on the back before filling in this page) Binding · Order (10)

D " OnίΓ (11: The Zhenggong Consumer Cooperative of the Central Standards Bureau of the Ministry of Line Economy printed its energy from the input to the output capacitor C1 and the load rl, but if the negative Ί cannot effectively absorb this power, V〇 will rise, Until the energy is equal to ^, if the load is too small or an open circuit, the load may be damaged due to the rise of electricity-its withstand voltage value, so it must be regulated by feedback control in addition to the DC voltage. In most of the Application of the output voltage of the 'boost' type chopper / 14 This paper scale is applicable to the Chinese National Standard (CNS) A4 and (210X297 mm) 83. 3. 10,000 29485 A7 B7 V. Description of the invention (12 Economy Printed by the Ministry of Standards and Staff's Consumer Cooperative: :: For fixed value, but in the drive circuit disclosed in the present invention, the type of chopper is used to adjust the terminal voltage of the ultrasonic motor. In design, the input is a fixed DC bucket "'Therefore, the output voltage is variable. The sum of the boost type chopper ^ both contain-the wire groove circuit, its vibration! The voltage and ⑽ are generated by the resonant groove circuit w wire and provided to the load, which makes the change The switching element of the current transformer can be (And) zero current switching, one ^ ^ can use series LC or parallel L- ㈠ parallel state, in these converters and "" its power to load, subject to the switching frequency ⑹ and the resonance frequency of the resonance tank circuit f〇 ratio control. Figure 1 (), "half-bridge type" resonant converter's operating mode is divided into operation rate is less than resonance (is < fQ) and operating frequency is greater than resonance frequency (fs > f〇) two The former has two modes of discontinuous conduction mode (fs < f〇 / 2) and continuous conduction mode (fs / 2 < fs < f〇) according to its operating frequency range, while the latter is continuous conduction mode operation. The conduction mode of operation is generally better. The mode of operation is that it can obtain better power and voltage adjustment due to its smaller frequency range. U (a) (b) are fs > f〇 and fs < f (), The stable waveform of the output current iL and the communication signal of the pole conduction. In FIG. 11, it can be seen that the gate conduction communication number cannot be turned on simultaneously for the two electronic switching elements S1 and S2 of the arm (Leg), which will cause the power supply Vd to form a short circuit. Phenomenon and burn down si and S2, the operation principle uses the sequence of SI and S2 to control the flow of the output current iL , The sequence of a y. FS > f 0 mode output current flowing through the element is Dl- > Sl- >]) 2- > S2- > Dl fS < f 0 mode output current flowing through the element order is Sl4Dl -»S2- > D2— " S1 type with the need of the same pattern ------- ί 丨 装 ------ 定 ----- 〖线 Ί (Please read the back first Please pay attention to this page and then fill out this page) 15 This paper scale is applicable to China National Standard Falcon (CNS). Μ specification (210X 297 mm) 83.3.10,000 A7 B7 5. Description of the invention (13 Ultrasonic motor drive disclosed in the present invention The fs> f〇 mode in the circuit is mainly considered to have the following characteristics: (1) Operating at a higher frequency, which makes the impedance of the resonant inductor larger, prevents the switching element from being burned due to excessive current, and has short-circuit protection characteristics. .2 · When the switch is turned on at zero voltage and zero current, there is no need to connect another fast diode in parallel. D1 and D2 only use the base diode of the component itself (CBody-diode), and the switching loss is small. · 3. · The snubber circuit is simple when the electronic switch is closed, and only a snubber capacitor is needed in parallel. 4. Low electromagnetic interference (EMI) noise. 12. FIG. 12 is a f embodiment of the main circuit of the super I-wave motor drive circuit disclosed in the present invention. As described in M, it is: a set of DC-DC boost type chopper and two sets of single-phase high-frequency series load resonance type The converter is composed of successive stages. Its characteristic is that the boost chopper of each phase can adjust the capacitor voltage on the resonance tank separately. That is, the amplitude of the high-frequency AC voltage input by the ultrasonic motor is the same and unchanged. Vinl and Vin2 are Two sets of isolated and independent DC voltage sources. In this embodiment, the ground electrode (GN) of the ultrasonic motor is selected) and the output voltage-dividing capacitors (C1, C2) of each set of DC direct current boost type chopper and The middle point of (C3, C4) is used as the reference potential of this system, then vA and vB are the output of two sets of single-phase high-frequency series resonant converter and the terminal voltage of the ultrasonic motor, and the electronic switching element is Power type metal oxide half field effect transistors (POWER MOSFET), D2 and D4 are fast diodes, and D5, D6, D7 and D8 are the corresponding base diodes of Power MOSFET. '_ Figure 13 is a block diagram of the closed-loop control of the output voltage amplitude. The control method adopts pulse width modulation direct duty cycle ratio control. The output voltage is fed back. 16 This paper standard is applicable to the Chinese National Standard (CNS) A4 condition ( 210X297mm) 丨 Binding ^ Line J (Please read the precautions on the back before filling in this page) Printed by the Ministry of Economic Affairs, -f Central Standards Bureau Beigong Consumer Cooperative 83. 3. 10,000 Central Ministry of Economic Affairs ®: Industrial Consumer Cooperative Printed Policy A7 ^ -—____ B7 V. Description of the invention (14) ~ ~~ The body reference spit pressure ν after an error amplifier (Error amplifier) generates an error signal as the control voltage Vc, the control voltage Vc and-fixed frequency ( The two-angle wave Vtri is compared by a comparator to generate a pulse-width modulation phantom signal. The pulse-width modulation signal is amplified by a drive circuit to amplify the drive current and electrically isolated to generate electricity to the switch switching signal. * Vc "Change to control your cycle The control of the Bein cycle ratio adjusts the output voltage to reference 2. Therefore, only the inductance or capacitance of the resonant tank circuit changes S, which will cause the resonance point of the oscillating tank circuit to shift, thereby causing the output When the voltage changes, V〇 and the reference voltage Vf are amplified by the error amplifier to the error signal Vc, so when Vc is compared with a fixed three-angle wave 'η, the output of the comparator at that time is 0 volts, (Vc> v⑴comparator The output is the saturation voltage value, in this example is 12 volts. As shown in the figure, when the output voltage Vq m and the reference voltage error will increase, the% value will also expand, so that the comparator output square wave The duty cycle of the signal will increase than D. In this case, the feedback control loop must act to reduce the output voltage. Conversely, as shown in Figure 14⑻, when the output voltage V〇 rises, it is the same as the reference voltage. The amount of error will be reduced, and Vc < value will also be reduced, so that the duty cycle ratio of the square wave output by the comparator will be reduced. Therefore, the duty cycle ratio of the square wave signal output by the comparator is reduced, and the boost cutoff is switched The duty cycle ratio of the electronic switch of the device is reduced, and the input DC voltage can be adjusted to decrease, so the boost chopper can be adjusted to the output voltage setting value. FIG. 15 is the drive for the traveling wave type ultrasonic motor disclosed by the present invention _ _____ 17 This paper button is suitable for China National Counties (CNS) Α4 · _ (210x1 ^ 7 mm) 83. 3. 10,000 (please read the precautions on the back before filling in this page) • Pack · -6

V. Description of the invention (15 An embodiment of the output voltage amplitude closed loop control circuit of the circuit, in which 1C TL494 provides the function of pulse width modulation control, the reference voltage is 5v, provided by ic internal, VCC Bu 3 is three groups of mutual Isolated independent DC power supply, the variable resistor 'R1 VR2 is used to adjust the λ and β phase output voltage feedback signal attenuation, the rectifier wave circuit 150 will rectify and filter the decayed output voltage feedback signal to become a straight mud signal, The feedback DC signal is connected to the pulse width modulation control circuit 152 connected to the TL4g4 by a first-level 1C (iv) connected to the voltage follower circuit 151 to eliminate its load effect, and the optical coupling circuit 1 composed of ⑽ 丨 37 will control The signal is electrically isolated from the drive signal. The drive circuit 丨 54 uses ic UC3707 whose outputs are connected to S1 and other gates (Gate) respectively. This one is specially designed to drive P⑽OMOSFET drive icf. It has two channels, and each channel has output 1. 5A driving capacity. In addition, in order to be able to control the two-phase output of the _resonant converter, the I-vibration and the field value are constant and the same, there must be two sets of output voltage amplitude closed-loop control circuit points Do not control the two phases of Λ and Β and set their output points independently to solve the adverse effects caused by the inconsistency of Cd, RF, Rr and Rl of each phase to obtain the output voltage amplitude of the two phases, which can be set in series The two-phase output voltage amplitudes Va and 4 of the resonant converter are in the range of 80 to 120 square root mean square. In order to determine the operating point, the operating frequency of the ultrasonic motor speed characteristic curve is about 40 to 44κ 丨 丨z, because the mechanical resonance frequency is 39KHz, however, its speed is very high and unstable during mechanical resonance, so the operating frequency must be set to operate at a range higher than the mechanical resonance frequency. The operation mode is fS> gt. Excellent, based on the above situation, it can be determined that the drive frequency of the inverter should be operated in the range of f s> f Mr > f 〇 In the embodiment, set resonance ______ 18 This paper scale uses the Chinese national sample rate (CN; ) A4 specification (210x29 * 7cm) 1 ^ ------, 1T ------ 0 (please read the notes on the back before filling this page) Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 83. 3. 10,000 Ministry of Economic Affairs Central Standard Falcon Bureau shellfish consumption Printed by Zuoshe A7 ___ _B7 V. Description of the invention (16) The resonance frequency (f〇) of the tank circuit is 35KHζ. According to the actual measurement results, the suppression capacitance of the ultrasonic motor Cdi = Cd2 = 9.07nf, the resonance inductance of the resonance tank circuit can be The following formula is used to calculate f.-1 (12) From formula (12), Lr = 2.28mll can be calculated. Since the drive frequency of the ultrasonic motor can be controlled to control its speed, it is necessary to design a drive signal that can control the frequency to drive the electronic Switch, you can control the speed of the ultrasonic motor. In one embodiment of the present invention, two power field effect transistors are used as electricity and sub-switching elements for each phase. Figure 16 is a block diagram of the phase splitting and driving circuit. When the direct current control voltage u * (〇 ~ l〇V) is input to the voltage control frequency circuit (VCO circuit), a square wave output V1 with a frequency range of 16 (M80KHz and an amplitude of 12v) is generated to the split-phase After the circuit), a difference of 90 is generated. The phases of the two groups are 0, respectively. , 180. And 90. , 270. The two-phase square waves V2, V3, V4 and V5 are blocked by lockout circuits to prevent the two sets of reverse output square wave signals from overlapping at the same time and prevent the electronic switching elements of each phase from simultaneously touching. , The output signals ΤΑ, Τχ of the aforementioned circuit, and four sets of independent square wave signals are generated by the electrical isolation circuit, and the signal is amplified by the isolation and driving circuits (Isolating & Driving circuits) to generate four sets of signals that promote the Power MOSFET, which The outputs are respectively connected to the gates and gates of the four electronic switches S2, S3, S5 and S6 of the series resonant converter. Figure 17 is the voltage control frequency circuit disclosed in the present invention. This paper standard is applicable to the Chinese National Standard (CNS) Α4 present grid (210Χ297mm) 83. 3. 10,000 (Notes and fill in this page) --------- {丨 姑 衣 ------ 1T ------ · 0

Fifth Ministry of Economic Affairs Central Standard Falcon Bureau Beigong Consumer Cooperative Printed A7 B7 Description of invention (丨 7) The embodiment is mainly composed of IC UC1825, the size of the control voltage U * can determine the size of the 1C internal oscillator charging current, charging The current is linearly related to the output frequency. The variable resistor R1 can adjust the input oscillator charging current as the output square wave frequency offset (〇ffset) adjustment. When the input DC control voltage range is set to change from 〇 ~ 1 〇V The frequency range of its output square wave V1 is 160 ~ 180Κ1ίζ. The wiring diagram of the split circuit 171 in Figure Π shows that it is composed of an IC 40.13 with two]) type flip-flops connected as a ring counter (Ringcounter), which divides the frequency of VI by 4, and is divided by Pins 1, 2 and 12, 13 of IC4013 are taken out of phase A. , 180. And 90 of phase B. , 270. Square wave signal. In the wiring diagram of the steering control circuit ι72 in FIG. 17, X and Y are two control input bits, Ici〇70 is a repulsion or gate (x〇Rgate) so that when X = 1 (High), the output is controlled to be the reverse of the input Phase, the output is controlled to be equal to the input when χ = 〇 (L〇w), so when χΥ = 〇1, enable = 1, it means that the A-phase signal is ahead of the β-phase signal 9〇. , To output clockwise () signal. When XY ^ ll, enable = l, it means that the A-phase signal is 90 ° behind the B-phase signal. It is the output counterclockwise rotation (ccff.) Signal, but when γ = 〇 or 〇1 ^ 1) 16 = 0, it is from 1〇4073 And gate (80〇 & 16) output person, 8 two. The phase signal is 0, which means stop (ST0P) running signal. Fig. 18 shows the relationship between the waveforms of M'νl'MMI, V4, V5, Va, \, vb, and Vs and the time domain when ΧΥ = 0 and enable = 1, that is, when rotating clockwise. Figure 丨 9 shows the waveform and time domain relationship when XY = U, enable = l, that is, u when it is rotated counterclockwise :) !, n, V2, V3, V4, V5 'Q, \, vb, and Vs. FIG. 20 is an embodiment of the latch circuit disclosed by the present invention, which is mainly composed of a 1C 4528 click-and-send (〇ne-sh〇t) circuit 200. The paper size is applicable to the Chinese national standard Falcon (CNS) A4 said grid (2 丨 ΟΧ: 297 male thin) ------- {丨 installed ------ order ------ (line a (please read the notes on the back first (Fill in this page again) 83. 3. 10,000 A7 B7 V. Description of the invention (18) Connected, when va, ’vb and v6 input square waves are sent to the click-to-launch circuit, a click-to-go pulse wave is generated, and its pulse wave The time is determined by the RC time constant of the external variable resistor R 2 and the external capacitor C5. Click on the pulse wave to pass the AND gate and input square wave and then do "AND" processing, so that the two hj0SFEt of each phase will not be turned on at the same time. To avoid a short circuit, set it to 2us in this example. In addition, because the input square wave and clicking the pulse wave do " AND ”processing are not on the same time basis. In order to eliminate this situation, in this example, the input side The wave uses a delay circuit 201 as the delay time, and the delay time is controlled by the variable resistor R3 and the external

The RC time constant of the capacitor C6 is determined. Figure 21 shows the signal waveform at each point of the A-phase part of the latch circuit. • [FIG. 22 is an embodiment of an isolated driving circuit disclosed in the present invention. The driving power circuit 220 uses a bridge rectifier circuit and a voltage regulator ic 7812 to provide 4 sets of 12V DC power supplies. The electrical isolation system uses four 37 connections The optical coupling isolation circuit 221 and the driving circuit 222 are composed of 4 sets of push-pull current amplifier circuits, which send out 4 sets of isolated driving signals to the 4 electronic switching elements power MOSFET (S2, S3, S5 and S6 of the series resonant converter) ) As the drive signal for the gate. (Please save M- «Precautions on the back side and fill in this X). Packing. Threading · 21 copies of paper printed and printed by Beigong Consumer Cooperative of China National Standards Bureau, Ministry of Economic Affairs. China ’s National Commodity Rate (CMS) Μ 杂 ( 210X297 / ^ 83. 3- 1〇, 〇〇 °

Claims (1)

ABCD, Ministry of Economic Affairs, Central Standards Bureau, Employee and Consumer Cooperative Ind. VI. Patent scope-1 · Ultrasonic motor drive device, including: booster chopper, half-bridge load series resonant converter, voltage-controlled frequency circuit, Split-phase circuit. 2. The ultrasonic motor drive f 'as described in item i of the patent application scope, in which the input of the boost type chopper is artificial DC, has an inductance to store the amount of π, and contains an electron controlled by pulse width modulation Type switch, the electric pre-switch is controlled to make the inductor store energy when it is turned on, and the inductor is released to its output when it is turned off, so as to obtain a boost power supply with a variable voltage. '3. The ultrasonic motor drive equipment as described in items 1 and 2 of the patent scope ^ wherein the electronic type 1 switch of the juice pressure chopper uses the output voltage of the half-bridge load series resonant converter as Feedback generates a variable duty cycle ratio to control the on and off of electronic switches. 4 The ultrasonic motor drive device as described in item 丨 of the patent application scope, in which the half-bridge load series resonant converter has a total of two groups, and the input of each half-bridge load series resonant converter is connected to two independent The output of the boost type chopper, the input end of each group of converters contains two capacitors connected in series, and the middle of the capacitors is connected in common and connected to the location of the ultrasonic motor. Each half-bridge load series resonant converter The device contains two electronic switches. The two switches are connected in series-resonance inductor. The resonance inductor and the capacitance of the piezoelectric ceramic material of the ultrasonic motor form a resonance groove. The repeated switching of the electronic switch is used to make the piezoelectric switch. There is a phase difference of 90 between the two ends of the ceramic. Electrical angle, the voltage is 80-120 volts rms, and the frequency is the two-phase AC sine wave voltage of ζ ~ side 2. 5. The half-bridge load series resonant converter as described in item 4 of the patent application scope, in which the electronic switch has a switching frequency greater than the total resonance tank __ 22 '' I installed ------ order ----- / line (please read the notes on the back before filling in this page) Patent scope A8 B8 C8 D8 Centralized Bureau of the Ministry of Economic Affairs Employee Consumer Cooperative printed the frequency of gathering vibration ' The electronic switch has the advantages of zero voltage and zero current switching when it is turned on. 6. The ultrasonic motor drive device as described in item 1 of the patent application park, wherein the voltage control frequency circuit, the input is a DC voltage range is 〇 ~ 10 volts' output frequency range is 160K1IZ ~ 180KHζ and the amplitude is 12 volts, and the duty cycle ratio is square wave of ϋ · 5. 7. Ultrasonic motor drive device as described in item 1 of the patent application range, of which The output of the phase-splitting circuit is the square wave output of the pressure-controlled frequency circuit as described in item 6 of the patent scope, and the input square wave frequency is divided by 4 to produce a phase angle of 0, 90, 180, 270. , The voltage is 12 volts, 4 sets of square wave signal output with a rate of 40KHZ ~ 45K1IZ. 8 · The phase-splitting circuit as described in item 7 of the patent scope, whose output is connected to the drive of the electronic switch as described in items 4 and 5 of the patent application The circuit is used as an isolated pulse signal required for switching electronic switches. 9 _ The half-bridge load applied resonant converter as described in item 4 of the patent application, its two-phase balanced AC output voltage, after rectification and filter circuit After rectifying and filtering, and using a variable resistor to step-down feedback to the pulse width modulation control circuit of the booster chopper as described in item 2 of the patent application range, the DC of the booster chopper is changed by the control duty cycle ratio The output voltage allows the output voltage of the phase AC to be maintained at a constant value between 80 and 120 volts. ---- / Line (please read the precautions on the back before filling in this page) 23 The size of the dagger paper applies to the Chinese National Standard (CNS) A4 specification (210X297 race)