TW291577B - - Google Patents
Info
- Publication number
- TW291577B TW291577B TW083104717A TW83104717A TW291577B TW 291577 B TW291577 B TW 291577B TW 083104717 A TW083104717 A TW 083104717A TW 83104717 A TW83104717 A TW 83104717A TW 291577 B TW291577 B TW 291577B
- Authority
- TW
- Taiwan
Links
Classifications
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- H10D64/01312—
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- H10D64/0112—
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- H10P50/266—
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20638793 | 1993-08-20 | ||
| JP6039457A JPH07111253A (ja) | 1993-08-20 | 1994-03-10 | シリサイド形成方法および半導体装置の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW291577B true TW291577B (en:Method) | 1996-11-21 |
Family
ID=26378851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW083104717A TW291577B (en:Method) | 1993-08-20 | 1994-05-24 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH07111253A (en:Method) |
| KR (1) | KR950006968A (en:Method) |
| TW (1) | TW291577B (en:Method) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11200050A (ja) * | 1998-01-14 | 1999-07-27 | Mitsubishi Electric Corp | タングステンシリサイド膜の形成方法、半導体装置の製造方法、及び半導体ウェーハ処理装置 |
| JP2937998B1 (ja) | 1998-03-16 | 1999-08-23 | 山形日本電気株式会社 | 配線の製造方法 |
| US6583057B1 (en) * | 1998-12-14 | 2003-06-24 | Motorola, Inc. | Method of forming a semiconductor device having a layer deposited by varying flow of reactants |
| JP4154471B2 (ja) | 2002-11-15 | 2008-09-24 | 富士通株式会社 | 半導体装置の製造方法 |
| JP4858461B2 (ja) * | 2008-02-21 | 2012-01-18 | ルネサスエレクトロニクス株式会社 | タングステンシリサイド膜の形成方法及び半導体装置の製造方法 |
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1994
- 1994-03-10 JP JP6039457A patent/JPH07111253A/ja active Pending
- 1994-05-24 TW TW083104717A patent/TW291577B/zh active
- 1994-08-16 KR KR1019940020073A patent/KR950006968A/ko not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| KR950006968A (ko) | 1995-03-21 |
| JPH07111253A (ja) | 1995-04-25 |