TW289129B - - Google Patents

Info

Publication number
TW289129B
TW289129B TW084100159A TW84100159A TW289129B TW 289129 B TW289129 B TW 289129B TW 084100159 A TW084100159 A TW 084100159A TW 84100159 A TW84100159 A TW 84100159A TW 289129 B TW289129 B TW 289129B
Authority
TW
Taiwan
Application number
TW084100159A
Other languages
Chinese (zh)
Original Assignee
Shinetsu Chem Ind Co
Tokyo Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chem Ind Co, Tokyo Electron Co Ltd filed Critical Shinetsu Chem Ind Co
Application granted granted Critical
Publication of TW289129B publication Critical patent/TW289129B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ceramic Products (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Jigs For Machine Tools (AREA)
  • Resistance Heating (AREA)
TW084100159A 1993-12-27 1995-01-10 TW289129B (cs)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33087993 1993-12-27
JP31639694A JPH07297267A (ja) 1993-12-27 1994-12-20 静電チャック付セラミックスヒーター

Publications (1)

Publication Number Publication Date
TW289129B true TW289129B (cs) 1996-10-21

Family

ID=26568639

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084100159A TW289129B (cs) 1993-12-27 1995-01-10

Country Status (3)

Country Link
JP (1) JPH07297267A (cs)
KR (1) KR950021341A (cs)
TW (1) TW289129B (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202011000090U1 (de) 2011-01-14 2011-04-21 E-LEAD ELECTRONIC CO., LTD., Shengang Shiang Fahrzeug-Audiosystem mit auswechselbarem Plug-In-Computer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477388B1 (ko) * 2002-08-26 2005-03-17 주성엔지니어링(주) 웨이퍼 공정용 히터블록
US10917942B2 (en) 2017-07-31 2021-02-09 Samsung Electronics Co., Ltd. Structure, planar heater including the same, heating device including the planar heater, and method of preparing the structure

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2638649B2 (ja) * 1989-12-22 1997-08-06 東京エレクトロン株式会社 静電チャック
JPH0750736B2 (ja) * 1990-12-25 1995-05-31 日本碍子株式会社 ウエハー加熱装置及びその製造方法
JP3081279B2 (ja) * 1991-06-03 2000-08-28 電気化学工業株式会社 ホットプレート
JPH0513555A (ja) * 1991-07-01 1993-01-22 Toto Ltd 静電チヤツク及び静電チヤツクに対する電圧印加方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202011000090U1 (de) 2011-01-14 2011-04-21 E-LEAD ELECTRONIC CO., LTD., Shengang Shiang Fahrzeug-Audiosystem mit auswechselbarem Plug-In-Computer

Also Published As

Publication number Publication date
JPH07297267A (ja) 1995-11-10
KR950021341A (ko) 1995-07-26

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees