TW284892B - - Google Patents
Info
- Publication number
- TW284892B TW284892B TW85100498A TW85100498A TW284892B TW 284892 B TW284892 B TW 284892B TW 85100498 A TW85100498 A TW 85100498A TW 85100498 A TW85100498 A TW 85100498A TW 284892 B TW284892 B TW 284892B
- Authority
- TW
- Taiwan
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34083894A JPH08181097A (ja) | 1994-12-22 | 1994-12-22 | 半導体ウェハ貼付プレートの付着物除去方法及び付着 物除去装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW284892B true TW284892B (it) | 1996-09-01 |
Family
ID=18340778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW85100498A TW284892B (it) | 1994-12-22 | 1996-01-16 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH08181097A (it) |
| TW (1) | TW284892B (it) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115548173B (zh) * | 2022-09-21 | 2023-08-01 | 东莞市合易自动化科技有限公司 | 一种半导体晶圆将不良晶圆去除的设备 |
-
1994
- 1994-12-22 JP JP34083894A patent/JPH08181097A/ja active Pending
-
1996
- 1996-01-16 TW TW85100498A patent/TW284892B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08181097A (ja) | 1996-07-12 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |