TW284892B - - Google Patents

Info

Publication number
TW284892B
TW284892B TW85100498A TW85100498A TW284892B TW 284892 B TW284892 B TW 284892B TW 85100498 A TW85100498 A TW 85100498A TW 85100498 A TW85100498 A TW 85100498A TW 284892 B TW284892 B TW 284892B
Authority
TW
Taiwan
Application number
TW85100498A
Other languages
Chinese (zh)
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW284892B publication Critical patent/TW284892B/zh

Links

TW85100498A 1994-12-22 1996-01-16 TW284892B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34083894A JPH08181097A (ja) 1994-12-22 1994-12-22 半導体ウェハ貼付プレートの付着物除去方法及び付着 物除去装置

Publications (1)

Publication Number Publication Date
TW284892B true TW284892B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-09-01

Family

ID=18340778

Family Applications (1)

Application Number Title Priority Date Filing Date
TW85100498A TW284892B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-12-22 1996-01-16

Country Status (2)

Country Link
JP (1) JPH08181097A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW284892B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115548173B (zh) * 2022-09-21 2023-08-01 东莞市合易自动化科技有限公司 一种半导体晶圆将不良晶圆去除的设备

Also Published As

Publication number Publication date
JPH08181097A (ja) 1996-07-12

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Legal Events

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