TW280935B - - Google Patents

Info

Publication number
TW280935B
TW280935B TW084100550A TW84100550A TW280935B TW 280935 B TW280935 B TW 280935B TW 084100550 A TW084100550 A TW 084100550A TW 84100550 A TW84100550 A TW 84100550A TW 280935 B TW280935 B TW 280935B
Authority
TW
Taiwan
Application number
TW084100550A
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW280935B publication Critical patent/TW280935B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW084100550A 1993-10-29 1995-01-23 TW280935B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/144,944 US5475892A (en) 1993-10-29 1993-10-29 Semiconductor wafer particle extractor

Publications (1)

Publication Number Publication Date
TW280935B true TW280935B (zh) 1996-07-11

Family

ID=22510861

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084100550A TW280935B (zh) 1993-10-29 1995-01-23

Country Status (5)

Country Link
US (1) US5475892A (zh)
EP (1) EP0651438A1 (zh)
JP (1) JPH07254582A (zh)
KR (1) KR950012575A (zh)
TW (1) TW280935B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3244220B2 (ja) * 1996-08-06 2002-01-07 信越半導体株式会社 平板状物の乾燥方法および乾燥装置
DE19644779C2 (de) * 1996-10-28 2001-06-28 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten, insbesondere auch von Halbleiterwafern
US5883374A (en) * 1997-03-27 1999-03-16 Advanced Micro Devices, Inc. Scanning system for identifying wafers in semiconductor process tool chambers
US6918864B1 (en) * 1999-06-01 2005-07-19 Applied Materials, Inc. Roller that avoids substrate slippage
US20060000494A1 (en) * 2004-06-30 2006-01-05 Lam Research Corporation Self-draining edge wheel system and method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3004276A (en) * 1958-11-03 1961-10-17 Carl C Hoffman Apparatus for quickly cleaning folded filter element of dry type air filters
US3005223A (en) * 1959-07-07 1961-10-24 William W Taylor Phonograph record vacuum cleaner
US3150401A (en) * 1963-01-31 1964-09-29 William W Taylor Phonograph record cleaner
NL130001C (zh) * 1963-07-24
US3479222A (en) * 1966-06-22 1969-11-18 Disc Pack Corp Apparatus for and method of cleaning memory discs
US3765051A (en) * 1971-11-12 1973-10-16 A Nu Inc Apparatus for cleaning filter elements or the like
EP0145749B1 (en) * 1983-05-23 1988-03-16 Asq Boats, Inc. Universal flat orienter for semiconductor wafers
US4662811A (en) * 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
JPS61178187U (zh) * 1985-04-26 1986-11-06
US5054988A (en) * 1988-07-13 1991-10-08 Tel Sagami Limited Apparatus for transferring semiconductor wafers
JPH05259264A (ja) * 1992-03-11 1993-10-08 Fujitsu Ltd 半導体ウェーハ整列装置

Also Published As

Publication number Publication date
US5475892A (en) 1995-12-19
JPH07254582A (ja) 1995-10-03
KR950012575A (ko) 1995-05-16
EP0651438A1 (en) 1995-05-03

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees