TW280931B - - Google Patents

Info

Publication number
TW280931B
TW280931B TW84109545A TW84109545A TW280931B TW 280931 B TW280931 B TW 280931B TW 84109545 A TW84109545 A TW 84109545A TW 84109545 A TW84109545 A TW 84109545A TW 280931 B TW280931 B TW 280931B
Authority
TW
Taiwan
Application number
TW84109545A
Other languages
Chinese (zh)
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08602994A external-priority patent/JP3526908B2/ja
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW280931B publication Critical patent/TW280931B/zh

Links

TW84109545A 1994-03-31 1995-09-12 TW280931B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08602994A JP3526908B2 (ja) 1994-03-31 1994-03-31 真空ポンプシステムおよび半導体単結晶引き上げ装置

Publications (1)

Publication Number Publication Date
TW280931B true TW280931B (fr) 1996-07-11

Family

ID=51397618

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84109545A TW280931B (fr) 1994-03-31 1995-09-12

Country Status (1)

Country Link
TW (1) TW280931B (fr)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees