TW279254B - - Google Patents

Info

Publication number
TW279254B
TW279254B TW84110122A TW84110122A TW279254B TW 279254 B TW279254 B TW 279254B TW 84110122 A TW84110122 A TW 84110122A TW 84110122 A TW84110122 A TW 84110122A TW 279254 B TW279254 B TW 279254B
Authority
TW
Taiwan
Application number
TW84110122A
Original Assignee
Metrologix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metrologix Inc filed Critical Metrologix Inc
Application granted granted Critical
Publication of TW279254B publication Critical patent/TW279254B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2809—Scanning microscopes characterised by the imaging problems involved
    • H01J2237/281—Bottom of trenches or holes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
TW84110122A 1994-09-13 1995-09-27 TW279254B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30538294A 1994-09-13 1994-09-13

Publications (1)

Publication Number Publication Date
TW279254B true TW279254B (zh) 1996-06-21

Family

ID=23180565

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84110122A TW279254B (zh) 1994-09-13 1995-09-27

Country Status (2)

Country Link
TW (1) TW279254B (zh)
WO (1) WO1996008835A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014130098A1 (en) * 2013-02-19 2014-08-28 Rodriguez Lester Manuel Apparatus for sexual activities (the grey sex machine)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797955B1 (en) 2003-01-30 2004-09-28 Kla-Tencor Technologies Corporation Filtered e-beam inspection and review
US7019292B1 (en) 2004-06-15 2006-03-28 Kla-Tencor Technologies Corporation E-beam detection of defective contacts/vias with flooding and energy filter
EP1703537B9 (en) * 2005-03-17 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Analysing system and charged particle beam device
JP6581940B2 (ja) * 2016-04-15 2019-09-25 株式会社日立ハイテクノロジーズ 電子顕微鏡装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4669004A (en) * 1986-02-27 1987-05-26 Quantum Corporation High capacity disk file with embedded sector servo
US5311376A (en) * 1991-06-11 1994-05-10 Western Digital (Singapore) Pte Information detecting system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014130098A1 (en) * 2013-02-19 2014-08-28 Rodriguez Lester Manuel Apparatus for sexual activities (the grey sex machine)

Also Published As

Publication number Publication date
WO1996008835A1 (en) 1996-03-21

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