TW278313B - - Google Patents

Info

Publication number
TW278313B
TW278313B TW84109271A TW84109271A TW278313B TW 278313 B TW278313 B TW 278313B TW 84109271 A TW84109271 A TW 84109271A TW 84109271 A TW84109271 A TW 84109271A TW 278313 B TW278313 B TW 278313B
Authority
TW
Taiwan
Application number
TW84109271A
Other languages
Chinese (zh)
Original Assignee
Seikosya Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosya Kk filed Critical Seikosya Kk
Application granted granted Critical
Publication of TW278313B publication Critical patent/TW278313B/zh

Links

TW84109271A 1994-03-31 1995-09-06 TW278313B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6063057A JP2810911B2 (ja) 1994-03-31 1994-03-31 露光装置

Publications (1)

Publication Number Publication Date
TW278313B true TW278313B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1996-06-11

Family

ID=13218338

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84109271A TW278313B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-03-31 1995-09-06

Country Status (2)

Country Link
JP (1) JP2810911B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW278313B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831620B1 (ko) * 2006-12-29 2008-05-27 (주)엔에스 필름 낱장공급장치
JP2008216433A (ja) * 2007-03-01 2008-09-18 Adtec Engineeng Co Ltd 露光装置
JP5004786B2 (ja) * 2007-12-27 2012-08-22 株式会社オーク製作所 露光装置の反転部
JP2010182997A (ja) * 2009-02-09 2010-08-19 Seiko Instruments Inc ウエハ露光装置及びウエハ露光方法
CN107130379A (zh) * 2017-07-17 2017-09-05 太仓秦风广告传媒有限公司 一种自动检测与清理异物的印染轧车
CN110376853A (zh) * 2019-08-27 2019-10-25 爱司凯科技股份有限公司 高精度全自动双面曝光机
JP7004331B2 (ja) * 2019-12-10 2022-01-21 株式会社レヨーン工業 露光機の除塵装置

Also Published As

Publication number Publication date
JP2810911B2 (ja) 1998-10-15
JPH07271048A (ja) 1995-10-20

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