TW278202B - - Google Patents

Info

Publication number
TW278202B
TW278202B TW84112408A TW84112408A TW278202B TW 278202 B TW278202 B TW 278202B TW 84112408 A TW84112408 A TW 84112408A TW 84112408 A TW84112408 A TW 84112408A TW 278202 B TW278202 B TW 278202B
Authority
TW
Taiwan
Application number
TW84112408A
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6238477A external-priority patent/JPH0878347A/ja
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW278202B publication Critical patent/TW278202B/zh

Links

TW84112408A 1994-09-06 1995-11-22 TW278202B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6238477A JPH0878347A (ja) 1994-09-06 1994-09-06 エピタキシャル成長装置のサセプタ

Publications (1)

Publication Number Publication Date
TW278202B true TW278202B (zh) 1996-06-11

Family

ID=51397439

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84112408A TW278202B (zh) 1994-09-06 1995-11-22

Country Status (1)

Country Link
TW (1) TW278202B (zh)

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