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An integrated circuit having an active device electrically connected to a capacitor employing a thin film dielectric region of BaxTiyOz with the values of X, Y and Z being in the approximate ratios of 2, 9 and 20, respectively. The capacitor of such an integrated circuit has compact dimensions, low leakage flux and a nearly linear capacitance over a broad frequency and biasing voltage range.
TW84108869A1995-06-071995-08-25Integrated circuit with linear thin film capacitor
TW275716B
(en)