TW271491B - Fabricating process for chip with fluoro-oxide - Google Patents

Fabricating process for chip with fluoro-oxide

Info

Publication number
TW271491B
TW271491B TW84108012A TW84108012A TW271491B TW 271491 B TW271491 B TW 271491B TW 84108012 A TW84108012 A TW 84108012A TW 84108012 A TW84108012 A TW 84108012A TW 271491 B TW271491 B TW 271491B
Authority
TW
Taiwan
Prior art keywords
chip
fluoro
oxide
fabricating process
fetching
Prior art date
Application number
TW84108012A
Other languages
Chinese (zh)
Inventor
Wei-Shin Lu
Jenn-Gwo Hwu
Original Assignee
Nat Science Committee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Committee filed Critical Nat Science Committee
Priority to TW84108012A priority Critical patent/TW271491B/en
Application granted granted Critical
Publication of TW271491B publication Critical patent/TW271491B/en

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  • Formation Of Insulating Films (AREA)

Abstract

A fabricating process for chip with fluoro-oxide comprises the steps of: preparing one chip; growing one fluoro-oxide layer on the chip by depositing; putting the chip into one high thermal processor to perform oxidization to the fluoro-oxide by applying high temperature; fetching the chip.
TW84108012A 1995-08-01 1995-08-01 Fabricating process for chip with fluoro-oxide TW271491B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84108012A TW271491B (en) 1995-08-01 1995-08-01 Fabricating process for chip with fluoro-oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84108012A TW271491B (en) 1995-08-01 1995-08-01 Fabricating process for chip with fluoro-oxide

Publications (1)

Publication Number Publication Date
TW271491B true TW271491B (en) 1996-03-01

Family

ID=51397047

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84108012A TW271491B (en) 1995-08-01 1995-08-01 Fabricating process for chip with fluoro-oxide

Country Status (1)

Country Link
TW (1) TW271491B (en)

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Legal Events

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