TW270242B - Enclosure layer process - Google Patents

Enclosure layer process

Info

Publication number
TW270242B
TW270242B TW83109785A TW83109785A TW270242B TW 270242 B TW270242 B TW 270242B TW 83109785 A TW83109785 A TW 83109785A TW 83109785 A TW83109785 A TW 83109785A TW 270242 B TW270242 B TW 270242B
Authority
TW
Taiwan
Prior art keywords
layer
enclosure layer
gate
enclosure
layer process
Prior art date
Application number
TW83109785A
Other languages
Chinese (zh)
Inventor
Jing-Miin Hwang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW83109785A priority Critical patent/TW270242B/en
Application granted granted Critical
Publication of TW270242B publication Critical patent/TW270242B/en

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Abstract

An enclosure layer process by removing field emitter device directly comprises: forming gate emitter on substrate, in which there are cathode, one isolation layer, gate layer, silicon tips and silicon enclosure layer; nitrogen high temperature annealing; biasing the above gate and/or the above cathode; etching the above enclosure layer with alkaline solution.
TW83109785A 1994-10-19 1994-10-19 Enclosure layer process TW270242B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83109785A TW270242B (en) 1994-10-19 1994-10-19 Enclosure layer process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83109785A TW270242B (en) 1994-10-19 1994-10-19 Enclosure layer process

Publications (1)

Publication Number Publication Date
TW270242B true TW270242B (en) 1996-02-11

Family

ID=51396998

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83109785A TW270242B (en) 1994-10-19 1994-10-19 Enclosure layer process

Country Status (1)

Country Link
TW (1) TW270242B (en)

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