TW269737B - - Google Patents

Info

Publication number
TW269737B
TW269737B TW083109101A TW83109101A TW269737B TW 269737 B TW269737 B TW 269737B TW 083109101 A TW083109101 A TW 083109101A TW 83109101 A TW83109101 A TW 83109101A TW 269737 B TW269737 B TW 269737B
Authority
TW
Taiwan
Application number
TW083109101A
Other languages
Chinese (zh)
Original Assignee
Sony Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5268904A external-priority patent/JPH07122478A/en
Application filed by Sony Co Ltd filed Critical Sony Co Ltd
Application granted granted Critical
Publication of TW269737B publication Critical patent/TW269737B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
TW083109101A 1993-10-27 1994-10-01 TW269737B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5268904A JPH07122478A (en) 1993-10-27 1993-10-27 Pattern projection method

Publications (1)

Publication Number Publication Date
TW269737B true TW269737B (en) 1996-02-01

Family

ID=51396956

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083109101A TW269737B (en) 1993-10-27 1994-10-01

Country Status (2)

Country Link
KR (1) KR100297910B1 (en)
TW (1) TW269737B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2039600A1 (en) * 2007-09-19 2009-03-25 HONDA MOTOR CO., Ltd. Motorcycle

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3102076B2 (en) * 1991-08-09 2000-10-23 キヤノン株式会社 Illumination device and projection exposure apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2039600A1 (en) * 2007-09-19 2009-03-25 HONDA MOTOR CO., Ltd. Motorcycle

Also Published As

Publication number Publication date
KR100297910B1 (en) 2001-10-24
KR950012573A (en) 1995-05-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees