TW260620B - - Google Patents

Info

Publication number
TW260620B
TW260620B TW081105509A TW81105509A TW260620B TW 260620 B TW260620 B TW 260620B TW 081105509 A TW081105509 A TW 081105509A TW 81105509 A TW81105509 A TW 81105509A TW 260620 B TW260620 B TW 260620B
Authority
TW
Taiwan
Application number
TW081105509A
Original Assignee
Nippon Paionics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paionics Kk filed Critical Nippon Paionics Kk
Application granted granted Critical
Publication of TW260620B publication Critical patent/TW260620B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic System
    • C07F5/06—Aluminium compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4402—Reduction of impurities in the source gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic System
    • C07F3/06—Zinc compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic System
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic System
    • C07F5/06—Aluminium compounds
    • C07F5/061—Aluminium compounds with C-aluminium linkage
    • C07F5/062—Al linked exclusively to C
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
TW081105509A 1991-07-17 1992-07-13 TW260620B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26812191 1991-07-17
JP26812291 1991-07-17

Publications (1)

Publication Number Publication Date
TW260620B true TW260620B (zh) 1995-10-21

Family

ID=26548176

Family Applications (1)

Application Number Title Priority Date Filing Date
TW081105509A TW260620B (zh) 1991-07-17 1992-07-13

Country Status (5)

Country Link
US (1) US5470555A (zh)
EP (1) EP0523525B1 (zh)
KR (1) KR0150470B1 (zh)
DE (1) DE69202014T2 (zh)
TW (1) TW260620B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69421249T2 (de) * 1993-12-14 2000-07-13 Sumitomo Chemical Co Verfahren zur Entfernung von Sauerstoff-enthaltenden Verunreinigungen aus Organo-Gallium oder -Indium Verbindungen
DE1001049T1 (de) * 1998-11-13 2000-11-02 Epichem Ltd Verfahren zur Reinigung von organometallischen Verbindungen
US6447576B1 (en) * 1999-10-29 2002-09-10 Japan Pionics Co., Ltd. Cleaning agent and cleaning process of harmful gas
TW510820B (en) * 1999-11-30 2002-11-21 Japan Pionics Method of cleaning of harmful gas and cleaning apparatus
JP4073146B2 (ja) * 2000-03-17 2008-04-09 株式会社高純度化学研究所 ガリウムアルコキシドの精製方法
TW550307B (en) * 2000-04-19 2003-09-01 Getters Spa A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys
AU5255001A (en) * 2000-04-19 2001-10-30 Saes Getters S.P.A. A process for the purification of organometallic compounds or heteroatomic organic compounds with a palladium-based catalyst
WO2001079586A1 (en) * 2000-04-19 2001-10-25 Saes Getters S.P.A. A process for the purification of organometallic compounds or heteroatomic organic compounds with a catalyst based on iron and manganese supported on zeolites
US6911065B2 (en) * 2002-12-26 2005-06-28 Matheson Tri-Gas, Inc. Method and system for supplying high purity fluid
GB2432364B (en) * 2005-11-18 2009-11-11 Rohm & Haas Elect Mat Organometallic compound purification
EP3207976B1 (en) 2012-02-10 2021-06-30 Entegris, Inc. Gas purifier
WO2014105272A1 (en) * 2012-12-31 2014-07-03 Albemarle Corporation Oxygenate removal from organometallic compounds

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2144497A (en) * 1935-11-21 1939-01-17 Westinghouse Electric & Mfg Co Process for freeing gas of oxygen
US2351167A (en) * 1941-10-04 1944-06-13 Du Pont Removal of oxygen from normally gaseous olefins
US3852406A (en) * 1967-06-20 1974-12-03 Messer Griesheim Gmbh Method of removing oxygen from gases
JPS506440A (zh) * 1973-05-17 1975-01-23
US4034062A (en) * 1975-03-20 1977-07-05 Borden, Inc. Removal of oxygen from gas stream with copper catalyst
JPS60209249A (ja) * 1984-04-02 1985-10-21 Olympus Optical Co Ltd 工業用原料ガスの純化剤，その製造方法およびその使用方法
US4713224A (en) * 1986-03-31 1987-12-15 The Boc Group, Inc. One-step process for purifying an inert gas
DE3618942A1 (de) * 1986-06-05 1987-12-10 Messer Griesheim Gmbh Masse zur entfernung durch chemiesorption von homogen geloesten beimengungen, insbesondere sauerstoff, aus gasen oder fluessigkeiten
US4772296A (en) * 1987-05-12 1988-09-20 Eagle-Picher Industries, Inc. Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films
JP2732262B2 (ja) * 1988-09-26 1998-03-25 日本パイオニクス株式会社 アルシンの精製方法
KR960010082B1 (ko) * 1988-09-26 1996-07-25 니혼 파이오닉스 가부시끼가이샤 기체성 수소화물의 정제방법
JP2700412B2 (ja) * 1989-06-08 1998-01-21 日本パイオニクス株式会社 水素化物ガスの精製方法
US5356672A (en) * 1990-05-09 1994-10-18 Jet Process Corporation Method for microwave plasma assisted supersonic gas jet deposition of thin films
JPH04318920A (ja) * 1991-04-17 1992-11-10 Mitsubishi Electric Corp 気相結晶成長装置

Also Published As

Publication number Publication date
EP0523525A1 (en) 1993-01-20
DE69202014T2 (de) 1995-08-31
EP0523525B1 (en) 1995-04-12
US5470555A (en) 1995-11-28
KR930002360A (ko) 1993-02-23
KR0150470B1 (ko) 1998-10-15
DE69202014D1 (de) 1995-05-18

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