TW258697B - Process of removal for polyimide resin - Google Patents

Process of removal for polyimide resin

Info

Publication number
TW258697B
TW258697B TW83109158A TW83109158A TW258697B TW 258697 B TW258697 B TW 258697B TW 83109158 A TW83109158 A TW 83109158A TW 83109158 A TW83109158 A TW 83109158A TW 258697 B TW258697 B TW 258697B
Authority
TW
Taiwan
Prior art keywords
polyimide resin
metal salts
removal
polyimide
coating
Prior art date
Application number
TW83109158A
Other languages
Chinese (zh)
Inventor
Jiann-Huei Lii
Syh-Ming Her
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW83109158A priority Critical patent/TW258697B/en
Application granted granted Critical
Publication of TW258697B publication Critical patent/TW258697B/en

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)

Abstract

A process of removal for polyimide resin, which comprises the steps of: (1) coating first layer of polyimide resin on a substrate; (2) coating polyimide resin blended with metal salts on the area where etching is to take place on the first layer of polyimide resin; (3) undergoing baking to convert the polyimide resin blended with metal salts in the first and second layers of polyimide resin into polyimide complex containing metal salts; (4) using chemical etching or mechanical means to remove the polyimide complex area containing the metal salts.
TW83109158A 1994-09-30 1994-09-30 Process of removal for polyimide resin TW258697B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83109158A TW258697B (en) 1994-09-30 1994-09-30 Process of removal for polyimide resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83109158A TW258697B (en) 1994-09-30 1994-09-30 Process of removal for polyimide resin

Publications (1)

Publication Number Publication Date
TW258697B true TW258697B (en) 1995-10-01

Family

ID=51401762

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83109158A TW258697B (en) 1994-09-30 1994-09-30 Process of removal for polyimide resin

Country Status (1)

Country Link
TW (1) TW258697B (en)

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