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A process of removal for polyimide resin, which comprises the steps of: (1) coating first layer of polyimide resin on a substrate; (2) coating polyimide resin blended with metal salts on the area where etching is to take place on the first layer of polyimide resin; (3) undergoing baking to convert the polyimide resin blended with metal salts in the first and second layers of polyimide resin into polyimide complex containing metal salts; (4) using chemical etching or mechanical means to remove the polyimide complex area containing the metal salts.
TW83109158A1994-09-301994-09-30Process of removal for polyimide resin
TW258697B
(en)