TW246739B - Method of controlling critical dimension - Google Patents
Method of controlling critical dimensionInfo
- Publication number
- TW246739B TW246739B TW83111986A TW83111986A TW246739B TW 246739 B TW246739 B TW 246739B TW 83111986 A TW83111986 A TW 83111986A TW 83111986 A TW83111986 A TW 83111986A TW 246739 B TW246739 B TW 246739B
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- layer
- critical dimension
- sub
- film
- Prior art date
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
A method of controlling critical dimension includes the following steps: 1. supplying one first thin film layer; 2. forming at least one sub-thin film layer with same material as the first film film on the first thin film surface, and the reflectivity of the first thin film and each layer of sub-thin film decreasing from top to down; 3. coating one phtoresist layer on top layer surface of sub-thin film, and the reflectivity of the photoresist less than that of top layer of the thin film; 4. implementing exposure, development on the photoresist to form needed pattern.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83111986A TW246739B (en) | 1994-12-21 | 1994-12-21 | Method of controlling critical dimension |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW83111986A TW246739B (en) | 1994-12-21 | 1994-12-21 | Method of controlling critical dimension |
Publications (1)
Publication Number | Publication Date |
---|---|
TW246739B true TW246739B (en) | 1995-05-01 |
Family
ID=51401149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW83111986A TW246739B (en) | 1994-12-21 | 1994-12-21 | Method of controlling critical dimension |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW246739B (en) |
-
1994
- 1994-12-21 TW TW83111986A patent/TW246739B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |