TW246739B - Method of controlling critical dimension - Google Patents

Method of controlling critical dimension

Info

Publication number
TW246739B
TW246739B TW83111986A TW83111986A TW246739B TW 246739 B TW246739 B TW 246739B TW 83111986 A TW83111986 A TW 83111986A TW 83111986 A TW83111986 A TW 83111986A TW 246739 B TW246739 B TW 246739B
Authority
TW
Taiwan
Prior art keywords
thin film
layer
critical dimension
sub
film
Prior art date
Application number
TW83111986A
Other languages
Chinese (zh)
Inventor
Huoo-Tiee Lu
Der-Yuan Wu
Huey-Jing Chen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW83111986A priority Critical patent/TW246739B/en
Application granted granted Critical
Publication of TW246739B publication Critical patent/TW246739B/en

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A method of controlling critical dimension includes the following steps: 1. supplying one first thin film layer; 2. forming at least one sub-thin film layer with same material as the first film film on the first thin film surface, and the reflectivity of the first thin film and each layer of sub-thin film decreasing from top to down; 3. coating one phtoresist layer on top layer surface of sub-thin film, and the reflectivity of the photoresist less than that of top layer of the thin film; 4. implementing exposure, development on the photoresist to form needed pattern.
TW83111986A 1994-12-21 1994-12-21 Method of controlling critical dimension TW246739B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83111986A TW246739B (en) 1994-12-21 1994-12-21 Method of controlling critical dimension

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83111986A TW246739B (en) 1994-12-21 1994-12-21 Method of controlling critical dimension

Publications (1)

Publication Number Publication Date
TW246739B true TW246739B (en) 1995-05-01

Family

ID=51401149

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83111986A TW246739B (en) 1994-12-21 1994-12-21 Method of controlling critical dimension

Country Status (1)

Country Link
TW (1) TW246739B (en)

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees