TW244393B - - Google Patents

Info

Publication number
TW244393B
TW244393B TW082103376A TW82103376A TW244393B TW 244393 B TW244393 B TW 244393B TW 082103376 A TW082103376 A TW 082103376A TW 82103376 A TW82103376 A TW 82103376A TW 244393 B TW244393 B TW 244393B
Authority
TW
Taiwan
Application number
TW082103376A
Other languages
Chinese (zh)
Original Assignee
At & T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by At & T Corp filed Critical At & T Corp
Application granted granted Critical
Publication of TW244393B publication Critical patent/TW244393B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/061Manufacture or treatment of FETs having Schottky gates
    • H10D30/0612Manufacture or treatment of FETs having Schottky gates of lateral single-gate Schottky FETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D64/0125
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10P14/3416
    • H10P14/6336
    • H10P76/202
    • H10P76/204
    • H10P76/4085
TW082103376A 1993-02-26 1993-04-30 TW244393B (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2354793A 1993-02-26 1993-02-26

Publications (1)

Publication Number Publication Date
TW244393B true TW244393B (enExample) 1995-04-01

Family

ID=21815769

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082103376A TW244393B (enExample) 1993-02-26 1993-04-30

Country Status (4)

Country Link
EP (1) EP0613174A3 (enExample)
JP (1) JPH07135326A (enExample)
KR (1) KR940020595A (enExample)
TW (1) TW244393B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105023835B (zh) * 2015-06-17 2019-04-02 泰科天润半导体科技(北京)有限公司 介质掩膜的制造方法、利用该掩膜刻蚀或离子注入的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551905A (en) * 1982-12-09 1985-11-12 Cornell Research Foundation, Inc. Fabrication of metal lines for semiconductor devices
DE3609274A1 (de) * 1986-03-19 1987-09-24 Siemens Ag Verfahren zur herstellung eines selbstjustiert positionierten metallkontaktes
US4769343A (en) * 1987-07-17 1988-09-06 Allied-Signal Inc. Single step lift-off technique for submicron gates
FR2650120B1 (fr) * 1989-07-21 1991-09-20 Thomson Composants Microondes Procede de fabrication de grilles hyperfines

Also Published As

Publication number Publication date
KR940020595A (ko) 1994-09-16
EP0613174A2 (en) 1994-08-31
EP0613174A3 (en) 1995-03-01
JPH07135326A (ja) 1995-05-23

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