TW243544B - - Google Patents
Info
- Publication number
- TW243544B TW243544B TW082110602A TW82110602A TW243544B TW 243544 B TW243544 B TW 243544B TW 082110602 A TW082110602 A TW 082110602A TW 82110602 A TW82110602 A TW 82110602A TW 243544 B TW243544 B TW 243544B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H10P50/283—
-
- H10P95/064—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US99932792A | 1992-12-31 | 1992-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW243544B true TW243544B (en:Method) | 1995-03-21 |
Family
ID=25546198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW082110602A TW243544B (en:Method) | 1992-12-31 | 1993-12-14 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0607684A3 (en:Method) |
| JP (1) | JPH06232096A (en:Method) |
| TW (1) | TW243544B (en:Method) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4511430A (en) * | 1984-01-30 | 1985-04-16 | International Business Machines Corporation | Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process |
| US4545852A (en) * | 1984-06-20 | 1985-10-08 | Hewlett-Packard Company | Planarization of dielectric films on integrated circuits |
| US5006485A (en) * | 1988-12-09 | 1991-04-09 | U.S. Philips Corporation | Method of manufacturing an intergrated circuit including steps for forming interconnections between patterns formed at different levels |
| JP3092185B2 (ja) * | 1990-07-30 | 2000-09-25 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| US5378318A (en) * | 1992-06-05 | 1995-01-03 | Vlsi Technology, Inc. | Planarization |
-
1993
- 1993-12-14 TW TW082110602A patent/TW243544B/zh active
- 1993-12-15 EP EP93310123A patent/EP0607684A3/en not_active Withdrawn
- 1993-12-27 JP JP5330132A patent/JPH06232096A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| EP0607684A3 (en) | 1995-03-15 |
| JPH06232096A (ja) | 1994-08-19 |
| EP0607684A2 (en) | 1994-07-27 |