TW241373B - Liquid phase epitaxy growing boat - Google Patents

Liquid phase epitaxy growing boat

Info

Publication number
TW241373B
TW241373B TW83105461A TW83105461A TW241373B TW 241373 B TW241373 B TW 241373B TW 83105461 A TW83105461 A TW 83105461A TW 83105461 A TW83105461 A TW 83105461A TW 241373 B TW241373 B TW 241373B
Authority
TW
Taiwan
Prior art keywords
liquid phase
epitaxy
growing
phase epitaxy
chip
Prior art date
Application number
TW83105461A
Other languages
Chinese (zh)
Inventor
Jeong-Sheng Shyu
Been-Tzeng You
Ruey-Liang Perng
Jeng-Yeu Gau
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW83105461A priority Critical patent/TW241373B/en
Application granted granted Critical
Publication of TW241373B publication Critical patent/TW241373B/en

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A liquid phase epitaxy growing boat with vertical chip, which is suitable for growing at least one film solution epitaxy on at least one chip, includes at least one epitaxy growing tank, at least one chip vertically installed in the epitaxy growing tank and full growing solution to make chip grow epitaxy vertically.
TW83105461A 1994-06-16 1994-06-16 Liquid phase epitaxy growing boat TW241373B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83105461A TW241373B (en) 1994-06-16 1994-06-16 Liquid phase epitaxy growing boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83105461A TW241373B (en) 1994-06-16 1994-06-16 Liquid phase epitaxy growing boat

Publications (1)

Publication Number Publication Date
TW241373B true TW241373B (en) 1995-02-21

Family

ID=51400916

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83105461A TW241373B (en) 1994-06-16 1994-06-16 Liquid phase epitaxy growing boat

Country Status (1)

Country Link
TW (1) TW241373B (en)

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