TW202425174A - Substrate processing apparatus and substrate processing method - Google Patents

Substrate processing apparatus and substrate processing method Download PDF

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Publication number
TW202425174A
TW202425174A TW112138585A TW112138585A TW202425174A TW 202425174 A TW202425174 A TW 202425174A TW 112138585 A TW112138585 A TW 112138585A TW 112138585 A TW112138585 A TW 112138585A TW 202425174 A TW202425174 A TW 202425174A
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TW
Taiwan
Prior art keywords
substrate processing
processing apparatus
processing method
substrate
processing
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Application number
TW112138585A
Other languages
Chinese (zh)
Inventor
徐柱賢
Original Assignee
南韓商細美事有限公司
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Publication date
Application filed by 南韓商細美事有限公司 filed Critical 南韓商細美事有限公司
Publication of TW202425174A publication Critical patent/TW202425174A/en

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TW112138585A 2022-11-30 2023-10-06 Substrate processing apparatus and substrate processing method TW202425174A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2022-0164396 2022-11-30

Publications (1)

Publication Number Publication Date
TW202425174A true TW202425174A (en) 2024-06-16

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