TW202414508A - Electrodeless eximer lamp - Google Patents

Abstract

The present invention relates to an Electrodeless Eximer lamp. In more detail, the Electrodeless Eximer lamp of the present invention is a sealed structure sealed with an inert gas, characterized in that it comprises a discharge section that releases vacuum ultraviolet radiation through discharge generated by high-frequency (RF) electricity; a high voltage application part, which is equipped with a high voltage (HV) for connecting the excimer lamp to start with high-frequency power; and a getter containing portion, which is used for preparing getter substances for removing impurities in the excimer lamp; wherein the Electrodeless eximer lamp can achieve high-power driving without operation delay through an endless discharge form.

Description

Electrodeless Excimer Lamp

The present invention relates to an electrodeless excimer lamp, and more particularly, to an electrodeless excimer lamp included in an anti-static device using an excimer lamp and used for high-power driving without operation delay.

In order to prevent problems such as device damage caused by fine dust adhesion or static electricity in advance, anti-static devices are generally installed in various substrates such as LCD, OLED, chips, or various materials such as sheet structures or various thin film structures, or in product processing procedures.

On the other hand, with the recent further sophistication of LCD, OLED, and transistor technology, the number of processes performed in a reduced-pressure vacuum environment, such as deposition processes or processes in a vacuum chamber, or processes performed in special environments such as handling inert gas has increased significantly. At this time, unlike under atmospheric pressure, X-ray irradiation devices are difficult to use in the above special environments due to their low static elimination performance. Corona discharge devices have problems such as spattering caused by high-voltage discharge and inconvenience caused by ion balance adjustment, making them difficult to use.

In order to improve this problem, the applicant proposed the invention of Korean Patent No. 10-2065347 "Anti-static Device Using Vacuum Ultraviolet Rays". In the patent, the anti-static function is performed by connecting to a vacuum chamber and irradiating vacuum ultraviolet rays to improve the problem. However, this conventional anti-static device using vacuum ultraviolet rays is a filament type, and the filament has a problem of requiring a preheating time in order to release thermal electrons.

In addition, in order to solve the problem of requiring preheating time to release the thermal electrons and the problem of not being able to turn on/off control in real time due to the preheating time, the applicant proposed the invention of Korean Patent No. 10-2022-0072418 "Anti-static device using an excimer lamp". In the patent, there is no filament (heat source) in the luminescence process, and the excimer lamp can be used to irradiate vacuum ultraviolet rays to perform the anti-static function. The excimer lamp is a sealed structure in which an inert gas is sealed, that is, the lamp can emit light with the help of an external electrode without preheating time.

Meanwhile, as shown in FIGS. 1 and 2 , an antistatic device 1 using an excimer lamp is being developed, which is roughly composed of a head 2 and a lamp holder 3, and includes an excimer lamp 4 inside the head 2. The excimer lamp 4 is a straight-line lamp structure, which is improved by an electrodeless excimer lamp structure so that real-time on/off control can be performed without a warm-up time. However, the excimer lamp 4 of this structure is not suitable for high power, and in particular, if a high voltage is applied for high power, there is a problem that getter substances are scattered due to the high voltage and become impurities.

[Prior art literature] [Patent literature] (Patent literature 1) Korean patent No. 10-2065347 (2020.01.07) (Patent literature 2) Korean patent publication No. 10-2022-0072418 (2022.06.02)

Technical topic The purpose of the present invention is to provide an electrodeless excimer lamp that can be driven at high power without operating delay to solve the above-mentioned problems. In addition, the present invention aims to provide an electrodeless excimer lamp that can solve the problem that when high frequency (RF) power is applied for high power and high voltage (HV) is applied for applying high frequency power, the getter (getter) as a metal substance is scattered due to the application of high voltage and becomes impurities, thereby causing low charge removal efficiency. The purpose of the present invention is not limited to the above-mentioned purpose, and other purposes not mentioned can be clearly understood by technical personnel in the field of technology of the present invention from the following description.

Technical solution In order to achieve the above-mentioned purpose, the electrodeless excimer lamp of the present invention is a closed structure enclosed in an inert gas, and is characterized in that it includes: a discharge section, which releases vacuum ultraviolet rays by means of discharge generated by high-frequency (RF) electricity; a high-voltage application section, which is equipped with a high voltage (HV) required for connecting to the high-frequency electricity to start the excimer lamp; and a getter storage section, which is used to configure a getter material for removing impurities in the excimer lamp; wherein the electrodeless excimer lamp can achieve high-power drive without operation delay through the electrodeless discharge form.

In addition, it is characterized in that the high voltage applying part and the getter storage part are separated from each other. In addition, it is characterized in that the discharge part is arranged to be parallel or side by side with the high voltage applying part or the getter storage part. In addition, it is characterized in that the discharge part includes a first external electrode for receiving high-frequency power from a high-frequency generating device. In addition, it is characterized in that the high voltage applying part includes a second external electrode for receiving high-voltage power from a voltage generating device.

Effect of the invention The electrodeless excimer lamp of the present invention can realize high-power electrodeless discharge using high-frequency (RF) power, thereby having the effect of realizing high-power drive without operation delay. In addition, the electrodeless excimer lamp of the present invention is configured so that the high voltage application part and the getter storage part are separated from each other, which has the effect of solving the problem that the getter (getter) as a metal substance is scattered due to discharge and becomes impurities, thereby causing the de-static efficiency to decrease.

The advantages and features of the present invention and the methods for realizing them will become clear with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and can be realized in various forms that are different from each other. The embodiments are only provided to make the disclosure of the present invention more complete and to fully inform the technical personnel in the technical field to which the present invention belongs of the scope of the invention. The present invention is only defined by the scope of the claims.

The specific contents for implementing the present invention are described in detail below with reference to the accompanying drawings. Regardless of the accompanying drawings, the same component labels refer to the same constituent elements, and "and/or" includes all combinations of the mentioned items and more than one.

Although the terms "first" and "second" are used to describe various components, these components are certainly not limited by these terms. These terms are only used to distinguish one component from other components. Therefore, the first component mentioned below can also be the second component within the scientific and technological concept of the present invention.

The terms used in this specification are used to describe the embodiments and are not intended to limit the present invention. In this specification, as long as there is no special mention in the sentence, the singular also includes the plural. The use of "comprises" and/or "comprising" in the specification does not exclude the existence or addition of one or more other constituent elements in addition to the mentioned constituent elements.

If there is no different definition, all terms (including technical terms and scientific terms) used in this specification can be used as the meaning that can be commonly understood by technical personnel in the technical field to which the present invention belongs. In addition, the terms defined in the dictionary in general use shall not be interpreted too much or excessively unless they are clearly defined.

The preferred embodiments of the present invention are described in detail below with reference to the attached drawings. FIG. 3 is a perspective view showing an anti-static device using the electrodeless excimer lamp of the first embodiment of the present invention, and FIG. 4 is an exploded perspective view showing an anti-static device using the electrodeless excimer lamp of the first embodiment of the present invention.

First, referring to FIG. 3 and FIG. 4 , the electrodeless excimer lamp 100 of the present invention is equipped inside an anti-static device using an excimer lamp, wherein the excimer lamp is roughly composed of a head 10 and a lamp holder 20. Preferably, a housing space for housing the electrodeless excimer lamp 100 is formed inside the head 10, and the electrodeless excimer lamp 100 is inserted and installed in the housing space to play a role in irradiating vacuum ultraviolet rays to a charged body.

The electrodeless excimer lamp 100 of the present invention has an electrodeless structure without an electrode inside, and a discharge space is formed by a closed structure (vacuum structure) in which an inert gas is sealed, so that the gas can be used as a light source to emit light without a warm-up time.

The electrodeless excimer lamp 100 of the present invention, for example, as shown in the figure, may include an "H"-shaped discharge tube and an external electrode. The shape of the discharge tube may be partially deformed according to the specification or form of the static elimination device.

The discharge tube can be made of a dielectric through a conventional dielectric manufacturing process such as ceramics. The dielectric is based on a ceramic material having both electrical insulation and dielectric properties, and can be made of quartz, glass, aluminum oxide, titanium oxide, magnesium oxide, silicon oxide, silver phosphate, silicon carbide, indium oxide, cadmium oxide, bismuth oxide, zinc oxide, iron oxide, lead zirconate titanate, carbon nanotubes, etc.

FIG. 5 is a perspective view showing the polar excimer lamp of the first embodiment of the present invention, and FIG. 6 is a simplified structural diagram for describing the polar excimer lamp of the first embodiment of the present invention. The polar excimer lamp 100 of the present invention is described in more detail below with reference to FIG. 5 and FIG. 6. Referring to FIG. 5 and FIG. 6, the polar excimer lamp 100 of the present invention generally includes a discharge portion 110, a high voltage application portion 120, and a getter storage portion 130.

First, the discharge portion 110 refers to a portion that emits vacuum ultraviolet rays by discharge generated by high frequency power (RF power).

The discharge part 110 is formed with a first external electrode 111, and the first external electrode 111 is used to receive high-frequency power from a high-frequency generating device in the anti-static device.

The high frequency generating device is used to generate high frequency (RF) by receiving a voltage from an external voltage generating device, and is arranged to be located at one side of the interior of the lamp holder 20 .

The first external electrode 111 may be formed into a cylindrical shape by a conductive material such as a net or a thin plate surrounding the discharge portion 110 .

The first external electrode 111 is not limited to a cylindrical shape and can be made of a metal material such as aluminum. Therefore, high-frequency power is connected from the high-frequency generating device through the first external electrode 110, and the reciprocating motion of electrons causes frequent collision ionization, making it easy to maintain discharge from the high-frequency region.

Next, the high voltage applying unit 120 refers to a portion provided for receiving a high voltage (HV) for starting the excimer lamp with high-frequency power. In other words, it refers to a starting voltage for driving the electrodeless excimer lamp 100 .

The high voltage applying part 120 is formed with a second external electrode 121 for receiving a high voltage (HV) from an external high voltage generating device.

The second external electrode 121 is different from the first external electrode 111 in function only, but has the same structure, so it will not be described in detail.

Therefore, the electrodeless excimer lamp 100 of the present invention is driven by connecting a starting voltage to the high voltage applying part 120 through the second external electrode 121 and connecting a high-frequency power higher than the starting voltage to the discharge part 110 through the first external electrode 111.

Therefore, discharge plasma is generated in the discharge space of the electrodeless excimer lamp 100, and the inert gas sealed in the discharge space forms excimers (excited state), and ultraviolet light with a wavelength of 100 to 200 nm (plasma) is radiated when the excimers migrate to the ground state.

At this time, the impedance between the high-frequency power and the electrodeless excimer lamp 100 will change greatly. The impedance characteristics between the two points will affect the performance, life and power efficiency of the product.

The factor that determines the impedance is determined by the capacitance and inductance values. According to the corresponding specific impedance standard, in order to perform fine adjustment, it is preferred to construct an impedance matching circuit as shown in FIG. 6 so as to add a trimmer capacitor with adjustable capacitance to perform impedance adjustment of the electrodeless excimer lamp 100.

If this impedance matching is not performed, problems such as shortened product life, excessive power consumption, and heat generation may occur due to excessive reflected waves.

Next, the getter container 130 refers to a portion for containing a getter substance 131 for removing impurities in the electrodeless excimer lamp 100 .

The getter material 131 may be made of metal materials such as magnesium, barium, and barium alloys that have a significant gas absorbing property, but is not limited thereto.

The getter material 131 can absorb impurity gases in the discharge space, and has the effect of improving the vacuum degree or the purity of the sealed inert gas.

On the other hand, the high voltage applying part 120 and the getter containing part 130 of the excimer-free lamp 100 of the present invention are formed to be separated from each other.

This is because, for example, in a conventional inline excimer lamp where a getter material is contained together or the second external electrode 121 to which a high voltage is applied is in close contact with the getter material, when discharge occurs due to application of a high voltage, the getter material, which is a metal material, will scatter and become impurities in the discharge space.

Therefore, as shown in FIG. 5 or FIG. 6 , it is preferred but not limited to that the discharge unit 110 , the high voltage applying unit 120 and the getter containing unit 130 are arranged parallel to or side by side with each other.

FIG. 7 is a simplified configuration diagram for describing an electrodeless excimer lamp according to a second embodiment of the present invention, and FIG. 8 is a simplified configuration diagram for describing an electrodeless excimer lamp according to a third embodiment of the present invention.

For example, as shown in FIG. 7 or FIG. 8 , if the getter housing portion 130 is separated from the high voltage applying portion 120 , the same effect can be achieved.

More specifically, as shown in FIG. 7 , in order to solve the problem of scattering of the getter substance 131, the getter containing parts 130 may be formed to be spaced apart from each other on the high voltage applying part 120 side within a range where the getter substance 131 does not scatter.

In addition, as shown in FIG. 8 , the getter container 130 may be formed in a partially protruding shape on the discharge portion 110 .

At this time, the high voltage applying part 120 is formed on the discharge part 110 side to be separated from the getter accommodating part 130. FIG. 8 is only an example and is not limited thereto, and the getter accommodating part 130 may protrude from the discharge part 110 in various forms.

FIG. 9 is a simplified configuration diagram for describing a fourth embodiment of the present invention, and FIG. 10 is a simplified configuration diagram for describing a fifth embodiment of the present invention.

On the other hand, the opposite of the shape shown in FIG8 is not excluded. Referring to FIG9 and FIG10, the high voltage applying part 120 can be formed in a partially protruding shape on the discharge part 110, and the getter containing part 130 can be formed on the side of the discharge part 110. This means that the high voltage applying part 120 and the getter containing part 130 can be formed separately so that the getter substance 131 does not scatter.

That is, in the electrodeless excimer lamp of the present invention, the discharge section 110, the high voltage applying section 120 and the getter containing section 130 can be formed in various shapes, and configured so that the discharge section 110 and the high voltage applying section 120 or the getter containing section 130 are parallel or side by side with each other, so that the problem of scattering of the getter substance 131 can be solved, which means that it can be formed in a shape other than that shown in the attached figure.

FIG. 11 is a simplified configuration diagram for describing the electrodeless excimer lamp of the sixth embodiment of the present invention. On the other hand, referring to FIG. 11, in the electrodeless excimer lamp of the present invention, the high voltage applying portion 120 and the getter accommodating portion 130 can be formed on the discharge portion 110 side and can be formed to be separated from each other so that the getter material 131 does not scatter.

This means that in the excimer lamp of the present invention, the discharge portion 110 and the high voltage applying portion 120 or the getter containing portion 130 may not be arranged in parallel or side by side with each other.

The result means that in the electrodeless excimer lamp of the present invention, the high voltage applying part 120 and the getter containing part 130 are separated from each other and can be driven within the range where the getter substance 131 is not scattered due to discharge. In the electrodeless excimer lamp of the present invention, as long as the high voltage applying part 120 and the getter containing part 130 are separated from each other within the range where the getter substance 131 is not scattered due to the shape, specifications, etc. of the anti-static device, its structure can be partially changed.

The embodiments of the present invention are described above with reference to the accompanying drawings, but those skilled in the art in the field of technology to which the present invention belongs can understand that the present invention can be implemented in other specific forms without changing its scientific and technological ideas or essential features. Therefore, the embodiments described above should be understood in all aspects as merely illustrative and not restrictive.

100: Electrodeless excimer lamp of the present invention 110: Discharge section 111: First external electrode 120: High voltage application section 121: Second external electrode 130: Getter storage section 131: Getter material

FIG. 1 is a perspective view showing an anti-static device using an excimer lamp being developed by the present applicant. FIG. 2 is a perspective view showing an anti-static device using an excimer lamp being developed by the present applicant. FIG. 3 is a perspective view showing an anti-static device using an electrodeless excimer lamp of the first embodiment of the present invention. FIG. 4 is an exploded perspective view showing an anti-static device using an electrodeless excimer lamp of the first embodiment of the present invention. FIG. 5 is a perspective view showing an electrodeless excimer lamp of the first embodiment of the present invention. FIG. 6 is a simplified structural diagram for describing the electrodeless excimer lamp of the first embodiment of the present invention. FIG. 7 is a simplified structural diagram for describing the electrodeless excimer lamp of the second embodiment of the present invention. FIG8 is a simplified configuration diagram for describing the polarless excimer lamp of the third embodiment of the present invention. FIG9 is a simplified configuration diagram for describing the polarless excimer lamp of the fourth embodiment of the present invention. FIG10 is a simplified configuration diagram for describing the polarless excimer lamp of the fifth embodiment of the present invention. FIG11 is a simplified configuration diagram for describing the polarless excimer lamp of the sixth embodiment of the present invention.

100: The electrodeless excimer lamp of the present invention

110: Discharge Department

111: first external electrode

120: High voltage application unit

121: Second external electrode

130: Inhalant container

Claims (5)

A kind of electrodeless excimer lamp, which is a closed structure enclosed with an inert gas, comprising: a discharge section, which releases vacuum ultraviolet rays by means of discharge generated by high frequency (RF) power; a high voltage applying section, which is equipped for receiving the high voltage (HV) required to start the excimer lamp with high frequency power; and a getter storage section, which is provided with a getter material for removing impurities in the excimer lamp; wherein the electrodeless excimer lamp can achieve high power drive without operation delay through the electrodeless discharge form. According to the electrodeless excimer lamp described in claim 1, the high voltage application part and the getter storage part are formed separately from each other. According to the electrodeless excimer lamp described in claim 1, the discharge section is arranged to be parallel or side by side with the high voltage application section or the getter storage section. According to the electrodeless excimer lamp described in claim 1, the discharge section includes a first external electrode for receiving high-frequency power from a high-frequency generating device. According to the electrodeless excimer lamp described in claim 1, the high voltage applying section includes a second external electrode for receiving high voltage power from a voltage generating device.