TW202405410A - 檢查系統 - Google Patents

檢查系統 Download PDF

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Publication number
TW202405410A
TW202405410A TW112121644A TW112121644A TW202405410A TW 202405410 A TW202405410 A TW 202405410A TW 112121644 A TW112121644 A TW 112121644A TW 112121644 A TW112121644 A TW 112121644A TW 202405410 A TW202405410 A TW 202405410A
Authority
TW
Taiwan
Prior art keywords
lens
light
inspection
article
inspection system
Prior art date
Application number
TW112121644A
Other languages
English (en)
Chinese (zh)
Inventor
原口一馬
田中泰資
高橋翔馬
山田和宏
田中康弘
羽根田匠
藤井秋希良
Original Assignee
日商松下知識產權經營股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商松下知識產權經營股份有限公司 filed Critical 日商松下知識產權經營股份有限公司
Publication of TW202405410A publication Critical patent/TW202405410A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW112121644A 2022-07-01 2023-06-09 檢查系統 TW202405410A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022106814 2022-07-01
JP2022-106814 2022-07-01

Publications (1)

Publication Number Publication Date
TW202405410A true TW202405410A (zh) 2024-02-01

Family

ID=89382163

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112121644A TW202405410A (zh) 2022-07-01 2023-06-09 檢查系統

Country Status (2)

Country Link
TW (1) TW202405410A (fr)
WO (1) WO2024004729A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000171403A (ja) * 1998-12-08 2000-06-23 Dainippon Printing Co Ltd 表面検査装置
JP2006046946A (ja) * 2004-07-30 2006-02-16 Shinshu Univ 同軸落射照明装置及び同軸落射照明方法
JP5866573B1 (ja) * 2015-03-23 2016-02-17 マシンビジョンライティング株式会社 検査用照明装置及び検査システム
US11328380B2 (en) * 2018-10-27 2022-05-10 Gilbert Pinter Machine vision systems, illumination sources for use in machine vision systems, and components for use in the illumination sources

Also Published As

Publication number Publication date
WO2024004729A1 (fr) 2024-01-04

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