TW202404753A - Substrate processing apparatus and method of processing a substrate in a substrate processing apparatus - Google Patents

Abstract

A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

Description

Substrate processing device and method of processing substrate in substrate processing device

[Cross-reference of related applications]

This non-provisional patent application claims priority and benefit from U.S. Provisional Patent Application No. 62/742,000, filed on October 5, 2018, the entire text of which is incorporated herein by reference.

Exemplary embodiments relate generally to substrate processing tools, and more particularly to substrate transport devices.

In semiconductor processing, dual SCARA (Selected Compliance Articulated Robot Arm) arm robots can be used to transfer wafers to and from semiconductor process modules. Dual SCARA arm robots typically allow rapid exchange of substrates to and from the process module, where rapid exchange can be viewed as removing one substrate from the process module and placing a different substrate into the same process module in rapid succession without having to move both The SCARA arm robot rotates as a unit around the shoulder axis of the dual SCARA arm robot without substantially retracting the arm to the battery position or the fully retracted position.

Typically, each arm of a dual-SCARA arm robot includes an upper arm rotatable about the shoulder axis, a front arm rotatably coupled to the upper arm and about the elbow axis, and an end effector coupled to the forearm and about the wrist axis. Substrate holder. In general, referring to Figures 8A and 8B, a wrist pulley 800 is positioned at each wrist axis 850 to drive rotation of the respective end effector 811, 812 coupled thereto. Here, the wrist pulley 800 and the respective end effectors 811, 812 rotate as a unit around the wrist axis 850 (for example, the wrist pulley 800 rotates together with the respective end effectors 811, 812. The wrist pulley is driven by a transmission circuit Driven by 803, the transmission circuit 803 consists of two transmission belts 801, 802 surrounding the wrist pulley 800 to cover an arc spanning approximately 180 degrees relative to the axis of rotation of the wrist pulley 800. Here, the transmission belts 801, 802 must stacked on top of each other on the wrist pulley 800, thereby defining the height PH of the wrist pulley 800 to be at least twice the height BH of the single drive belt 801, 802. The wrist pulleys 800 are typically positioned in the respective forearms 820, 821 and by an axis are coupled to respective end effectors 811, 812 such that the respective end effectors 811, 812 rotate above (or below) the respective forearms 820, 821. Therefore, in the example of a single arm of a conventional SCARA arm robot, the wrist The height WJH of the joint 830 may be at least twice the height BH of the single drive belt 801, 802, plus the thickness of the wrist plates 811P, 812P of the respective end effectors 811, 812 plus twice the wall of the respective forearm 820, 821 thickness.

Substrate transport robots typically operate in a transport bay where the interior height of the transport bay accommodates, for example, the height of the transport robot's dual SCARA arms, except for the Z travel of the arm in addition to the required operating clearance between the arms and the walls of the transport bay. Scope. The transport chamber typically includes a slot valve with a hole sized to allow the end effector and/or wrist joint to pass through the slot valve hole. In some instances, the slot valve hole is not large enough for the wrist joint to pass through, which results in long end effector roll deflections that provide the respective SCARA arm reach while preventing the wrist joint from passing through the slot valve hole. However, increasing the roll deflection of the end effector reduces the end effector stiffness and increases the swing diameter of the SCARA arm.

It would be advantageous to have a reduced height bamboo wrist joint such that the wrist joint can pass through the hole in the slot valve so that the interior height of the transport cabin can be lowered, thereby reducing the internal volume of the transport cabin and/or its respective process module. Providing the wrist joint through the slotted valve hole provides a shorter end effector roll deflection, which increases end effector stiffness and reduces the swing diameter of the substrate transport robot arm. Reducing the swing diameter of the substrate transport arm can provide a reduction in the internal volume of the transfer chamber, which can increase the throughput of semiconductor processing systems due to the time required to evacuate the chamber to evacuate and/or evacuate the chamber to atmospheric pressure. can be reduced. In addition, reducing the overall height of the transport cabin can reduce the cost of the transport cabin. Aspects of the present invention, as will be described herein, provide for a reduction in wrist joint height of the transfer arm, inter alia, by reducing the amount of wrist pulley belt/cable wraparound. Reducing the height of the wrist joint of the transfer arm may provide at least partial access of the wrist joint through the slot valve hole, which may perform the advantages described above.

FIG. 1 illustrates a dual SCARA arm substrate processing device 100 (also referred to herein as the "transport device 100") according to various aspects of this embodiment. Although aspects of the present embodiments will be described with reference to the drawings, it should be understood that the various aspects of the present embodiments can be embodied in many forms. Additionally, any suitable size, shape or type of components or materials may be used.

In one aspect, the transport device 100 includes a carrier or frame 106 to which the SCARA arms 110, 120 are pivotally mounted at the shoulder joints of the SCARA arms and to which the drive section 108 is mounted and Coupled to SCARA arms 110, 120. In one aspect, the transport device 100 includes at least two SCARA arms 110, 120. Any suitable controller 199 is coupled to drive segment 108 and includes any suitable code to perform operations of transportation device 100 as described herein.

In one aspect, the at least two SCARA arms include a first SCARA arm 110 connected to the frame 106 and a second SCARA arm 120 connected to the frame 106 . The first SCARA arm 110 is a dual link arm having at least one end effector 110E cantilevered therefrom. For example, the dual links of the first SCARA arm 110 define an upper arm link 110U and a forearm link 110F. Upper arm link 110U includes and defines shoulder joint 110SJ, wherein upper arm link 110U is rotatably connected to the frame about a shoulder rotation axis SAX at a proximal end of upper arm link 110U (eg, shoulder joint 110SJ) 106. Forearm link 110F is rotatably (eg, pivotally) connected to the distal end of upper arm link 110U at a proximal end of forearm link 110F to define an elbow rotation axis EX1. Each of at least one end effector 110E is rotatably (eg, pivotally) coupled to a distal end of forearm link 110F about wrist rotation axis WX1 at wrist joint 110WJ about wrist rotation axis WX1 Rotate relative to the forearm 110F.

The second SCARA arm 120 is a dual link arm having at least one end effector 120E cantilevered therefrom. For example, the dual links of the second SCARA arm 120 define an upper arm link 120U and a forearm link 120F. Upper arm link 120U includes and defines shoulder joint 120SJ, wherein upper arm link 120U is rotatably connected to the frame about a shoulder rotation axis SAX at a proximal end of upper arm link 120U (eg, shoulder joint 120SJ). 106. Forearm link 120F is rotatably (eg, pivotally) connected to the distal end of upper arm link 120U at the proximal end of forearm link 120F to define elbow rotation axis EX2. Each of at least one end effector 120E is rotatably (eg, pivotally) coupled to a distal end of forearm link 120F about wrist rotation axis WX2 at wrist joint 120WJ about wrist rotation axis WX2 Rotate relative to this forearm 120F.

Although only one end effector 110E, 120E is shown coupled to each wrist rotation axis WX1, WX2, in other aspects, any suitable number of end effectors may be coupled to one of the wrist axes WX1, WX2 Or more to perform batch transfer of substrates or rapid exchange of substrates. In this aspect, the shoulder rotation axis SAX is shared by the first and second SCARA arms 110 and 120 . In other aspects, the first and second SCARA arms 110 and 120 may have respective shoulder rotation axes arranged side by side. . Furthermore, although aspects of the invention are described with respect to a SCARA type transfer arm, aspects of the invention may equally be applied to suitable types of transfer arms having driven end effectors or end effectors driven by respective drive axes, The rotation system of the end effector from arc end to arc end is approximately 180° or less. In other aspects, the rotation of the end effector from arc end to arc end may be greater than 180°, with the end effector interface seating surfaces 604ES, 605ES of the transfer arm wrist idlers 604, 605 (see Figures 6D and 6E) The surface area is reduced, but there is still enough surface area to support the end effectors 110E, 120E thereon.

Referring also to Figures 2, 3A, and 3B, in one aspect, the drive section 108 is mounted to the frame 106 in any suitable manner. Drive segment 108 has at least one degree of freedom operably coupled to SCARA arms 110, 120 via transmission mechanism 299 (see Figures 2 and 7A) to rotate the SCARA about shoulder rotation axis SAX at respective shoulder joints 110SJ, 120SJ Arms 110, 120 and the SCARA arms 110, 120 are articulated to extend and retract. In one aspect, the drive segment 108 is a three-axis (eg, three degrees of freedom) drive segment, while in other aspects, the drive segment may include any suitable number of drive axes (eg, more or less than three drive axis). In one aspect, the drive section 108 generally includes a drive shaft assembly 241 (which may be part of a transmission mechanism 299 along with any suitable pulley/belt system as described herein) and three motors 242, 244, 246. In this aspect, drive shaft assembly 241 has three drive shafts 250A, 250B, and 250C. As can be appreciated, the drive system may not be limited to three motors and three drive shafts.

The first motor 242 includes a stator 248A and a rotor 260A connected to the intermediate shaft 250A. The second motor 244 includes a stator 248B and a rotor 260B connected to the outer shaft 250B. Third motor 246 includes a stator 248C and a rotor 260C connected to inner shaft 250C. The three stators 248A, 248B, 248C are fixedly attached to the frame 106 at different vertical heights or positions along the frame 106 (note that a three-axis drive system including radially nested motors, such as Those described in U.S. Patent Application No. 13/293,717 filed on August 10 and U.S. Patent No. 8,008,884 issued on August 30, 2011, the entire contents of which are incorporated herein by reference, can also be used to drive the transportation device 100). For illustrative purposes only, first stator 248A is the middle stator, second stator 248B is the top stator and third stator 248C is the bottom stator. Each stator generally contains an electromagnetic coil.

The three drive shafts 250A, 250B and 250C are configured as coaxial drive shafts. The three rotors 260A, 260B, 260C preferably contain permanent magnets, but alternatively contain magnetic induction rotors, which do not have permanent magnets. A sleeve or thin can seal 262 is preferably positioned between the rotors 260A, 260B, 260C and the respective stators 248A, 248B, 248C to seal the stators 248A, 248B, 248C from the operating environment of the SCARA arms 110, 120 and allow The transport device 100 may be used in a vacuum environment with the drive shaft assembly 241 positioned within the vacuum environment and the stators 248A, 248B, 248C positioned outside the vacuum environment. However, if the transport device 100 is intended to be used only in an atmospheric environment, the sleeve 262 is not required.

The third shaft 250C is the inner shaft and extends from the bottom stator 248C. Inner shaft 250C has a third rotor 260C aligned with bottom stator 248C. Intermediate shaft 250A extends upwardly from intermediate stator 248A. The countershaft has a first rotor 260A and is aligned with a first stator 248A. Outer shaft 250B extends upwardly from top stator 248B. The outer shaft has a second rotor 260B aligned with the top stator 248B. Various bearings are provided about shafts 250A-250C and frame 106 to allow each shaft to be independently rotatable relative to each other and frame 106 .

In one aspect, each axis 250A-250C may be provided with a position sensor 264. Position sensor 264 is used to signal the rotational position of shafts 250A-250C relative to each other and/or relative to frame 106 to controller 199 . Any suitable sensor may be used, such as optical or inductive.

The drive section 108 may also include one or more suitable Z-axis drives 190 for moving the transport device 100 upper arm links 110U, 120U, forearm links 110F, 120F and end effectors 110E, 120E in parallel ( For example, along) in a direction generally parallel to the shoulder rotation axis SAX. In another aspect, one or more rotational joints of transport device 100 (e.g., wrist or elbow axis) may include a Z-axis drive, such as for moving the end effectors of each arm in the Z direction and toward each other. Independence.

In one aspect, the outer shaft 250B is coupled to the upper arm link 110U, such that the outer shaft 250B and the upper arm link 110U rotate as a unit around the shoulder rotation axis SAX. The intermediate shaft 250A is coupled to the upper arm link 120U, so that the intermediate shaft 250A and the upper arm link 120U rotate as a unit around the shoulder rotation axis SAX. In other aspects, outer shaft 250B may be coupled to upper arm link 120U and intermediate shaft 250A coupled to upper arm link 110U. Inner shaft 120C is connected to each forearm link 110F, 120F to jointly drive each forearm link 110F, 120F.

In one aspect, as shown in Figures 1, 3A, and 3B, upper arm links 110U, 120U and forearm links 110F, 120F have substantially equal lengths, while in other aspects, upper arm links 110U, 120U and forearm links 110U, 120U and forearm links 110F, 120F have substantially equal lengths. Links 110F, 120F may have unequal lengths. In other aspects, the end effectors 110E, 120E have a predetermined length such that when the first and second SCARA arms 110, 120 are in the retracted configuration shown in Figure 4, the upper arm links 110U, 120U and the forearm links Rods 110F, 120F sweep in a direction opposite the extension direction 400 of end effectors 110E, 120E (eg, wrist rotation axes WX1, WX2 and elbow rotation axes EX1, EX2 positioned behind shoulder rotation axis SAX) . In the aspects shown in Figures 1, 3A, 3B and 4, the end effectors 110E and 120E are stacked on top of each other above the shoulder axis SAX to define different transfer planes, so that one of the end effectors 110E and 120E passes through the other end effector. 110E, 120E and each SCARA arm 110, 120 has independent extension and retraction along an extension axis R (see Figures 3A, 3B and 4) that is common to both SCARA arms 110, 120 and Through the shoulder rotation axis SAX. In other aspects, also referring to Figures 5A-5G, end effectors 110E, 120E can be positioned in the same plane (eg, not passing through each other), with one of each of the first and second SCARA arms 110, 120 The telescopic axes 400R form an angle relative to each other, wherein the angle between the telescopic axes 400R corresponds to the angle between the process modules PM1 to PM4, and the process modules are coupled to the transfer cabin in which the SCARA arms 110, 120 are positioned. 5020.

Referring now to FIG. 6A , the transport device 100 will be described in detail below. As mentioned above, in one aspect, the outer drive shaft 250B is coupled to the upper arm link 120U and the intermediate drive shaft 250A is coupled to the upper arm link 110U, such that each upper arm link 110U, 120U is under the power of the respective drive shaft 250A, 250B. Rotate independently around the shoulder rotation axis SAX, which is shared by the first and second SCARA arms 110 and 120 . Inner drive shaft 250C is connected to both forearm links 110F, 120F via a split drive pulley 606 (see also split drive pulley 906 in Figures 9A and 9B), which is coupled to inner drive shaft 250C, where split drive pulley 606, 906 are rotatably mounted to rotate as a unit at the shoulder rotation axis SAX of the drive section 108 under power from the inner drive shaft 250C. In one aspect, split drive pulleys 606, 906 are positioned at least partially within each upper arm link 110U, 120U. In other aspects, where the transport device 100 includes more than two SCARA arms (eg, at least two), a drive axis is provided for driving each upper arm link of at least two SCARA arms, and another drive axis is provided, For driving at least one split drive pulley connected to the front arm link of at least two SCARA arms, such that each split drive pulley drives the rotation of at least two forearms. In one aspect, the split drive pulleys 606, 906 are coupled to at least two idler pulleys 600, 601, one of which is connected to the first SCARA arm 110 to perform the operation of the first SCARA arm 110. Extend and retract, and at least the other of the two idlers 600 and 601 is connected to the second SCARA arm 120 to perform extension and retraction of the second SCARA arm 120 .

In one aspect, each upper arm link 110U, 120U includes an idler gear 600, 601 positioned at the respective elbow rotation axis EX1, EX2. Each idler gear 600, 601 is mounted on a respective upper arm link 110U, 120U about a respective elbow rotation axis EX1, EX2 so as to rotate about the elbow rotation axis EX1, EX2 independently of the upper arm link 110U, 120U. For example, any suitable bearings 620A, 620B may be provided within the upper arm links 110U, 120U for the idlers 600, 601 to be mounted for rotation about the elbow rotation axes EX1, EX2. Each idler gear 600, 601 is coupled to a respective forearm link 110F, 120F such that the idler gear 600, 601 rotates as a unit with the respective forearm link 110F, 120F about the respective elbow rotation axis EX1, EX2.

Please refer to Figures 6A, 6C and 6D. Each end effector 110E, 120E is driven by the upper arm link 110U, 120U of the SCARA arm 110, 120 to maintain the end effector 110E, 120E along each SCARA arm 110, 120. The alignment of the telescopic axis. For example, in one aspect, elbow drive pulley 603 (see Figures 6A and 6E) is mounted to upper arm link 110U of SCARA arm 110 about elbow rotation axis EX1 in any suitable manner such that elbow drive pulley 603 faces The upper arm link 110U is rotatably fixed. An idler gear 604 (eg, a wrist joint pulley) is mounted in forearm link 110F in any suitable manner for rotation about wrist axis WX1. The idler gear 604 has an inner diameter ID and an outer diameter OD (see Figure 6F) such that the idler gear 604 is sized and shaped to allow coupling of a standard/conventional wrist joint in a standard/conventional transfer arm. and other structures and are equally bounded by them. For example, the wrist joint has a predetermined size and includes a shaft SHT and a bearing BRG that have predetermined dimensions based on, for example, slot valve size, load to be carried by the transfer arm, transfer cabin size, etc. Given these transfer arm constraints, a conventional wrist pulley (such as that shown in Figure 8A) also has predetermined dimensions (eg, inner and outer diameters, etc.). In accordance with various aspects of this embodiment, as described herein, idler pulley 604 is shaped and sized to reduce the wrist height of transfer arm 110 as long as the same constraints are imposed on conventional wrist pulleys. End effector 110E is mounted to idler 604 such that SCARA arm 110 extends and retracts to perform rotation of idler 604 relative to forearm 110F and together with the coupled at least one end effector 110E as a unit about the wrist axis WX1, as will be described in more detail in this article. The idler pulley 604 is coupled to the elbow drive pulley 603 in any suitable manner, such as by having at least two separate drive belts 660A, 660B (generally similar to the drive belt segments 701, 702, 711, 712 described herein). Segment transmission circuit 660, in which each transmission belt 660A, 660B at least partially surrounds the idler 604 and the elbow drive pulley 603 in opposite directions, so that when the forearm link 110F moves relative to the upper arm link 110U, the elbow drive pulley 603 Relative rotation with respect to forearm link 110F at elbow rotation axis EX1 causes one of drive belts 660A, 660B to pull on idler 604 while the other drive belt 660A, 660B pushes on idler 604 to execute idler 604 to rotate and maintain the alignment of the end effector 110E along the telescopic axis. Elbow drive pulley 603 and idler gear 604 may have a diameter ratio of approximately 1:2; however, in other aspects, elbow drive pulley 603 and idler gear 604 may have any suitable diameter ratio.

Similarly, elbow drive pulley 602 (see Figures 6A and 6D) is mounted to upper arm link 120U of SCARA arm 120 about elbow rotation axis EX2 in any suitable manner such that elbow drive pulley 602 is relative to upper arm link 120U is rotatably fixed. An idler gear 605 (eg, wrist joint pulley) is mounted in forearm link 120F in any suitable manner for rotation about wrist axis WX2. The idler gear 605 has an inner diameter ID and an outer diameter OD (see Figure 6F) such that the idler gear 604 is sized and shaped to allow coupling of a standard/conventional wrist joint in a standard/conventional transfer arm. and other structures, in the same manner as described above for idler gear 604 . End effector 120E is mounted to idler 605 such that SCARA arm 120 extends and retracts to perform rotation of idler 605 relative to forearm 120F and together with the coupled at least one end effector 120E as a unit about the wrist axis WX2, as will be described in more detail in this article. The idler pulley 605 is coupled to the elbow drive pulley 602 in any suitable manner, such as by having at least two separate drive belts 661A, 661B (generally similar to the drive belt segments 701, 702, 711, 712 described herein). Segment transmission circuit 661, in which each transmission belt 661A, 661B at least partially surrounds the idler 605 and the elbow drive pulley 602 in opposite directions, so that when the forearm link 120F moves relative to the upper arm link 120U, the elbow drive pulley 602 Relative rotation with respect to forearm link 120F at elbow rotation axis EX2 causes one of drive belts 661A, 661B to pull on idler 605 while the other drive belt 661A, 661B pushes on idler 605 to execute idler 605 to rotate and maintain the alignment of the end effector 120E along the telescopic axis. Elbow drive pulley 602 and idler gear 605 may have a diameter ratio of approximately 1:2; however, in other aspects, elbow drive pulley 602 and idler gear 605 may have any suitable diameter ratio.

Referring now to Figures 5H, 6A, 6C, 6D, 6E, 6F and 6G, the end effectors 110E, 120E and idlers 604, 605 are constructed such that the height 670 of at least one end effector 110E, 120E is tied to the wrist joint. 110WJ, 120WJ (Fig. 6G) within the stack height profile 671 (Fig. 6G) such that the total stack height 672 (Fig. 6G) of the at least one end effector 110E, 120E and wrist joints 110WJ, 120WJ is sized to conform And through the channel 680 (Fig. 6G) of the slot valve 681 (Fig. 6G). The stack height profile 671 of the wrist joints 110WJ, 120WJ includes at least a portion of the respective idlers 604, 605 and the SCARA arm extending the at least one end effector 110E, 120E and through the passage 680 of the slot valve 681. part. For example, in one aspect, upper arms 110U, 120U, forearms 110F, 120F, and end effectors 110E, 120E have respective lengths 110UL, 120UL, 110FL, 120FL, 110EL, 120EL (e.g., the length of each end effector can be from the wrist The substrate holding positions 110SHL, 120SHL of the partial axes WX1, WX2 measured to the end effectors 110E, 120E (and together with the respective transfer arms 110, 120) are configured to provide accessible processing module PM4 (or other suitable processing module ) of the deep substrate holding station 500 (see Figure 5H). Although upper arm links 110U, 120U and forearm links 110F, 120F are illustrated as having substantially the same lengths 110FL, 120FL, 110UL, 120UL, in other aspects, upper arm links 110U, 120U have lengths 110UL, 120UL The lengths 110FL and 120FL of the forearm links 110F and 120F may be unequal. The deep substrate holding station 500 is positioned in the processing module PM4 such that it is positioned an offset distance DIST (i.e., positioned along the telescopic axis R of the transfer arms 110, 120) from the slot valve 681 channel (or interface) 680 of the transport chamber PM4. The medial surface 520) is consistent with and adapted to accommodate at least a portion of the extension of the lengths 110FL, 120FL of the forearm links 110F, 120F at the wrist joints 110WJ, 120WJ (i.e., at the wrist axes WX1, WX2), where the forearm links 110F, 120F Portions of the lengths 110FL, 120FL of the rods 110F, 120F and the lengths 110EL, 120EL of the end effectors 110E, 120E extend from the wrist axes WX1, WX2 through the inner side 520 of the slot valve 681.

Still referring to Figures 6A, 6C, 6D, 6E, 6F and 6G, the wrist joints 110WJ and 120WJ are configured to allow the respective transfer arms 110 and 120 to conform to the channel 680 of the slot valve 681 (see Figure 5H), as described above. narrate. In one aspect, the heights 660H, 661H (see Figure 6C) of the drive belts 660A, 660B, 661A, 661B of the respective segmented drive circuits 660, 661 are predetermined (e.g., based on the amount of torque intended to be transferred by the transfer arm , dynamics, etc.) such that the heights 110HT, 120HT of the arms 110F, 120F before accommodating the respective drive belts 660A, 660B, 661A, 661B change at least in part with the heights 660H, 661H of the drive belts 660A, 660B, 661A, 661B. In other aspects, the heights 110HT, 120HT of the forearms 110F, 120F may vary with any suitable transfer arm characteristics.

As shown, for example, in Figures 4 and 6F, end effectors 110E, 120E overlap respective forearms 110F, 120F at respective wrist joints 110WJ, 120WJ. As shown in FIGS. 1 and 4 , the forearm 120F includes a recessed portion or notch 120FR that provides freedom of movement of the end effector 120E relative to the forearm 120F within the recessed portion 120FR during extension and retraction of the transfer arm 120 . The height 120H of the recessed portion 120FR may be such that the (upper) surface 120FS of the forearm 120F is generally coplanar with or below the (upper) surface 120EPS of the wrist plate 120EP of the end effector 120E. Recessed portion 120FR may be configured to provide end effector 120E with any suitable amount of rotation about wrist axis WX2 to perform extension and retraction of end effector 120E to any suitable substrate holding station. As also shown in FIGS. 1 and 4 , the forearm 110F includes a recessed portion or notch 110FR that provides freedom of movement of the end effector 110E relative to the forearm 110F within the recessed portion 110FR during extension and retraction of the transfer arm 110 . The height 110H of the recessed portion 110FR may be such that the (upper) surface 110FS of the forearm 110F is substantially coplanar with or below the (upper) surface 110EPS of the wrist plate 110EP of the end effector 110E. Recessed portion 110FR may be configured to provide end effector 110E with any suitable amount of rotation about wrist axis WX1 to perform extension and retraction of end effector 110E to any suitable substrate holding station.

6F illustrates a cross-sectional view of the end effectors 110E, 120E and the overlap of the forearms 110F, 120F with the end effectors 110E, 120E at the recessed portions 110FR, 120FR. As shown in FIG. 6F , end effector 110E, 120E (bottom) interface 613 and respective forearms 110F, 120F and respective idlers 604, 605 are configured to be between end effectors 110E, 120E and respective forearms 110F, 120F. Provide any appropriate clearance. In this aspect, the uppermost edges or surfaces 612 of the forearms 110F, 120F (within the recessed portions 110FR, 120FR and closest to the end effectors 110E, 120E) are positioned such that the uppermost edges 622 of the idlers 604, 605 protrude beyond Above the uppermost edge or surface 612 of the respective forearm 110F, 120F within the respective recessed portion 110FR, 120FR. In other aspects, the uppermost edge 622 of the idler gear 604, 605 may be generally coplanar with or below the uppermost edge or surface 612 of the forearm 110F, 120F.

Still referring to Figures 6A, 6C, 6D, 6E, 6F, and 6G, the idler 605 has an end effector interface seating surface 605ES that seats against the at least one end effector 120E. End effector seating surface 605ES defines an end effector layer relative to frame 106 . The end effector interface seating surface 605ES is located at the same level as or beneath at least one of the individual belt segments 661A, 661B coupled to the idler 605 . As shown, for example, in Figures 6C and 6D, idler 605 has a stepped pulley peripheral edge 650 having a first peripheral portion 651 (Fig. 6F) with a first height 699 and a second peripheral portion 652 (Fig. 6F) with a second height 698. 6F), the first height 699 is greater than the second height 698. The end effector 120E is coupled to the idler 605 such that the end 437 (Figs. 4 and 6F) of the wrist plate 120EP of the end effector 120E opposite the substrate holding position 120SHL is disposed adjacent the first surrounding portion 651. The stepped pulley peripheral edge 650 forms a recess 630 of the idler 605 into which the end effector wrist plate 120EP is recessed such that the total stack height 672 of the at least one end effector 120E and wrist joint 120WJ is (FIG. 6G) Channel 680 (FIG. 6G) is sized to conform and pass through slot valve 681 (FIG. 6G).

Each transfer arm 110, 120 includes a respective segmented drive circuit 660, 661 of an individual drive belt segment 660A, 660B, 661A, 660B (or any suitable drive link, such as a cable segment) coupled to a respective idler 604, 605 to perform the rotation of idler wheels 604 and 605. The stepped pulley peripheral edge 650 forms drive belt surrounding surfaces 635, 636 which interface with the respective drive belts 661A, 661B of the segmented drive circuit 661. The belt anchor points 643, 644 connecting each of the individual belt segments 661A, 661B to the idler 605 are positioned such that at least one of the individual belt segments, such as the belt segment 661B, wraps around the idler 605 such that The peripheral edge of the pulley closest to the at least one end effector 120E (eg, closest to the substrate holding location 120SHL of the end effector 120E) and opposite the at least one individual belt segment 661B is positioned at or below the level of the surround . For example, the first peripheral portion 650 forms a belt surrounding surface 635 for the belt 661B to wrap around. The second peripheral portion 652 forms a lower belt surrounding surface 636 for the belt 661A to wrap around. The upper and lower belt wrapping surfaces 635, 636 are positioned at different heights on the idler 605 so that the belts 661A, 661B are positioned in different planes relative to each other (i.e., one belt does not wrap around the other belt ). As shown in FIG. 6F , at least one of the belt segments, such as belt segment 661B, has an upright height that spans (eg, substantially parallel to wrist axis WX2 ) the layer contact/seating surface 610 of end effector 120E. (corresponding to the height of the upper drive belt surrounding surface), the layer contact/seating surface contacts and seats against the layer surface 615 of the idler 605 (e.g., bounded by the end effector interface seating surface 605ES) to form an interface between the idler 605 and the end Part of the coupling between effectors 120E.

As shown in FIG. 6F , at least one individual belt segment (such as belt segment 661B) is positioned adjacent to the layer edge 622 of the idler gear 605 of the at least one end effector 120E and from at least one of the idler gears 605 . The layer seating surface 610 of the end effector 120E projects outwardly toward the at least one end effector 120E. In this aspect, the (bottom) interface 613 of the end effector 120E with the forearm 120F and idler 605 includes any suitable recess 614 that provides clearance within which drive belt segment 661B may be at least partially disposed. Referring also to FIG. 6I , recess 614 may form a hole or space 619 in sidewall 620 of wrist plate 120EP through which belt segment 661B may extend between idler pulley 605 and elbow drive pulley 602 .

Similarly, idler 604 has an end effector interface seating surface 604ES that seats against the at least one end effector 110E. End effector seating surface 604ES defines an end effector layer relative to frame 106 . The end effector interface seating surface 604ES is located at the same level as or beneath at least one of the individual belt segments 660A, 660B coupled to the idler 604 . As shown, for example, in Figures 6C and 6E, idler 604 has a stepped pulley peripheral edge 650 having a first peripheral portion 651 (Fig. 6F) with a first height 699 and a second peripheral portion 652 (Fig. 6F) with a second height 698. 6F), the first height 699 is greater than the second height 698. End effector 110E is coupled to idler gear 604 such that the end 438 ( FIGS. 4 and 6F ) of wrist plate 110EP of end effector 110E opposite substrate holding position 110SHL is disposed adjacent first peripheral portion 651 . The stepped pulley peripheral edge 650 forms a recessed portion 630 of the idler wheel 604 into which the end effector wrist plate 110EP is recessed such that the total stacking height 672 of the at least one end effector 110E and wrist joint 110WJ is (FIG. 6G) Channel 680 (FIG. 6G) is sized to conform and pass through slot valve 681 (FIG. 6G).

The stepped pulley peripheral edge 650 forms drive belt surrounding surfaces 635, 636 that interface with the respective drive belts 660A, 660B of the segmented drive circuit 660. The belt anchor points 643, 644 connecting each of the individual belt segments 660A, 660B to the idler 604 are positioned such that at least one of the individual belt segments, such as the belt segment 660B, wraps around the idler 604 such that The peripheral edge of the pulley closest to the at least one end effector 110E (eg, closest to the substrate holding location 110SHL of end effector 110E) and opposite the at least one individual drive belt segment 660B is positioned at or below the level of the surround . For example, first peripheral portion 650 forms a belt wrapping surface 635 for belt 660B to wrap around. The second peripheral portion 652 forms a lower belt surrounding surface 636 for the belt 660A to wrap around. The upper and lower belt wrapping surfaces 635, 636 are positioned at different heights on the idler 604 such that the belts 660A, 660B are positioned in different planes relative to each other (i.e., one belt does not wrap around the other belt ). As shown in FIG. 6F , at least one of the belt segments, such as belt segment 660B, has an upright height that spans (eg, substantially parallel to wrist axis WX1 ) the layer contact/seating surface 610 of end effector 110E. (corresponding to the height of the upper drive belt surrounding surface), the layer contact/seating surface contacts and seats against the layer surface 615 of the idler 604 (e.g., bounded by the end effector interface seating surface 604ES) to form an interface between the idler 604 and the end Part of the coupling between effectors 110E.

As shown in FIG. 6F , at least one individual belt segment, such as belt segment 660B, is positioned adjacent to the layer edge 622 of the idler gear 604 of the at least one end effector 110E and from at least one of the idler gears 604 . The layer seating surface 610 of the end effector 110E projects outwardly toward the at least one end effector 110E. In this aspect, the (bottom) interface 613 of the end effector 110E with the front arm 110F and the idler 604 includes any suitable recess 614 that provides clearance in which the drive belt segment 660B can be at least partially disposed. Referring also to FIG. 6H , recess 614 may form a hole or space 619 in sidewall 620 of wrist plate 110EP through which belt segment 660B may extend between idler pulley 605 and elbow drive pulley 602 .

Referring now to Figures 6C-6E and 6J-6M, the positions of the belt anchor points 643, 644 on the respective idlers 604, 605 define belt meshing arcs B1, B2, B11, B12 with the respective idlers 604, 605, The rotation angle θ1, θ2, θ11, θ12 between the transmission belt meshing arcs B1, B2, B11, B12 and the tangent points TT1, TT2, TT11, TT12 is about 90 degrees or less, and the transmission belt anchoring points 643, 644 are at the tangent points. TT1, TT2, TT11, TT12 form tangent lines between respective drive belt segments 660A, 660B, 661A, 661B and respective idlers 604, 605.

In one aspect, the idler gears 604, 605 and the respective elbow drive pulleys 603, 603 to which they are coupled via segmented drive circuits 660, 661 may have any suitable drive ratio, It provides sufficient rotation of the respective end effectors 110F, 120F to extend and retract the SCARA arms 110, 120 to and from a predetermined substrate holding position configured away from the shoulder axis SAX to pick up and place substrates. a predetermined distance. For example, the ratio between the elbow drive pulleys 602, 603 and the respective idler pulleys 604, 605 is constructed such that the belt anchor points 643, 644 on the idlers 604, 605 are positioned such that for each SCARA arm 110, 120 Rotation angle θ of respective end effector 110E, 120E for extension motion (i.e., rotation of the drive axis to perform rotation of idler gears 604, 605 to fully extend and retract arms SCARA 110, 120) (see Figures 3A and 3B) At least one arc (eg, arcs B1, B2, B11, B12) is created on the idler gears 604, 605 such that the arcs B1, B2, B11, B12 on the surrounding portions 651, 652 of one of the respective idler gears 604, 605 are The belt anchor points 643, 644 of one belt segment 660A, 660B, 661A, 661B at one end EE1 are no longer in contact with an opposing belt segment 660A, 660B on the other surrounding portion 651, 652 of the respective idler 604, 605 , 661A, 661B transmission belt anchor points 643, 644 overlap. For example, as shown in Figure 6C, belt anchor points 643, 644 for opposing belt segments 661A, 661B are positioned generally up and down and belt anchor points 643, 644 for opposing belt segments 660A, 660B are positioned generally up and down. In other aspects, the belt anchor points 643, 644 of one belt segment 660A, 660B, 661A, 661B may be at any suitable distance from the belt anchor points 643, 644 of the respective opposing belt segment 660A, 660B, 661A, 661B. Spaced circumferentially.

As shown in Figure 6C, the belt anchor points 645, 646 of the belt segments 660A, 660B, 661A, 661B coupling the belt segments 660A, 660B, 661A, 661B to respective elbow drive pulleys 602, 603 are positioned generally 180° apart. Therefore, in the examples shown in Figures 6C-6E and 6J-6M (note above that the diameter ratio between the elbow drive pulleys 602, 602 and the respective idler pulleys 604, 605 is approximately 1:2), The belt anchor points 645, 646 are spaced on the elbow drive pulleys 602, 603 and the belt anchor points 643, 644 are spaced on the idler pulleys 604, 605 such that the elbow drive pulleys 602, 603 rotate approximately ±180° causing each to idle. Wheels 604, 605 rotate approximately ±90° (note that the 0° configuration of the belt pulley drive is illustrated in Figures 6C-6E and 6J-6M and that the belt anchor points 643, 644 are generally facing away from the elbow drive pulley 602, 603), but in other aspects in which the drive ratio of the elbow drive pulleys 602, 603 to the idler pulleys 604, 605 is greater than 1:2 (as described below), the belt anchor points are driven along the elbow The relative positions of the circumferences of pulleys 602, 603 and/or idlers 604, 605 may differ from those described above.

On the other end EE2 of arcs B1, B2, B11, B12, the drive belt anchor points 643, 644 are positioned so that the drive belt engages between the end EE1 of arcs B1, B2, B11, B12 and the tangent points TT1, TT2, TT11, TT12 The rotational angles θ1, θ2, θ11, θ12 are approximately 90° or less (i.e., the belt segments 660A, 660B, 661A, 661B are tangential to the respective idlers 604, 605 and are under pure tension such that they wrap around their respective Belt segments 660A, 660B, 661A, 661B of idlers 604, 605 do not bend).

In one aspect, as discussed above, the elbow drive pulleys 602, 603 and respective idlers 604, 605 may have a ratio of approximately 1:2, such that the elbow drive pulleys 602, 603 executed by the controller 199 are approximately ± The 180° rotation results in approximately ±90° rotation of the respective idler gears 604, 605 (eg, corresponding to the drive belt engagement arcs B1, B2, B11, B12). As mentioned above, in other aspects, the drive ratio between the elbow drive pulleys 602, 603 and the respective idler pulleys 604, 605 may be greater than 1:2. For example, the drive ratio between the elbow drive pulleys 602, 603 and the respective idler pulleys 604, 605 may be approximately 1:2.5, approximately 1:3, approximately 1:4, or any suitable drive ratio that is configured to perform Full extension and retraction of the SCARA arms 110, 120 and/or rotation of one SCARA arm 110, 120 relative to the other SCARA arm 110, 120 about the shoulder axis SAX (eg, see Figures 5A-5G, such as when providing a Actuation with more than three degrees of freedom).

Referring now to Figures 4, 6A, 6D, 6E, 6G, and 6J-6M, in order to perform rotation of the idlers 604, 605 and the respective end effectors 110E, 120E coupled thereto, the idlers 604, 605 may have different configurations. (e.g., left- and right-handed configurations) to rotate clockwise and counterclockwise. For example, transfer arm 110 may be considered a right-hand arm because the arm is positioned on the right-hand side of the telescopic axis facing the extension direction (e.g., the end effector moves out of the retracted configuration). Likewise, transfer arm 120 may be considered is the left arm (because the arm is positioned on the left hand side of the telescopic axis facing the extension direction.

Referring to right hand transfer arm 110, the driven configuration of end effector 110E to upper arm link 110U results in idler gear 604 being coupled to transfer arm 110 as it extends along telescopic axis R from the retracted configuration shown in Figure 4. The end effector 110E rotates counterclockwise. To provide counterclockwise rotation of idler 604, belt segment 660B is positioned closer to the opposite side of wrist axis WX1 than end effector base plate holding position 110SHL of end effector 110 and recessed portion 630 of idler 605. The upper (top) edge 622 of the idler wheel 604. Belt segment 660A is positioned below end effector 110E and end effector interface seating surface 604ES (e.g., such that the side of idler 604 on which (lower) belt segment 660A is positioned is on the side of the (upper) belt Segment 660B forms a clear interface for end effector 110 at the same level. In this manner, belt segments 660A, 660B can wrap around and unwind from idler 604 without interfering with seating against the end effector interface supports. End effector 110E sits on surface 604ES.

Referring to left hand transfer arm 120, the driven configuration of end effector 120E to upper arm link 120U results in idler gear 605 being coupled to transfer arm 120 as it extends along telescopic axis R from the retracted configuration shown in Figure 4. The end effector 120E rotates clockwise. To provide clockwise rotation of idler gear 605, belt segment 661B is positioned closer to the opposite side of wrist axis WX2 than end effector base plate holding position 120SHL of end effector 120 and recessed portion 630 of idler gear 605. The upper (top) edge 622 of the idler wheel 605. Belt segment 661A is positioned below end effector 120E and end effector interface seating surface 605ES (e.g., such that the side of idler 605 on which (lower) belt segment 661A is positioned is on the side of the (upper) belt Segment 661B forms a clear interface for end effector 120 at the same level. In this manner, belt segments 661A, 661B can wrap around and unwind from idler 605 without interfering with seating against the end effector interface support. End effector 120E sits on surface 605ES.

Referring also to Figures 7A-7C and 9A-9B, the split drive pulleys 606, 906 may be generally similar to U.S. Patent Application No. 15/634,871 filed on June 27, 2017 and published as U.S. Early Publication No. No. 2018/0019155 (published on January 18, 2018), the full text of which is incorporated into this article by reference. Split drive pulleys 606, 906 are coupled to idler pulleys 600, 601 via respective segmented drive circuits 700, 710. The segmented drive circuit 700 includes individual belt segments 701 , 702 while the segmented drive circuit 710 includes individual belt segments 711 , 712 . The drive belt segments 701, 702, 711, 712 of each segmented drive circuit 700, 710 are configured as opposite drive belts with respect to the direction of torque from the split drive pulley 606, 906 to the respective idler pulley 600, 601, where the respective segment The segment transmission circuits 700, 710 are opposite to each other from the split drive pulleys 606, 906 to the respective idler pulleys 600, 601 such that at least the idler trains are driven from the split drive pulleys 606, 906 (and the corresponding degrees of freedom of the drive section 108) simultaneously and Drive in the same direction. It should be noted that although the two idlers 600, 601 are shown coupled to the split drive pulley, in other aspects at least two idlers are coupled to the split drive pulley such that the single degree of freedom provided by the drive section Power is split between at least two idler gears. Here, the split drive pulleys 606 and 906 are common pulleys that split one degree of freedom of the drive section between at least two idlers 600 and 601 so as to jointly drive at least two idlers from one degree of freedom of the drive section 108 600, 601. As described in greater detail below, the split drive pulleys 606, 906 have a plurality of belt interface layers or planes where the belt segments 701, 702, 711, 712 are attached to the split drive pulleys 606, 906. In one aspect, as will be described below, at least one of the belt segments 701, 702, 711, 712 of the respective drive circuits 700, 710 share a common belt interface layer (eg, positioned in a common plane) so as to have A common belt height rather than being positioned above each other. Accordingly, the split drive pulleys 606, 906 (also referred to as shoulder or hub pulleys) may be described as having a slimmer height than conventional shoulder or hub pulleys, and accordingly, the dual arm SCARA transport has a smaller height than conventional shoulder or hub pulleys. The double-arm SCARA transport device has a compact height.

Please refer to Figures 9A and 9B. In one aspect, the split drive pulley includes two belt interface layers 906L1 and 906L2, where each belt interface layer 906L1 and 906L2 is a common belt interface layer. For example, belt segment 701 of segmented drive circuit 700 and belt segment 712 of segmented drive circuit 710 have belt interface layer 906L2 coupled to split drive pulley 906 at their respective belt anchor points 770, 772 such that the belt Segments 701, 712 share a common belt height BH in a manner similar to that described below for split drive pulley 606. Belt segment 702 of segmented drive circuit 700 and belt segment 711 of segmented drive circuit 710 are coupled to split drive pulley 906 by the belt interface layer 906L1 at their respective belt anchor points 771, 773 such that the belt segmentation 702, 711 share a common belt height BH in a manner similar to that described below for the split drive pulley 606. Split drive pulley 906 is here a one-piece, one-piece component. In other aspects, the split drive pulley may be constructed from more than one piece, as discussed below.

Referring to Figures 6B and 7A-7C, in one aspect, at least one of the two SCARA arms 110, 120 may be a removable SCARA arm. For example, the first SCARA arm 110 may be removed as a unit from the frame 106 while the second SCARA arm 120 remains mounted to the frame 106 . In this aspect, the split drive pulley 606 is a segmented pulley having a removable pulley segment 606B that includes at least a belt interface layer for removal from the shoulder rotation axis SAX Pulley segment 606B. Pulley segments 606A, 606B are constructed such that pulley segment 606B can be removed from pulley segment 606A while remaining fixed to the shoulder axis of rotation and the respective drive circuits 700, 710 of the respective SCARA arms 110, 120 The drive belt segments 701, 702, 711, 712 are still fixed to the corresponding pulley segments 606A, 606B. For example, pulley segment 606B is rotatably mounted on upper arm link 110U about shoulder rotation axis SAX, while pulley segment 606A is rotatably mounted on upper arm link 120U about shoulder rotation axis SAX. Belt segments 701, 702 of drive circuit 700 are coupled to pulley segment 606B, while belt segments 711, 712 of drive circuit 710 are coupled to pulley segment 606A. When the SCARA arm 110 is removed from the transport 100 , the pulley segment 606B remains attached to the upper arm link 110U and the pulley segment 606A remains attached to the upper arm link 120U such that the SCARA arm 110 can follow the transmission circuit 700 and The pulley segment 606B attached thereto is removed in one unit.

In one aspect, each pulley segment 606A, 606B includes at least one mating feature that engages a corresponding mating feature of the other pulley segment 606A, 606B, wherein the mating feature rotatably secures the pulley segment 606A to the pulley segment. Segment 606B, such that the pulley segments 606A, 606B rotate in a unit about the shoulder rotation axis SAX (ie, the pulley segments are bonded to each other in a predetermined rotational orientation). For example, in one aspect, pulley segment 606A includes a mating surface 730 that mates with mating surface 740 of pulley segment 606B. Pulley segment 606A may also include a mating surface 731 that mates with mating surface 741 of pulley segment 606B. Although mating surfaces 730, 731, 740, 741 are shown and described for being rotatably secured to pulley segments 606A, 606B such that the pulley segments rotate in a unit about shoulder rotation axis SAX, in other aspects Pulley segments 606A, 606B may be rotatably secured in any suitable manner, such as using one or more of a latch, clamp, shoulder bolt, or any other suitable fastener. As can be appreciated from Figures 6A-6B, the delicate height of the SCARA arm in this embodiment's aspect can be easily reconstructed from two SCARA arms into one SCARA arm, and vice versa. Additionally, the exemplary arm configuration shown in Figures 6A-6B has at least one SCARA arm, which can be interchanged or exchanged as a unit as described above.

As shown in Figures 7A to 7D, the split drive pulley 606 includes three belt interface layers 606L1, 606L2, 606L3, suitable for four belt segments 701, 702, 711, 712 of the two transmission circuits 700, 710. In one aspect, removable pulley segment 606B includes belt interface layer 606L1 and interface layer portion 606L2B of belt interface layer 606L2. Pulley segment 606A includes interface layer portion 606L2A of drive belt interface layer 606L2 and interface layer 606L3. In this aspect, belt segment 701 is coupled to the interface layer 606L1 of pulley segment 606B at belt anchor point 770 , and belt segment 702 is coupled to the portion of the interface layer of pulley segment 606B at belt anchor point 771 606L2B. Belt segment 712 is coupled to belt interface layer 606L3 of pulley segment 606A at belt anchor point 772, and belt segment 711 is coupled to interface layer portion 606L2A of pulley segment 606A at belt anchor point 773 such that the belt interface Layer 606L2 is common to belt segment 702 and belt segment 711 .

Referring now to Figures 7E to 7H, the positions of each belt anchor point 770-773 on the split drive pulleys 606, 609 define belt engagement arcs A1, A2, A11, A12 with the split drive pulley 606 such that the belt engagement arc A1 The rotation angles α1, α2, α11, and α12 between , A2, A11, A12 and the tangent points T1, T2, T11, and T12 are about 90 degrees or less. The anchor points 770, 771, 772, and 773 of the transmission belt are at the tangent points T1, T2, T11 and T12 form tangent lines between respective drive belt segments 701, 702, 711, 712 and the split drive pulley 606.

Referring now to Figures 7A through 7H, in one aspect, the split drive pulleys 606, 609 and at least two idlers 600, 601 to which the split drive pulleys 606, 609 are coupled via transmission circuits 700, 710 may be with any suitable drive ratio that provides sufficient rotation of the respective forearm links 110F, 120F to extend and retract the SCARA arms 110, 120 to and from a predetermined substrate holding position for picking up and placing substrates, the predetermined substrate holding position being Disposed a predetermined distance away from the shoulder axis SAX. For example, the ratio between the split drive pulleys 606, 609 and each idler pulley 600, 601 is constructed such that the belt anchor points 770, 771, 772, 773 on the split drive pulleys 606, 609 are positioned such that for each SCARA The rotation angle β (see Figures 3A and 3B) of the extension movement of the arms 110, 120 (i.e., the rotation of the drive axis to perform the rotation of the idler pulley 600, 601 to fully extend and retract the arms SCARA 110, 120) is determined by the split drive pulley. At least one arc (for example, arcs A1, A2, A11, A12) is formed on 606, 609 such that the belt anchor of a belt segment 701, 702, 711, 712 at one end E1 of the arcs A1, A2, A11, A12 Fixed points 770, 771, 772, 773 no longer coincide with belt anchor points 770, 771, 772, 773 of opposing belt segments 701, 702, 711, 712 on the same or different belt interface layers 606L1, 606L2, 606L3. For example, as shown in Figures 7A-7C, belt anchor points 770, 771 for opposing belt segments 701, 702 are positioned generally up and down and belt anchor points 772, 773 for opposing belt segments 711, 712 are positioned generally up and down. position. In other aspects, the belt anchor points 770 , 771 , 772 , 773 may be circumferentially spaced from the belt anchor points 770 , 771 , 772 , 773 of the opposing belt segments 701 , 702 , 711 , 712 by any suitable distance. . In the examples shown in Figures 7A-7H and 9A-9B, belt anchor points 770, 771 are shown approximately 180 degrees apart from belt anchor points 772, 773 such that the split drive pulleys 606, 906 are approximately ±90 degrees apart. The rotation results in approximately ±180 degree rotation of the idlers 600, 601, but in other aspects where the drive ratio of the split drive pulleys 606, 609 to the idlers 600, 601 is greater than approximately 2:1 (as described below) , the relative position between the belt anchor points along the circumference of the split drive pulley may vary from approximately 180 degree intervals.

On the other end E2 of the arcs A1, A2, A11, A12, the belt anchor points 770, 771, 772, 773 are positioned so that the belt engages the end E1 of the arcs A1, A2, A11, A12 with the tangent points T1, T2, T11 The rotation angles α1, α2, α11, α12 between , T12 are about 90 degrees or less (that is, the drive belt segments 701, 702, 711, 712 are tangential to the split drive pulley 606 and are under pure tension so that the surrounding The belt segments 701, 702, 711, 712 of the split drive pulleys 606, 906 will not bend).

In one aspect, as described above, the split drive pulleys 606, 906 and idler pulleys 600, 601 may have a ratio of approximately 2:1 such that approximately ±90° rotation of the split drive pulleys 606, 906 is performed by the controller 199 (for example, corresponding to the drive belt engagement arcs A1, A2, A11, A12) resulting in approximately ±180° rotation of each idler gear 600, 601. As mentioned above, in other aspects, the drive ratio between the split drive pulleys 606, 906 and the idler pulleys 600, 601 may be greater than 2:1. For example, the drive ratio between the split drive pulleys 606, 906 and the idler pulleys 600, 601 may be approximately 2.5:1, approximately 3:1, approximately 4:1, or any suitable drive ratio configured to perform a SCARA arm. Full extension and retraction of 110, 120 and/or rotation of one SCARA arm 110, 120 relative to the other SCARA arm 110, 120 about shoulder axis SAX (eg, see Figures 5A-5G), as described herein . It can be understood that in the case where the drive ratio between the split drive pulleys 606, 906 and the idler pulleys 600, 601 is greater than approximately 2:1, the controller 199 is configured to execute the split drive pulleys 606, 906 in accordance with the drive ratio. Any appropriate amount of rotation is required to fully extend and retract the SCARA arms 110, 120.

Referring now to Figures 10A and 10B, belt anchor points 770-773 (only belt anchor point 770 is shown, but it should be understood that the other belt anchor points (including belt anchor points 643, 644) are generally similar to those for the belt Description of anchor points 770 ) couples respective drive belt segments 701 , 702 , 711 , 712 to split drive pulleys 606 , 906 . Furthermore, although the belt anchor points are described with respect to the split drive pulley 606, it should be understood that the split drive pulley 906 (and the belt anchor points for pulleys 600, 601, 602, 603, 604, 605) are generally similar. For example, in one aspect, each drive belt anchor point 770-773 includes a base 1084 for a latch 1062 to be mounted thereto. The end of each belt segment 701, 702, 711, 712 includes a hole through which one of the spokes 1080 of the latch 1062 projects. A retaining spring clip 1082 or other suitable retaining member is attached to the spoke 1080 to secure the drive belt segments 701 , 702 , 711 , 712 to the spoke 1080 . Spokes 1080 project from base 1084 to provide an attachment location for drive belt segments 701, 702, 711, 712. In other aspects, the spokes 1080 may project directly from one of the circumferential edges or sides of the split drive pulleys 606, 906. In one aspect, the holes in the belt segments 701, 702, 711, 712 are slightly larger than the spokes 1080 and the retaining clips 1082 do not tightly hold the belt segments 701, 702, 711, 712 such that the belt segments 701, 702, 711, 712 pivot freely around spokes 1080. In one aspect, the base 1084 is an adjustable base that provides position adjustment for the latch 1062 to adjust the tension of the belt segments 701, 702, 711, 712. For example, a screw 1086 passes through a critical hole in the split drive pulley 606, 906 and retains a fastening wedge 1088 adjacent the split drive pulley 606, 906. One surface of the fastening wedge 1088 engages an inclined surface 1090 of the base 1084. In order to increase the tension of the transmission belt segments 701, 702, 711, 712, the screw 1086 can be tightened and the fastening wedge 1088 can be pushed downward in the direction of arrow A. This can push the fastening wedge 1088 against the inclined surface 1090, thereby forcing the bottom seat 1084 to slide in the arrow direction B. On the contrary, if you want to reduce the tension of the transmission belt segments 701, 702, 711, 712, you can loosen the screw 1086. In other aspects, the belt segments 701, 702, 711, 712 may be coupled to the split drive pulleys 606, 906 and other pulleys 600, 601, 602, 603, 604, 605 of the transport arm 100 in any suitable manner. Suitable examples of drive belt anchor points can be found in U.S. Patent No. 5,778,730, issued July 14, 1998, which is incorporated herein by reference in its entirety.

Referring again to Figures 2, 5A-5G, 7A-7D, and Figures 11A-11C, in one aspect, the drive section 108 includes a limiting pulley section drive 108L configured to form between pulley section 606A and pulley section 606B. The relative movement between the SCARA arms 110 and 120 allows the SCARA arms 110 and 120 to rotate relative to each other about the shoulder rotation axis SAX. For example, the SCARA arms 110, 120 illustrated in Figures 5A-5G have end effectors 110E, 120E positioned in the same plane (in other aspects, the end effectors may be positioned in different planes). Here, each SCARA arm 110, 120 touches the substrate process modules PM1 to PM4, where, for example, the SCARA arm 110 can move relative to the SCARA arm 120 to touch any one of the process modules PM2 to PM4, while SCARA The telescopic axis 400R of the arm 120 is substantially aligned with the process module PM1. To rotate the SCARA arm 110 relative to the SCARA arm 120 , the limiting pulley segment drive 108L may be positioned between the pulley segments 606A, 606B such that the limiting pulley segment drive 108L may be coupled to both pulley segments 606A, 606B . In other aspects, the limiting pulley segment driver 108L may be positioned anywhere in the upper arms 110U, 120U to perform relative rotation between the pulley segments 606A, 606B. Limiting pulley segment driver 108L may be any suitable driver for performing relative movement between pulley segments 606A, 606B, such as, for example, a solenoid, stepper motor, linear actuator, or rotary actuator. In one aspect, the base 108LS of the limiting pulley segment driver 108L may be mounted to the pulley segment 606A (which is coupled to the drive shaft 250C), and the movable portion 108LM of the limiting pulley segment driver 108L may be coupled to the pulley segment. 606B. Limiting pulley segment drive 108L is coupled to controller 199 in any suitable manner to receive control signals for actuating limiting pulley segment drive 108L. In one aspect, the mating surfaces 730, 731, 740, 741 of the pulley segments 606A, 606B may be circumferentially spaced apart from each other by any suitable distance D corresponding to the pulley segments 606A, 606B and associated SCARA arm 110 The relative movement angle θ2 between , 120. To accommodate larger angles of relative movement, portions 606AP, 606BP of pulley segments 606A, 606B along which belt segments 701, 702, 711, 712 interface (such as on belt interface layer 606L2) may be retracted such that When corresponding mating surfaces 730, 731, 740, 741 contact each other, portions 606AP, 606BP move in direction 1111 relative to their respective pulley segments 606A, 606B. In yet other aspects, the drive ratio between the pulley segments 606A, 606B and the idlers 600, 601 may also be increased to provide relative rotation between the SCARA arms 110, 120 about the shoulder rotation axis SAX.

Please refer to Figures 4, 5H, 6A, 6C-6E, 6G and 12. During operation, the double-link transfer arms 110 and 120 can be aligned so that the telescopic axes 400 of the end effectors 110E and 120E are aligned with the process module. standards, such as process module PM4 (see Figures 4 and 5H) (Figure 12, block 1200), where both end effectors 110E, 120E of transfer arms 110, 120 extend into the same or common process module. In other aspects, in which each transfer arm 110, 120 can be independently rotated to have a respective telescopic axis 400R (as shown in FIG. 5B), the extension axis of the end effector 110E of the transfer arm 110 is aligned with, for example, the process mold. Group PM2 is aligned, and telescopic axis 400R of end effector 120E of transfer arm 120 is aligned with, for example, process module PM1 (Figure 12, block 1200). In one aspect, transfer arm 110 is rotatable relative to transfer arm 120 about shoulder axis SAX such that end effector 110E is aligned with one of process modules PM2-PM4, wherein at least pulley segment drive 108L is constrained is actuated to rotate pulley segment 606A relative to pulley segment 606B by a predetermined amount such that the belt anchor points 770, 771, 772, 772 of each segmented drive circuit 700, 710 are positioned relative to each other about the shoulder The axis SAX changes (as shown in Figure 11A) and the end effector 110E of the transfer arm 110 is aligned with a predetermined one of the process modules PM2-PM4 (Figure 12, block 1210).

In one aspect, one or more of the drive shafts 250A-205C may be rotated to perform relative rotation of the SCARA arms 110, 120 in addition to limiting actuation of the pulley segment driver 108L and maintaining end effector 110E, 120E. One or more are aligned with predetermined programming modules PM1 to PM4. One or more drive shafts 250A-250C may rotate to perform extension of one of the transfer arms 110, 120 such that the respective end effector 110E, 120E and the respective wrist joint 110WJ, 120WJ extend through the slot valve 681 channel 680 (See Figures 5H and 6G) (Figure 12, block 1220). In one aspect, one of the transfer arms 110, 120 is extended while the other transfer arm 110, 120 remains retracted. In one aspect, when one transfer arm 110 , 120 is retracted from the process module, the other transfer arm 110 , 120 can be extended substantially simultaneously or when the at least one transfer arm 110 , 120 is substantially fully retracted. It is then extended to perform rapid exchange of substrates to/from the process module (Figure 12, block 1230). In one aspect, at least a portion of or the entire wrist joint 110WJ, 120WJ of each transfer arm 110, 120 can extend through the slot valve 681 channel or hole 680 to pick up or place substrates in the respective process module. The substrate holding position 500 is used for rapid substrate exchange or substrate transfer without rapid exchange.

As discussed above, the drive section 106 includes a Z-axis drive 190 operatively connectable to at least one of the transfer arms 110 , 120 . The Z-axis driver 190 generates Z-axis travel of one or more of the at least one end effector 110E and the other end effector 120E to provide a respective total stack height 672 (FIG. 6G) based on the respective stack height profile 671 and the channel 680. The gaps between GAP1 and GAP2 (see Figure 6G) are used to adjust the Z height of the end effectors 110E and 120E to pass through the slot valve 681 channel 680 (Figure 12, block 1240). For example, the Z height of end effector 110E of arm 110 may be adjusted such that at least part of end effector 110E and wrist joint 110WJ extend through channel 680 for transferring substrates to and from the process module. After the arm 110 is substantially retracted, the Z-height of the end effector 120E can be adjusted (such as with the end effector positioned up and down, as shown in FIG. 4 ) such that at least part of the end effector 120E and wrist joint 120WJ Extend through the same or different channels 680 to transfer substrates to and from the same or different process modules.

In one aspect, a substrate processing apparatus 100 is provided having a rack, a substrate transport apparatus coupled to the rack 106 and including a drive segment 108 having at least one degree of freedom, and SCARA arms 110, 120 driven by the drive segment 108, wherein is a dual link arm plus end effectors 110E, 120E that are pivotally coupled to the dual link arm front arms 110F, 120F via wrist joint pulleys 604, 605 which A drive circuit configured such that the end effector layer is set relative to the frame 106 by the wrist joint pulleys 604, 605 and via individual belt segments 660A, 660B, 661A, 661B connected to the wrist joint pulleys 604, 605 660, 661 to extend and retract the SCARA arm to perform rotation of the end effector 110E, 120E relative to the forearm 110F, 120F (Figure 13, block 1300). The substrate S (FIG. 4) is transported by the end effector 110E, 120E by using at least one degree of freedom of the drive segment 108 to extend and retract the SCARA arms 110, 120 (FIG. 13, block 1310). During transportation, one of the belt segments 660B, 661B is wrapped around the wrist joint pulleys 604, 605 and is wrapped around the end effector that sits against the wrist joint pulleys 604, 605, which are configured relative to the frame 106 layer) on the contact surfaces 610 of the end effectors 110E, 120E on the seating surfaces 604ES, 605ES. When transporting the substrate S, the end effectors 110E, 120E utilize another degree of freedom of the drive section 108 to move along the Z-axis to the substrate transport plane STP defined by the channel 680 of the slot valve 681 connected to the frame 106 (Fig. 6G), and transporting the substrate includes moving the end effectors 110E, 120E along the substrate transport plane STP such that at least part of the end effectors 110E, 120E and the wrist joint pulleys 604, 605 pass through the slot valve 681 channel 680 .

According to one or more aspects of this embodiment, a substrate processing apparatus includes:

rack; and

A SCARA arm pivotally mounted to the frame at a shoulder joint of the SCARA arm, the SCARA arm being a dual link arm having at least one end effector cantilevered from the dual link arm, the dual link arm A link arm defines an upper arm, including and defining the shoulder joint at one end, and is pivotally connected to an elbow joint of the upper arm anterior arm to define the SCARA arm, each of the at least one end effector in the SCARA The arm is pivotally connected to the forearm at its wrist joint for rotation about the wrist joint axis relative to the forearm; and

A drive segment having at least one degree of freedom that is operatively coupled to the SCARA arm via a transmission mechanism to rotate the SCARA arm about a shoulder axis at the shoulder joint and to articulately extend and retract the SCARA arm. return; return

wherein the at least one end effector is coupled to a wrist joint pulley configured to extend and retract the SCARA arm to perform the wrist joint pulley together with the coupled at least one end effector to rotation of a unit relative to the forearm about the wrist joint axis; and

wherein the height of the at least one end effector is within a stack height profile of the wrist joint such that the total stack height of the at least one end effector and wrist joint is sized to conform to and pass through the channel of the slot valve.

According to one or more aspects of this embodiment, the stack height profile of the wrist joint includes a wrist joint pulley and a SCARA arm extending the wrist through a channel extending the at least one end effector and through the slot valve. At least part of the joint pulley.

According to one or more aspects of this embodiment, the substrate processing apparatus further includes a segmented transmission circuit of an individual belt segment coupled to the wrist joint pulley to perform rotation of the wrist joint pulley, the belt segment At least one of them has a height that stands upright across the layer contact surface of the end effector that contacts and sits against the layer surface of the wrist joint pulley forming part of the coupling between the pulley and the end effector.

According to one or more aspects of this embodiment, the substrate processing apparatus further includes another SCARA arm mounted to the frame, such that the shoulder axis is about a common shoulder of both the SCARA arm and the other SCARA arm. department axis.

According to one or more aspects of this embodiment, the other SCARA arm has another end effector at another wrist joint, and wherein the other end effector and the other wrist joint define another stack A height profile that has a total stack height sized to conform to the passage through the slot valve.

According to one or more aspects of this embodiment, the SCARA arm and the other SCARA arm are constructed such that the at least one end effector and the other end effector respectively define different transfer planes stacked on top of each other.

According to one or more aspects of this embodiment, the drive section includes a Z-axis drive operatively connectable to at least one of the SCARA arm and the other SCARA arm, and the Z-axis drive is based on the respective stack height profile The Z-axis travel of one or more of the at least one end effector and the other end effector is generated by the clearance between the respective total stack height and the channel.

According to one or more aspects of this embodiment, the wrist joint pulley is coupled to the drive section by a segmented transmission circuit of individual belt segments, at least one individual belt segment being positioned close adjacent the A layer edge of the wrist joint pulley of at least one end effector protrudes toward the at least one end effector from a layer seating surface of the at least one end effector that is seated against the wrist joint pulley.

According to one or more aspects of this embodiment, the belt anchor points connecting each of the individual belt segments to the wrist joint pulley are positioned such that at least one of the individual belt segments wraps around the pulley, Such that the peripheral edge of the pulley closest to the at least one end effector and relative to the at least one individual belt segment surround is positioned at or below the level of the surround.

According to one or more aspects of this embodiment, the wrist joint pulley has an end effector interface seating surface that seats against the at least one end effector, defining an end effector layer relative to the frame, and the An end effector interface seating surface is located at the same level or below as at least one of the individual belt segments coupled to the wrist joint pulley.

According to one or more aspects of this embodiment, a substrate processing apparatus includes:

rack; and

A SCARA arm pivotally mounted to the frame at a shoulder joint of the SCARA arm, the SCARA arm being a dual link arm having at least one end effector cantilevered from the dual link arm, the dual link arm A link arm defines an upper arm, including and defining the shoulder joint at one end, and is pivotally connected to an elbow joint of the upper arm anterior arm to define the SCARA arm, each of the at least one end effector in the SCARA The arm is pivotally connected to the forearm at its wrist joint for rotation about the wrist joint axis relative to the forearm; and

A drive segment having at least one degree of freedom that is operatively coupled to the SCARA arm via a transmission mechanism to rotate the SCARA arm about a shoulder axis at the shoulder joint and to articulately extend and retract the SCARA arm. return; return

wherein at least one end effector is coupled to a wrist joint pulley configured to allow the SCARA arm to extend and retract to perform the wrist joint pulley together with the coupled at least one end effector in a Rotation of the unit relative to the forearm about the wrist joint axis; and

wherein the wrist joint pulley is coupled to the drive section by a segmented drive circuit of individual drive belt segments, and the wrist joint pulley has an end effector interface seating surface that seats against the end effector, defining Relative to the end effector layer of the frame, the end effector interface seating surface is at or below the same layer as at least one of the individual drive belt segments coupled to the pulley.

According to one or more aspects of this embodiment, the height of the at least one end effector is within the stack height profile of the wrist joint, such that the total stack height of the at least one end effector and the wrist joint is sized Follow the shape and pass through the channel of the slot valve.

According to one or more aspects of this embodiment, the stacked height profile of the wrist joint includes the wrist joint pulley and the SCARA arm extension extending the at least one end effector and the wrist joint pulley passing through the channel at least part of.

According to one or more aspects of this embodiment, at least one of the belt segments has a height that stands upright across a layer contact surface of the end effector that contacts and sits against the interface of the wrist joint pulley. The layer surface of the seating surface forms part of the coupling between the pulley and the end effector.

According to one or more aspects of this embodiment, the belt anchor points connecting each of the individual belt segments to the wrist joint pulley are positioned such that at least one of the individual belt segments wraps around the pulley, Such that the peripheral edge of the pulley closest to the at least one end effector and relative to the at least one individual belt segment surround is positioned at or below the level of the surround.

According to one or more aspects of this embodiment, the substrate processing apparatus further includes another SCARA arm mounted to the frame, such that the shoulder axis is about a common shoulder of both the SCARA arm and the other SCARA arm. department axis.

According to one or more aspects of this embodiment, a method of processing a substrate in a substrate processing device is provided. This method includes the following steps:

The substrate processing device is provided with: a frame; a substrate transport device coupled to the frame, including a drive section having at least one degree of freedom; and a SCARA arm driven by the drive section, which is a double link arm plus An end effector is pivotally coupled to the dual-link arm front arm by a wrist joint pulley constructed such that the end effector layer relative to the frame is The rotation of the end effector relative to the forearm is effected by extension and retraction of the transmission circuit set by the wrist joint pulley and with which the SCARA arm is effected by separate belt segments connected to the wrist joint pulley; and

transporting the substrate by the end effector by extending and retracting the SCARA arm using the at least one degree of freedom of the drive segment;

wherein during transportation, one of the belt segments is wrapped around the wrist joint pulley and is set relative to the machine around a contact surface of the end effector that is seated against the seating surface of the wrist joint pulley. Frame this end effector layer.

According to one or more aspects of this embodiment, the method further includes using another degree of freedom of the drive segment to move the end effector along the Z-axis to a position defined by a slot valve channel connected to the frame. a substrate transport plane, and wherein transporting the substrate includes moving the end effector along the substrate transport plane such that at least part of the end effector and the wrist joint pulley pass through the slot valve channel.

According to one or more aspects of this embodiment, a method is provided. The method includes:

Provide a rack for substrate processing equipment;

A SCARA arm is provided pivotally mounted to the frame at a shoulder joint of the SCARA arm, the SCARA arm being a double link arm having at least one end effector cantilevered therefrom, the A dual link arm defines an upper arm, including and defining the shoulder joint at one end, and is pivotally connected to an elbow joint in front of the upper arm to define the SCARA arm, each of the at least one end effector at the The wrist joint of the SCARA arm is pivotally connected to the forearm and coupled to a wrist joint pulley for rotation about the wrist joint axis relative to the forearm;

providing a drive segment having at least one degree of freedom operatively coupled to the SCARA arm via a transmission mechanism to rotate the SCARA arm about a shoulder axis at the shoulder joint and to articulately extend the SCARA arm; retract; and

When the SCARA arm is extended and retracted, performing rotation of the wrist joint pulley and at least one end effector of the coupling together as a unit relative to the forearm around the wrist joint axis,

wherein the height of the at least one end effector is within a stack height profile of the wrist joint such that the total stack height of the at least one end effector and wrist joint is sized to conform to and pass through the channel of the slot valve.

According to one or more aspects of this embodiment, the stack height profile of the wrist joint includes a wrist joint pulley and a SCARA arm extending the wrist through a channel extending the at least one end effector and through the slot valve. At least part of the joint pulley.

According to one or more aspects of this embodiment, the method further includes performing rotation of the wrist joint pulley by a segmented transmission circuit coupled to an individual belt segment of the wrist joint pulley, the belt segment being At least one has a height that stands upright across the layer contact surface of the end effector that contacts and sits against the layer surface of the wrist joint pulley forming part of the coupling between the pulley and the end effector.

According to one or more aspects of this embodiment, the method further includes providing another SCARA arm mounted to the frame such that the shoulder axis is with respect to a common shoulder of both the SCARA arm and the other SCARA arm. axis.

According to one or more aspects of this embodiment, the other SCARA arm has another end effector at another wrist joint, and wherein the other end effector and the other wrist joint define another stack A height profile that has a total stack height sized to conform to the passage through the slot valve.

According to one or more aspects of this embodiment, the SCARA arm and the other SCARA arm are constructed such that the at least one end effector and the other end effector respectively define different transfer planes stacked on top of each other.

According to one or more aspects of this embodiment, the method further includes using the Z-axis driver of the drive segment operatively connected to at least one of the SCARA arm and the other SCARA arm based on the respective stack height profile. The gap between the respective total stack height and the channel creates the Z-axis travel of one or more of the at least one end effector and the other end effector.

According to one or more aspects of this embodiment, the wrist joint pulley is coupled to the drive section by a segmented transmission circuit of individual belt segments, at least one individual belt segment being positioned close adjacent the A layer edge of the wrist joint pulley of at least one end effector protrudes toward the at least one end effector from a layer seating surface of the at least one end effector that is seated against the wrist joint pulley.

According to one or more aspects of this embodiment, the belt anchor points connecting each of the individual belt segments to the wrist joint pulley are positioned such that at least one of the individual belt segments wraps around the pulley, Such that the peripheral edge of the pulley closest to the at least one end effector and relative to the at least one individual belt segment surround is positioned at or below the level of the surround.

According to one or more aspects of this embodiment, the wrist joint pulley has an end effector interface seating surface that seats against the at least one end effector, defining an end effector layer relative to the frame, and the An end effector interface seating surface is located at the same level or below as at least one of the individual belt segments coupled to the wrist joint pulley.

According to one or more aspects of this embodiment, a substrate processing device is provided. The substrate processing device includes:

rack; and

A substrate transport device coupled to the frame, including a drive segment having at least one degree of freedom; and a SCARA arm driven by the drive segment, which is a dual link arm plus an end effector, the end effector being driven by A wrist joint pulley is pivotally coupled to the dual link arm front arm, the wrist joint pulley is configured such that the end effector layer relative to the frame is set by the wrist joint pulley and SCARA The arm performs rotation of the end effector relative to the forearm by extension and retraction of a drive circuit of individual drive belt segments connected to the wrist joint pulley; and

wherein the end effector is configured to transport the substrate by extending and retracting the SCARA arm using the at least one degree of freedom of the drive segment; and

wherein during transportation, one of the belt segments is wrapped around the wrist joint pulley and is set relative to the machine around a contact surface of the end effector that is seated against the seating surface of the wrist joint pulley. Frame this end effector layer.

According to one or more aspects of this embodiment, another degree of freedom of the drive segment moves the end effector along the Z-axis to a substrate transport plane defined by a slot valve channel connected to the rack, And wherein, the end effector transports the substrate along the substrate transport plane, such that at least part of the end effector and the wrist joint pulley pass through the slot valve channel.

It should be understood that the above description is only an explanation of various aspects of this embodiment. Various substitutions and modifications may be devised by those skilled in the art without departing from aspects of the present embodiment. Accordingly, the various aspects of the present embodiments are intended to cover all such alternatives and modifications that fall within the scope of any claims dependent thereon. Furthermore, the fact that different features are recited in mutually different dependent or independent terms does not mean that a combination of these features cannot be used to advantage, for such a combination remains within the scope of the aspect of the invention.

100:Substrate processing device 106:Rack 108: Drive section 108L: Limited pulley segmented drive 108LM: Movable part 108LS: bottom seat 110:SCARA arm 110E: End effector 110EL:Length 110EP: Wrist plate 110F: Forearm link 110FL:Length 110FR: Recessed portion or notch 110FS: Upper surface 110H:Height 110HT: height 110SJ: Shoulder joint 110U: Upper arm link 110UL:Length 110WJ: Wrist joint 120:SCARA arm 120C:Inner shaft 120E: End effector 120EL:Length 120EP: Wrist plate 120F: Forearm link 120FL: length 120FR: Recessed portion or notch 120FS: Upper surface 120H: height 120HT: height 120SJ: Shoulder joint 120U: Upper arm link 120UL:Length 120WJ: Wrist joint 190:Z axis drive 205C: Drive shaft 241:Drive shaft assembly 242:First motor 244:Second motor 246:Third motor 248A: First stator 248B: Second stator 248C:Third stator 250A: Intermediate shaft 250B:Outer shaft 250C:Inner shaft 260A:First rotor 260B: Second rotor 260C:Third rotor 262:Sleeve 264: Position sensor 299: Transmission 400:Extend direction 400:Telescopic axis 400R: telescopic axis 437:End 438:End 500: Deep substrate holding station 520: Medial side 600:Idler pulley 601:Idler wheel 602: Elbow drive pulley 603: Elbow drive pulley 604:Idler pulley 604ES: End effector interface seating surface 605:Idler pulley 605ES: End effector interface seating surface 606: Split drive pulley 606A: Pulley segments 606AP:Part 606B: Pulley segmentation 606BP:Part 606L1: Drive belt interface layer 606L2: Transmission belt interface layer 606L2A: Interface layer part 606L2B: Interface layer part 606L3: Transmission belt interface layer 609: Split drive pulley 610: Layer contact/seating surface 612:Top edge or surface 613: Bottom interface 614: concave part 615:Layer surface 619: Hole or space 620:Side wall 620A:Bearing 620B:Bearing 622:Top edge 630: concave part 635: Drive belt surrounding surface 636: Drive belt surrounding surface 643: Drive belt anchor point 644: Drive belt anchor point 645: Drive belt anchor point 645: Drive belt anchor point 646: Drive belt anchor point 650: Edge around the stepped pulley 651: First surrounding part 652:Second surrounding part 660: Segmented transmission circuit 660A: Drive belt segmentation 660B: Drive belt segmentation 660H: height 661: Segmented transmission circuit 661A: Drive belt segmentation 661B: Drive belt segmentation 661H:Height 670:Height 671: stack height profile 672:Total stack height 680:Channel 681:Slot valve 698:Second height 699: first height 700: Segmented transmission circuit 701: Drive belt segmentation 702: Drive belt segmentation 710: Segmented transmission circuit 711: Drive belt segmentation 712: Drive belt segmentation 730:Mating surface 731:Mating surface 740:Mating surface 741:Mating surface 770: Drive belt anchor point 771: Drive belt anchor point 772: Drive belt anchor point 773: Drive belt anchor point 906: Split drive pulley 906L1: Drive belt interface layer 906L2: Drive belt interface layer 1062:Latch 1080:spoke 1082: Keep spring clip 1084: Bottom seat 1086:Screw 1088: Fastening wedge 1090: Inclined surface 1111: Direction 1200:block 1210:block 1220: Square 1230:block 1240:block 1300:block 1310:block 5020:Transfer cabin S:Substrate SAX: shoulder rotation axis EX1:Elbow rotation axis WX1: wrist rotation axis EX2:Elbow rotation axis WX2: wrist rotation axis SHT:shaft BRG: bearing ID:inner diameter OD: outer diameter PM1: Process module PM2: Process module PM4: Processing Module DIST:offset distance B1: Drive belt meshing arc B2: Drive belt meshing arc B11: Drive belt meshing arc B12: Drive belt meshing arc TT1: cut point TT2: cut point TT11:cut point TT12: cut point EE1: end EE2: the other end θ1: rotation angle θ2: rotation angle θ11: rotation angle θ12: rotation angle BH: Common belt height GAP1: Gap GAP2: Gap STP: Substrate transport plane

The above aspects and other features of the disclosed embodiments will be explained in the following description in conjunction with the accompanying drawings, in which:

[Fig. 1] is a schematic diagram of a substrate transport device according to one or more aspects of this embodiment;

[Fig. 2] is a schematic diagram of a portion of a substrate transport device according to one or more aspects of this embodiment;

[Figures 3A and 3B] are schematic diagrams of parts of the substrate transport device of Figure 1 according to one or more aspects of this embodiment;

[Fig. 4] is a schematic diagram of a substrate transport device according to one or more aspects of this embodiment;

[Figures 5A-5G] are schematic diagrams of a substrate transport device according to one or more aspects of this embodiment;

[Figure 5H] is a schematic diagram of the transfer arm extending through the slot valve according to one or more aspects of this embodiment;

[Figures 6A and 6B] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figures 6C-6E] are schematic diagrams of parts of the end effector drive transmission mechanism according to one or more aspects of this embodiment;

[Fig. 6F] is a schematic cross-sectional view of the wrist joint of the transferred arm according to one or more aspects of this embodiment;

[Figure 6G] is a schematic diagram of the wrist joint of Figure 6F extending through the slot valve according to one or more aspects of this embodiment;

[Figures 6H and 6I] are schematic diagrams of portions of respective transfer arm end effectors according to one or more aspects of this embodiment;

[Figures 6J-6M] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figures 7A-7H] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figures 8A and 8B] are schematic diagrams of parts of a conventional substrate transport device;

[Figures 9A and 9B] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figures 10A and 10B] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figures 11A to 11C] are schematic diagrams of parts of a substrate transport device according to one or more aspects of this embodiment;

[Figure 12] is a flow chart of a method according to one or more aspects of this embodiment; and

[Fig. 13] is a flow chart of a method according to one or more aspects of this embodiment.

500: Deep substrate holding station

520: Medial side

680:Channel

681:Slot valve

5020:Transfer cabin

SAX: shoulder rotation axis

WX1: wrist rotation axis

PM4: Processing Module

DIST:offset distance

R: Telescopic axis

Claims (20)

A substrate processing device including: rack; A SCARA arm pivotally mounted to the frame at a shoulder joint of the SCARA arm, the SCARA arm being a dual link arm having at least one end effector cantilevered from the dual link arm, the dual link arm A link arm defines an upper arm, including and defining the shoulder joint at one end, and is pivotally connected to an elbow joint of the upper arm anterior arm to define the SCARA arm, each of the at least one end effector in the SCARA The wrist joint of the arm is pivotally connected to the forearm for rotation about the wrist joint axis relative to the forearm and by means of the wrist joint through the slot valve; and A drive section having at least one degree of freedom that is operatively coupled to the SCARA arm via a transmission mechanism to rotate the SCARA arm about a shoulder axis at the shoulder joint and to articulately extend and retract the SCARA arm. return; wherein the at least one end effector is coupled to a wrist joint pulley configured to allow the SCARA arm to extend and retract to perform the wrist joint pulley together with the coupled at least one end effector in a Rotation of the unit relative to the forearm about the wrist joint axis; and The wrist joint pulley is coupled to the drive section by segmented individual belt segments, with at least one individual belt segment proximal to a layer edge of the wrist joint pulley adjacent the at least one end effector and seated from The layer seating surface of the at least one end effector of the wrist joint pulley projects toward the at least one end effector. The substrate processing apparatus of claim 1, wherein the height of the at least one end effector is within a stacking height profile of the wrist joint, such that the total stacking height of the at least one end effector and the wrist joint is set to a size Follow the shape and pass through the channel of the slot valve. The substrate processing apparatus of claim 2, wherein the stack height profile of the wrist joint includes the wrist joint pulley and the wrist extending the at least one end effector and the channel through the slot valve At least part of the joint pulley. The substrate processing apparatus of claim 2, further comprising another SCARA arm mounted to the frame such that the shoulder axis is a common shoulder axis of both the SCARA arm and the other SCARA arm, wherein, the The other SCARA arm has another end effector at the other wrist joint, and wherein the other end effector and the other wrist joint define another stack height profile that is sized to conform and pass The total stacking height of this channel in this slot valve. The substrate processing apparatus of claim 4, wherein the SCARA arm and the other SCARA arm are constructed such that the at least one end effector and the other end effector respectively define different transfer planes stacked on top of each other. The substrate processing apparatus of claim 4, wherein the drive section includes a Z-axis drive operatively connectable to at least one of the SCARA arm and the other SCARA arm, and the Z-axis drive is based on the respective stack height profiles. The gap between the respective total stack height and the channel creates the Z-axis travel of one or more of the at least one end effector and the other end effector. The substrate processing apparatus of claim 1, wherein at least one of the segmented individual belt segments has a height that vertically spans a layer contact surface of the at least one end effector contacting and abutting The coupling between the wrist pulley and the at least one end effector is on the layer surface of the wrist pulley forming part. The substrate processing apparatus of claim 1, further comprising another SCARA arm mounted to the frame such that the shoulder axis becomes a common shoulder axis of both the SCARA arm and the other SCARA arm. The substrate processing apparatus of claim 1, wherein the belt anchor points connecting each of the individual belt segments to the wrist joint pulley are positioned such that at least one of the individual belt segments wraps around the pulley such that The peripheral edge of the pulley closest to the at least one end effector and relative to the at least one individual belt segment surround is positioned at or below the level of the surround. The substrate processing apparatus of claim 1, wherein the wrist joint pulley has an end effector interface seating surface that seats against the at least one end effector, defining an end effector layer relative to the frame, and the end effector The effector interface seating surface is at the same level as or beneath at least one of the segmented individual drive belt segments coupled to the wrist joint pulley. A method of processing a substrate in a substrate processing device, the method comprising: A substrate processing apparatus is provided, which includes: rack; A SCARA arm pivotally mounted to the frame at a shoulder joint of the SCARA arm, the SCARA arm being a dual link arm having at least one end effector cantilevered from the dual link arm, the dual link arm A link arm defines an upper arm, including and defining the shoulder joint at one end, and is pivotally connected to an elbow joint of the upper arm anterior arm to define the SCARA arm, each of the at least one end effector in the SCARA The wrist joint of the arm is pivotally connected to the forearm for rotation about the wrist joint axis relative to the forearm and by means of the wrist joint through the slot valve; and A drive segment having at least one degree of freedom that is operatively coupled to the SCARA arm via a transmission mechanism to rotate the SCARA arm about a shoulder axis at the shoulder joint and to articulately extend and retract the SCARA arm. return; and transporting the substrate by the end effector by extending and retracting the SCARA arm using the at least one degree of freedom of the drive segment; wherein the at least one end effector is coupled to a wrist joint pulley configured to allow the SCARA arm to extend and retract to perform the wrist joint pulley together with the coupled at least one end effector in a Rotation of the unit relative to the forearm about the wrist joint axis; and The wrist joint pulley is coupled to the drive section by segmented individual belt segments, with at least one individual belt segment proximal to a layer edge of the wrist joint pulley adjacent the at least one end effector and seated from The layer seating surface of the at least one end effector of the wrist joint pulley projects toward the at least one end effector. The method of claim 11, wherein the height of the at least one end effector is within a stack height profile of the wrist joint such that the total stack height of the at least one end effector and wrist joint is sized to conform And through the channel of the slot valve. The method of claim 12, wherein the stacked height profile of the wrist joint includes the wrist joint pulley and at least a portion of the wrist joint pulley extending the at least one end effector and extending through the channel . The method of claim 12, further comprising: providing another SCARA arm mounted to the frame such that the shoulder axis becomes a common shoulder axis of both the SCARA arm and the other SCARA arm, wherein the other SCARA arm A SCARA arm has another end effector at another wrist joint, and wherein the other end effector and the other wrist joint define another stack height profile that is sized to conform to and pass through the The total stacking height of this channel of the slot valve. The method of claim 14, wherein the SCARA arm and the other SCARA arm are constructed such that the at least one end effector and the other end effector respectively define different transfer planes stacked on top of each other. The method of claim 14, wherein the drive section includes a Z-axis driver operatively connectable to at least one of the SCARA arm and the other SCARA arm, the method further comprising: by the Z-axis driver, based on The gap between the respective total stack height of the respective stack height profile and the channel creates the Z-axis travel of one or more of the at least one end effector and the other end effector. The method of claim 11, wherein at least one of the segmented individual belt segments has a height that stands upright across the layer contact surface of the at least one end effector contacting and seated against the wrist The wrist joint pulley forms part of the layer surface of the coupling between the wrist joint pulley and the at least one end effector. The method of claim 11, further comprising providing another SCARA arm mounted to the frame such that the shoulder axis becomes a common shoulder axis for both the SCARA arm and the other SCARA arm. The method of claim 11, wherein the belt anchor points connecting each of the individual belt segments to the wrist joint pulley are positioned such that at least one of the individual belt segments wraps around the pulley so as to be closest to the pulley. The at least one end effector and the pulley peripheral edge relative to the at least one individual belt segment surround are positioned at or below the level of the surround. The method of claim 11, wherein the wrist joint pulley has an end effector interface seating surface that seats against the at least one end effector defining an end effector layer relative to the frame, and the end effector The interface seating surface is at the same level as or beneath at least one of the segmented individual drive belt segments coupled to the wrist joint pulley.

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