TW202402488A - Method and apparatus for substrate transport apparatus position compensation , substrate transport empiric arm droop mapping apparatus, substrate transport apparatus, and substrate processing tool - Google Patents

Abstract

A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

Description

Methods and equipment for position compensation of substrate conveying equipment, substrate conveying experience arm droop surveying equipment, substrate conveying equipment, and substrate processing tools

[0001] Exemplary embodiments relate generally to robotic systems, and more particularly to robotic conveyor devices.

[0002] More precise repeatability with respect to substrate positioning is, for example, desirable for semiconductor substrate processing. For example, semiconductor substrate transfer equipment designs have evolved to applications with increasing throughput requirements, higher process module temperatures, and smaller transfer openings between process modules of processing equipment. In particular, as the end effector of the conveying device enters and exits the process module through the conveying opening, the smaller conveying opening limits the allowable vertical displacement of the end effector. As a result, the mechanical design challenge for substrate transfer equipment lies in the selection of materials and arm link geometries to maximize the static and dynamic stiffness of the individual arm links as well as the end effector. The choice of materials and arm link geometry can result in high costs and the target vertical displacement may not be achieved. [0003] It would be advantageous to provide a substrate transport apparatus that overcomes the above problems by minimizing vertical displacement of the end effector and the substrate above it as the substrate transport apparatus extends and retracts to a predetermined location within the processing apparatus.

[0004] In accordance with one or more aspects of the disclosure, provided is a substrate transfer arm empirical droop mapping apparatus for a substrate transfer system of a processing tool. The mapping device includes: a frame; an interface configured on the frame to form a datum feature that represents a substrate transfer space in the processing tool defined by the substrate transfer system; a substrate transfer arm that is articulated and has a substrate holder, and mounted to the frame in predetermined relationship to at least one datum feature; and a registration system configured relative to the substrate transfer arm and the at least one datum feature such that due to a first arm position and a second arm position different from the first arm position The registration system registers the experienced arm droop distance in the arm droop distance register based on arm droop changes caused by the movement of the substrate holder in the transport space along at least one motion axis between positions. According to one or more aspects of the disclosure, the arm sag distance register is described at a first arm position and a second arm position and at a third arm position that is simultaneously different from the first and second arm positions. The empirical arm droop distance in which the substrate holder moves along at least one axis of motion. [0006] According to one or more aspects of the disclosed embodiments, the arm droop distance register is implemented to define a curve that describes the arm droop distance with respect to the position of the arm as the substrate holder moves along at least one axis of motion. change. [0007] In accordance with one or more aspects of the disclosure, a curve depicts arm droop variation with respect to arm position as a substrate holder moves along more than one different axis of motion that defines substrate transport Transfer plane or transfer volume in space. [0008] In accordance with one or more aspects of the disclosed aspects, a curve describes discrete arm droop distance changes with respect to arm position for substrate holder motion along each of more than one different axis of motion. [0009] According to one or more aspects of the disclosed embodiments, the arm drop distance register is implemented as a data lookup table or algorithm. According to one or more aspects of the disclosed embodiments, at least one axis of motion is an extension axis of the substrate transfer arm in at least each quadrant of the substrate transfer space surrounding the substrate transfer arm, or at least the substrate transfer arm The rotation axis, or at least the lifting axis of the substrate transfer arm. [0011] According to one or more aspects of the disclosed embodiments, the substrate transfer arm is mounted with a drive section having a coaxial drive spindle that drives movement of the arm. [0012] According to one or more aspects of the disclosed embodiments, the substrate transfer arm may be selected from a plurality of different and interchangeable transfer arms, each transfer arm having a different corresponding transfer arm registered by the registration system of the equipment. Arm sag distance registers, each register describing the empirical arm sag distance specific to the corresponding delivery arm. [0013] According to one or more aspects of the disclosure, a method includes: providing a frame having an interface disposed on the frame, the interface forming a datum feature representative of a substrate transport system defined by a processing tool a substrate transfer space in the processing tool; mounting a substrate transfer arm to the frame in a predetermined relationship to at least one datum feature, the substrate transfer arm being an articulated arm and having a substrate holder; and due to differences in the first arm position and Changes in arm sag caused by movement of the substrate holder in the transport space between the first arm position and the second arm position along at least one axis of motion are configured relative to the substrate transport arm and at least one datum feature. Register the system and register the experienced arm sag distance in the arm sag register. According to one or more aspects of the disclosure, the arm sag distance register is described at a first arm position and a second arm position and at a third arm position that is simultaneously different from the first and second arm positions. The empirical arm droop distance in which the substrate holder moves along at least one axis of motion. [0015] According to one or more aspects of the disclosed embodiments, the arm droop distance register is implemented to define a curve describing the arm droop distance with respect to the position of the arm as the substrate holder moves along at least one axis of motion. change. [0016] In accordance with one or more aspects of the disclosure, a curve depicts arm droop variation with respect to arm position as a substrate holder moves along more than one different axis of motion that defines substrate transport Transfer plane or transfer volume in space. [0017] In accordance with one or more aspects of the disclosed aspects, the curve describes discrete arm droop distance changes with respect to arm position for substrate holder motion along each of more than one different axis of motion. [0018] According to one or more aspects of the disclosed embodiments, the arm drop distance register is implemented as a data lookup table or algorithm. According to one or more aspects of the disclosed embodiments, at least one axis of motion is an extension axis of the substrate transfer arm in at least each quadrant of the substrate transfer space surrounding the substrate transfer arm, or at least the substrate transfer arm The rotation axis, or at least the lifting axis of the substrate transfer arm. [0020] According to one or more aspects of the disclosed embodiments, the substrate transfer arm is mounted with a drive section having a coaxial drive spindle that drives movement of the arm. [0021] According to one or more aspects of the disclosed embodiments, further comprising: selecting a substrate transfer arm from a plurality of different and interchangeable transfer arms, each transfer arm having a different corresponding registration by the registration system Arm sag distance registers, each register describing the empirical arm sag distance specific to the corresponding delivery arm. According to one or more aspects of the disclosed embodiments, a substrate transport apparatus includes: a frame; a drive area connected to the frame; a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of movement with respect to the frame, in a first position and at a position different from the first position between the second position and moving relative to the frame; and a controller operatively connectable to the drive area so as to effect articulation of the conveyor arm, the controller including an arm sag compensator configured to cause the arm sag compensator to resolve The empirical droop distance of the conveyor arm between the first position and the second position due to droop of the conveyor arm. [0023] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves substantially the entire empirical sag distance of the conveyor arm. According to one or more aspects of the disclosed embodiments, the compensator has an arm droop distance register, and the arm droop compensator determines between the first position and the second position of the delivery arm from the arm droop distance register. The experienced sag distance between. [0025] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in size and direction with a drive area, which compensates and resolves the conveyor arm as determined by the arm sag distance register. Approximately the entire experience sag distance. According to one or more aspects of the disclosure, the compensating motion results in the elimination of substantially the entire empirical sag distance of the transport arm relative to a predetermined reference datum, such that the substrate is clamped at a predetermined location in the transport space The device is in the net position and in the direction in which the display arm droops, which position is independent of the conveyor arm droop. [0027] In accordance with one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. [0028] In accordance with one or more aspects of the disclosed aspects, the controller performs a compensating movement such that the substrate holder completes the movement to a predetermined location approximately at a net position. [0029] In accordance with one or more aspects of the disclosed aspects, the controller implements compensating motion, and the arm motion causes the substrate holder to move along an optimal path with a temporally optimal trajectory between the first position and the second position. Move between two positions. [0030] According to one or more aspects of the disclosed aspects, the drive region and the transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, and the arm sag distance register describes more than one degree of freedom throughout the transfer arm. The droop distance of the empirical arm in the transport space formed by one degree of freedom of movement. [0031] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm droop characteristics and associated corresponding droop distance registers, which describe the empirical arm droop distance of the associated arm. [0032] In accordance with one or more aspects of the disclosed aspects, a substrate processing tool is provided with a substrate transport apparatus as described herein and has a substrate clamping station configured to interface with a predetermined location in the transport space. The substrates on the substrate holder form an interface, and the substrate clamping station is positioned so that the interface is implemented independently of the transport arm droop. [0033] According to one or more aspects of the disclosed aspects, a substrate processing tool is provided with a substrate transport device as described herein and has a predetermined structure that interacts with the transport arm or substrate holder and is configured to So that the interaction is performed independently of the conveyor arm drooping. According to one or more aspects of the disclosure, a substrate processing tool includes: a frame; a drive area connected to the frame; a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of movement with respect to the frame, in a first position and at a position different from the first position between the second position and moving relative to the frame; and a controller operatively connectable to the drive zone so as to implement articulation of the conveyor arm, the controller configured to implement the arm drooping opposite to the display arm with the drive zone The arm droop is compensated for by movement in the direction of the arm droop such that the entire empirical arm droop distance due to the arm droop between the first position and the second position is substantially eliminated with respect to the predetermined reference datum. According to one or more aspects of the disclosed embodiments, the controller has an arm droop distance register, and the controller determines the position of the delivery arm between the first position and the second position from the arm droop distance register. Experience arm drop distance. [0036] According to one or more aspects of the disclosed aspects, the drive region and the transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, and the arm sag distance register describes more than one degree of freedom throughout the transfer arm. The droop distance of the empirical arm in the transport space formed by one degree of freedom of movement. [0037] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm droop characteristics and associated corresponding arm droop distance registers, which describe the empirical arm droop distance of the associated arm. According to one or more aspects of the disclosure, the compensating motion results in the elimination of substantially the entire empirical arm sag distance of the transport arm relative to a predetermined reference datum, such that the substrate clamp at a predetermined location in the transport space The holder is in the net position, and in the direction of the apparent arm droop, this position is independent of the arm droop. [0039] According to one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. According to one or more aspects of the disclosed embodiments, the controller implements movement of the transport arm in a direction opposite to the direction in which the display arm hangs down, such that the substrate holder completes the movement and reaches a substantially clear position. scheduled location. [0041] According to one or more aspects of the disclosed embodiments, the controller implements movement of the transfer arm in a direction opposite to a direction in which the display arm sag, and the arm movement causes the substrate holder to move along a time-optimized path. and moves between the first position and the second position along the optimal path of the optimal trajectory. According to one or more aspects of the disclosed embodiments, a method includes: providing a substrate transport apparatus having a drive area connected to a frame and a transport arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of motion with respect to the frame, in a first position and a third position different from the first position. moving between the two positions with respect to the frame; and analyzing the empirical droop distance of the conveyor arm between the first position and the second position due to the droop of the conveyor arm, where the empirical droop distance of the conveyor arm between the first position and the second position is The distance is determined by the arm sag distance register of the arm sag compensator, which resides in a controller connected to the drive area to implement the articulation of the conveyor arm. [0043] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves substantially the entire empirical sag distance of the conveyor arm. According to one or more aspects of the disclosed specific aspects, the arm droop compensator has an arm droop distance register, and the method further includes: using the arm droop compensator to determine the position of the delivery arm from the arm droop distance register. The empirical sag distance between the first and second positions. [0045] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in size and direction with a drive area, which compensates and resolves the conveyor arm as determined by the arm sag distance register. Approximately the entire experience sag distance. According to one or more aspects of the disclosure, the compensating motion results in the elimination of substantially the entire empirical sag distance of the transport arm relative to a predetermined reference datum, such that substrate clamping at a predetermined location in the transport space The device is in the net position, and in the direction showing the conveyor arm droop, this position is independent of the conveyor arm droop. [0047] In accordance with one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. [0048] In accordance with one or more aspects of the disclosed aspects, the controller performs compensating movement such that the substrate holder completes the movement to a predetermined location approximately at a net position. [0049] In accordance with one or more aspects of the disclosed aspects, the controller implements compensating motion, and the arm motion causes the substrate holder to move along an optimal path with a time-optimized trajectory at the first position and the second position. Move between two positions. [0050] According to one or more aspects of the disclosed embodiments, the drive area and the transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, the method further comprising: described with an arm sag distance register The empirical arm sag throughout the conveyor space formed by more than one degree of freedom of movement of the conveyor arm. [0051] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm droop characteristics and associated corresponding arm droop distance registers, which describe the empirical arm droop distance of the associated arm. [0052] In accordance with one or more aspects of the disclosed aspects, provided is a substrate transfer arm droop mapping apparatus for a substrate transfer system of a processing tool. The mapping device includes: a frame; an interface configured on the frame to form a datum feature that represents a substrate transport space in the processing tool defined by the substrate transport system; a substrate transport arm that is articulated and has a substrate holder, and mounted to the frame in a predetermined relationship to at least one datum feature; and a registration system configured relative to the substrate transfer arm and the at least one datum feature such that due to a first arm position and a second arm position different from the first arm position, The registration system registers uncommanded arm displacement distances in the arm sag register between arm positions and uncommanded arm geometry changes caused by movement of the substrate holder in the transport space along at least one axis of motion. According to one or more aspects of the disclosure, an empirical arm sag distance is described between a first arm position and a second arm position and at a third arm position that is simultaneously different from the first and second arm positions. An uncommanded arm displacement distance in which the substrate holder moves along at least one axis of motion. [0054] In accordance with one or more aspects of the disclosed aspects, the arm sag register is implemented to define a curve describing uncommanded arm displacement distance variation with respect to arm position, wherein the substrate holder moves along at least one axis to move. [0055] In accordance with one or more aspects of the disclosure, a curve depicts uncommanded arm displacement distance variation with respect to arm position where the substrate holder moves along more than one different axis of motion, the motion The axis defines a transfer plane or transfer volume in the substrate transport space. In accordance with one or more aspects of the disclosure, a curve depicts discrete and uncommanded arm displacement distances with respect to arm position for substrate holder motion along each of more than one different axis of motion. change. [0057] In accordance with one or more aspects of the disclosed embodiments, the arm drop register is implemented as a data lookup table or algorithm. According to one or more aspects of the disclosure, at least one axis of motion is an extension axis of the substrate transfer arm, or at least the substrate transfer arm, in at least each quadrant of the substrate transfer space surrounding the substrate transfer arm. The rotation axis, or at least the lifting axis of the substrate transfer arm. [0059] According to one or more aspects of the disclosed embodiments, the substrate transfer arm is mounted with a drive section having a coaxial drive spindle that drives movement of the arm. [0060] According to one or more aspects of the disclosed aspects, the substrate transfer arm may be selected from a plurality of different and interchangeable transfer arms, each transfer arm having a different corresponding transfer arm registered by the registration system of the equipment. Arm sag registers, each register describing an uncommanded arm displacement distance specific to the corresponding conveyor arm. [0061] According to one or more aspects of the disclosure, a method includes: providing a frame having an interface disposed on the frame, the interface forming a datum feature representing a process defined by a substrate transport system of a process tool a substrate transfer space in the tool; mounting a substrate transfer arm to the frame in a predetermined relationship to at least one datum feature, the substrate transfer arm being an articulated arm and having a substrate holder; and Uncommanded arm geometry changes between one arm position and a second arm position and caused by movement of the substrate holder in the transport space along at least one axis of motion are calculated relative to the substrate transport arm and at least one datum feature. The configured registration system registers the uncommanded arm displacement distance in the arm sag register. [0062] In accordance with one or more aspects of the disclosure, an arm drop register is described between a first arm position and a second arm position and a third arm position that is simultaneously different from the first and second arm positions. An uncommanded arm displacement distance in which the substrate holder moves along at least one axis of motion. [0063] In accordance with one or more aspects of the disclosed aspects, the arm sag register is implemented to define a curve describing uncommanded arm displacement distance variation with respect to arm position, wherein the substrate holder moves along at least one axis to move. [0064] In accordance with one or more aspects of the disclosure, the curve describes uncommanded arm displacement distance variation with respect to arm position where the substrate holder moves along more than one different axis of motion, the motion The axis defines a transfer plane or transfer volume in the substrate transport space. According to one or more aspects of the disclosure, a curve depicts discrete and uncommanded arm displacement distances with respect to arm position for substrate holder motion along each of more than one different axis of motion change. [0066] In accordance with one or more aspects of the disclosed embodiments, the arm drop register is implemented as a data lookup table or algorithm. According to one or more aspects of the disclosure, at least one axis of motion is an extension axis of the substrate transfer arm, or at least the substrate transfer arm, in each quadrant of the substrate transfer space surrounding the substrate transfer arm. The rotation axis, or at least the lifting axis of the substrate transfer arm. [0068] In accordance with one or more aspects of the disclosed aspects, the substrate transfer arm is mounted with a drive section having a coaxial drive spindle that drives movement of the arm. [0069] According to one or more aspects of the disclosed embodiments, the method further includes selecting a substrate transfer arm from a plurality of different and interchangeable transfer arms, each transfer arm having a different transfer arm registered by the registration system. Corresponding arm sag registers, each register describing an uncommanded arm displacement distance specific to the corresponding conveyor arm. According to one or more aspects of the disclosed embodiments, a substrate transport apparatus includes: a frame; a drive area connected to the frame; a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of motion with respect to the frame in a first position and a second position different from the first position between positions while moving with respect to the frame; and a controller operatively connectable to the drive area so as to effect articulation of the conveyor arm, the controller including an arm sag compensator configured to cause the arm sag compensator to resolve the conveyor The uncommanded arm displacement distance of the arm due to uncommanded changes in arm geometry between the first position and the second position. [0071] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves substantially the entire uncommanded arm displacement of the conveyor arm distance. According to one or more aspects of the disclosure, the compensator has an arm droop register, and the arm droop compensator determines from the arm droop register whether the transfer arm is between the first position and the second position. Commanded arm displacement distance. [0073] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves changes in the conveyor arm as determined by the arm sag register. Approximately the entire uncommanded arm displacement distance. [0074] According to one or more aspects of the disclosure, the compensating motion results in canceling substantially all of the uncommanded arm displacement distance of the conveyor arm relative to a predetermined reference datum, such that at a predetermined location in the conveyor space The substrate holder is in a net position independent of uncommanded arm geometry changes in the direction exhibiting uncommanded arm displacement. [0075] In accordance with one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. [0076] In accordance with one or more aspects of the disclosed aspects, the controller performs compensating movement such that the substrate holder completes the movement to a predetermined location approximately at a net position. [0077] In accordance with one or more aspects of the disclosed aspects, the controller implements compensating motion and the arm motion causes the substrate holder to move in the first and second positions along an optimal path with a time-optimal trajectory. Move between two positions. [0078] According to one or more aspects of the disclosed aspects, the drive region and the transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, and the arm sag register describes more than one degree of freedom throughout the transfer arm. The uncommanded arm displacement distance in the conveying space formed by the degree of freedom of movement. [0079] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm sag characteristics and associated corresponding sag registers that describe the uncommanded arm displacement distance of the associated arm. [0080] In accordance with one or more aspects of the disclosed aspects, a substrate processing tool is provided with a substrate transport apparatus as described herein and has a substrate clamping station configured to interface with a predetermined location in the transport space. The substrate on the substrate holder forms an interface, and the substrate holding station is positioned so that the interface is implemented independently of uncommanded arm geometry changes. [0081] According to one or more aspects of the disclosed aspects, a substrate processing tool is provided with a substrate transport device as described herein and has a predetermined structure that interacts with the transport arm or substrate holder and is configured to So that the interaction is performed independently of uncommanded arm geometry changes. According to one or more aspects of the disclosure, a substrate processing tool includes: a frame; a drive area connected to the frame; a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of motion with respect to the frame, in a first position and a third position different from the first position. moving between the two positions with respect to the frame; and a controller operatively connectable to the drive area so as to implement the articulation of the conveyor arm, the controller being constructed with the drive area in a direction opposite to the direction in which the display arm hangs down Movement of the arm is performed in a direction that compensates for arm sag such that approximately the entire uncommanded arm displacement distance due to uncommanded arm geometry changes between the first position and the second position is eliminated with respect to a predetermined reference datum. According to one or more aspects of the disclosure, the controller has an arm droop register, and the controller determines from the arm droop register an uncommanded position of the delivery arm between the first position and the second position. Arm displacement distance. [0084] According to one or more aspects of the disclosed aspects, the drive region and the transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, and the arm sag register describes more than one degree of freedom throughout the transfer arm. The uncommanded arm displacement distance in the conveying space formed by the degree of freedom of movement. [0085] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm sag characteristics and associated corresponding arm sag registers that describe uncommanded arm displacement distances of the associated arms. [0086] According to one or more aspects of the disclosure, the compensating motion results in canceling substantially all of the uncommanded arm displacement distance of the conveyor arm relative to a predetermined reference datum, such that at a predetermined location in the conveyor space The substrate holder is in a net position independent of the arm droop in the direction of the display arm droop. [0087] According to one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. According to one or more aspects of the disclosed embodiments, the controller implements movement of the transport arm in a direction opposite to the direction in which the display arm hangs down, such that the substrate holder completes the movement and reaches a substantially clear position. scheduled location. [0089] According to one or more aspects of the disclosed embodiments, the controller implements movement of the transfer arm in a direction opposite to a direction in which the display arm sag, and the arm movement causes the substrate holder to move along a time-optimized path. and moves between the first position and the second position along the optimal path of the optimal trajectory. [0090] According to one or more aspects of the disclosed embodiments, a method includes: providing a substrate transport apparatus having a drive area connected to a frame and a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector having a substrate holder operable in a transport space defined by articulation of the transport arm along at least one axis of motion with respect to the frame, in a first position and a third position different from the first position. moving about the frame between two positions; and resolving the uncommanded arm displacement distance of the conveyor arm between the first position and the second position due to uncommanded arm geometry changes, where the conveyor arm is in the first position and the second position The uncommanded arm displacement distance is determined by the arm sag register of the arm sag compensator, which resides in a controller connected to the drive area to implement the articulation of the conveyor arm. [0091] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves substantially the entire uncommanded arm displacement of the conveyor arm distance. [0092] According to one or more aspects of the disclosed specific aspects, the arm droop compensator has an arm droop register, and the method further includes: using the arm droop compensator to determine the position of the delivery arm at the first position from the arm droop distance register. The uncommanded arm displacement distance between the first position and the second position. [0093] According to one or more aspects of the disclosed embodiments, the controller implements compensating movement of the conveyor arm in magnitude and direction with a drive region that compensates for and resolves the approximate movement of the conveyor arm as determined by the arm sag register. The entire uncommanded arm displacement distance. [0094] According to one or more aspects of the disclosure, the compensating motion results in canceling substantially all of the uncommanded arm displacement distance of the conveyor arm relative to a predetermined reference datum, such that at a predetermined location in the conveyor space The substrate holder is in a net position independent of the uncommanded arm geometry change in the direction exhibiting the uncommanded arm geometry change. [0095] According to one or more aspects of the disclosed aspects, the predetermined location is a substrate destination in a substrate processing tool. [0096] In accordance with one or more aspects of the disclosed aspects, the controller performs compensating movement such that the substrate holder completes the movement to a predetermined location approximately at a net position. [0097] In accordance with one or more aspects of the disclosed aspects, the controller implements compensating motion, and the arm motion causes the substrate holder to move along an optimal path with a time-optimized trajectory between the first position and the second position. Move between two positions. [0098] According to one or more aspects of the disclosed embodiments, the drive region and the conveyor arm are configured such that movement of the conveyor arm has more than one degree of freedom, the method further comprising: describing the entire conveyor in terms of arm droop registration The uncommanded arm displacement distance in the conveying space formed by the arm having more than one degree of freedom of movement. [0099] According to one or more aspects of the disclosed embodiments, the delivery arm is interchangeable from a plurality of different and interchangeable delivery arms, such that each interchangeable arm is switched at the connection with the drive region There are different arm sag characteristics and associated corresponding arm sag registers that describe uncommanded arm displacement distances of the associated arms.

[0101] FIGS. 1A-1M are schematic diagrams of substrate processing equipment in accordance with aspects disclosed. Although aspects of the disclosed aspects will be described with reference to the drawings, it should be understood that the aspects of the disclosed aspects may be implemented in many forms. Incidentally, any suitable size, shape or type of components or materials may be used. Aspects of the disclosed aspects provide methods and apparatus for implementing transfer arm position compensation such that the end effector of the transfer arm and the substrate carried thereon extend generally along the wafer transfer plane, but not along the transfer The arm extends substantially away from the wafer transport plane. For example, also referring to FIG. 4D , a substrate S travels within a substrate processing apparatus along a predetermined reference datum plane (referred to herein as transfer plane TP). In one aspect, the transfer plane TP is, for example, a horizontal plane that corresponds to the plane of the substrate S when it is clamped by the transfer arm and the transfer arm is retracted; while in other aspects, the transfer plane TP may correspond to the plane passing through the slit valve. Any suitable substrate clamping location within the path or substrate handling equipment. In one aspect, the transfer plane TP extends or spans the entire substrate transfer chamber where, for example, the transfer arm is located. [0103] In one aspect, the transfer plane TP is aligned with the slit valve SV of the substrate transfer chamber and at least partially defines a plane along which the substrate S travels through the slit valve SV to different portions of the substrate processing tool. For example, as the transfer arm 315 (and other transfer arms described herein) extends to transfer the substrate S through the slit valve SV, the transfer arm bends or sag such that the substrate S is positioned by a sag distance DRP. Deviated from the conveying plane. Note that the term "droop" is used here for convenience to describe the uncommanded total/unexcited Z-direction displacement or "sag" of part of the transfer arm from a reference datum plane (such as the wafer transfer plane TP). ). [0104] The droop distance DRP of the delivery arm 315 depends on a number of factors. For example, the sag distance DRP may be a combination of one or more of the following: the transfer arm 315 link due to the load imposed on the resilient arm member (such as the weight of the base plate and/or arm link), the drive area 200 and/or Or the bending and deflection caused by the payload of the conveyor arm; the bending and torsion implemented on the conveyor arm from the driving load; and the rotation axes T1, T2, T3, etc. from the conveyor arm 315 joint with respect to the horizontal plane (such as the transfer plane TP) The non-orthogonal variability and/or the motion effect of the non-orthogonality of the drive spindles of the drive region 200 with respect to each other and the transfer plane TP. [0105] As can be appreciated, the resulting droop distance DRP is variable as a function of the extended position of the delivery arm 315 along the extension axis R, the rotation of the delivery arm in the direction T about the axis θ, the direction along which the delivery arm moves along the axis θ. Z-axis lift or Z position, and other environmental factors such as arm temperature (note thermal expansion and contraction of arm links and other components of the conveyor arm [including the drive area]). As discussed above, increasing the throughput of substrate processing equipment such as processing equipment 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H imposes size limitations on allowable sag. For example, to increase throughput, the height SVH of the slit valve SV hole may be made smaller to reduce the amount of time required to open and close the slit valve. This reduced height SVH reduces the amount of clearance between the end effector of the delivery device 315 and the slit valve SV (e.g., the clearance between the substrate clamped on the end effector and the slit valve, the wrist joint of the end effector clearance between the slit valve, etc.), especially due to the process module arrangement and transfer arm/end effector architecture (e.g. short end effector wrist W to move part of the wrist W extending through the slit valve Distance - note that wrist W is the joint where the end effector is coupled to the rest of the delivery arm). On the other hand, it is desirable to reduce the Z-travel between the end effector and the substrate holding station to reduce substrate handover time. This reduced Z travel requires the end effector and the overlying substrate to be placed closer to the substrate clamping station. [0106] As mentioned above, the droop distance DRP is defined by a combination of linear and highly nonlinear factors, so it is inappropriate to predict the droop distance DRP using classical analysis methods. Aspects of the disclosed embodiments provide a substrate transfer arm droop mapping apparatus 2000 (see FIGS. 4A to 4C ) constructed with a transfer arm 315 extending in the R direction and combined with a processing apparatus 100A operating the transfer arm 315 along the middle thereof. , 100B, 100C, 100D, 100E, 100F, 100G, 100H with different extension and contraction axes, and the droop distance DRP is measured during the rotation direction of the T direction. Aspects of the disclosed embodiments also provide a conveyor apparatus and a substrate processing apparatus in which the conveyor apparatus is located, configured to compensate for arm sag during operation of the conveyor apparatus. Aspects of the disclosed embodiments also provide methods of operating substrate processing equipment and transport equipment disposed therein to compensate for arm droop. Aspects of the disclosed embodiments provide for increased placement accuracy of end effectors of a conveyor apparatus and overlying substrates, thereby increasing throughput of the substrate processing apparatus. [0107] Shown are processing apparatuses 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, such as, for example, a semiconductor tool station, in accordance with aspects disclosed. Although the drawings show a semiconductor tool station, aspects of the specific aspects disclosed herein may be applied to any tool station or application employing a robotic manipulator. In one aspect, processing equipment 100A, 100B, 100C, 100D, 100E, 100F is shown with a clustered tool arrangement (eg, with substrate holding stations connected to a central chamber); while in other aspects, the processing equipment may be a linear array of tools. 100G, 100H, as described in U.S. Patent No. 8,398,355 entitled "Linear Distribution Semiconductor Workpiece Processing Tool" issued on March 19, 2013 (the entire disclosure of which is incorporated herein by reference); however, the specific aspects of the disclosure Aspects of can be applied to any suitable tool station. Apparatus 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H generally includes: an atmospheric front end 101; at least one vacuum load lock chamber 102, 102A, 102B, 102C; and a vacuum back end 103. At least one vacuum load lock chamber 102, 102A, 102B, 102C may be coupled to any suitable port(s) or opening(s) of front end 101 and/or rear end 103 in any suitable arrangement. For example, in one aspect, one or more load lock chambers 102, 102A, 102B, 102C may be arranged side by side on a common horizontal plane, as can be seen in Figures 1B-1D and 1G-1K. In other aspects, one or more load lock chambers may be arranged in a lattice pattern such that at least two load lock chambers 102A, 102B, 102C, 102D are arranged in rows (e.g., with separated horizontal surfaces) and columns (e.g., with separated vertical planes), as shown in Figure 1E. In yet other aspects, one or more load lock chambers may be a single line of load lock chambers 102, as shown in Figure 1A. In yet another aspect, at least one load lock chamber 102, 102E can be arranged in a stacked line arrangement, as shown in Figure 1F. It should be understood that although the load lock chambers are illustrated at end 100E1 or face 100F1 of transfer chambers 125A, 125B, 125C, 125D, one or more load lock chambers may otherwise be arranged in transfer chambers 125A, 125B, 125C. , 125D on any multi-side 100S1, 100S2 or end 100E1, 100E2 or face 100F1-100F8. Each of the at least one load lock chamber may also include one or more wafer/substrate rest planes WRP (FIG. IF), where the substrate is clamped on suitable supports within the respective load lock chamber. Otherwise, the tool station may have any suitable architecture. Components of the front end 101 and at least one load lock chamber 102, 102A, 102B, 102C and each of the rear end 103 may be connected to a controller 110, which may be part of any suitable control architecture, such as, for example, a cluster. Architecture control. The control system may be a closed-loop controller with a master controller (which may be controller 110 in one aspect), a cluster controller, and an autonomous remote control, such as in the document titled "Scalable Motion Control" issued on March 8, 2011 System" disclosed in U.S. Patent No. 7,904,182, the disclosure of which is incorporated herein by reference in its entirety. Otherwise, any suitable controller and/or control system may be utilized. [0108] In one aspect, the front end 101 generally includes a loadport module 105 and a mini-environment 106, such as an equipment front end module (EFEM). The load port module 105 may be a box opener/loader to tool standard (BOLTS) interface that complies with SEMI standards E15.1, E47.1, E62, etc. for 300 mm load ports. E19.5 or E1.9, or front or bottom opening cases/pods and cassettes. In other aspects, the load port module can be configured as a 200 mm wafer/substrate interface, a 450 mm wafer/substrate interface, or any other suitable substrate interface, such as larger or smaller semiconductor wafers/ Substrate, flat panel for flat panel display, solar panel, photomask or any other suitable object. Although three load port modules 105 are shown in FIGS. 1A-1D, 1J, and 1K, in other aspects, any suitable number of load port modules may be incorporated into the front end 101. The load port module 105 may be configured to receive substrate carriers or cassettes C from an overhead conveyor system, an automated guided vehicle, a personnel guided vehicle, a rail guided vehicle, or from any other suitable conveying method. Load port module 105 may interface with mini-environment 106 through load port 107 . Load port 107 may allow substrates to pass between substrate cassettes and mini-environment 106 . Mini-environment 106 generally includes any suitable transfer robot 108 that may incorporate one or more aspects of the disclosed aspects described herein. In one aspect, the robot 108 may be a track-mounted robot, such as described in U.S. Patent Nos. 6,002,840, issued on December 14, 1999, U.S. Patent Nos. 8,419,341, issued on April 16, 2013, and U.S. Patent Nos. 1, 2010, for example. U.S. Patent No. 7,648,327, issued in September 2019, the entire disclosure of which is incorporated herein by reference. Otherwise, the bot 108 may be substantially similar to that described herein with respect to the backend 103 . Mini-environment 106 may provide a controlled clean zone for transferring substrates between multiple load port modules. [0109] At least one vacuum load lock chamber 102, 102A, 102B, 102C may be located between and connected to the mini-environment 106 and the backend 103. In other aspects, load port 105 may be generally directly coupled to at least one load lock chamber 102, 102A, 102B, 102C or transfer chamber 125A, 125B, 125C, 125D, 125E, 125F, into which substrate carrier C is drawn. 125A, 125B, 125C, 125D, and the substrate is transferred directly between the substrate carrier C and the load lock chamber or transfer chamber. In this regard, the substrate carrier C may function as a load lock chamber such that the processing vacuum of the transport chamber extends into the substrate carrier C. As can be appreciated, where substrate carrier C is substantially directly coupled to the load lock chamber via a suitable load port, any suitable transfer device may be disposed within the load lock chamber or otherwise have access to carrier C for transfer Substrates are transported to and from the substrate carrier C. Note that the term vacuum as used herein may refer to a high vacuum in which substrates are processed, such as 10 ⁻⁵ Torr or less. At least one load lock chamber 102, 102A, 102B, 102C generally includes atmospheric and vacuum slit valves. Slit valves in the load lock chambers 102, 102A, 102B (and processing station 130) may provide environmental isolation for evacuating the load lock chambers after front loading substrates from the atmosphere, and when filled with an inert gas such as nitrogen ) to maintain the vacuum in the transfer chamber while ventilating the lock chamber. As will be described herein, the slit valves of processing devices 100A, 100B, 100C, 100D, 100E, 100F (and linear processing devices 100G, 100H) may be located in the same plane, in different vertical stacking planes, or in the same A combination of planar slit valves and slit valves located in different vertical stacking planes (as described above with respect to the load ports) to accommodate transfer of substrates to and from at least processing station 130 and coupled to transfer chambers 125A, 125B, 125C , 125D, 125E, 125F load lock chambers 102, 102A, 102B, 102C. At least one of the load lock chambers 102, 102A, 102B, 102C (and/or the front end 101) may also include an aligner to align the substrate's datum to a desired position for processing or any other suitable substrate metrology device. Among other things, the vacuum load lock chamber may be located at any suitable location within the processing facility and of any suitable architecture. Vacuum backend 103 generally includes: transfer chambers 125A, 125B, 125C, 125D, 125E, 125F; one or more processing stations or modules 130; and any suitable number of transfer unit modules 104, One or more included delivery robots may include one or more aspects of specific aspects of the disclosure described herein. The transfer chambers 125A, 125B, 125C, 125D, 125E, 125F may have any suitable shape and size, which, for example, conforms to SEMI standard E72 guidelines. The following will describe the delivery unit module(s) 104 and one or more delivery robots, which may be located at least partially within the delivery chambers 125A, 125B, 125C, 125D, 125E, 125F, to load the lock chamber 102, 102A, 102B, 120C (or cassette C at the load port) and various processing stations 130 to transport substrates. In one aspect, the conveying unit module 104 can be removed from the conveying chambers 125A, 125B, 125C, 125D, 125E, 125F to form a modular unit, so that the conveying unit module 104 complies with SEMI standard E72 guidelines. [0111] The processing station 130 may operate on the substrate through various deposition, etching, or other types of processes to form circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), such as ion cloth Implantation, metrology, rapid thermal processing (RTP), atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI) ), wire bonding and evaporation, or other thin film processes using vacuum pressure. Processing station 130 is communicably connected to transfer chambers 125A, 125B, 125C, 125D, 125E, 125F in any suitable manner (eg, via slit valve SV) to allow substrates to pass from transfer chambers 125A, 125B, 125C, 125D , 125E, 125F pass to the processing station 130, and vice versa. The slit valves SV of the transfer chambers 125A, 125B, 125C, 125D, 125E, 125F can be arranged to allow connection of dual (eg, more than one substrate processing chambers located in a common housing) or side-by-side processing stations 130T1-130T8, Single processing station 130S and/or stacked process modules/load lock chambers (Figures 1E and 1F). Note that when one or more arms of the transport unit module 104 are aligned with a predetermined processing station 130 along the extension-retraction axis R of the transport unit module 104, substrate transfer to and from the processing station 130 and coupling may occur. Load lock chambers 102, 102A, 102B, 102C (or cassette C) in transfer chambers 125A, 125B, 125C, 125D, 125E, 125F. Depending on aspects of the disclosed aspects, one or more substrates may be transferred individually or substantially simultaneously to individual predetermined processing stations 130, such as when picking/placement of substrates from side-by-side or preceding processing stations, as shown in FIG. 1B, As shown in 1C, 1D, 1G~1K. On the one hand, the conveying unit module 104 can be installed on a suspension arm 143 (see, for example, FIGS. 1D and 1G~1I), where the suspension arm 143 has a single suspension link or multiple suspension links 121, 122 or Linear carrier 144, such as the U.S. Patent Provisional Application No. 61/892,849 titled "Processing Equipment" filed on October 18, 2013, and the U.S. Patent titled "Processing Equipment" filed on November 15, 2013 The disclosures in Provisional Application No. 61/904,908 and International Patent Application No. PCT/US13/25513 titled "Substrate Processing Equipment" filed on February 11, 2013 are hereby incorporated by reference in their entirety. Referring now to FIG. 1L , shown is a schematic plan view of linear wafer processing system 100G with tool interface area 2012 mounted to transfer chamber module 3018 such that interface area 2012 is generally facing (e.g., inwardly) but sideways. Move to the longitudinal axis X of the transport chamber 3018. Delivery chamber modules 3018 may be extended in any suitable direction by attaching other delivery chamber modules 3018A, 3018I, 3018J to interfaces 2050, 2060, 2070, as described in U.S. Patent No. 8,398,355, previously and described in This is for reference. Each transport chamber module 3018, 3018A, 3018I, 3018J includes any suitable wafer transporter 2080 that may include one or more aspects of the specific aspects disclosed herein to transport wafers throughout Processing system 100G and, for example, access processing module PM. As can be appreciated, each chamber module may be capable of maintaining an isolated or controlled atmosphere (eg, _N2 , clean air, vacuum). [0114] Referring to FIG. 1M, shown is a schematic diagram of an exemplary processing tool 100H, which may be along the longitudinal axis X of the linear transfer chamber 416, for example. In terms of the specific aspect of the disclosure shown in FIG. 1M, tool interface region 12 may representatively be connected to transfer chamber 416. In this regard, interface region 12 may define an end of tool delivery chamber 416 . As seen in FIG. 1M , the transfer chamber 416 may have another workpiece entry and exit station 412 , for example at an end opposite the interface station 12 . Among other things, other entry and exit stations can be set up to insert/remove workpieces from the transfer chamber. In one aspect, interface area 12 and access station 412 may allow workpieces to be loaded and unloaded from the tool. In other aspects, the workpiece can be loaded into the tool from one end and removed from the tool from the other end. In one aspect, transfer chamber 416 may have one or more transfer chamber modules 18B, 18i. Each chamber module may be capable of maintaining an isolated or controlled atmosphere (eg N ₂ , clean air, vacuum). As previously noted, the architecture/arrangement of the transfer chamber modules 18B, 18i and load lock chamber modules 56A, 56 and the workpiece stations forming the transfer chamber 416 shown in FIG. 1M is exemplary only; and in other respects, transfer A chamber can have more or fewer modules configured in any desired module arrangement. In the aspect shown, station 412 may be a load lock room. In other aspects, load lock chamber modules may be located between end entry and exit stations (similar to station 412), or adjacent transfer chamber modules (similar to module 18i) may be constructed to operate as load lock chambers . [0115] As also noted previously, the transfer chamber modules 18B, 18i have therein one or more corresponding transfer devices 26B, 26i, which may include one or more of the specific aspects disclosed herein. More aspects. The conveying devices 26B, 26i of the individual conveying chamber modules 18B, 18i may cooperate to provide a linearly distributed workpiece conveying system 420 in the conveying chamber. In this regard, the conveyor device 26B may have a conventional selective compliant articulated robot arm (SCARA) arm architecture (although in other respects, the conveyor arms may have any other desired arrangement, as discussed below. mentioned). [0116] In aspect of the specific aspect of the disclosure shown in FIG. 1M, the arms and/or end effectors of conveyor device 26B can be arranged to provide what may be referred to as a quick-switch arrangement that allows the conveyor to be moved from a pick/place location to Quickly switch wafers. Transfer arms 26B may have any suitable drive zones (e.g., coaxially arranged drive shafts, side-by-side drive shafts, horizontally adjacent motors, vertically stacked motors, etc.) to provide any suitable number of degrees of freedom for each arm (For example, there is Z-axis motion around the independent rotation of the shoulder and elbow joints). As seen in Figure 1M, in this regard, modules 56A, 56, 30i may be interposed between transfer chamber modules 18B, 18i and define appropriate processing modules, load lock chamber(s), and Buffer station, measuring station(s) or any other station(s) desired. For example, plug-in modules such as load lock chambers 56A, 56 and workpiece station 30i each have stationary workpiece supports/shelf 56S, 56S1, 56S2, 30S1, 30S2 that cooperate with conveyor arms to move along the The linear axis X of the conveying chamber implements workpiece conveyance through the length of the conveying chamber. For example, workpiece(s) may be loaded into transfer chamber 416 from interface area 12 . The workpiece(s) may be positioned on the support(s) of the load lock chamber module 56A using the transport arm 15 of the interface area. Workpiece(s) in load lock chamber module 56A may be moved between load lock chamber module 56A and load lock chamber module 56 by transfer arm 26B in module 18B, and in a manner similar to The arm 26i (in the module 18i) is used in a continuous manner to move between the load lock chamber 56 and the workpiece station 30i, and the arm 26i in the module 18i is used to move between the station 30i and the station 412. This process can be reversed in whole or in part to move the workpiece(s) in the opposite direction. Thus, on the one hand, the workpiece can be moved in any direction along the axis do processing or other things). In other aspects, a plug-in transfer chamber module with a stationary workpiece support or shelf may not be disposed between the transfer chamber modules 18B, 18i. In this aspect, the transfer arm adjacent to the transfer chamber module can transfer the work piece directly from the end effector or from one transfer arm to the end effector of another transfer arm to move the work piece through the transfer chamber. Processing station modules can operate on the wafer through a variety of deposition, etching or other types of processing to form circuits or other desired structures on the wafer. The processing station module is connected to the transfer chamber module to allow wafers to pass from the transfer chamber to the processing station, and vice versa. A suitable example of a processing tool having general features similar to that shown in Figure ID is described in US Pat. No. 8,398,355, which was previously incorporated by reference in its entirety. [0117] Referring now to FIGS. 2A, 2B, 2C, and 2D, in one aspect, the conveyor unit module 104 includes at least one drive area 200, 200A, 200B, 200C and at least one conveyor arm portion having at least one conveyor arm, such as The following conveyor arms 314, 315, 316, 317, and 318. The delivery arms 314, 315, 316, 317, 318 may be coupled to the drive shafts of the drive areas 200, 200A-200C in any suitable connection CNX, in any suitable manner, so that the rotation of the drive shafts is implemented as here The movement of the conveying arms 314, 315, 316, 317, 318. As will be described below, in one aspect, the conveyor arms 314, 315, 316, 317, 318 are interchangeable from a plurality of different and interchangeable conveyor arms 314, 315, 316, 317, 318, so as to be in contact with the drive zone. Connect CNX to switch, where each interchangeable arm 314, 315, 316, 317, 318 has a different sag characteristic and an associated corresponding sag distance register 700 (see Figure 7) that describes the associated delivery arm Arm droop distances of 314, 315, 316, 317, and 318. [0118] At least one drive area 200, 200A, 200B, 200C is mounted to any suitable frame of the processing devices 100A to 100H. In one aspect, as noted above, the conveyor unit module 104 may be mounted to the linear slider 144 or the suspension arm 143 in any suitable manner, wherein the linear slider and/or suspension arm 143 has a structure substantially similar to that described herein. The driving areas of the driving areas 200, 200A, 200B, and 200C are described. At least one drive zone 200, 200A, 200B, 200C may include a common drive zone including a frame 200F housing one or more of the Z-axis drive 270 and the rotational drive zone 282. The interior 200FI of the frame 200F may be sealed in any suitable manner, as will be described below. In one aspect, the Z-axis drive may be any suitable drive configured to move at least one transfer arm 300, 301 along the Z-axis. The Z-axis driver is illustrated as a screw driver in FIG. 2A , but in other aspects, the driver can be any suitable linear driver, such as a linear actuator, a piezoelectric motor, etc. Rotary drive zone 282 may be configured as any suitable drive zone, such as a harmonious drive zone, for example. For example, the rotary drive area 282 may include any suitable number of coaxially arranged harmoniously driven motors 280. For example, FIG. 2B shows that the drive area 282 includes three coaxially arranged harmoniously driven motors 280, 280A, and 280B. In other aspects, the drive locations of drive area 282 may be side-by-side and/or coaxially arranged. In one aspect, the rotary drive zone 282 shown in FIG. 2A includes a harmonically driven motor 280 for driving one of the shafts 280S; however, in other aspects, the drive zone may include any suitable number of harmonically driven motors 280, 280A, 280B. (FIG. 2B), which corresponds, for example, to any suitable number of drive shafts 280S, 280AS, 280BS in a coaxial drive system (FIG. 2B). The Harmony Drive motor 280 may have a high capacity output bearing such that the components of the ferrous fluid seals 276, 277 are centered and at least partially supported by the Harmony Drive motor 280 during the desired rotation T and There is sufficient stability and clearance during extended R movements. Note that the ferrous fluid seals 276, 277 may include several parts that form a generally concentric coaxial seal, as will be described below. In this example, the rotary drive area 282 includes a housing 281 housing one or more drive motors 280, which may be generally similar to those described above and/or in U.S. Pat. Nos. 6,845,250, 5,899,658, 5,813,823, and 5,720,590, which disclose the entire And use this as a reference. The ferrous fluid seals 276, 277 may have tolerances to seal each drive shaft 280S, 280AS, 280BS within the drive shaft assembly. In one aspect, the ferrous fluid seal may not be provided. For example, the drive region 282 may include a drive having a stator that is substantially sealed from the environment of the operating conveyor arm, while the rotor and drive shaft share the environment of the operating arm. Suitable examples of actuation zones that may be used in aspects of the disclosure without ferrous fluidic seals include the ^MagnaTran® 7 and ^MagnaTran® 8 robotic actuation zones from Brooks Automation, Inc., which may have a seal can arrangement as follows will be described. Note that the drive shaft(s) 280S, 280AS, 280BS may also have a hollow structure (eg, with a hole extending longitudinally along the center of the drive shaft) to allow electrical wires 290 or any other suitable items to pass through the drive assembly to e.g. to another drive area, as described in U.S. Patent Application No. 15/110,130, filed on July 7, 2016 and published as U.S. Patent Publication No. 2016/0325440 on November 10, 2016 (which discloses the entire hereby reference), or to any suitable position encoder, controller and/or at least one transfer arm 314, 315, 316, 317, 318 mounted to the driver 200, 200A, 200B, 200C. As can be appreciated, each drive motor of the drive areas 200, 200A, 200B, 200C may include any suitable encoder configured to detect the position of the individual motor to determine whether each conveyor arm 314, 315, 316, 317, The positions of the end effectors 314E, 315E, 316E, 317E1, 317E1, 318E1, and 318E2 of 318. [0119] In one aspect, housing 281 may be mounted to carrier 270C, which is coupled to Z-axis drive 270 such that Z-axis drive 270 moves the carrier (and housing 281 thereon) along the Z-axis. . As can be appreciated, to seal the controlled atmosphere in which at least one transfer arm 300, 301 is operated from the interior of the driver 200, 200A, 200B, 200C (which may operate in an atmospheric pressure ATM environment) may include one or more of the above. A plurality of ferrous fluid seals 276, 277 and bellows seals 275. The bellows seal 275 may have one end coupled to the carrier 270C and the other end coupled to any suitable portion of the frame 200FI such that the interior 200FI of the frame 200F and the controlled atmosphere in which the at least one transfer arm 300, 301 operates isolate. [0120] Otherwise, as noted above, a driver may be provided on the carrier 270C with a stator seal isolated from the atmosphere operating the transfer arm without a ferrous fluid seal, such as the MagnaTran from Brooks Automation. ^® 7 and MagnaTran ^® 8 robot drive areas. For example, also referring to Figures 2C and 2D, the rotational drive region 282 is configured such that the motor stator is hermetically isolated from the environment in which the robotic arm is operated, while the motor rotor shares the environment in which the robotic arm is operated. Figure 2C illustrates a coaxial drive having a first drive motor 280' and a second drive motor 280A'. The first drive motor 280' has a stator 280S' and a rotor 280R', where the rotor 280R' is coupled to the drive shaft 280S. Canister seal 280CS may be positioned between stator 280S' and rotor 280R' and connected to housing 281 in any suitable manner so as to seal stator 280S' from the environment in which the robot arm is operated. Similarly, motor 280A' includes a stator 280AS' and a rotor 280AR', where rotor 280AR' is coupled to drive shaft 280AS. The tank seal 280ACS can be configured between the stator 280AS' and the rotor 280AR'. The can seal 280ACS may be connected to the housing 281 in any suitable manner to seal the stator 280AS' from the environment in which the robot arm is operated. As can be appreciated, any suitable encoders/sensors 268A, 268B may be provided to determine the position of the drive shaft and arm(s) operating the shaft(s). Referring to Figure 2D, illustrated is a three-axis rotational drive area 282. The three-axis rotary drive section may be generally similar to the coaxial drive section described above with respect to Figure 2C; however, in this regard, there are three motors 280', 280A', 280B', each having a drive shaft coupled to an individual drive shaft 280A, 280B'. Rotors 280R', 280AR', 280BR' for 280AS and 280BS. Each motor also includes an individual stator 280S', 280AS', 280BS' which is sealed from the atmosphere operating the robotic arm(s) by an individual can seal 280SC, 280ACS, 280BCS. As can be appreciated, any suitable encoder/sensor may be provided to determine the position of the drive shaft and the arm(s) operating the drive shaft(s) as described above with respect to Figure 2C. As can be appreciated, on the one hand, the drive shaft of the motor illustrated in FIGS. 2C and 2D may not allow the wire 290 to feed through; while on other aspects, any suitable seal may be provided so that the wire may pass through, for example, FIGS. 2C and 2D. The hollow drive shaft of the motor demonstrated in 2D. [0121] Referring now to Figures 3A-3E, the suspension arm 143 and/or the delivery unit module 104 may include any suitable arm linkage(s). Suitable examples of arm linkages can be found, for example, in U.S. Patent No. 7,578,649 issued on August 25, 2009, U.S. Patent No. 5,794,487 issued on August 18, 1998, U.S. Patent No. 5,794,487 issued on May 24, 2011 Patent No. 7,946,800, U.S. Patent No. 6,485,250 issued on November 26, 2002, U.S. Patent No. 7,891,935 issued on February 22, 2011, U.S. Patent No. 8,419,341 issued on April 16, 2013, November 2011 U.S. Patent Application No. 13/293,717 titled "Dual-Arm Robot" filed on September 10, 2013, and U.S. Patent Application No. 13/293,717 titled "Linear Vacuum Robot with Z-Motion and Articulated Arm" filed on September 5, 2013 No. 13/861,693, which is disclosed in its entirety and is incorporated herein by reference. In aspects of the disclosed specific aspects, at least one transfer arm, suspension arm 143 and/or linear slider 144 of each conveyor unit module 104 may be derived from a conventional SCARA arm 315 (Selective Compliance Articulated Robot Arm). ) (Fig. 3C) type design, which includes an upper arm 315U, a belt driven forearm 315F and a belt localized end effector 315E, or is derived from a telescoping arm or any other suitable arm design, such as a Cartesian linear sliding arm 314 (Fig. 3B). Suitable examples of transfer arms can be found, for example, in U.S. Patent Application No. 12/117,415, 100G, filed on May 8, 2008, titled "Substrate Transfer Apparatus Having Multiple Movable Arms Utilizing Mechanical Switching Mechanisms" No. 7,648,327, issued on January 19, 2017, the entire disclosure of which is incorporated herein by reference. The transfer arms may operate independently of each other (e.g., each arm extends/retracts independently of the other arms), may operate via loss-of-motion switching, or may be operationally linked in any suitable manner such that the arms share at least one common of drive shaft. In other aspects, the delivery arms may have any other desired arrangement, such as a frog-leg arm 316 (FIG. 3A) architecture, a jumping frog arm 317 (FIG. 3E) architecture, a double symmetrical arm 318 (FIG. 3D) architecture, etc. Suitable examples of transfer arms may be found in U.S. Patent Nos. 6,231,297, issued on May 15, 2001, U.S. Patent Nos. 5,180,276, issued on January 19, 1993, U.S. Patent Nos. 6,464,448, issued on October 15, 2002, U.S. Patent No. 6,224,319 issued on May 1, 2001, U.S. Patent No. 5,447,409 issued on September 5, 1995, U.S. Patent No. 7,578,649 issued on August 25, 2009, U.S. Patent No. 7,578,649 issued on August 18, 1998 U.S. Patent No. 5,794,487, U.S. Patent No. 7,946,800 issued on May 24, 2011, U.S. Patent No. 6,485,250 issued on November 26, 2002, U.S. Patent No. 7,891,935 issued on February 22, 2011, 2011 U.S. Patent Application No. 13/293,717 titled "Dual-arm Robot" filed on November 10, and U.S. Patent Application No. 13/270,844 titled "Coaxial Drive Vacuum Robot" filed on October 11, 2011 , which is disclosed in its entirety and is hereby used for reference. Note that the suspension arm 143 may have a generally similar architecture to the conveyor arms 314, 315, 316, 317, 318, with the conveyor module unit 104 mounted to the suspension arm in place of the end effectors 315E, 316E, 317E1, 317E1, 318E1, 318E2. As can be appreciated, the transfer arm(s) 314, 315, 316, 317, 318 are operatively coupled to the respective drive zones 200, 200A, 200B, 200C in any suitable manner such that the respective drive Zones 200, 200A, 200B, 200C are defined by articulation of transfer arms 314, 315, 316, 317, 318 along at least one axis of motion with respect to a frame (such as frame 200F or any suitable frame of processing tools 100A-100H). In a defined transport space TSP (see Figures 4A and 4B), in a first arm position 2030A (e.g., the retracted position of the transport arm, see Figure 4A) and a second arm position 2030B that is different from the first arm position 2030A (e.g., the transport arm The articulated movement of the transport arms 314, 315, 316, 317, 318 is carried out with respect to the frame 200F between extended positions, see Figure 4B). As will be described in greater detail below, any suitable controller (eg, controller 110) may be coupled to the drive areas 200, 200A, 200B, 200C in any suitable manner to drive the drive areas 200, 200A, 200B, 200C, so as to effect delivery. Articulation of arms 314, 315, 316, 317, 318. Controller 110 includes sag compensator 110DC configured such that arm sag compensator 110DC resolves transfer arm 314, 315, 316, 317, 318 due to transfer arm sag between first arm position 2030A and second arm position 2030B. The arm drop distance DRP (Figure 4D), as will be described in more detail here. [0122] Referring now to FIGS. 4A to 4D, a schematic diagram of a substrate transport arm droop surveying and mapping device 2000 is demonstrated. In one aspect, mapping device 2000 includes a frame 2000F configured to receive transport device 2004 in any suitable manner such that transport arms 315-318 of transport device 2004 are movably positioned as described herein. In one aspect, the conveyor 2004 is, for example, generally similar to the conveyor module 104 (including one or more conveyor arms 314, 315, 316, 317, 318 and drive areas 200, 200A-200C); or in other aspects , similar to the conveyor equipment module 104 installed on the above-mentioned suspension arm 143 or linear slider 144. In one aspect, frame 2000F defines any suitable reference datum feature that corresponds to and represents a suitable reference for, for example, the transfer chamber of front-end module 101 or the transfer chambers 125A-125F, 3018, 3018A, 416 of any suitable processing tools 100A-100H. Datum features. [0123] In one aspect, the frame 2000F includes a mounting surface 2010 that forms a base reference surface to which the mounting flange 200F of the conveyor device 2004 is attached. In one aspect, the engagement of mounting flange 200F with mounting surface 2010 establishes the vertical or Z location of transfer plane TP. In other aspects, the mounting surface 2010 forms a base reference surface for engaging the Z-axis rail 2007 of the conveyor device 2004 . On the one hand, the engagement of the Z-axis rail 2007 with the mounting surface 2010 establishes the vertical or Z position of the transfer plane TP. In one aspect, the base reference surface formed by the mounting surface 2010 forms an interface between the frame 2000F and the conveyor apparatus 2004, which represents the substrate conveyor system of the processing apparatus 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. The substrate transport space TSP in the processing tool (such as the front-end module 101 or the transfer chambers 125A to 125F, 3018, 3018A, and 416). In one aspect, the substrate transport system includes one or more of the following: transport equipment 2004 for processing tools 100A~100H, substrate clamping locations (such as process modules, aligners, buffers, etc.), substrate/cassette lifts, narrow Slit valve SV. [0124] In one aspect, the transport device 2004 has articulated arms 314, 315, 316, 317, 318 (such as those described above) including drive areas 200, 200A-200C and an end effector having a substrate gripper SH 314E, 315E, 316E, 317E1, 317E2, 318E1, 318E2. For purposes of explanation, aspects of the disclosed embodiments will be described using end effector 315E and arm 315, but it will be understood that aspects of the disclosed embodiments apply equally to arms 314, 315, 316, 317, 318 and end effector Devices 314E, 316E, 317E1, 317E2, 318E1, 318E2. The conveyor device 2004 may be mounted to the frame 2000F with individual drive areas 200, 200A, 200B, 200C, thereby providing the conveyor arm 315 with at least one axis of motion (θ, R, Z) to move with at least one degree of freedom. Determine the droop distance DRP of the delivery arm 315 as described herein. In one aspect, conveyor device 2004 is mounted to frame 2000F such that it has a predetermined relationship to at least one datum feature 2000DF of frame 2000F. For example, in one aspect, the Z-axis rail 2007 of the conveyor device 2004 mounting the flange 200F and/or the drive zones 200, 200A, 200B, 200C may be aligned with respect to a home or home position of the conveyor arm 315. For example, mounting flange 200F (or housing of drive area 200 ) and/or Z-axis rail may include any suitable datum reference feature 200DF that points to rotation of transfer arms 315 - 318 in the T direction about axis θ Location. For example, datum reference feature 200DF may define or otherwise indicate the rotational direction of the arm about axis θ, which corresponds to zero degrees of rotational angle of extension and contraction (see extension axis R1 and corresponding angle θ1 of FIG. 4C ). The frame 2000F of the mapping device 2000 includes any suitable datum or reference feature 2000DF configured to interface with or be coupled to the datum reference feature 200DF of the conveyor device 2004 such that it can be configured relative to the datum feature 200DF corresponding to the processing device 100A. The predetermined direction of the direction of the conveying device 2004 within ~100H is used to map the droop distance DRP of the conveying arm 315. For example, the interface or coupling of datum reference features 200DF, 2000DF rotationally positions substrate conveyor 2004 within frame 2000 in the T direction about axis θ such that there are zero degrees of extension and contraction rotation angles (e.g., extension axis R1) is at a known predetermined location with respect to frame 2000F. As can be appreciated, mounting the conveyor device 2004 in the frame 2000F at a known location provides for substantially all angles θ1 - θ8 through which the conveyor arm extends and retracts and for all distances the arm extends along the different extension axes R1 - R8 DEXT (such as arrival position) to measure the droop distance DRP. [0125] In one aspect, the substrate transfer arm droop mapping apparatus 2000 also includes a registration system 2020 configured relative to the substrate transfer arm 315 and at least one datum feature 200DF, 2000DF, such that due to differences between the first arm position 2030A and the second Between the arm positions 2030B and the arm droop change caused by the movement of the end effector 315E (including the substrate holder SH) in the transport space TSP along at least one motion axis (such as R, θ, Z), the registration system registers the arm Droop distance DRP. In one aspect, registration system 2020 includes any suitable controller 2020C including memory 2020CM and processor 2020CP including any suitable non-transitory computer code to implement a substrate transfer arm droop mapping apparatus as described herein. 2000 operations. The substrate transfer arm droop mapping apparatus 2000 further includes at least one sensing device 2021 configured to extend and retract one or more of the substrate transfer arms 315 to 318 R1 to R8 along with the end effector 315E within the transfer space TSP. The path is operated to sense or otherwise detect the position of at least end effector 315E. Among other aspects, at least one sensing device 2021 is configured to sense or detect the position of any suitable portion of the substrate transfer arm 315 (the wrist joint corresponding to axis T3, the substrate S clamped on the end effector 315E, etc.). In one aspect, at least one sensing device 2021 includes at least one optical sensor, such as motion tracking camera(s) or through-beam sensor, or any other suitable sensor (for example, proximity sensor, capacitive sensor) , laser sensors, confocal sensors, or sensors using radar, LIDAR, or echo locations) configured to sense/detect the position of at least the end implementer 315E within the transport space TSP. In one aspect, at least one sensing device 2021 is arranged or otherwise aligned with any suitable feature of the delivery arm 315 such as the end effector 315E, the substrate S clamped to the end effector, and/or any other suitable feature of the delivery arm 315 Features) form an interface such that the position of the feature of the transfer arm 315 is determined, such as the position of the feature in the Z direction relative to or about a predetermined reference datum representing the substrate transfer plane TP. [0126] In one aspect, controller 2020C may be generally similar to controller 110 in that controller 2020 is configured to control conveyor device 2004 to extend along one or more extension and retraction paths R1 to R8 in any suitable manner. number of degrees of freedom to move, as described here. Controller 2020C is coupled to at least one sensing device 2021 in any suitable manner (eg, through any suitable wired or wireless connection). At least one sensing device 2021 is configured to transmit and controller 2020C is configured to receive any suitable signal from at least one sensing device 2021 embodying end effector 315E of substrate transfer arms 315-318 (including substrate S clamped thereon) or The position (e.g. θ, R, Z) of any other suitable features within the transport space TSP relative to the transport plane TP. For example, also referring to FIGS. 4A to 4D and 5 , a schematic diagram of a droop distance DRP below a substrate transfer arm (eg, substrate transfer arm 315 ) is demonstrated. In this regard, the droop distance DRP is shown measured at three points along the substrate S carried on the end effector 315E of the substrate transfer arm 315 . For example, as the substrate S is transported along the extension and contraction axes R1 to R8, the droop distance DRP with respect to the transfer plane TP (such as the Z position change of the end effector 315E and the substrate clamped thereon) can be in front of the substrate S. Measured at the edge SLT, the center SC of the substrate S, and/or the trailing edge SLT of the substrate S. As described herein, the position of the substrate S or the end effector 315E may be based on the position of the substrate S or the end effector 315E when the transfer arm 315 is in the retracted configuration (eg, when the substrate S is in the first position 2030A), such as the position of the substrate S in the arm retracted configuration. central SC, while defining the transfer plane TP. In other aspects, the transfer plane TP may be defined based on the location of any suitable substrate clamping stations such as process modules, buffers, aligners, load lock chambers, etc. As also discussed herein, non-linear factors of the conveyor arm 315 cause changes in the Z position (such as the drop distance DRP) with respect to, for example, any suitable reference datum (such as the conveyor plane TP), the height of which is dependent on the particular configuration of the conveyor arm 315. And the droop DRP varies uniquely with each arm 314, 315, 316, 317, 318. [0127] Still referring to FIGS. 4A-4D and 5, exemplary operations of the substrate transfer arm droop mapping apparatus 2000 will be described. In one aspect, frame 2000F is disposed (block 600 of FIG. 6 ) at any suitable location, such as on a semiconductor fabrication facility factory floor or at a fabrication facility of substrate conveyor 104 and/or transfer arm 315 . As mentioned above, the frame includes an interface, such as the above-mentioned reference datum feature 2000DF, where the reference datum feature 2000F represents the substrate transport space TSP. The substrate transfer arm 315 is mounted to the frame 2000F (block 610 of Figure 6) in a predetermined relationship to at least one datum feature 2000DF in any suitable manner, such as described above. In one aspect, the driving areas 200, 200A~200C are mounted to the frame 2000F and the conveying arm 315 is mounted to the driving areas 200, 200A~200C, such that the driving areas 200, 200A~200C implement the conveying arm 315 with respect to at least one datum feature 2000DF. extend. As can be seen in Figure 4C, the driving areas 200, 200A~200C and the installed conveyor arm 315 are mounted to the frame 2000F, so that the reference datum feature 200F of the conveyor device 2004 is located in a predetermined direction with respect to the reference datum feature 2000DF of the frame 2000F. (e.g. aligned in any suitable way). Here, the alignment of the reference features 200DF, 2000DF points the zero or home position of the delivery arm 315 to angle θ1, which corresponds to the extension-retraction axis R1. On the one hand, when the conveying device 2004 is located in the transfer chamber of any suitable processing equipment 100A-H (such as the front-end module 101 or the transfer chambers 125A-125F, 3018, 3018A, 416), the angle θ1 and the extension and contraction axis R1 correspond to The home or zero position of the conveyor 2004. On the one hand, the angle θ1 and the extension and contraction axis R1 and each of the other angles θ2 ~ θ8 and the extension and contraction axis R2 ~ R8 may correspond to the transfer chambers 125A ~ 125F, 3018, 3018A, 3018A, 3018A, 3018A, 3018A, 416's individual extension and contraction axes. [0128] On the one hand, the conveyor arm 315 installed to the drive area 200, 200A~200C can be selected from a plurality of conveyor arms 315~318 installed to the common drive area 200, 200A~200C. For example, drive area 200 may be mounted to frame 2000F, as described above. The arms 314, 315, 316, 317, 318 are interchangeable with each other such that any one of the arms 314, 315, 316, 317, 318 can be selected and installed into the drive area 200. Here, the transfer arm 315 is selected from a plurality of interchangeable transfer arms 314, 315, 316, 317, 318 for mounting to the drive area 200 within the frame 2000F. [0129] As described above, controller 2020C is configured to effect movement of transfer arm 315. The controller 2020C implements movement of the transfer arm 315 between the first arm position 2030A and the second arm position 2030B along at least one axis of motion in the transfer space TSP (block 620 of FIG. 6 ). As described herein, the first arm position 2030A may be a retracted position of the transport arm 315 and the second arm position 2030B may be the position of the slit valve SV or any suitable substrate holding station for the substrate processing apparatuses 100A-100H. (such as loading lock chamber, buffer, process module, etc.) substrate clamping position. For example only, the delivery arm extends at an angle θ1 along the extension-retraction axis R1. The arm drop distance DRP of the delivery arm 315 is registered by the registration system 2020 in any suitable manner (block 630 of Figure 6). For example, in one aspect, the sag distance DRP can be measured from the transfer plane TP, which can be established from the retracted home/zero position of the substrate S (such as when the transport arm retracts to the first retracted position along the extended retract axis R1 Position 2030A and at angle θ1). The transfer plane TP can define the reference datum from which the sag distance DRP is measured for all angles θ1 to θ8 and for all extension and contraction axes R1 to R8. Here, there are eight extension and contraction axes R1~R8 and eight corresponding angles θ1~θ8, but in other aspects, there may be more than or less than eight extension and contraction axes and more than or less than eight corresponding angles. . [0130] As can be seen in FIG. 5 , the transport plane TP may correspond to the center SC of the substrate S clamped on the end effector 315E of the transport arm 315. The registration system 2020 is configured to detect the substrate Z position, for example, at any suitable point on the substrate S (eg, the leading edge SLE, center SC, and/or trailing edge SLT of the substrate S). Here, the Z position of the substrate is used for convenience; and otherwise, the drop distance DRP of the transport arm 315 may be along any suitable axis of any suitable reference frame. In FIG. 5 , as the transport arm 315 extends, for example, along the axis R1 from the first position 2030A to the second position 2030B, the uncompensated leading edge SLE, center SC, and trailing edge SLT of the substrate S are mapped with respect to the arm extension DEXT. Z position. As can be seen in Figure 5, at position 2030A, the trailing edge SLT of the substrate S is lower than the front edge SLE of the substrate; and at the second position 2030B, the trailing edge SLT of the substrate is higher than the front edge SLE of the substrate. As can also be seen in Figure 5, due to linear and non-linear factors implementing the extension of the transfer arm 315, the uncompensated Z position of the center SC of the substrate S is approximately 2.5 distance units below the transfer plane TP. [0131] In one aspect, the registration system 2020 is configured to sample the Z position of the substrate at any suitable incremental distance along the extension-retraction axis R1. For example, as the end effector 315E travels along the extension-retraction axis Rl, the Z position of the substrate may be sampled or measured at each ΔR distance unit increment. On the one hand, the sag distance DRP is shown to be approximately linear (varying with distance along the extension-retraction axis R1) in Figure 5 for demonstration purposes only, but it should be understood that the sag distance may vary non-linearly, for example if there is a significant non-linear total variation. situation. For examples where the sag distance is not linear, the Z position of the substrate can be measured more frequently (e.g. with smaller ΔR distance unit increments between samples) as the substrate S moves along the extension/retraction axis R1 to increase the The Z position of the substrate or the sag distance DRP measured by the extension and contraction axis R1 is defined. As the substrate S moves along the extension and contraction axis R1, the droop distance DRP measured at different ΔR distance unit intervals between the first position 2030A and the second position 2030B is, for example, recorded in the controller. 2020C memory 2020CM or any other suitable memory. In one aspect, the droop distance DRP measurement is stored in any suitable format/manner suitable for programmed control of the conveyor device 2004 including the conveyor arm 315, such as in the form of a lookup table or any suitable algorithm. In one aspect, the sag distance DRP measurement may be stored in the arm sag distance register 700 in the form of a lookup table, an example of which is illustrated in FIG. 7 . In one aspect, the arm sag distance register 700 includes an extended position R _ext1-m of the conveyor arm 315 , which is, for example, the center SC of the substrate S carried on the end effector 315E (in other aspects, the conveyor arm 315 The extension position may be determined by any suitable feature of the transfer arm 315 or the substrate S), and the extension angle θ _1-n of the transfer arm 315 is plotted. On the one hand, R _ext1 corresponds to the retracted position of the conveyor at the respective angle θ _1-n , and Rm corresponds to the position of the conveyor arm 315 in the second position 2030B (or a subsequent position different from the arm retracted position). Here, each extension position R _ext1 ~ R _m (there can be any suitable number of extension positions) corresponds to a sampling location for sag measurement DRP. In one aspect, the ΔR distance unit increment between the extended positions R _ext1 ~R _m ( FIG. 4C ) may be substantially constant; in other aspects, the ΔR distance unit increment may be variable, for example, in The predetermined area of the droop mapping (for example, the predetermined area along the extension and contraction axes R1 ~ R8) provides a larger definition. In one aspect, the angle θ _1-n corresponds to the expansion and contraction axes R1 to R8 and corresponds to different substrate clamping locations; however, in other aspects, there can be any suitable number of angles to measure the sag DRP. [0133] In one aspect, the controller 2020C is configured to drive the drive zone 200 in any suitable manner to extend the delivery arm 315 along the extension-retraction axis R1 at an angle θ1. As the transport arm 315 extends, the sensing device 2021 measures, for example, the Z positions ΔZ _1-1 to ΔZ _1-m of the substrate S at the extended positions R _ext1 to R _m . The arm drop DRP distances ΔZ1 - 1 to ΔZ1 - m are registered (block 630 of FIG. 6 ) with the controller in any suitable manner, such as in the arm drop distance register 700 . Controller 2020C is further configured to rotate delivery arm 315 such that end effector 315E is positioned to extend at angle θ2 along another extension retraction axis R2, where blocks 620 and 630 of FIG. 6 are repeated to obtain the sag DRP distance ΔZ _{2 -1} to ΔZ _2-m are registered in the arm droop distance register 700. In the above manner, the sag distance measurement is made at each angle θ _1-n and for each extension position R _ext1-m , so that the corresponding sag DRP is measured and represented in the arm sag distance register 700, for example, as an angle ΔZ _1-1 ~ ΔZ _1-m of θ1 to ΔZ _n-1 ~ ΔZ _nm at angle θn. Here, the arm droop distance register 700 describes the arm droop distance DRP at the first arm position 2030A, the second arm position 2030B, and at the third arm position 2030C (and subsequent arm positions 2030D~2030P), where the third arm position 2030C (and subsequent arm positions 2030D-2030P) are distinct from both the first arm position 2030A and the second arm position 2030B, in which the end effector 315E is along at least one axis of motion (in this case the extended axis of motion R, but in other respects Move in the T direction along the θ axis of motion and/or along the Z axis of motion). The attention arm sag distance register 700 is demonstrated to make a single sag distance measurement (ΔZ _1-1 ~ ΔZ _1-m at angle θ1 to ΔZ _n-1 ~ ΔZ _nm at angle θn), which may correspond to the center SC of the substrate S, However, it should be understood that in other aspects, the arm sag distance register 700 may also include sag distance measurement of the leading edge SLE and/or the trailing edge SLT of the substrate S. [0134] As can be seen in Figure 7, the arm droop distance register 700 may not only be a two-dimensional array relating the droop distance DRP to the extension distances _Rext1 ~ _Rm , but may also be constructed so as to compensate for differences in the operation of the conveyor device 104 environmental conditions (such as, for example, different operating temperatures TH), and/or to compensate for the arm extension of the transport arm 315 at different heights along the Z-axis. For example, blocks 620 and 630 of FIG. 6 may be repeated for any suitable number of different temperatures _THinitial ~ _{THinitial +y} , such that the sag compensation described by the arm sag distance register 700 and the arm sag implemented thereby Compensation (as described herein) accommodates, for example, thermal expansion and contraction of arm components (such as arm links, pulleys, belts, end effectors, etc.). Blocks 620 and 630 of FIG. 6 may also be repeated for any suitable number of different Z heights _Ziniti ~ _{Ziniti +x} , such that the arm sag distance register 700 and the sag compensation (described herein) implemented thereby are accommodating. For example, misalignment between the Z-axis of the conveyor 104 and the coaxial spindle of the drive zone 200, and/or misalignment between the drive shafts of the coaxial drive zones 200, 200A-200C to which the accommodation arm 315 is coupled. In a still further aspect, where the conveyor apparatus 104 includes interchangeable arms 314, 315, 316, 317, 318, arm sag may be created for each interchangeable arm 314, 315, 316, 317, 318 in the manner described above. The distance from the register is 700, 700'~700n'. [0135] As can be appreciated, the arm sag distance register may be generated in a manner similar to that described above with respect to the mounting of the delivery arm 2004 to the suspension arm 143 or linear slider 144. Here, the suspension arm 143 or the linear slider 144 (on which the transfer arm 2004 is mounted) may be mounted to the frame 2000F of the substrate transfer arm droop mapping apparatus 2000 in a manner substantially similar to that described above, with the registration system 2020 configured in a manner similar to the above. The droop distance of the conveyor arm 2004 mounted to the suspension arm 143 or the linear slider 144 is determined in the manner described relative to the extension and contraction axis R (for example, as shown in FIGS. 1C and 1D ), so that the conveyor arm 2004 and the suspension arm 143 Or the sag distance DRP implemented by the linear slider 144 is registered in the corresponding arm sag register 700 . As can be seen in Figure 7, the arm droop distance register 700 is implemented (such as having a form) so as to define a curve, such as curves 599A~C, which describes the arm droop distance with respect to the arm positions _Rext1 ~ _Rm , θ1~θn DRP changes in which the end effector 315E moves along one or more axes of motion R, θ, Z. In one aspect, one or more motion axes R, θ, Z define a transfer plane TP or a transfer volume TSV in the substrate transfer space TSP. As can be seen in Figure 7, each curve 599A-C describes the arm position for movement of the end effector 315E along each of one or more axes of motion R, θ, Z (see extension distances R _ext1 ~ R _m ) changes in the discrete arm sagging distance. [0137] On the one hand, still referring to Figures 4A-4D, 5, 7 and Figures 1A-1M, 2A-2D, the arm sag distance register(s) 700 is configured with individual delivery devices 2004 (and different selectable arms 314, 315, 316, 317, 318, if equipped) to operate. In one aspect, the arm sag distance register(s) 700 for the conveyor device 2004 is transferred (eg, loaded in any suitable manner) to the sag of the controller 110 of the processing devices 100A-100H in which the conveyor device 2004 is to be used. Compensator 110DC. In one aspect, sag compensator 110DC may be disposed within the housing of drive areas 200, 200A-200C, and coupled to controller 110 in any suitable manner to implement arm sag compensation as described herein. The controller 110 is then configured to implement a compensating movement of the conveying arm 2004 (eg, the conveying arm 315 ) with the drive area 200 , 200A-200C of the conveying device 2004 , wherein the compensating movement has a magnitude and a direction that compensates for and resolves the approximate movement of the conveying arm 315 The entire sag distance is DRP. In one aspect, using the processing apparatus 100A of FIG. 1A as an example, the sag compensator 110DC of the controller 110 is configured to determine the delivery arm 315 in the first position 2030A from the sag distance register(s) 700 in any suitable manner. The droop distance DRP between the second position 2030B and the second position 2030B in this example is the position of the slit valve SV. In one aspect, the magnitude and direction of the compensation movement are determined by the droop distance register(s) 700 . As illustrated in FIG. 5 , the controller 110 drives, for example, the conveyor device 2004 (which is exemplified as the conveyor device 104 of FIG. 1A ) according to the magnitude and direction of the compensation movement determined by the sag distance register(s) 700 . The Z-axis driver of the drive regions 200, 200A-200C, such that the substrate S generally runs along the transfer plane TP throughout the movement of the end effector 315E along the extension-retraction axis (eg, axis R1). In this regard, the compensating movement is in direction 586 and has a magnitude that generally corresponds to the amount of uncompensated droop (eg, droop distance DRP) illustrated in Figures 4D and 5. In this way, the compensating movement of the transport arm 315 results in the elimination of substantially the entire droop distance DRP of the transport arm 315 relative to the transfer plane TP (for example, the transfer plane TP here forms a predetermined reference datum for transferring the substrate S), so that during transport The end effector 315E of the second position 2030A in the space TSP is in the net position NP (such as along the transfer plane TP without deviating generally above or below the transfer plane TP), and in the direction in which the presentation arm hangs down (here is the Z direction), this position is independent of arm droop. Again, note that although second location 2030B is illustrated as a slit valve SV location, second location 2030B may otherwise be any suitable predetermined substrate destination in processing apparatus 100A-100H (e.g., aligner, buffer). , process module, etc. clamping location). [0139] Referring to FIG. 9, the controller 110 is configured to implement a compensating movement of the delivery arm 315 such that the end effector 315E completes the movement to reach the second position 2030B at the net position NP. As seen in Figure 9, the end effector is in a retracted position DRXT, which may correspond to first position 2030A. The controller 110 controls, for example, the movement 900 of the transfer arm 315 (which in this example is the Z-axis movement in the direction 586) so that the end effector 315E completes the movement and reaches the second position at the net position NP along the transfer plane TP. 2030B. As can be appreciated, reaching the net position NP is, for example, the center SC of the substrate S (or any other suitable feature of the transfer arm 315, such as the bottom of the end effector or the link coupling the end effector to the transfer arm). The wrist joint) is placed in the desired position roughly independent of arm drop, which increases processing throughput by reducing transfer times (e.g., pick and place times) and processing time (e.g., less time to close slit valves, etc.) , as mentioned above. Positioning the transfer arm 315 substantially independent of the arm droop as described herein also provides for transfer between the end effector interface location of the substrate clamping station (e.g., the end effector 315 and the substrate clamping location of the substrate clamping station). /transfer location) is positioned at a predetermined location within the transport space TSP, such that positioning of the end effector interface location of the substrate clamping station (e.g., corresponding to the second location 2030B) is substantially independent of the arm droop. Implementationally, aspects of the disclosed aspects provide substrate processing tools 100A-100H having a predetermined structure that interacts with the transfer arm 315 and end effector 315E and configured such that the interaction is independent of arm droop. implementation. [0140] Although motion 900 is illustrated as a generally linear motion, otherwise the motion may have any suitable motion profile. For example, movement 900' increases the Z position of end effector 315E greatly toward the beginning of movement 900', while movement 900'' increases the Z position of end effector 315E greatly toward the end of movement 900'. In one aspect, the controller 110 is configured to perform compensating movements with arm motions that move the end effector 315 between the first position 2030A and the second position 2030B along an optimal path with a time-optimal trajectory, for example As stated in U.S. Patent No. 9,517,558 issued on December 13, 2016, U.S. Patent No. 6,216,058 issued on April 10, 2001, and U.S. Patent No. 6,643,563 issued on November 4, 2003, which disclose the entire And use this as a reference. As described herein, drive areas 200, 200A-200C and conveyor arms 315 (and arms 314, 316-318) are constructed with multiple degrees of freedom (such as Z-axis motion, multiple drives each with individual degrees of freedom). axle, etc.), so that the movement of the conveyor arm (eg, conveyor arm 315) has more than one degree of freedom. In one aspect, the arm sag register 700 describes the arm sag distance DRP in the transport space TSP formed by more than one arm motion freedom throughout the transport arm 315 as described above. For example, in one aspect, as described above, the arm droop register 700 includes an arm droop distance DRP for each rotation angle θ of the conveyor arm 315 and for each Z-axis height of the conveyor arm 315 to define the conveyor space. TSP. [0142] Referring also to FIG. 8, an exemplary operation of the conveyor 2004 (which corresponds to the conveyor module 104 and/or the conveyor module 104 mounted to the suspension arm 143 or the linear slider 144) will be described. In one aspect, a substrate transport apparatus 2004 (block 800 of Figure 8) is provided. The substrate transport device 2004 includes drive areas 200, 200A~200C, which are connected to the frames and transport arms 314, 315, 316, 317, 318 of the substrate processing devices 100A~100H. As mentioned above, the transfer arms 314, 315, 316, 317, 318 are articulated and have end effectors 314E, 315E, 316E, 317E1, 317E2, 318E1, 318E2 with substrate holders having the substrate S carried thereon SH. The end effectors 314E, 315E, 316E, 317E1, 317E2, 318E1, 318E2 are conveyed along at least one axis of motion R with respect to the frame as defined by the articulation of the conveyor arms 314, 315, 316, 317, 318 as described above. It can move between a first position 2030A and a second position 2030B different from the first position 2030A in the space TSP. In one aspect, where the conveyor device 2004 includes a plurality of selectable conveyor arms 314, 315, 316, 317, 318, a conveyor arm 314, 315, 316, 317, 318 is selected from the plurality of selectable conveyor arms. 314, 315, 316, 317, 318 (block 805 in Figure 8) to be coupled to the driving regions 200, 200A~200C. [0143] Analyze the droop distance DRP between the first position 2030A and the second position 2030B of the transport arms 314, 315, 316, 317, 318 (block 810 of Figure 8), where the transport arms 314, 315, 316, 317 , 318 The droop distance DRP between the first position 2030A and the second position 2030B is, for example, a distance corresponding to the conveyor device 2004 architecture (such as a drive zone and an arm selected to be coupled to the drive zone, which may include a suspension arm 143 or The arm sag register 700 of the linear slider 144) is determined by the sag compensator 110DC. As discussed above, arm drop compensator 10DC may reside in controller 110 of processing devices 100A-100H, or within drive areas 200, 200A-200C, and be connected to controller 110 in any suitable manner, such that Implement articulation of the conveyor arm. [0144] On the one hand, the controller uses the drive areas 200, 200A~200C to implement the compensation movements 900, 900', 900'' of the transport arm 2004 between the first position 2030A and the second position 2030B (see, for example, Figure 5 and 9) (block 820 of FIG. 8 ), which has a size and direction 586 that compensates for and resolves substantially the entire droop distance DRP of the delivery arm 2004 . As mentioned above, the compensating movements 900, 900', 900'' of the transport arms 314, 315, 316, 317, 318 result in the elimination of substantially the entire sag distance DRP relative to any suitable predetermined reference datum (eg transfer plane TP) , in this case, the substrate holder SH at a predetermined position (for example, the second position 2030B) in the transport space TSP is at the net position NP, and in the direction in which the display arm hangs down (for example, the Z direction), this position is independent of the arm Sagging. On the one hand, the controller 110 completes the arm movement of the delivery arms 314, 315, 316, 317, 318 between the first position 2030A and the second position 2030B, so that the end effectors 314E, 315E, 316E, 317E1, 317E2, The substrate holder SH of 318E1 and 318E2 completes the movement and reaches the second position 2030B which is approximately at the net position NP. In one aspect, the controller 110 implements the compensating movements 900, 900', 900'' while the arm movements cause the substrate gripper SH of the end effector 314E, 315E, 316E, 317E1, 317E2, 318E1, 318E2 to move along a The optimal path of the optimal trajectory moves between the first position 2030A and the second position 2030B, as described above. [0145] According to the above, various aspects of the disclosed specific aspects provide a conveying device 104, 2004, which has a conveying arm 314, 315, 316, 317, 318, which is on the common drive area 200, 200A~200C. are truly switchable/interchangeable with each other, provided that the corresponding arm drop registers 700 for the interchangeable arms 314, 315, 316, 317, 318 are loaded into the controller 110 that controls the movement of the conveyor equipment 104, 2004. Further, while aspects of specific aspects of the disclosure are described above, it should be understood that aspects of the specific aspects of the disclosure may be employed, compared to motion paths that would result without position compensation as described herein. , any given point on the robot arm (such as the substrate clamping location on the end effector, wrist joint, elbow joint, etc.) is maintained within a tight predetermined motion path tolerance. For example, aspects of the disclosed aspects may be based on a general three-dimensional path in the transport space TSP, where the general three-dimensional path is determined as described above using a substrate transfer arm drop mapping device, where the general three-dimensional path is incorporated into Part of the command logic for the transfer arm provided by a controller (eg, controller 110). Aspects of the disclosed embodiments take advantage of the degrees of freedom available from the robot control system (eg, drive areas 200, 200A-200C). For example, if the delivery arm is allowed to move along radial, tangential, vertical, and end-effector orientations (such as when the delivery arm is mounted to or includes a suspension arm or linear slide), then all of these degrees of freedom can be used to compensate for the delivery Mechanical error trajectories in space TSP. More generally, the systems and processes previously described for trajectory compensation based on empirical factors of arm droop (ΔZ) in the 4-dimensional axes (R, θ, Z, TH) of the transport space TSP can be similarly Any given point (e.g., rotation axis T1, rotation axis T2, Trajectory compensation of rotation axis T3 or center SC). This approach would be applicable to maintaining any given point of the transfer arm 315 within any desired (eg, tighter) motion path tolerance compared to the resulting uncompensated mechanical path. This means that the proposed compensation approach can be empirically based on general 3-dimensional paths in space (R, θ, Z), which can be predetermined via experimental measurements and incorporated into part of the algorithm input. The compensation algorithm will take advantage of the degrees of freedom (3, 4, 5, 6 or more) available from the robot control system. For example, if the manipulator allows movement along radial, tangential, vertical, end effector pointing directions, then all these degrees of freedom can be used to correct for mechanical trajectory errors in the transport space TSP. Accordingly, the term arm sag (although previously specifically stated for convenience to indicate uncommanded displacement or "droop" in the Z direction), as used more generally herein, is to be understood to mean delivery arm 315 Uncommanded displacements resulting from bending of the corresponding motion axis or degree of freedom, such as (X,Y) sag or polar coordinate transformation (R,θ) sag. [0147] By further example, referring now to FIG. 7A, an arm drop distance register 700A is provided. In one aspect, empirical sag distance DRP measurements may be stored in arm sag distance register 700A, which has a lookup table format similar to that previously described. The lookup table(s) shown in Figure 7A may be combined or mixed with the lookup table(s) of Figure 7 to form a composite three-dimensional arm droop algorithm for each degree of freedom of the arm. In one aspect, the arm droop distance register 700A includes the extension position R _ext1-m of the transport arm 315 , which is, for example, the center SC of the substrate S carried by the end effector 315E and the rotation axis of the wrist W of the transport arm 315 T3, the rotation axis T2 of the elbow of the conveying arm 315, and the extension angle θ _1-n of the conveying arm 315 is plotted (in other aspects, the extending position of the conveying arm 315 can be determined by any other suitable position of the conveying arm 315 or the substrate S. determined by the characteristics). On the one hand, R _ext1 corresponds to the retracted position of the conveyor at the respective angle θ _1-n , and R _m corresponds to the position of the conveyor arm 315 in the second position 2030B (or a subsequent position other than the arm retracted position). Here, each extension position R _ext1 ~R _m (there can be any suitable number of extension positions) corresponds to a sampling location for the empirical sag measurement DRP. In one aspect, the ΔR distance unit increment between the extension positions R _ext1 ~R _m (Fig. 4C) can be approximately constant; in other aspects, the ΔR distance unit increment can be variable, for example, in the sagging A predetermined area of mapping (such as a predetermined area along the extension and contraction axes R1 to R8) is used to provide a larger definition. In one aspect, the angle θ _1-n corresponds to the expansion and contraction axes R1 to R8 and corresponds to different substrate clamping locations; however, in other aspects, there can be any suitable number of angles to measure the empirical sag DRP. [0148] In one aspect, the controller 2020C is configured to drive the drive zone 200 in any suitable manner to extend the delivery arm 315 along the extension-retraction axis R1 at the angle θ1. As the transport arm 315 extends, the sensing device 2021 measures R, θ positions, such as the center SC of the substrate S, the rotation axis T3 of the wrist W, the rotation axis T2 of the elbow, or any other suitable feature of the transport arm 315 or the substrate S in the extended position. ΔR,θ1-1 to ΔR,θ1-m of R _ext1 ~R _m . The empirical arm sag DRP distances ΔR,θ1-1 to ΔR,θ1-m are registered (block 630 of Figure 6) with the controller in any suitable manner (eg, in arm sag distance register 700A). Controller 2020C is further configured to rotate delivery arm 315 such that end effector 315E is positioned to extend along another extension-retraction axis R2 at angle θ2, where blocks 620 and 630 of Figure 6 are repeated to obtain the empirical droop DRP distance. ΔR,θ2-1 to ΔR,θ2-m are registered in the arm droop distance register 700A. In the above manner, the sag distance is measured at each angle θ _1-n and for each extension position R _ext1-m . In this way, the corresponding empirical sag DRP is measured and represented in the arm sag distance register 700A, for example. ΔR, θ1-1 to ΔR, θ1-m at angle θ1 and ΔR, θn-1 to ΔR,θn-m at angle θn. Here, the arm droop distance register 700A describes the experienced arm droop distance DRP at the first arm position 2030A and the second arm position 2030B and at the third arm position 2030C (and subsequent arm positions 2030D~2030P), where the third arm position 2030C (and subsequent arm positions 2030D-2030P) differs from both the first arm position 2030A and the second arm position 2030B, in which the end effector 315E is along at least one axis of motion (in this example the extended axis of motion R, but in other respects is moving in the T direction along the θ axis of motion and/or along the Z axis of motion). Note that the arm droop distance register 700A is demonstrated based on the droop distance measurement (ΔR, θ1-1 to ΔR, θ1-m from the angle θ1 and ΔR, θn-1 to ΔR, θn-m from the angle θn), which can correspond to The center SC of the substrate S, the rotation axis T3 of the wrist W of the transport arm 315, and the rotation axis T2 of the elbow of the transport arm 315. However, it should be understood that in other aspects, the arm droop distance register 700A may also include the leading edge of the substrate S SLE and/or trailing edge SLT or any other suitable feature of the transfer arm 315 sag distance measurement. [0149] As can be seen in FIG. 7A , the arm droop distance register 700A may not only be a two-dimensional array that associates the empirical droop distance DRP with the extension distances R _ext1 ~R _m , but may also be constructed so as to compensate for the time in which the transport device 104 is operated. Different environmental conditions (such as different operating temperatures TH), and/or compensation for arm extension at different positions of the transfer arm 315 along the Z-axis. For example, blocks 620 and 630 of FIG. 6 may be repeated for any suitable number of different temperatures _THinitial ~ _{THinitial +y} , such that the sag compensation described by arm sag distance register 700A and the arm sag implemented thereby Compensation (as described herein) accommodates, for example, thermal expansion and contraction of arm components (such as arm links, pulleys, belts, end effectors, etc.). Blocks 620 and 630 of FIG. 6 may also be repeated for any suitable number of different Z heights _Ziniti ~ _{Ziniti +x} , such that arm sag distance register 700A and the sag compensation (described herein) implemented thereby are accommodating. For example, misalignment between the Z-axis of the conveyor 104 and the coaxial spindle of the drive zone 200, and/or misalignment between the drive shafts of the coaxial drive zones 200, 200A-200C to which the accommodation arm 315 is coupled. In a still further aspect, where the delivery device 104 includes interchangeable arms 314, 315, 316, 317, 318, the arms may be generated for each interchangeable arm 314, 315, 316, 317, 318 in the manner described above. Droop distance register 700A, 700A'~700An'. [0150] As can be appreciated, the arm sag distance registers 700A-700An' may be generated in a manner similar to that described above with respect to the mounting of the delivery arm 2004 to the suspension arm 143 or linear slider 144. Here, the suspension arm 143 or linear slider 144 and the mounted conveyor arm 2004 may be mounted to the frame 2000F of the substrate conveyor arm droop mapping apparatus 2000 in a manner substantially similar to that described above, wherein the registration system 2020 is configured in a manner similar to that described above. The way of extending the contraction axis R (for example, as shown in FIGS. 1C and 1D ) determines the droop distance of the conveyor arm 2004 mounted to the suspension arm 143 or the linear slider 144 , so that both the conveyor arm 2004 and the suspension arm 143 or The empirical droop distance DRP implemented by the linear slider 144 is registered in the corresponding arm droop register 700A. [0151] In one aspect, referring to FIGS. 4A-4D, 7A and FIGS. 1A-1M, 2A-2D, the arm sag distance register(s) 700A varies with the individual delivery device 2004 (and may be different as described above). Select arms 314, 315, 316, 317, 318, if equipped) to operate. In one aspect, the arm sag distance register(s) 700A for the conveyor device 2004 is transferred (eg, loaded in any suitable manner) to the sag compensator 110DC of the controller 110 for the arm sag distance register(s) 700A for which the conveyor device 2004 is to be used. Processing equipment 100A ~ 100H. In one aspect, the sag compensator 110DC may be disposed within the housing of the drive areas 200, 200A-200C, and coupled to the controller 110 in any suitable manner to implement arm sag compensation as described herein. The controller 110 is then configured to implement a compensating movement of the conveying arm 2004 (e.g., the conveying arm 315 ) with the drive area 200 , 200A-200C of the conveying device 2004 , wherein the compensating movement has a magnitude and a direction that compensates for and resolves the approximate movement of the conveying arm 315 The entire experience sagging distance DRP. In one aspect, using the processing apparatus 100A of FIG. 1A as an example, the sag compensator 110DC of the controller 110 is configured to determine the delivery arm 315 in the first position 2030A from the sag distance register(s) 700A in any suitable manner. The empirical droop distance DRP between the second position 2030B and the second position 2030B in this example is the position of the slit valve SV. In one aspect, the magnitude and direction of the compensation movement are determined by the sag distance register(s) 700A. [0152] It should be understood that the foregoing description is merely illustrative of aspects of specific aspects disclosed. Those skilled in this art can devise various alterations and embellishments without departing from the precise aspects of the form disclosed. Accordingly, the aspects disclosed are intended to embrace all such alterations, modifications, and variations that fall within the scope of the appended claims. Furthermore, the fact that mutually different dependent or independent items recite different features does not mean that a combination of these features cannot be used to advantage, and such combinations are still within the scope of aspects of the invention.

12: tool interface area 15: conveyor arm 18B, 18i: conveyor chamber module 26B, 26i: conveyor equipment 30i: workpiece station 30S1, 30S2: workpiece support/shelf 56, 56A: load lock chamber module 56S1, 56S2: Workpiece support/shelf 100A~100H: Processing equipment 100E1, 100E2: End 100F1-100F8: Surface 100S1, 100S2: Side 101: Atmospheric front end 102, 102A~102E: Vacuum load lock chamber 103: Vacuum rear end 104: Conveying unit module 105: Loading port module 106: Mini environment 107: Loading port 108: Transfer robot 110: Controller 110DC: Droop compensator 121: Suspension link 122: Suspension link 125A~125E :Conveyor room 130: Processing station 130S: Processing station 130T1-130T8: Processing station 143: Suspension arm 144: Linear carrier, linear slider 200, 200A~200C: Drive area 200DF: Datum reference feature 200F: Frame, mounting boss Edge 200FI: Internal 268A, 268B: Encoder/sensor 270: Z-axis driver 270C: Carrier 275: Telescopic bag seal 276: Ferrous fluid seal 277: Ferrous fluid seal 280: Harmony driven motor 280' :First drive motor 280A: Harmony drive motor 280A': Second drive motor 280ACS: Can seal 280AR': Rotor 280AS: Drive shaft 280AS': Stator 280B: Harmony drive motor 280B': Motor 280BCS: Can seal 280BR ': Rotor 280BS: Drive shaft 280BS': Stator 280CS: Tank seal 280R': Rotor 280S: Drive shaft 280S': Stator 281: Housing 282: Rotary drive area 290: Wire 314: Transport arm 314E: End effector 315: Conveyor arm 315E: End effector 315F: Belt driven forearm 315U: Upper arm 316: Conveyor arm 316E: End effector 317: Conveyor arm 317E1, 317E2: End effector 318: Conveyor arm 318E1, 318E2: End effector 412: Workpiece entry and exit station 416: Linear conveyor room 420: Workpiece conveyor system 586: Compensation movement direction 599A~599C: Curve 600~630: Steps of the invention method 700, 700A: Droop distance register 700', 700n', 700A', 700An': Droop distance register 800~820: Operation steps of conveying equipment 900, 900', 900": Compensation movement 2000: Substrate conveyor arm droop surveying equipment 2000DF: Datum or reference feature 2000F: Frame 2004: Conveying equipment 2007: Z-axis rail 2010: Installation Surface 2012: Tool interface area 2020: Registration system 2020C: Controller 2020CM: Memory 2020CP: Processor 2021: Sensing device 2030A: First position 2030B: Second position 2030C: Third position 2030D~P: Subsequent position 2050: Interface 2060: Interface 2070: Interface 2080: Wafer conveyor 3018, 3018A, 3018I, 3018J: Transport chamber module ATM: Atmospheric pressure C: Substrate carrier or cassette CNX: Connection DEXT: Extension distance DRP: Droop distance DRXT: Contraction distance NP: Net position PM: Processing module R, R1~R8: Extension and contraction axis, path R _ext1 ~ R _ext3 , R _m : Extension position ΔR: Distance unit increment S: Substrate SC: Center SH: Substrate holder SLE : Leading edge SLT: Trailing edge SV: Slit valve SVH: Hole height T: Rotation direction T1~T3: Rotation axis TH _initial ~TH _{initial +y} : Operating temperature TP: Transfer plane TSP: Transport space TSV: Transfer volume W: WRP: wafer/ _{substrate resting plane}

The following description explains the foregoing aspects and other features of the disclosed embodiments with respect to the accompanying drawings, wherein: 1A-1D are schematic diagrams of processing equipment incorporating aspects of the disclosed embodiments; Figures 1E and 1F are partial schematic diagrams of the processing equipment of Figures 1A~1D and 1G~1M; 1G-1M are schematic diagrams of processing equipment incorporating aspects of the disclosed embodiments; 2A is a schematic diagram of a robotic conveyor drive region in accordance with aspects disclosed; FIG. 2B is a partial schematic diagram of the transport drive area of the robot of FIG. 2A in accordance with aspects disclosed; Figure 2C is a partial schematic diagram of the transport drive area of the robot of Figure 2A in accordance with aspects disclosed; Figure 2D is a partial schematic diagram of the transport drive area of the robot of Figure 2A in accordance with aspects disclosed; 3A-3E are schematic diagrams of various aspects of a delivery arm according to specific aspects disclosed; 4A to 4C are schematic diagrams of a substrate transfer arm droop surveying apparatus according to various aspects disclosed; 4D is a schematic diagram of a substrate transfer arm showing a drooping arm in accordance with aspects of the disclosure; 5 is an exemplary illustration of substrate locations in accordance with aspects disclosed; Figure 6 is an exemplary flowchart of various aspects in accordance with specific aspects disclosed; Figure 7 is a schematic diagram of droop registration in accordance with various aspects of the disclosed specific aspects; Figure 7A is a schematic diagram of droop registration in accordance with various aspects of the disclosed specific aspects; Figure 8 is an exemplary flow diagram of aspects in accordance with specific aspects disclosed; and 9 is an exemplary illustration of conveyor arm position compensation in accordance with aspects of the disclosure.

200:Drive area

315:Conveyor arm

315E: End implementer

200DF: Datum or reference feature

200F: Frame, mounting flange

2000:Substrate conveyor arm droop surveying equipment

2000DF:Datum Features

2000F:Frame

2004: Conveying equipment

2007:Z axis rail

2010: Mounting surface

2020:Registration System

2020C:Controller

2020CP:Processor

2021: Induction device

2030A: First position

TP: transfer plane

TSP: transport space

TSV: transfer volume

Claims (30)

A substrate conveying equipment including: frame; a drive area, which is connected to the frame; a transfer arm operatively connected to the drive region, the arm being articulated and having an end effector, and having a substrate holder operable to be moved along at least one axis of motion by the transfer arm with respect to the frame to move relative to the frame between a first position and a second position different from the first position in the transport space defined by the hinge; and a controller operatively connectable to the drive area such as to effect articulation of the conveyor arm, the controller including an arm bend compensator configured to cause the arm bend compensator to resolve the conveyor arm due to uncommanded arm The uncommanded arm displacement distance between the first position and the second position due to the change in geometry. The substrate conveying apparatus of claim 1, wherein the controller implements a compensating movement of the conveying arm in size and direction with the drive area, which compensates and resolves substantially the entire uncommanded arm displacement distance of the conveying arm. The substrate conveying apparatus of claim 1, wherein the compensator has an arm bending register, and the arm bending compensator determines the position of the conveying arm between the first position and the second position from the arm bending register. Uncommanded arm displacement distance. The substrate conveying apparatus of claim 3, wherein the controller uses the driving area to implement a compensating movement of the conveying arm in size and direction, which compensates and resolves substantially the entire movement of the conveying arm determined by the arm bending register. The uncommanded arm displacement distance. The substrate conveying apparatus of claim 4, wherein the compensating movement causes elimination of substantially the entire uncommanded arm displacement distance of the conveying arm relative to a predetermined reference datum, such that the substrate clamp at a predetermined location in the conveying space The holder is in a net position independent of the uncommanded arm geometry change in the direction exhibiting the uncommanded arm displacement distance. The substrate transport apparatus of claim 5, wherein the predetermined location is a substrate destination in the substrate processing tool. The substrate conveying apparatus of claim 5, wherein the controller implements the compensating movement, so that the substrate holder completes the movement and reaches the predetermined location approximately at the net position. The substrate conveying apparatus of claim 5, wherein the controller implements the compensating movement, and the arm movement causes the substrate holder to be in the first position and the second position along an optimal path with a time-optimal trajectory. move between. The substrate transport apparatus of claim 3, wherein the drive area and transport arm are configured such that movement of the transport arm has more than one degree of freedom, and the arm bend register describes the more than one freedom of movement throughout the transport arm The uncommanded arm displacement distance of the conveying space formed by degrees. The substrate conveying apparatus of claim 3, wherein the conveying arm is interchangeable from a plurality of different and interchangeable conveying arms, such that each of the interchangeable arms has a different An arm bend characteristic and an associated corresponding bend register that describes the uncommanded arm displacement distance for that associated arm. A substrate processing tool having a substrate transport apparatus as claimed in claim 10 and having a substrate clamping station configured to form an interface with a substrate on the substrate holder at a predetermined location in the transport space, the substrate clamp The support station is positioned so that the interface is implemented independently of the uncommanded arm geometry changes. A substrate processing tool having a substrate transport apparatus as claimed in claim 10 and having a predetermined structure that interacts with the transport arm or substrate holder and configured such that the interaction is independent of the uncommanded arm geometry change implementation. A substrate processing tool including: frame; a drive area, which is connected to the frame; a transfer arm operatively connected to the drive region, the arm being articulated and having an end effector, and having a substrate holder operable to be moved along at least one axis of motion by the transfer arm with respect to the frame to move relative to the frame between a first position and a second position different from the first position in the transport space defined by the hinge; and A controller operatively connectable to the drive zone so as to implement articulation of the conveyor arm, the controller configured to use the drive zone to effect movement of the arm in a direction opposite to the direction in which the arm bends The arm bending is compensated such that approximately the entire uncommanded arm displacement distance due to the uncommanded arm geometry change between the first position and the second position is eliminated with respect to a predetermined reference datum. The substrate processing tool of claim 13, wherein the controller has an arm bend register, and the controller determines the uncommanded position of the transfer arm between the first position and the second position from the arm bend register. arm displacement distance. The substrate processing tool of claim 14, wherein the drive region and transfer arm are configured such that movement of the transfer arm has more than one degree of freedom, and the arm bend register describes the more than one freedom of movement throughout the transfer arm The uncommanded arm displacement distance of the conveying space formed by degrees. The substrate processing tool of claim 14, wherein the transfer arm is interchangeable from a plurality of different and interchangeable transfer arms such that each of the interchangeable arms has a different An arm bend characteristic and an associated corresponding arm bend register that describes the uncommanded arm displacement distance of the associated arm. The substrate processing tool of claim 13, wherein the compensating movement of the arm causes cancellation of substantially the entire uncommanded arm displacement distance of the conveyor arm relative to a predetermined reference datum, such that at a predetermined location in the conveyor space The substrate holder is in a clear position independent of the arm bending in the direction in which the arm bending occurs. The substrate processing tool of claim 17, wherein the predetermined location is a substrate destination in the substrate processing tool. The substrate processing tool of claim 17, wherein the controller implements the movement of the transfer arm in a direction opposite to the direction in which the arm bends, such that the substrate holder completes the movement to arrive substantially at the net position of the scheduled location. The substrate processing tool of claim 13, wherein the controller implements the movement of the transport arm in a direction opposite to the direction in which the arm bends, and the arm movement causes the substrate holder to follow a time-optimized trajectory The optimal path is used to move between the first position and the second position. A method that includes: A substrate transfer apparatus is provided having a drive area connected to the frame and a transfer arm operatively connectable to the drive area, the arm being articulated and having an end effector, and having a substrate holder operable with respect to the drive area. The frame is movable relative to the frame between a first position and a second position different from the first position in a conveyor space defined by the articulation of the conveyor arm along at least one axis of motion; and Resolve the uncommanded arm displacement distance of the conveyor arm between the first position and the second position due to the uncommanded arm geometry change, wherein the conveyor arm between the first position and the second position The uncommanded arm displacement distance is determined by the arm bend register of the arm bend compensator, which resides in the controller connected to the drive area to implement the articulation of the conveyor arm. The method of claim 21, wherein the controller implements a compensating movement of the conveyor arm in magnitude and direction with the drive region, which compensates for and resolves substantially the entire uncommanded arm displacement distance of the conveyor arm. The method of claim 21, wherein the arm bending compensator has an arm bending register, the method further comprising: using the arm bending compensator to determine the first position and the first position of the delivery arm from the arm bending distance register. This uncommanded arm displacement distance between the second position. The method of claim 23, wherein the controller uses the drive area to implement a compensating movement of the conveyor arm in size and direction, which compensates and resolves substantially the entire unsatisfactory movement of the conveyor arm determined by the arm bend register. Commanded arm displacement distance. The method of claim 24, wherein the compensating movement causes cancellation of substantially the entire uncommanded arm displacement distance of the transport arm relative to a predetermined reference datum such that the substrate holder is at a predetermined location in the transport space is the net position independent of the uncommanded arm geometry change in the direction in which the uncommanded arm geometry change manifests itself. The method of claim 25, wherein the predetermined location is a substrate destination in a substrate processing tool. The method of claim 25, wherein the controller implements the compensating movement such that the substrate holder completes movement and reaches the predetermined location approximately at the net position. The method of claim 25, wherein the controller implements the compensating movement and the arm movement causes the substrate holder to follow an optimal path with a time-optimal trajectory between the first position and the second position Move. The method of claim 23, wherein the drive region and the conveyor arm are configured such that movement of the conveyor arm has more than one degree of freedom, the method further comprising: describing the plurality of degrees throughout the conveyor arm with the arm bend register. The uncommanded arm displacement distance in the transport space formed by one degree of freedom of movement. The method of claim 23, wherein the conveyor arm is interchangeable from a plurality of different and interchangeable conveyor arms, such that each of the interchangeable arms has a different arm when switched at the connection with the drive zone A bend feature and an associated corresponding arm bend register that describes the uncommanded arm displacement distance for that associated arm.

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