TW202339084A - Workpiece carrier - Google Patents

Abstract

A workpiece carrier includes a ring frame and a supporting film. The ring shape includes an inner rim and an outer rim opposite to each other. The inner rim surrounds a carrying region for carrying a plurality of workpieces and includes a plurality of turning portions protruded toward the outer rim. The plurality of turning portions correspond to a plurality of corners of the plurality of workpieces. The supporting film is disposed at the carrying region and fixed to the ring frame.

Description

Workpiece carrier

The present disclosure relates to a workpiece carrier, particularly a workpiece carrier that can maximize the use of the load-bearing area without changing the accepted dimensions of the existing machine.

Generally speaking, in the manufacturing process of semiconductor products, after the wafer is cut to form multiple wafers, the multiple wafers are further fixed on a common carrier (such as a lead frame) and encapsulated with an encapsulant. Multiple chips are packaged together in an encapsulant, so at least one chip needs to be singulated through a further cutting process to form multiple functional packages. In this cutting process, adhesive cutting tape is mainly used to first affix it to the circular frame used by the machine equipment, and then the package structures to be cut are affixed to the cutting tape in sequence, and arranged one by one on the circular frame. inside the frame to facilitate transportation of the cutting machine and subsequent cutting processes. However, because most of the carriers used in current packaging structures are strip-shaped (such as copper foil substrates, lead frames, etc.), they are limited by the size and shape of the circular frame. The number of packaging structures that the entire frame can carry is limited. Therefore, the entire cutting tape area cannot be effectively utilized, which not only results in a waste of cutting tape materials, but also fails to increase production capacity.

The present disclosure provides a workpiece carrier that has a high area utilization rate, thereby reducing production costs and improving production efficiency.

A workpiece carrier disclosed in the present disclosure includes an annular frame and a supporting film. The annular frame includes an inner edge and an outer edge opposite to each other, wherein the inner edge frame encloses a bearing range for carrying multiple workpieces and includes a plurality of turning portions protruding toward the outer edge, and the plurality of turning portions Do not correspond to multiple corners of multiple workpieces. The supporting membrane is laid in the load-bearing range and fixed on the annular frame.

In an embodiment of the present disclosure, a distance from each of the plurality of turning portions to a center of the inner edge is substantially greater than a distance from other parts of the inner edge to the center.

In an embodiment of the present disclosure, the plurality of turning portions are arranged symmetrically with each other.

In an embodiment of the present disclosure, the plurality of workpieces are attached to the support film.

In an embodiment of the present disclosure, the plurality of workpieces are arranged on the support film along a first direction, and a length of the support film in the first direction is substantially smaller than the annular shape. An inner diameter of the frame.

In an embodiment of the present disclosure, a peripheral edge of the support film is substantially parallel to a corresponding long side of the plurality of workpieces.

In an embodiment of the present disclosure, the plurality of vertices of the plurality of turning portions respectively maintain a distance from the corresponding plurality of corners.

In an embodiment of the present disclosure, the distance is substantially between 13 mm and 16 mm.

In one embodiment of the present disclosure, the workpiece carrier is used on a platform of a cutting machine, wherein the platform is disposed below the support film to absorb and fix the support film, and the platform The outer edge of a platform maintains a distance from the inner edge of the annular frame.

In an embodiment of the present disclosure, the platform outer edge of the platform includes a plurality of platform turning portions corresponding to the plurality of turning portions.

Based on the above, the inner edge of the annular frame of the workpiece carrier of the present disclosure includes a plurality of turning portions protruding toward its outer edge, and the positions of the turning portions respectively correspond to multiple corners of the workpiece. With this configuration, the ring-shaped frame protrudes outward through the turning part of its inner edge to achieve the effect of giving way to the corners of the workpiece, so it can carry more weight without changing the shape and size of the outer edge of the ring-shaped frame. of workpieces, improving the area utilization of the workpiece carrier, thereby increasing the productivity of workpieces.

The aforementioned technical contents, features and effects of the present disclosure will be clearly presented in the following detailed description of each embodiment with reference to the drawings. Directional terms mentioned in the following embodiments, such as "up", "down", "front", "back", "left", "right", etc., are only for reference to the directions in the attached drawings. Accordingly, the directional terms used are illustrative and not limiting of the disclosure. Furthermore, in the following embodiments, the same or similar elements will be given the same or similar numbers.

FIG. 1 is a schematic top view of a workpiece carrier according to an embodiment of the present disclosure. FIG. 2 is a schematic side view of a workpiece carrier according to an embodiment of the present disclosure. Please refer to FIGS. 1 and 2 simultaneously. In some embodiments, the workpiece carrier 100 may include an annular frame 110 and a support film 120 . The workpiece carrier 100 can be used to carry and fix multiple workpieces 200 . For example, the workpiece carrier 100 can be used to carry and fix multiple package structures 200 in a semiconductor manufacturing process. In this embodiment, the workpiece carrier 100 can be used in conjunction with the platform 130 on a machine in a semiconductor manufacturing process (the drawing is for illustration only and is not intended to limit the application of the present disclosure). In this embodiment, the machine platform may be, for example, a cutting machine platform, and the platform 130 is the carrying platform of the cutting machine platform. Of course, this disclosure is not limited to this. The workpiece carrier 100 can be used on the platform 130 of any processing machine in the semiconductor manufacturing process to carry and fix the packaging structure 200 to facilitate subsequent processes. In some embodiments, the annular frame 110 can enclose a load-bearing range S1 for carrying multiple workpieces 200 , and the support film 120 can be laid in the load-bearing area S1 and fixed on the annular frame 110 . In this way, the workpiece 200 is attached to the support film 120 and can be fixed on the annular frame 110 through the support film 120 for subsequent processes.

In one embodiment, the support film 120 may include a release layer and an adhesive layer. The release layer can be disposed above the adhesive layer to prevent foreign matter from adhering to the adhesive layer before the packaging structure is attached to the adhesive layer. In this embodiment, the support film 120 may be a dicing tape used in semiconductor manufacturing processes, which may have adhesiveness and be used to maintain the packaging structure 200 in position during subsequent processing (eg, dicing processes). After the cutting process is completed, the supporting film 120 can be separated (peeled off) from the supporting film 120 by, for example, a peeling process. The peeling process may use any suitable process such as etching, grinding, and mechanical peel off to remove the support film 120 . In some embodiments, the support film 120 can be peeled off by irradiating laser or ultraviolet light on the surface of the support film 120 . In some embodiments, the supporting film 120 may have a shape substantially corresponding to the annular frame 110 . In this embodiment, the back side of the packaging structure 200 can be, for example, first attached to the support film 120, and then the support film 120 is fixed on the annular frame 110, and then the support is cut along the edge of the annular frame 110. Membrane 120. Of course, this disclosure is not limited to this. In some embodiments, the platform 130 can be disposed below the support film 120 to adsorb and fix the support film 120 . In this embodiment, the platform 130 can be a vacuum suction cup (chuck) or an electrostatic chuck, which uses vacuum or electrostatic adsorption to evenly adsorb the support film 120 to the upper surface of the platform 130 to ensure that the workpiece 200 is properly connected to the device. Stability and flatness between planes.

In this embodiment, the packaging structure 200 may be a packaged leadframe strip and the workpiece carrier 100 may be used, for example, to carry and fix a plurality of strip-shaped packaging structures 200 during the cutting process. That is to say, the shape of the packaging structure 200 of this embodiment is elongated (rectangular) with multiple corners 220 . In this way, when multiple packaging structures 200 with corners are arranged on the annular frame, the corners of the packaging structures 200 located at the edges are likely to interfere with the inner edge of the annular frame, resulting in the annular frame being unable to accommodate larger packages. Multiple package structures 200. Of course, this embodiment is only used for illustration, and the present disclosure is not limited thereto. In other embodiments, the packaging structure 200 may be other suitable packaging structures and may have other possible shapes. As long as the packaging structure 200 has corners that easily interfere with the inner edge of the annular frame, the configuration of the present disclosure can be applied.

In view of this, in this embodiment, the annular frame 110 may include an inner edge 114 and an outer edge 116 that are opposite to each other, wherein the inner edge 114 of the annular frame 110 is framed to carry a plurality of packaging structures 200 The load-bearing range S1 , and the inner edge 114 of the annular frame 110 includes a plurality of turning portions 112 protruding toward the outer edge 116 , and the positions of the turning portions 112 respectively correspond to the corners 220 of the packaging structure 200 . In this way, the ring-shaped frame 110 protrudes outward through the turning portion 112 of its inner edge 114 to achieve the effect of giving way to the corners 220 of the packaging structure 200, and thus can carry more packaging structures than a circular frame. 200, improving the space utilization of the workpiece carrier 100. Specifically, a general circular frame can carry approximately two packaging structures, while the annular frame 110 with multiple turning portions 112 in this embodiment can carry at least three packaging structures. Of course, this disclosure does not This is the limit.

3 is a schematic top view of the arrangement relationship between the annular frame and the packaging structure of a workpiece carrier according to an embodiment of the present disclosure. Please refer to FIGS. 1 and 3 . In some embodiments, the distance R1 from each turning portion 112 to the center of the inner edge 114 is substantially greater than the distance R2 from other parts of the inner edge 114 to the center. Moreover, the turning portions 112 can be arranged symmetrically with each other to respectively correspond to the multiple corners 220 of the multiple workpieces 200 . In this embodiment, the included angle θ1 of the turning portion 112 is approximately between 120 degrees and 140 degrees. In this embodiment, the vertices of the turning portion 112 maintain a distance g1 from the corresponding corners 220 to reserve the minimum safety distance required by the cutting tool. For example, the distance g1 between the vertex of the turning portion 112 and the corner 220 is approximately between 13 mm and 16 mm. Although the workpiece 200 in this embodiment is rectangular, in other embodiments, the workpiece 200 can also be in the shape of other polygons, such as a square. As long as the workpiece 200 has multiple non-circular corners, the present disclosure can be used. In this configuration, turning portions 112 corresponding to multiple corners are provided on the inner edge 114 of the annular frame 110 to accommodate a greater number of workpieces 200 without changing the shape and size of the outer edge of the annular frame 110 . .

In some embodiments, the workpieces 200 can be arranged on the support film 120 along the first direction D1, and the length L1 of the support film 120 in the first direction D1 is substantially smaller than the inner diameter L2 of the annular frame 110, that is, That is to say, the supporting film 120 does not completely cover the bearing range S1 enclosed by the annular frame 110 , and the peripheral edge 122 of the supporting film 120 is substantially parallel to the long side 210 of the corresponding workpiece 200 . In this embodiment, the support film 120 may be a roll-type support film, and the method of arranging the support film 120 may include first laying the support film 120 on the ring along the long axis direction of the workpiece 200 (approximately perpendicular to the first direction D1 ). On the ring-shaped frame 110, the supporting film 120 is cut along the edge of the ring-shaped frame 110. In this way, the length L1 of the support film 120 in the first direction D1 is the width of the roll-type support film, and the length L1 only needs to be slightly larger than the installation area of the workpiece 200, and does not need to completely cover the entire load-bearing range S1. Therefore, the length L1 of the support film 120 in the first direction D1 of this embodiment can be shortened to be smaller than the inner diameter L2 of the annular frame 110 to further reduce the production cost. For example, the length L1 of the support film 120 in the first direction D1 may be approximately 300 mm to 350 mm. In this embodiment, the length L1 of the support film 120 in the first direction D1 is approximately 320 mm, but the disclosure is not limited thereto.

FIG. 4 is a schematic top view of the arrangement relationship between a platform and a packaging structure according to an embodiment of the present disclosure. Please refer to FIG. 1 and FIG. 4 . In this embodiment, the platform 130 can also be configured similarly to the annular frame 110 and have a plurality of platform turning portions 132 corresponding to the turning portions 112 . Specifically, the platform outer edge 134 of the platform 130 can maintain a distance from the inner edge 114 of the annular frame 110 as shown in FIG. 1 . Furthermore, the platform outer edge 134 of the platform 130 includes a plurality of platform turning portions 132, which respectively correspond to the plurality of turning portions 112 of the annular frame 110. That is to say, the outer edge 134 of the platform will protrude outwards and form a turning point corresponding to the corner of the workpiece 200 , thereby ensuring that the corners of the workpiece 200 can also be adsorbed and attached by the platform 130 and the support film 120 . In one embodiment, the platform outer edge 134 may be slightly larger than the placement range of the workpiece 200 on the support film 120 . In this embodiment, the included angle θ2 of the platform turning portion 132 may be approximately between 120 degrees and 140 degrees.

In summary, the inner edge of the annular frame of the workpiece carrier of the present disclosure includes a plurality of turning portions protruding toward its outer edge, and the positions of the turning portions respectively correspond to multiple corners of the workpiece. With this configuration, the ring-shaped frame protrudes outward through the turning part of its inner edge to achieve the effect of giving way to the corners of the workpiece, so it can carry more weight without changing the shape and size of the outer edge of the ring-shaped frame. of workpieces, improving the space utilization of the workpiece carrier, thereby increasing the productivity of workpieces. Moreover, the workpiece carrier of the present disclosure further shortens the length of the support film in the arrangement direction of the workpieces, so that this length is only slightly larger than the installation area of the workpieces but does not completely cover the load-bearing range enclosed by the entire annular frame. , thus further reducing production costs.

100:Workpiece carrier 110: Ring frame 112: Turning point 114:Inner edge 116:Outer edge 120: Support film 122: Zhou Yuan 130:Platform 132:Platform Turning Department 134:Outer edge of platform 200: Workpiece, packaging structure 210: long side 220: Corner D1: first direction g1: spacing L1:Length L2:Inner diameter S1: Carrying range R1, R2: distance θ1, θ2: included angle

FIG. 1 is a schematic top view of a workpiece carrier according to an embodiment of the present disclosure. FIG. 2 is a schematic side view of a workpiece carrier according to an embodiment of the present disclosure. 3 is a schematic top view of the arrangement relationship between the annular frame and the packaging structure of a workpiece carrier according to an embodiment of the present disclosure. FIG. 4 is a schematic top view of the arrangement relationship between a platform and a packaging structure according to an embodiment of the present disclosure.

100:Workpiece carrier

110: Ring frame

112: Turning point

114:Inner edge

116:Outer edge

120: Support film

122: Zhou Yuan

130:Platform

134:Outer edge of platform

200: Workpiece, packaging structure

210: long side

220: Corner

D1: first direction

g1: spacing

L1:Length

L2:Inner diameter

S1: Carrying range

Claims (10)

A workpiece carrier including: An annular frame includes an inner edge and an outer edge opposite each other, wherein the inner edge frame encloses a bearing range for carrying a plurality of workpieces and includes a plurality of turning portions protruding toward the outer edge, and the plurality of Each turning portion corresponds to multiple corners of multiple workpieces; and A support membrane is laid on the load-bearing range and fixed on the annular frame. The workpiece carrier of claim 1, wherein a distance from each of the plurality of turning portions to a center of the inner edge is substantially greater than a distance from other parts of the inner edge to the center. The workpiece carrier according to claim 1, wherein the plurality of turning portions are arranged symmetrically with each other. The workpiece carrier of claim 1, wherein the plurality of workpieces are attached to the support film. The workpiece carrier of claim 1, wherein the plurality of workpieces are arranged on the support film along a first direction, and a length of the support film in the first direction is substantially smaller than the annular frame an inner diameter. The workpiece carrier as claimed in claim 1, wherein an edge of the support film is substantially parallel to a corresponding long side of the plurality of workpieces. The workpiece carrier as claimed in claim 1, wherein the plurality of vertices of the plurality of turning portions respectively maintain a distance from the corresponding plurality of corners. The workpiece carrier of claim 7, wherein the distance is substantially between 13 mm and 16 mm. The workpiece carrier as described in claim 1 is used in conjunction with a platform of a cutting machine, wherein the platform is disposed below the support film to adsorb and fix the support film, and an outer edge of the platform is in contact with the support film. The inner edge of the annular frame maintains a distance. The workpiece carrier of claim 9, wherein the platform outer edge of the platform includes a plurality of platform turning portions corresponding to the plurality of turning portions.

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