TW202337812A - Method and system for controlling the lifting mechanism of an overhead hoist transport vehicle - Google Patents

Method and system for controlling the lifting mechanism of an overhead hoist transport vehicle Download PDF

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Publication number
TW202337812A
TW202337812A TW111143128A TW111143128A TW202337812A TW 202337812 A TW202337812 A TW 202337812A TW 111143128 A TW111143128 A TW 111143128A TW 111143128 A TW111143128 A TW 111143128A TW 202337812 A TW202337812 A TW 202337812A
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Taiwan
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lifting
speed
clamping mechanism
control
transport vehicle
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TW111143128A
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Chinese (zh)
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杜寶寶
繆峰
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大陸商彌費科技(上海)股份有限公司
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Publication of TW202337812A publication Critical patent/TW202337812A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C1/00Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
    • B66C1/10Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
    • B66C1/42Gripping members engaging only the external or internal surfaces of the articles
    • B66C1/44Gripping members engaging only the external or internal surfaces of the articles and applying frictional forces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00Other constructional features or details
    • B66C13/16Applications of indicating, registering, or weighing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B66HOISTING; LIFTING; HAULING
    • B66CCRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00Other constructional features or details
    • B66C13/18Control systems or devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying

Abstract

The present application provides a method and system for controlling the lifting mechanism of an overhead hoist transport vehicle, which are applied to the technical field of semiconductor wafer manufacturing equipment. The method for controlling the lifting mechanism of an overhead hoist transport vehicle includes: when the overhead hoist transport vehicle runs to a preset position in a track, starting the drive of the lifting mechanism to the clamping mechanism to make the clamping mechanism lift; And acquiring a speed value of the lifting motion, and the lifting motion of the lifting mechanism is controlled by segments according to the speed value of the lifting motion. By acquiring the speed of lifting motion in real time, and controlling the lifting motion steadily and rapidly in segmentation according to the real-time speed, so that the lifting motion runs stably, the travel circumference of the operation is significantly optimized, which greatly improves the wafer handling efficiency in automatic application of a semiconductor factory, and the wafer production efficiency is improved.

Description

空中運輸車的升降機構控制方法及系統Control method and system for lifting mechanism of air transport vehicle

本發明屬於半導體晶圓製造設備技術領域,具體涉及一種自動物料搬送系統中空中運輸車的升降機構控制方法及系統。The invention belongs to the technical field of semiconductor wafer manufacturing equipment, and specifically relates to a lifting mechanism control method and system for an aerial transport vehicle in an automatic material handling system.

自動物料搬送系統(AMHS,Automatic Material Handling System,也稱天車系統)中的空中運輸車需要將目標夾取物按要求從一個地方搬送到設定位置,由於空中運輸車是在生產設備的上方運行,因而空中動輸車包含相對固定的升降機構和可升降的夾持機構,進而由升降機構對夾持機構進行升降控制,使得夾持機構到達預定位置進行目標物品(如晶圓盒)的夾取、搬送及釋放等動作。The aerial transport vehicle in the AMHS (Automatic Material Handling System, also known as the overhead crane system) needs to transport the target pick-up objects from one place to the set location as required, because the aerial transport vehicle runs above the production equipment Therefore, the aerial transport vehicle includes a relatively fixed lifting mechanism and a liftable clamping mechanism. The lifting mechanism then controls the lifting of the clamping mechanism, so that the clamping mechanism reaches a predetermined position to clamp the target item (such as a wafer box). Actions such as picking up, transporting and releasing.

現有空中運輸車中,處於生產需要,夾持機構和升降機構之間往往使用皮帶實現柔性連接,而皮帶的柔性特性使得升降機構在下放夾持機構的過程中,造成夾持機構相對於升降機構出現一定幅度的晃動、擺動等情況,因而夾持機構並不能精準地到達目標物品對應的預定位置進行夾持或釋放目標物品,同時為了精準到達預定位置,需要多次調整夾持機構的位置,延長了目標物品的夾持或釋放時間,造成整個夾持或釋放動作週期加長而影響生產效率。In existing aerial transport vehicles, due to production needs, belts are often used to achieve flexible connection between the clamping mechanism and the lifting mechanism. The flexible characteristics of the belt make the lifting mechanism lower the clamping mechanism, causing the clamping mechanism to move relative to the lifting mechanism. There is a certain degree of shaking, swinging, etc., so the clamping mechanism cannot accurately reach the predetermined position corresponding to the target item to clamp or release the target item. At the same time, in order to accurately reach the predetermined position, the position of the clamping mechanism needs to be adjusted multiple times. The clamping or releasing time of the target item is extended, causing the entire clamping or releasing action cycle to be lengthened and affecting production efficiency.

因此,亟需一種新的升降機構控制方案,使得升降機構能夠精準地將夾持機構下放到目標物品對應預定位置。Therefore, a new lifting mechanism control scheme is urgently needed so that the lifting mechanism can accurately lower the clamping mechanism to the predetermined position corresponding to the target item.

本發明提供一種自動物料搬送系統中空中運輸車的升降機構控制方法及系統,可縮短升降機構對夾持機構的控制時間和提高升降機構對夾持機構的控制精準性,使得升降機構能夠平穩地、快速地、精準地將夾持機構下放到預定位置進行目標物品的持或釋放。The invention provides a method and system for controlling the lifting mechanism of an aerial transport vehicle in an automatic material handling system, which can shorten the control time of the lifting mechanism on the clamping mechanism and improve the control accuracy of the lifting mechanism on the clamping mechanism, so that the lifting mechanism can smoothly , quickly and accurately lower the clamping mechanism to the predetermined position to hold or release the target object.

本發明的實施例提供了一種空中運輸車的升降機構控制方法,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制方法包括: 在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度; 根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 Embodiments of the present invention provide a method for controlling the lifting mechanism of an aerial transport vehicle. The lifting mechanism of the aerial transport vehicle controls the clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The aerial transport vehicle The vehicle lifting mechanism control methods include: During the lifting movement of the clamping mechanism, the outer diameter speed corresponding to the belt roll of the flexible belt is obtained; Adjust the lifting speed of the clamping mechanism according to the outer diameter speed to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position.

在一些實施例中,獲取該柔性皮帶的皮帶卷對應的外徑速度,包括:獲取該升降機構對該皮帶卷的驅動轉速; 根據該外徑速度調整該夾持機構的升降速度,包括: 獲取該驅動轉速對應的該皮帶卷的目標半徑; 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,其中該目標半徑與該升降速度滿足以下關係: ; 其中,n為圈數,y為柔性皮帶的厚度,Δt為皮帶卷轉動一圈的時間差,V為夾持機構的升降速度。 In some embodiments, obtaining the outer diameter speed corresponding to the belt roll of the flexible belt includes: obtaining the driving speed of the lifting mechanism for the belt roll; adjusting the lifting speed of the clamping mechanism according to the outer diameter speed, including: obtaining The driving speed corresponds to the target radius of the belt roll; according to the driving speed and the target radius, the lifting speed of the clamping mechanism is adjusted, where the target radius and the lifting speed satisfy the following relationship: ; Among them, n is the number of turns, y is the thickness of the flexible belt, Δt is the time difference for the belt roll to rotate once, and V is the lifting speed of the clamping mechanism.

在一些實施例中,獲取該升降機構對該皮帶卷的驅動轉速,包括:獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量; 調整該夾持機構的升降速度,包括: 根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。 In some embodiments, obtaining the driving speed of the belt roll by the lifting mechanism includes: obtaining the first number of pulses corresponding to the current lifting speed. The first pulse number is the driving speed used by the lifting mechanism to control the belt roll. The corresponding number of pulses; Adjust the lifting speed of the clamping mechanism, including: According to the driving speed, a second number of pulses is output, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses, and the lifting speed of the clamping mechanism is adjusted, where the second number of pulses is when assuming that the When the lifting speed remains unchanged, the sum of the increment of the number of pulses corresponding to the first pulse data and Δt.

在一些實施例中,該空中運輸車的升降機構控制方法還包括: 獲取該升降機構中伺服電機的行程; 根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。 In some embodiments, the lifting mechanism control method of the air transport vehicle further includes: Obtain the stroke of the servo motor in the lifting mechanism; According to the stroke and the number of second pulses, it is determined whether the lifting movement is normal. If it is normal, continue to issue the next program command. If it is abnormal, stop issuing the next program command.

本發明的實施例還提供了一種空中運輸車的升降機構控制方法,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間採用柔性皮帶連接,該空中運輸車的升降機構控制方法包括: 當空中運輸車在軌道中運行到預定位置時,啟動升降機構對夾持機構的驅動,以使夾持機構進行升降運動; 獲取該升降運動的速度值,並根據該升降運動的速度值進行分段控制; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 Embodiments of the present invention also provide a method for controlling the lifting mechanism of an air transport vehicle, which is applied to the lifting mechanism of the air transport vehicle to control the clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The control methods of the lifting mechanism of the air transport vehicle include: When the aerial transport vehicle reaches a predetermined position in the track, the lifting mechanism is started to drive the clamping mechanism so that the clamping mechanism performs lifting movement; Obtain the speed value of the lifting motion and perform segmented control based on the speed value of the lifting motion; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position.

在一些實施例中,啟動升降機構對夾持機構的驅動,包括:按預設的脈衝數量驅動升降機構中的伺服電機,其中該伺服電機用於驅動該柔性皮帶,以通過控制該柔性皮帶進行釋放或捲繞對夾持機構的驅動; 獲取該升降運動的速度值,包括:獲取該脈衝數量,並根據該脈衝數量確定該升降運動的速度值。 In some embodiments, starting the lifting mechanism to drive the clamping mechanism includes: driving a servo motor in the lifting mechanism according to a preset number of pulses, wherein the servo motor is used to drive the flexible belt to control the flexible belt. Release or winding of the drive to the clamping mechanism; Obtaining the speed value of the lifting motion includes: obtaining the number of pulses, and determining the speed value of the lifting motion based on the number of pulses.

在一些實施例中,該空中運輸車的升降機構控制方法還包括: 獲取行程編碼器回饋的伺服電機行程資料; 根據該伺服電機行程資料和該脈衝數量,確定該夾持機構的升降運動是否正常。 In some embodiments, the lifting mechanism control method of the air transport vehicle further includes: Obtain the servo motor stroke data fed back by the stroke encoder; According to the servo motor stroke data and the number of pulses, determine whether the lifting movement of the clamping mechanism is normal.

在一些實施例中,該分段控制還包括:勻速階段中,對該升降運動進行勻速控制,當該勻速階段的時長達到第四閾值時,控制該升降運動進入該減速階段; 其中,當在加速階段中檢測到該升降運動的速度值加速到該第二閾值時,控制該升降運動進入勻速階段。 In some embodiments, the segmented control further includes: performing uniform speed control on the lifting motion during the constant speed phase, and controlling the lifting motion to enter the deceleration phase when the duration of the uniform speed phase reaches the fourth threshold; Wherein, when it is detected in the acceleration phase that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the uniform speed phase.

在一些實施例中,該空中運輸車的升降機構控制方法還包括: 獲取第一對射感測器輸出的第一信號和第二對射感測器輸出的第二信號,該第一對射感測器用於檢測該夾持機構停止在異常位置,該第二對射感測器用於檢測該夾持機構是否停止在該設定位置; 根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係。 In some embodiments, the lifting mechanism control method of the air transport vehicle further includes: Obtain the first signal output by the first through-beam sensor and the second signal output by the second through-beam sensor. The first through-beam sensor is used to detect that the clamping mechanism stops at an abnormal position, and the second through-beam sensor is used to detect that the clamping mechanism stops at an abnormal position. The radiation sensor is used to detect whether the clamping mechanism stops at the set position; The relationship between the clamping mechanism and the set position is determined according to the first signal and the second signal.

在一些實施例中,根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係,包括: 當確定該第一信號和該第二信號符合預設的判定條件時,確定該夾持機構停止在該設定位置。 In some embodiments, determining the relationship between the clamping mechanism and the set position based on the first signal and the second signal includes: When it is determined that the first signal and the second signal meet the preset determination conditions, it is determined that the clamping mechanism stops at the set position.

本發明的實施例還提供了一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制系統包括: 第一控制模組,用於在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度; 第一調整模組,用於根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 Embodiments of the present invention also provide a lifting mechanism control system for an aerial transport vehicle, which is applied to the lifting mechanism of the aerial transport vehicle to control the clamping mechanism to perform lifting movements. The clamping mechanism is connected to the lifting mechanism by a flexible belt. The lifting mechanism control system of the transport vehicle includes: The first control module is used to obtain the outer diameter speed corresponding to the belt roll of the flexible belt during the lifting movement of the clamping mechanism; The first adjustment module is used to adjust the lifting speed of the clamping mechanism according to the outer diameter speed to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position.

在一些實施例中,獲取該柔性皮帶的皮帶卷對應的外徑速度,包括:獲取該升降機構對該皮帶卷的驅動轉速; 根據該外徑速度調整該夾持機構的升降速度,包括: 獲取該驅動轉速對應的該皮帶卷的目標半徑; 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,其中該目標半徑與該升降速度滿足以下關係: ; 其中,n為圈數,y為柔性皮帶的厚度,Δt為皮帶卷轉動一圈的時間差,V為夾持機構的升降速度。 In some embodiments, obtaining the outer diameter speed corresponding to the belt roll of the flexible belt includes: obtaining the driving speed of the lifting mechanism for the belt roll; adjusting the lifting speed of the clamping mechanism according to the outer diameter speed, including: obtaining The driving speed corresponds to the target radius of the belt roll; according to the driving speed and the target radius, the lifting speed of the clamping mechanism is adjusted, where the target radius and the lifting speed satisfy the following relationship: ; Among them, n is the number of turns, y is the thickness of the flexible belt, Δt is the time difference for the belt roll to rotate once, and V is the lifting speed of the clamping mechanism.

在一些實施例中,獲取該升降機構對該皮帶卷的驅動轉速,包括:獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量; 調整該夾持機構的升降速度,包括: 根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。 In some embodiments, obtaining the driving speed of the belt roll by the lifting mechanism includes: obtaining the first number of pulses corresponding to the current lifting speed. The first pulse number is the driving speed used by the lifting mechanism to control the belt roll. The corresponding number of pulses; Adjust the lifting speed of the clamping mechanism, including: According to the driving speed, a second number of pulses is output, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses, and the lifting speed of the clamping mechanism is adjusted, where the second number of pulses is when assuming that the When the lifting speed remains unchanged, the sum of the increment of the number of pulses corresponding to the first pulse data and Δt.

在一些實施例中,該空中運輸車的升降機構控制系統還包括:編碼器,該編碼器用於獲取該升降機構中伺服電機的行程; 該第一控制模組還用於根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。 In some embodiments, the lifting mechanism control system of the aerial transport vehicle also includes: an encoder, the encoder is used to obtain the stroke of the servo motor in the lifting mechanism; The first control module is also used to determine whether the lifting movement is normal based on the stroke and the second pulse number. If it is normal, continue to issue the next program command. If it is abnormal, stop issuing the next program command.

本發明實施例還提供了一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制系統包括: 控制機構,用於啟動升降機構中的伺服電機,以驅動該夾持機構進行升降運動; 檢測機構,用於檢測該升降運動的速度值; 其中,該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制; 其中,該分段控制包括: 啟動階段中,當該檢測機構檢測到該升降運動的速度值達到第一閾值時,該控制機構控制該升降運動進入加速階段; 加速階段中,該控制機構對該升降運動進行加速控制,並當該檢測機構檢測到該升降運動的速度值加速到第二閾值時,該控制機構控制該升降運動進入減速階段; 減速階段中,該控制機構對該升降運動進行減速控制,並當該檢測機構檢測到該升降運動的速度值減速到第三閾值時,該控制機構控制該升降運動進入平穩階段; 平穩階段中,該控制機構按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 Embodiments of the present invention also provide a lifting mechanism control system for an aerial transport vehicle. The lifting mechanism of the aerial transport vehicle controls the clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The aerial transport vehicle The vehicle’s lifting mechanism control system includes: A control mechanism used to start the servo motor in the lifting mechanism to drive the clamping mechanism to perform lifting movements; A detection mechanism is used to detect the speed value of the lifting movement; Wherein, the control mechanism and the detection mechanism are also used for coordinated segmented control based on the speed value of the lifting movement; Among them, the segmented control includes: In the startup phase, when the detection mechanism detects that the speed value of the lifting motion reaches the first threshold, the control mechanism controls the lifting motion to enter the acceleration phase; In the acceleration stage, the control mechanism performs acceleration control on the lifting movement, and when the detection mechanism detects that the speed value of the lifting movement accelerates to the second threshold, the control mechanism controls the lifting movement to enter the deceleration stage; In the deceleration stage, the control mechanism performs deceleration control on the lifting movement, and when the detection mechanism detects that the speed value of the lifting movement decelerates to the third threshold, the control mechanism controls the lifting movement to enter a stable stage; In the stable phase, the control mechanism controls the lifting movement according to the preset stable control strategy so that the clamping mechanism stops at the set position.

在一些實施例中,該控制機構包括PLC控制器,該檢測機構與該PLC控制器電連接; 該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制,包括:該PLC控制器和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制。 In some embodiments, the control mechanism includes a PLC controller, and the detection mechanism is electrically connected to the PLC controller; The control mechanism and the detection mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion, including: the PLC controller and the detecting mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion. .

在一些實施例中,該伺服電機與該PLC控制器電連接,該PLC控制器還用於按預設的脈衝數量驅動升降機構中的伺服電機,以及根據該脈衝數量確定該升降運動的速度值。In some embodiments, the servo motor is electrically connected to the PLC controller, and the PLC controller is also used to drive the servo motor in the lifting mechanism according to a preset number of pulses, and determine the speed value of the lifting movement based on the number of pulses. .

在一些實施例中,該伺服電機為包含有行程編碼器的伺服電機,該行程編碼器與該PLC控制器電連接; 該PLC控制器還用於:獲取該行程編碼器回饋的伺服電機行程資料,以及根據該伺服電機行程資料和該脈衝數量,確定該升降運動是否正常。 In some embodiments, the servo motor is a servo motor including a stroke encoder, and the stroke encoder is electrically connected to the PLC controller; The PLC controller is also used to: obtain the servo motor stroke data fed back by the stroke encoder, and determine whether the lifting movement is normal based on the servo motor stroke data and the number of pulses.

在一些實施例中,該PLC控制器與報警電路電連接; 當確定該升降運動屬於非正常時,該PLC控制器還用於:停止向該伺服電機的驅動器發送驅動指令,和/或發出語音警報,和/或展示警報資訊。 In some embodiments, the PLC controller is electrically connected to the alarm circuit; When it is determined that the lifting movement is abnormal, the PLC controller is also used to: stop sending driving instructions to the driver of the servo motor, and/or issue a voice alarm, and/or display alarm information.

在一些實施例中,該柔性皮帶的原點位置處設置有第一位置感測器,該第一位置感測器與該PLC控制器電連接; 該PLC控制器還用於:在按預設的脈衝數量驅動升降機構中的伺服電機前,獲取該第一位置感測器的輸出結果,以確定該柔性皮帶是否位於該原點位置。 In some embodiments, a first position sensor is provided at the origin of the flexible belt, and the first position sensor is electrically connected to the PLC controller; The PLC controller is also used to: before driving the servo motor in the lifting mechanism according to a preset number of pulses, obtain the output result of the first position sensor to determine whether the flexible belt is at the origin position.

本發明實施例,通過將升降機構對夾持機構的升降控制過程進行優化改進,即對每個機械結構和每一步的動作控制做優化,可極大地縮短了整個搬送系統的動作週期,通過縮短升降機構對夾持機構的升降時間,可在較短的時間內平穩地將夾持機構精準地下降到預定位置進行目標物品的夾持或釋放,極大地提升了自動物料搬送系統在自動化搬運半導體晶圓應用中的搬運效率,提高了半導體工廠中晶圓生產效率。In the embodiment of the present invention, by optimizing and improving the lifting control process of the clamping mechanism by the lifting mechanism, that is, optimizing the action control of each mechanical structure and each step, the action cycle of the entire conveying system can be greatly shortened. The lifting mechanism of the clamping mechanism can smoothly and accurately lower the clamping mechanism to the predetermined position in a short period of time to clamp or release the target item, which greatly improves the automatic material handling system's ability to automatically handle semiconductors. The handling efficiency in wafer applications improves the efficiency of wafer production in semiconductor factories.

為利貴審查委員瞭解本發明之技術特徵、內容與優點及其所能達到之功效,茲將本發明配合附圖及附件,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本發明實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本發明於實際實施上的申請範圍,合先敘明。In order to help the review committee understand the technical features, content and advantages of the present invention and the effects it can achieve, the present invention is described in detail below in the form of embodiments with the accompanying drawings and attachments, and the drawings used therein are , its purpose is only for illustration and auxiliary description, and may not represent the actual proportions and precise configurations after implementation of the present invention. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited to the actual implementation of the present invention. The scope shall be stated first.

在本發明實施例的描述中,需要理解的是,術語「長度」、「寬度」、「上」、「下」、「前」、「後」、「左」、「右」、「垂直」、「水平」、「頂」、「底」「內」、「外」等指示的方位或位置關係為基於附圖所示的方位或位置關係,僅是為了便於描述本發明實施例和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本發明的限制。In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", and "vertical" The orientations or positional relationships indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description. , rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be construed as a limitation of the present invention.

此外,術語「第一」、「第二」僅用於描述目的,而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。由此,限定有「第一」、「第二」的特徵可以明示或者隱含地包括一個或者更多個所述特徵。在本發明實施例的描述中,「多個」的含義是兩個或兩個以上,除非另有明確具體的限定。In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as “first” and “second” may explicitly or implicitly include one or more of the described features. In the description of the embodiments of the present invention, "plurality" means two or more, unless otherwise explicitly and specifically limited.

在本發明實施例中,除非另有明確的規定和限定,術語「安裝」、「相連」、「連接」、「固定」等術語應做廣義理解,例如,可以是固定連接,也可以是可拆卸連接,或成一體;可以是機械連接,也可以是電連接;可以是直接相連,也可以通過中間媒介間接相連,可以是兩個元件內部的連通或兩個元件的相互作用關係。對於本領域的具通常知識者而言,可以根據具體情況理解上述術語在本發明實施例中的具體含義。In the embodiments of the present invention, unless otherwise explicitly stipulated and limited, the terms "installation", "connection", "connection", "fixing" and other terms should be understood in a broad sense. For example, it can be a fixed connection or a removable connection. Disassembly and connection, or integration; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements. For those with ordinary knowledge in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

目前,如圖1所示,當空中運輸車1沿著空中軌道運行到設定位置時,運輸車中的升降機構2,通過控制夾持機構4進行升降運動,使得夾持機構4升降到指定高度,方便抓取或釋放目標物(如晶圓盒),其中升降機構2與夾持機構4之間通過柔性皮帶3連接。Currently, as shown in Figure 1, when the aerial transport vehicle 1 moves along the aerial track to a set position, the lifting mechanism 2 in the transport vehicle performs a lifting movement by controlling the clamping mechanism 4, so that the clamping mechanism 4 lifts to a specified height. , to facilitate grabbing or releasing target objects (such as wafer boxes), in which the lifting mechanism 2 and the clamping mechanism 4 are connected by a flexible belt 3 .

如圖2所示,升降機構2對夾持機構4的控制包括:比如從開始下放皮帶到夾持機構下降到指定高度,均是採用電機轉速不變的控制方式,即夾持機構4進行勻速下降。因此,如果為了使皮帶平穩、不晃動地下降,只能採用低轉速的控制方法,因而升降時間較長;而如果為了在短時間內完成此下放動作,只能採用高轉速的控制方法,造成皮帶在下放過程中明顯晃動或擺動,不利於精準地夾取目標物品,而且為了精準抓取目標物品,還需要多次調整夾持機構,同樣造成整個動作週期時間加長。As shown in Figure 2, the control of the clamping mechanism 4 by the lifting mechanism 2 includes: for example, from the time when the belt is lowered until the clamping mechanism drops to the specified height, the motor speed is constant, that is, the clamping mechanism 4 operates at a constant speed. decline. Therefore, if you want to make the belt descend smoothly and without shaking, you can only use a low-speed control method, so the lifting time is long; and if you want to complete the lowering action in a short time, you can only use a high-speed control method, resulting in The belt obviously shakes or swings during the lowering process, which is not conducive to accurately grasping the target item. In addition, in order to accurately grasp the target item, the clamping mechanism needs to be adjusted multiple times, which also lengthens the entire action cycle.

例如,針對應用於半導體製造工廠中的AMHS系統,一個完整的半導體工藝大約需要400個步驟來完成整個處理過程,而在這400個步驟,需要搬運晶圓盒的次數累計約1200次。一般而言,未優化過的AMHS系統,每次平均搬送時間可能需要5-6分鐘,而假如AMHS系統經優化後,使得該指標能達到2.5-3分鐘,這時即使取差值為2分鐘,1200次將可節省約2400分種,即優化後可為晶圓周期時間(wafer cycle time)多爭取到大約40小時,該時間對於瞬息萬變的半導體市場而言,是非常寶貴的。For example, for the AMHS system used in semiconductor manufacturing plants, a complete semiconductor process requires approximately 400 steps to complete the entire processing process, and during these 400 steps, the number of times the wafer box needs to be transported is approximately 1,200 times. Generally speaking, the average transport time of an unoptimized AMHS system may be 5-6 minutes each time. If the AMHS system is optimized so that the indicator can reach 2.5-3 minutes, then even if the difference is 2 minutes, 1,200 times will save about 2,400 minutes, that is, after optimization, about 40 more hours can be gained for the wafer cycle time. This time is very valuable in the rapidly changing semiconductor market.

因此,在對AMHS系統進行優化中,可能對每個機械結構、每一步的動作控制實現了很小的優化,但可能對整個搬送系統的週期可以帶來巨大影響。 有鑑於此,通過對升降機構的升降控制過程進行深入研究及改進探索後,提出了一種新的升降控制方案:如圖3所示,以下放夾持機構去釋放目標物體(比如晶圓盒)為例進行示意說明,當空中運輸車1在空中軌道行駛到預定位置時,其中預定位置為抓取或釋放晶圓盒時空中運輸車在軌道中停留位置,空中運輸車1可以通過內部的升降機構2對夾持機構4進行下降控制,其中對夾持機構4的下降運動進行速度分段控制,可通過優化各個分段控制,實現整個下降運動的優化。 Therefore, when optimizing the AMHS system, a small optimization may be achieved for each mechanical structure and each step of action control, but it may have a huge impact on the cycle of the entire conveying system. In view of this, after in-depth research and improvement exploration on the lifting control process of the lifting mechanism, a new lifting control scheme is proposed: as shown in Figure 3, lower the clamping mechanism to release the target object (such as a wafer box) Taking an example as a schematic illustration, when the aerial transport vehicle 1 travels on the aerial track to a predetermined position, where the predetermined position is the position where the aerial transport vehicle stays in the track when grabbing or releasing the wafer box, the aerial transport vehicle 1 can lift through the internal The mechanism 2 performs descending control on the clamping mechanism 4, in which the descending movement of the clamping mechanism 4 is controlled in sections by speed. By optimizing the control of each section, the entire descending movement can be optimized.

例如,如圖4所示,可將下降運動分為啟動階段、加速階段、減速階段和平穩階段,其中啟動階段可以為升降機構驅動夾持機構開啟運動的時段,使得夾持機構獲取到一個啟動速度,然後進入到加速階段,使得夾持機構4在短時間內加快運行速度,以較快運行速度在短時間內減少下降高度,接著進入減速階段,從較高速度開始減速,可以在短時間內進一步減少下降高度,最後通過平穩階段使得夾持機構4可以穩定、精準地停靠在晶圓盒安放位置,有利於將晶圓盒釋放在準確的安放位置上。For example, as shown in Figure 4, the descending motion can be divided into a start-up phase, an acceleration phase, a deceleration phase and a steady phase. The start-up phase can be the period when the lifting mechanism drives the clamping mechanism to start the movement, so that the clamping mechanism obtains a start speed, and then enters the acceleration stage, so that the clamping mechanism 4 accelerates the operating speed in a short time, reduces the descending height in a short time at a faster operating speed, and then enters the deceleration stage, decelerates from a higher speed, and can The descending height is further reduced, and finally through the stable stage, the clamping mechanism 4 can be stably and accurately docked at the wafer box placement position, which is conducive to releasing the wafer box at the accurate placement position.

例如,如圖5所示,可將下降運動分為啟動階段、加速階段、勻速階段、減速階段和平穩階段,其中啟動階段可以為升降機構驅動夾持機構開啟運動的時段,使得夾持機構獲取到一個啟動速度,然後進入到加速階段,使得夾持機構4在短時間內加快運行速度,以較快運行速度在短時間內減少下降高度,接著進入勻速階段,以較高的速度進行勻速下降,可以在短時間內進一步減少下降高度,再接著從較高速度開始減速,進一步在短時間內減少下降高度,最後通過平穩階段使得夾持機構4可以穩定、精準地停靠在晶圓盒安放位置,有利於夾持機構4在短時間內快速、平穩、精確地到達晶圓盒安放位置。For example, as shown in Figure 5, the descending motion can be divided into a start-up phase, an acceleration phase, a uniform phase, a deceleration phase and a steady phase. The start-up phase can be the period when the lifting mechanism drives the clamping mechanism to start the movement, so that the clamping mechanism obtains to a starting speed, and then enters the acceleration stage, so that the clamping mechanism 4 accelerates the operation speed in a short period of time, reduces the descending height in a short period of time at a faster operation speed, and then enters the uniform speed stage, and performs uniform descent at a higher speed. , the descending height can be further reduced in a short period of time, and then the deceleration starts from a higher speed, further reducing the descending height in a short period of time, and finally through the stable stage, the clamping mechanism 4 can be stably and accurately parked at the wafer box placement position. , which is conducive to the clamping mechanism 4 reaching the wafer box placement position quickly, smoothly and accurately in a short period of time.

需要說明的是,升降機構2對夾持機構4進行上升控制時,也可採用如下降控制類似的分段控制,即仍可以分為啟動階段、加速階段、減速階段和平穩階段,或者分為啟動階段、加速階段、勻速階段、減速階段和平穩階段。因此,這裡將上升運動、下降運動統稱為升降運動,其中下降運動可為夾持機構需要下降到晶圓盒所在位置以進行抓取晶圓盒的下降過程,下降運動也可為夾持機構在夾持並搬運晶圓盒到設定位置時需要下降到晶圓盒的安放位置的下降過程,上升運動可為夾持機構在抓取到晶圓盒後,需要上升恢復到預設位置後使得晶圓盒由空中運輸車進行搬運的上升過程,上升運動也可為夾持機構在將所夾持的晶圓盒釋放到安放位置後,夾持機構需要上升恢復到設定位置的上升過程。It should be noted that when the lifting mechanism 2 controls the lifting of the clamping mechanism 4, it can also adopt segmented control similar to the descending control, that is, it can still be divided into a starting phase, an acceleration phase, a deceleration phase and a stable phase, or it can be divided into Starting phase, acceleration phase, constant speed phase, deceleration phase and steady phase. Therefore, the ascending and descending movements are collectively referred to as lifting movements here. The descending movement can be the descending process in which the clamping mechanism needs to descend to the position of the wafer box to grasp the wafer box. The descending movement can also be the descending process of the clamping mechanism in When clamping and transporting the wafer box to the set position, it needs to descend to the placement position of the wafer box. The rising movement can be used to allow the clamping mechanism to rise and return to the preset position after grabbing the wafer box. The rising process of the round box being transported by the air transport vehicle can also be the rising process in which the clamping mechanism needs to rise back to the set position after releasing the clamped wafer box to the placement position.

另外,為便於說明,這裡示意圖示中以加速階段、減速階段為線性關係作示例性說明,實際應用中可根據實際控制需要進去其他曲線關係的控制,這裡不做限定。In addition, for the convenience of explanation, the linear relationship between the acceleration phase and the deceleration phase is used as an example in the schematic diagram here. In actual applications, other curve relationship control can be implemented according to actual control needs, and there is no limitation here.

以下結合附圖,說明本說明書中各實施例提供的技術方案。The technical solutions provided by each embodiment in this specification will be described below with reference to the accompanying drawings.

本發明提供一種空中運輸車的升降機構控制方法,可應用於半導體自動化工廠中的AMHS系統,用於空中運輸車的升降機構控制夾持機構進行升降運動,其中該夾持機構與該升降機構之間柔性皮帶連接。The invention provides a method for controlling the lifting mechanism of an air transport vehicle, which can be applied to AMHS systems in semiconductor automation factories. It is used for the lifting mechanism of the air transport vehicle to control the clamping mechanism to perform lifting movements, wherein the clamping mechanism and the lifting mechanism are Flexible belt connection.

如圖6所示,該空中運輸車的升降機構控制方法包括: 步驟S102、確定空中運輸車沿著軌道行駛是否已到達預定位置,並在確定出到達預定位置時,則執行步驟S104。 As shown in Figure 6, the control method of the lifting mechanism of the air transport vehicle includes: Step S102: Determine whether the air transport vehicle has reached a predetermined position while traveling along the track, and when it is determined that it has reached the predetermined position, step S104 is executed.

實施中,空中運輸車沿著空中軌道進行行駛過程中,可通過AMHS系統即時獲取空中運輸車沿著軌道的行駛位置,進而根據即時行駛位置確定出空中運輸車是否到達預定位置,以便於空中運輸車在到達預定位置時,觸發內部的升降機構進行夾持機構的升降控制。其中,預定位置可為需要抓取或釋放目標物體(如晶圓盒)時,空中運輸車在軌道中的停留位置。During the implementation, when the air transport vehicle is traveling along the aerial track, the driving position of the air transport vehicle along the track can be obtained in real time through the AMHS system, and then based on the real-time driving position, it can be determined whether the air transport vehicle has reached the predetermined position, so as to facilitate air transport. When the car reaches the predetermined position, the internal lifting mechanism is triggered to control the lifting of the clamping mechanism. The predetermined position may be the stopping position of the aerial transport vehicle in the track when the target object (such as a wafer box) needs to be grabbed or released.

實施中,可以在軌道中的預定位置設置檢測標識,比如感測器、條碼等,便於通過檢測標識,快速獲取到該預定位置,便於空中運輸車在該預定位置進行停留,以及方便觸發升降機構對夾持機構進行升降控制。因此,可在空中運輸車沿著軌道行駛中,運輸車中的控制機構可以通過即時確定空中運輸車是否已到達預定位置,以此作為升降控制的觸發條件,使得空中運輸車一旦到達預定位置進行停留時,升降機構可以快速開啟夾持機構進行升降運動。During implementation, detection marks, such as sensors, barcodes, etc., can be set at predetermined positions in the track to facilitate quick acquisition of the predetermined position through the detection marks, facilitate the air transport vehicle to stay at the predetermined position, and facilitate triggering of the lifting mechanism. Control the lifting and lowering of the clamping mechanism. Therefore, while the air transport vehicle is traveling along the track, the control mechanism in the transport vehicle can instantly determine whether the air transport vehicle has reached the predetermined position, as a trigger condition for the lifting control, so that once the air transport vehicle reaches the predetermined position, it When staying, the lifting mechanism can quickly open the clamping mechanism for lifting movement.

步驟S104、啟動升降機構對夾持機構的升降控制,以使夾持機構進行升降運動。Step S104: Start the lifting mechanism to control the lifting of the clamping mechanism, so that the clamping mechanism performs lifting movement.

實施中,可將空中運輸車沿著軌道行駛到達預定位置設置為觸發條件,並將該觸發條件作為控制機構進行升降控制的觸發條件設置於控制機構內部,比如在運輸車中的PLC(Programmable Logic Controller,可程式設計邏輯控制器)設置該觸發條件,使得PLC一旦檢測到觸發條件成立,可以快速地啟動對夾持機構的升降控制過程。During implementation, the aerial transport vehicle traveling along the track and reaching a predetermined position can be set as a trigger condition, and this trigger condition can be set inside the control mechanism as a trigger condition for the control mechanism to perform lifting control, such as the PLC (Programmable Logic) in the transport vehicle. Controller (programmable logic controller) sets the trigger condition so that once the PLC detects that the trigger condition is true, it can quickly start the lifting control process of the clamping mechanism.

實施中,可通過控制機構(如PLC)驅動升降機構中的伺服電機,使得伺服電機帶動柔性皮帶的皮帶軸進行轉動,從而通過轉動皮帶軸釋放皮帶實現夾持機構下降運動或者捲繞皮帶實現夾持機構上升運動。因此,通過控制升降機構的驅動,可實現夾持機構的升降運動控制。In implementation, the servo motor in the lifting mechanism can be driven by a control mechanism (such as PLC), so that the servo motor drives the belt shaft of the flexible belt to rotate, thereby releasing the belt by rotating the belt shaft to realize the downward movement of the clamping mechanism or winding the belt to realize clamping. Support the upward movement of the institution. Therefore, by controlling the driving of the lifting mechanism, the lifting motion control of the clamping mechanism can be realized.

步驟S106、在升降運動中,即時獲取該升降運動的速度值,並根據該升降運動的速度值進行分段控制。Step S106: During the lifting motion, the speed value of the lifting motion is obtained immediately, and segmented control is performed according to the speed value of the lifting motion.

其中,該分段控制可包括啟動階段、加速階段、減速階段和平穩階段。The segmented control may include a starting phase, an acceleration phase, a deceleration phase and a steady phase.

啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段。In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase.

具體實施中,可在啟動階段之初,先給一個能使皮帶下降的低速,以便更平穩地啟動夾持機構開始升降運動,然後當啟動後的速度平穩地達到第一閾值時,可將升降運動快速切換到加速階段。需要說明的是,鑒於啟動階段為低速且平穩升降,因而啟動階段也可稱為第一平穩階段,而將從減速階段所後進入的平穩階段稱為第二平穩階段。In the specific implementation, at the beginning of the startup phase, a low speed can be given to the belt to lower, so that the clamping mechanism can be started more smoothly to start the lifting movement, and then when the speed after startup reaches the first threshold smoothly, the lifting can be Movement quickly switches to an acceleration phase. It should be noted that since the starting stage is low speed and rises and falls smoothly, the starting stage can also be called the first steady stage, and the steady stage entered after the deceleration stage is called the second steady stage.

由於加速階段是從平穩啟動中進行,因而加速階段中夾持機構仍可較平穩地進行加速階段的升降運動,即在平穩運動中有效壓縮了加速階段的運動時間。Since the acceleration phase is started from a smooth start, the clamping mechanism can still perform the lifting movement of the acceleration phase relatively smoothly during the acceleration phase, that is, the movement time of the acceleration phase is effectively compressed during the smooth motion.

加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段。In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase.

具體實施中,加速階段可以採用線性的加速控制,比如加速度變化較小的加速控制,可在加速運動中縮短時間的同時,加速運動更平穩。以及,在加速到一定速度後,切換到減速階段。In specific implementation, linear acceleration control can be used in the acceleration phase, such as acceleration control with small acceleration changes, which can shorten the time during acceleration and make the acceleration more stable. And, after accelerating to a certain speed, it switches to the deceleration stage.

減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段。In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage.

具體實施中,由加速階段切換到減速階段時,可在加速階段結束和減速階段開始之間進行短時間的平穩切換,然後可以採用線性關係進行減速控制,通過減速階段逐步降低升降速度,使得在減速縮短時間的同時,運動更平穩。In the specific implementation, when switching from the acceleration phase to the deceleration phase, a short-term smooth switching can be performed between the end of the acceleration phase and the beginning of the deceleration phase, and then a linear relationship can be used for deceleration control, and the lifting speed is gradually reduced through the deceleration phase, so that in While decelerating shortens the time, the movement is smoother.

平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。其中,設定位置可為夾持機構在升降運動後應該停止的位置,比如去抓取晶圓盒時,設定位置可為晶圓盒所在位置,以便於夾持機構對晶圓盒進行抓取,比如抓取晶圓盒後,設定位置可為抓取晶圓盒後夾持機構恢復到運輸車中進行搬運晶圓盒的位置。因此,設定位置可根據實際的升降運動確定,這裡不作限定。In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position. Among them, the set position can be the position where the clamping mechanism should stop after the lifting movement. For example, when grabbing the wafer box, the set position can be the position of the wafer box, so that the clamping mechanism can grab the wafer box. For example, after grabbing the wafer box, the set position can be the position where the clamping mechanism returns to the transport vehicle to transport the wafer box after grabbing the wafer box. Therefore, the set position can be determined based on the actual lifting movement, which is not limited here.

具體實施中,可按預設的平穩控制策略將升降運動的速度從較小的速度逐步過渡到零,進而停止在設定位置。其中,平穩控制策略可為使得夾持機構平穩定停止到設定位置的緩慢減速控制過程,比如使得夾持機構從低速狀態並在短時間內停止到設定位置的控制過程。In specific implementation, the speed of the lifting movement can be gradually transitioned from a smaller speed to zero according to the preset smooth control strategy, and then stopped at the set position. The smooth control strategy may be a slow deceleration control process that makes the clamping mechanism stop smoothly and stably to a set position, such as a control process that makes the clamping mechanism stop from a low speed state to a set position in a short time.

需要說明的是,前述第一閾值、第二閾值、第三閾值以及預設的平穩控制策略等,可為在實際工廠應用中進行安裝調試後預設的參數,也可為後續根據實際運行情況總結所得的經驗資料,具體可根據實際應用確定,這裡不作限定。It should be noted that the aforementioned first threshold, second threshold, third threshold and preset smooth control strategy can be parameters preset after installation and debugging in actual factory applications, or can be subsequent parameters based on actual operating conditions. The summary of empirical data can be determined based on actual application and is not limited here.

通過在升降運動中對升降速度進行即時檢測,並根據檢測結果即時對升降運動進行分段控制,而且分段控制中進行平穩切換,進而有效地進行平穩的升降運動中,還能優化運動時間。Through real-time detection of the lifting speed during the lifting movement, and immediate segmented control of the lifting movement based on the detection results, and smooth switching in the segmented control, smooth lifting movements can be effectively performed, and the movement time can also be optimized.

在一些實施方式中,可通過控制加速階段的時長和減速階段的時長,使得加速階段和減速階段的時長較短,比如時長均可低於平穩階段的時長,既可通過加速、減速實現高效的短時運動,又能通過較長時長的平穩階段,更平穩、更準確地將夾持機構停止在設定位置。In some embodiments, the duration of the acceleration phase and the duration of the deceleration phase can be controlled to make the duration of the acceleration phase and the deceleration phase shorter. For example, the duration can be both shorter than the duration of the stationary phase, either by accelerating or decelerating. , decelerate to achieve efficient short-term movement, and through a longer plateau stage, the clamping mechanism can be stopped at the set position more smoothly and accurately.

在一些實施方式中,可根據整體升降階段的需要,比如行程較長時,可在加速階段和減速階段之間增加一個勻速階段。In some embodiments, according to the needs of the overall lifting stage, for example, when the stroke is long, a uniform speed stage can be added between the acceleration stage and the deceleration stage.

如圖5所示的分段控制示意,該分段控制還可包括:勻速階段,即當在加速階段中檢測到該升降運動的速度值加速到該第二閾值時,控制該升降運動進入勻速階段,以及在勻速階段中,對該升降運動進行勻速控制,並當該勻速階段的時長達到第四閾值時,控制該升降運動進入該減速階段。As shown in the segmented control diagram in Figure 5, the segmented control may also include: a constant speed phase, that is, when the speed value of the lifting motion is detected to accelerate to the second threshold in the acceleration phase, the lifting motion is controlled to enter a constant speed. stage, and in the constant speed stage, the lifting movement is controlled at a constant speed, and when the duration of the uniform speed stage reaches the fourth threshold, the lifting movement is controlled to enter the deceleration stage.

通過在加速階段和勻速階段之間增加勻速階段,既可在加速和減速之間通過勻速階段進行更平穩切換,還能通過高速運行的勻速階段,極大地壓縮運動時間。By adding a constant speed phase between the acceleration phase and the constant speed phase, it can not only switch more smoothly between acceleration and deceleration through the constant speed phase, but also greatly compress the motion time through the constant speed phase of high-speed operation.

在一些實施方式中,可通過PLC發出的脈衝來控制伺服電機運行,即通過PLC輸出不同控制脈衝頻率,進而利用這些控制脈衝驅動伺服電機,使得伺服電機的轉速由脈衝數量控制,因而脈衝數對應電機轉動角度,即脈衝頻率可以確定皮帶的轉速,進而可通過控制脈衝頻率實現升降運動的速度控制。需要說明的是,電機轉速與脈衝頻率之間的關係,可根據具體電機特性進行確定,這裡不作限定。In some embodiments, the operation of the servo motor can be controlled by the pulses sent by the PLC, that is, the PLC outputs different control pulse frequencies, and then these control pulses are used to drive the servo motor, so that the rotation speed of the servo motor is controlled by the number of pulses, so the number of pulses corresponds to The rotation angle of the motor, that is, the pulse frequency, can determine the speed of the belt, and then the speed of the lifting movement can be controlled by controlling the pulse frequency. It should be noted that the relationship between motor speed and pulse frequency can be determined based on specific motor characteristics and is not limited here.

例如,如圖7所示,當升降機構2在啟動階段將柔性皮帶3和夾持機構4下放達到一定速度時,比如PLC輸出脈衝量得到預設值時,PLC可按設定的脈衝頻率變化方式改變控制伺服電機的脈衝頻率,使得夾持機構4進入加速下降階段,使柔性皮帶3和夾持機構4平穩地進入加速下降。For example, as shown in Figure 7, when the lifting mechanism 2 lowers the flexible belt 3 and the clamping mechanism 4 to a certain speed during the startup phase, for example, when the PLC output pulse amount reaches a preset value, the PLC can change the pulse frequency according to the set Change the pulse frequency of the control servo motor to make the clamping mechanism 4 enter the accelerated descent stage, so that the flexible belt 3 and the clamping mechanism 4 enter the accelerated descent smoothly.

例如,如圖8所示,當升降機構2下放柔性皮帶3和夾持機構4的速度到達切換進入勻速階段時,PLC將按設定要求改變輸出的脈衝頻率,使柔性皮帶3和夾持機構4進入高速運行的勻速下降。For example, as shown in Figure 8, when the speed of the lifting mechanism 2 lowering the flexible belt 3 and the clamping mechanism 4 reaches the constant speed stage, the PLC will change the output pulse frequency according to the set requirements, so that the flexible belt 3 and the clamping mechanism 4 Enter high-speed operation and descend at a constant speed.

例如,如圖9所示,當升降機構2下放柔性皮帶3和夾持機構4平穩地進入減速下降階段時,PLC將按設定要求改變減速階段對應的脈衝頻率,使柔性皮帶3和夾持機構4進行平穩減速下降。For example, as shown in Figure 9, when the lifting mechanism 2 lowers the flexible belt 3 and the clamping mechanism 4 smoothly into the deceleration and descent stage, the PLC will change the pulse frequency corresponding to the deceleration stage according to the set requirements, so that the flexible belt 3 and the clamping mechanism 4 Carry out a smooth deceleration and descent.

例如,如圖10所示,當柔性皮帶3和夾持機構4經過減速下降平穩地進入最後的平穩下降時,PLC將按設定要求改變平穩階段對應的脈衝頻率,使柔性皮帶3和夾持機構4平穩緩慢下降並停止到指定高度,即停留在方便抓取目標物體5(如晶圓盒)的位置。For example, as shown in Figure 10, when the flexible belt 3 and the clamping mechanism 4 enter the final smooth descent smoothly after deceleration, the PLC will change the pulse frequency corresponding to the stable stage according to the set requirements, so that the flexible belt 3 and the clamping mechanism 4. Descend steadily and slowly and stop to the specified height, that is, stay at a position convenient for grabbing the target object 5 (such as a wafer box).

在一些實施方式中,通過獲取PLC輸出的脈衝數量,可獲取到升降運動對應的速度值,進而可以及脈衝數量實現分段控制。In some embodiments, by obtaining the number of pulses output by the PLC, the speed value corresponding to the lifting movement can be obtained, and then segmented control can be achieved based on the number of pulses.

實施中,正如前述示意說明,可按預設的脈衝數量驅動升降機構中的伺服電機,通過該伺服電機驅動該柔性皮帶,實現對該柔性皮帶進行釋放或捲繞,進而實現對夾持機構的驅動。以及,通過獲取該脈衝數量,並根據該脈衝數量確定該升降運動的速度值。In implementation, as mentioned above, the servo motor in the lifting mechanism can be driven according to a preset number of pulses, and the servo motor drives the flexible belt to release or wind the flexible belt, thereby realizing the clamping mechanism. drive. And, by obtaining the number of pulses, and determining the speed value of the lifting motion based on the number of pulses.

在一些實施方式中,可採用回饋檢測機制,對分段控制中升降運動的速度控制進行即時回饋控制。In some implementations, a feedback detection mechanism can be used to perform instant feedback control on the speed control of the lifting motion in segmented control.

如圖11所示,在升降機構2中,可採用帶編碼器的伺服電機驅動皮帶卷轉動,其中編碼器可將伺服電機的實際行程資訊與PLC發出脈衝形成比較資訊給驅動器。例如,編碼器回饋的伺服電機行程和PLC發出脈衝的對比資訊無誤,PLC將會按原要求持續地發脈衝給驅動器,而如編碼回饋的對比資訊有異常,編碼器會將此資訊發送給驅動器,再由驅動器將故障資訊回饋給PLC,當PLC接收到異常資訊後表明上一程式的動作未完成不會發下一程式的指令給驅動器。As shown in Figure 11, in the lifting mechanism 2, a servo motor with an encoder can be used to drive the belt roll to rotate. The encoder can compare the actual stroke information of the servo motor with the pulses sent by the PLC to the driver. For example, if the comparison information between the servo motor stroke fed back by the encoder and the pulses sent by the PLC is correct, the PLC will continue to send pulses to the driver according to the original requirements. If the comparison information fed back by the encoder is abnormal, the encoder will send this information to the driver. , and then the driver will feedback the fault information to the PLC. When the PLC receives the abnormal information, it indicates that the action of the previous program has not been completed and will not send the next program's instructions to the driver.

具體實施中,該空中運輸車的升降機構控制方法還包括:獲取行程編碼器回饋的伺服電機行程資料,並根據該伺服電機行程資料和該脈衝數量,確定該升降運動是否正常。In specific implementation, the control method of the lifting mechanism of the air transport vehicle also includes: obtaining the servo motor stroke data fed back by the stroke encoder, and determining whether the lifting movement is normal based on the servo motor stroke data and the number of pulses.

通過編碼器對行程資訊和PLC下發的脈衝數量進行對比,形成對比資訊,可依據這些對比資訊進行即時監控。The encoder compares the stroke information with the number of pulses sent by the PLC to form comparative information, which can be used for real-time monitoring.

在一些實施方式中,如圖12所示,前述即時回饋控制可應用於分段控制的各個階段中,並在編碼器對比資訊正常後,方可進行下一個階段。例如,通過編碼器判斷對比資訊是否正常,若正常,可繼續速度控制,若異常,則向驅動器回饋編碼器對比資訊異常,由PLC對異常進行相關處理,比如控制蜂鳴器發出蜂鳴警報,將問題資訊顯示在運輸車的車身顯示器上,然後進行人工干預處理等等。In some implementations, as shown in Figure 12, the aforementioned instant feedback control can be applied to each stage of segmented control, and the next stage can only proceed after the encoder comparison information is normal. For example, the encoder is used to determine whether the comparison information is normal. If it is normal, speed control can be continued. If it is abnormal, the encoder comparison information is abnormal and is fed back to the driver. The PLC handles the abnormality, such as controlling the buzzer to sound a buzzer alarm. The problem information is displayed on the body display of the transport vehicle, and then manual intervention is performed, etc.

在一些實施方式中,當確定該升降運動處於異常狀態時,該空中運輸車的升降機構控制方法還包括:停止向該升降機構發送驅動指令,和/或發出語音警報,和/或展示警報資訊。通過在即時回饋檢測中發現異常時,及時對異常進行相應處理。In some embodiments, when it is determined that the lifting movement is in an abnormal state, the lifting mechanism control method of the air transport vehicle further includes: stopping sending driving instructions to the lifting mechanism, and/or issuing a voice alarm, and/or displaying alarm information. . When an abnormality is discovered in the instant feedback detection, the abnormality can be handled accordingly in a timely manner.

在一些實施方式中,可通過在夾持機構中設置兩對感測器,通過兩對感測器對夾持機構與目標物體之間的相對位置即時判斷。In some embodiments, two pairs of sensors can be provided in the clamping mechanism, and the relative position between the clamping mechanism and the target object can be determined instantly through the two pairs of sensors.

實施中,該空中運輸車的升降機構控制方法還包括:獲取第一對射感測器輸出的第一信號和第二對射感測器輸出的第二信號,該第一對射感測器用於檢測該夾持機構停止在異常位置,該第二對射感測器用於檢測該夾持機構是否停止在該設定位置;以及,根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係。In implementation, the control method of the lifting mechanism of the air transport vehicle also includes: acquiring the first signal output by the first beam sensor and the second signal output by the second beam sensor, and the first beam sensor is used In order to detect that the clamping mechanism stops at an abnormal position, the second beam sensor is used to detect whether the clamping mechanism stops at the set position; and, according to the first signal and the second signal, determine whether the clamping mechanism and The relationship between the set positions.

具體實施中,夾持機構上設置第一對射感測器和第二對射感測器,其中該第一對射感測器設置於該第二對射感測器的上方,該第二對射感測器用於檢測該夾持機構是否停止在該設定位置,該第一對射感測器用於檢測該夾持機構停止在異常位置。通過獲取兩組對射感測器的信號,並依靠這些信號在平穩階段中進行調整控制,可提高平穩階段的控制準確性,同時縮短平穩階段所需時長,有效優化整個上升或下降的運動時長。In a specific implementation, a first through-beam sensor and a second through-beam sensor are provided on the clamping mechanism, wherein the first through-beam sensor is disposed above the second through-beam sensor, and the second through-beam sensor is disposed above the second through-beam sensor. The through-beam sensor is used to detect whether the clamping mechanism stops at the set position, and the first through-beam sensor is used to detect that the clamping mechanism stops at an abnormal position. By acquiring the signals from two sets of through-beam sensors and relying on these signals for adjustment control during the stationary phase, the control accuracy of the stationary phase can be improved, while the duration required for the stationary phase can be shortened, effectively optimizing the entire ascending or descending movement. duration.

在一些實施方式中,可利用兩組對射感測器的信號進行平穩階段中信號的組合控制。In some embodiments, signals from two sets of on-shooting sensors can be used to perform combined control of signals in the stationary phase.

實施中,根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係,包括:當確定該第一信號和該第二信號符合預設的判定條件時,確定該夾持機構停止在該設定位置。In implementation, determining the relationship between the clamping mechanism and the set position based on the first signal and the second signal includes: when it is determined that the first signal and the second signal meet the preset determination conditions, determining the The clamping mechanism stops at this set position.

例如,當觸發到下面一組對射感測器時,表明柔性皮帶3和夾持機構4已下降到位,此時PLC讀取到來自對射感測器和編碼器的資訊一致後判斷此下降過程結束。For example, when the following set of through-beam sensors is triggered, it indicates that the flexible belt 3 and the clamping mechanism 4 have dropped to the position. At this time, the PLC reads the information from the through-beam sensors and the encoder and determines that the drop is consistent. The process ends.

例如,當觸發到上面一組對射感測器時,表明夾持機構4下降異常,比如可能下降過度,如可能晶圓盒位置偏離導致夾持機構下降過量,比如晶圓盒上放置有其他物體,導致觸發上方一組對射感測器等等。For example, when the upper set of through-beam sensors is triggered, it indicates that the clamping mechanism 4 has dropped abnormally. For example, it may have dropped excessively. For example, the position of the wafer box may have deviated, causing the clamping mechanism to drop excessively. For example, there are other objects placed on the wafer box. Objects, triggering a set of through-beam sensors above and so on.

在一些實施方式中,可通過感測器對皮帶的運動位置進行即時檢測,即在皮帶卷的原點位置安裝位置感測器,通過位置感測器檢測柔性皮帶的位置。In some embodiments, the moving position of the belt can be detected instantly through a sensor, that is, a position sensor is installed at the origin of the belt roll, and the position of the flexible belt is detected through the position sensor.

在一種實施方式中,在啟動夾持機構的升降運動前,該空中運輸車的升降機構控制方法還包括:獲取第一位置感測器的輸出結果,以確定該柔性皮帶是否位於原點位置。In one embodiment, before starting the lifting movement of the clamping mechanism, the lifting mechanism control method of the aerial transport vehicle further includes: obtaining the output result of the first position sensor to determine whether the flexible belt is at the origin position.

基於相同發明構思,本發明還提供一種空中運輸車的升降機構控制方法,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間採用柔性皮帶連接,以更準確地調整升降運動的速度,實現更精確的升降運動速度控制,使得夾持機構更平穩、準確地到達設定位置進行晶圓盒的抓取或釋放。Based on the same inventive concept, the present invention also provides a method for controlling the lifting mechanism of an air transport vehicle, which is applied to the lifting mechanism of the air transport vehicle to control the clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The speed of the lifting movement can be adjusted more accurately to achieve more precise speed control of the lifting movement, allowing the clamping mechanism to reach the set position more smoothly and accurately to grab or release the wafer cassette.

實施中,鑒於皮帶存在一定厚度,在皮帶卷跟隨伺服電機轉動中,皮帶卷半徑的變化將引起夾持機構升降速度存在微小變化,因而在考慮到電機轉速外,將柔性皮帶在下放過程中皮帶卷外徑變化和速度變化予以考慮,進而將柔性皮帶厚度對速度的影響計算在內,並加入到控制當中,使得在設定位置抓取時可以達到更加精準,具體參見以下的各實施方式。During implementation, in view of the certain thickness of the belt, when the belt roll follows the rotation of the servo motor, changes in the radius of the belt roll will cause slight changes in the lifting speed of the clamping mechanism. Therefore, in addition to taking into account the motor speed, the flexible belt is lowered during the lowering process. Changes in roll outer diameter and speed changes are taken into account, and the impact of the thickness of the flexible belt on the speed is calculated and added to the control, so that more accurate grabbing can be achieved at the set position. For details, see the following implementations.

如圖13所示,該空中運輸車的升降機構控制方法包括: 步驟S201、在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度。 As shown in Figure 13, the control method of the lifting mechanism of the air transport vehicle includes: Step S201: During the lifting movement of the clamping mechanism, obtain the outer diameter speed corresponding to the belt roll of the flexible belt.

實施中,外徑速度的獲取可通過感測器等獲取方式,也可結合感測器進行計算確定該外徑速度。In implementation, the outer diameter speed can be obtained through a sensor or other acquisition methods, or the outer diameter speed can be calculated and determined in combination with a sensor.

實施中,可通過PLC輸出驅動脈衝,由升降機構中的電機在驅動脈衝的控制下,帶動皮帶卷釋放或捲繞柔性皮帶,其中電機轉動一圈對應於皮帶卷轉動一圈。因此,當PLC通過輸出脈衝控制皮帶卷釋放或捲繞柔性皮帶時,可通過讀取PLC輸出的脈衝數量,進而根據脈衝數量對應的電機轉速,可確定該外徑速度,而外徑速度對應於夾持機構的升降速度。In implementation, the driving pulse can be output by the PLC, and the motor in the lifting mechanism drives the belt roll to release or wind the flexible belt under the control of the driving pulse, where one rotation of the motor corresponds to one rotation of the belt roll. Therefore, when the PLC controls the belt roll to release or wind the flexible belt by outputting pulses, the outer diameter speed can be determined by reading the number of pulses output by the PLC and then based on the motor speed corresponding to the number of pulses, and the outer diameter speed corresponds to The lifting speed of the clamping mechanism.

S203、根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動。S203. Adjust the lifting speed of the clamping mechanism according to the outer diameter speed to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls.

實施中,在確定該外徑速度後,可將該外徑速度與預計運行速度進行比較,進而根據比較結果即時調整該夾持機構的升降速度。In implementation, after determining the outer diameter speed, the outer diameter speed can be compared with the expected operating speed, and then the lifting speed of the clamping mechanism can be adjusted immediately based on the comparison result.

其中,分段控制包括:啟動階段、加速階段、減速階段和平穩階段。其中這些階段可參考前述說明,這裡不再展開說明。Among them, segmented control includes: starting phase, acceleration phase, deceleration phase and steady phase. These stages can be referred to the foregoing description and will not be explained here.

通過即時獲取柔性皮帶卷的外徑速度,即柔性皮帶釋放或捲繞對應的外徑速度,並根據該外徑速度即時調整夾持機構的速度,使得夾持機構可以在不同階段都能按預設的目標升降速度進行升降運動,提高夾持架構升降運動的平穩性、準確性。By instantly obtaining the outer diameter speed of the flexible belt roll, that is, the outer diameter speed corresponding to the release or winding of the flexible belt, and adjusting the speed of the clamping mechanism in real time based on the outer diameter speed, the clamping mechanism can operate as expected at different stages. The lifting movement is carried out at a set target lifting speed to improve the stability and accuracy of the lifting movement of the clamping structure.

在一些實施方式中,鑒於PLC通過發出的脈衝來控制伺服電機運行,脈衝數對應電機轉動角度,而伺服電機驅動皮帶卷,因而PLC輸出的脈衝頻率可用於確定皮帶卷的轉速,即可以通過獲取皮帶卷的轉動速度,來獲取該柔性皮帶在皮帶卷帶動下的運動速度,其中柔性皮帶的運動速度對應於夾持機構的升降速度。In some embodiments, since the PLC controls the operation of the servo motor by sending pulses, the number of pulses corresponds to the rotation angle of the motor, and the servo motor drives the belt roll, the pulse frequency output by the PLC can be used to determine the rotation speed of the belt roll, that is, it can be obtained by The rotation speed of the belt roll is used to obtain the movement speed of the flexible belt driven by the belt roll, where the movement speed of the flexible belt corresponds to the lifting speed of the clamping mechanism.

如圖14所示,當柔性皮帶3繞皮帶軸6下降過程中,皮帶卷外徑與速度都在時刻變化,假如PLC發出的脈衝頻率為一個定量,則雖然伺服電機的轉速是勻速,但傳送給柔性皮帶3的線性速度是逐漸變慢。As shown in Figure 14, when the flexible belt 3 is descending around the belt shaft 6, the outer diameter and speed of the belt roll are changing all the time. If the pulse frequency sent by the PLC is a constant, then although the rotation speed of the servo motor is constant, the transmission The linear speed given to the flexible belt 3 is gradually slower.

實施中,可根據皮帶卷PLC發出一定增量的脈衝來補嘗電機勻速轉動傳遞給柔性皮帶逐漸變慢的直線下降現象,使柔性皮帶的運動速度(即夾持機構的升降速度)按預定速度實現控制。During implementation, the PLC of the belt roll can send out certain incremental pulses to compensate for the gradual slowdown of the linear decline transmitted to the flexible belt by the uniform rotation of the motor, so that the movement speed of the flexible belt (that is, the lifting speed of the clamping mechanism) can be adjusted to a predetermined speed. Achieve control.

為便於理解,以勻速控制為例進行速度控制示意說明。To facilitate understanding, a schematic explanation of speed control is given using uniform speed control as an example.

因皮帶自身厚度的存在,雖然電機轉一圈,皮帶也會轉一圈,但皮帶每圈半徑r並不相同,導致電機轉速(即PLC輸出的脈衝頻率)雖然不變,但每轉一圈皮帶下降高度均不一樣,即在相同的時間t內,夾持機構的路程s不一樣,因為夾持機構的速度V將不同,因而夾持機構的勻速運動將不再是勻速控制的運動。Due to the thickness of the belt itself, although the motor rotates once, the belt will also rotate once, but the radius r of each revolution of the belt is not the same. As a result, although the motor speed (i.e., the pulse frequency output by the PLC) remains unchanged, it changes with each revolution. The lowering heights of the belts are all different, that is, within the same time t, the distance s of the clamping mechanism is different, because the speed V of the clamping mechanism will be different, so the uniform motion of the clamping mechanism will no longer be a uniformly controlled motion.

假設,柔性皮帶3的厚度為y,皮帶未下放前,皮帶卷的總半徑為R,圈數(即皮帶在皮帶軸上繞的圈數)為n,則速度 。因此,要實現均速下降,即速度V要保持不變,則需要把皮帶卷的外徑速度計算在內,若假設皮帶下降速度V為一個定量,即均速下降,皮帶下降第一圈的高度是2πR,第二圈皮帶下降的高度為:2π〔R-(n-1)*y〕,也就是說雖然速度V不變,但是路程S在變化,因而通過即時獲取出每圈轉動時間差Δt,可以通過計算出對應的脈衝增量來保持速度V不變,其中路程差 ,則可根據路程差除以時間差等於速度,可確定出 。其中,y為柔性皮帶的厚度,Δt為皮帶卷每圈轉動時間差,V為夾持機構的升降速度。 Assume that the thickness of the flexible belt 3 is y, before the belt is lowered, the total radius of the belt roll is R, and the number of turns (that is, the number of turns of the belt around the belt axis) is n, then the speed . Therefore, in order to achieve a uniform speed decrease, that is, the speed V needs to remain unchanged, the outer diameter speed of the belt roll needs to be calculated. If it is assumed that the belt downward speed V is a constant, that is, a uniform speed decrease, the first lap of the belt decrease will be The height is 2πR, and the height of the second belt drop is: 2π[R-(n-1)*y]. That is to say, although the speed V remains unchanged, the distance S is changing, so the time difference of each revolution is obtained in real time. Δt, the speed V can be kept constant by calculating the corresponding pulse increment, where the distance difference , then it can be determined according to the distance difference divided by the time difference equal to the speed. . Among them, y is the thickness of the flexible belt, Δt is the time difference between each rotation of the belt roll, and V is the lifting speed of the clamping mechanism.

在一些實施方式中,可通過獲取PLC輸出的脈衝數量來確定皮帶卷的驅動轉速。In some embodiments, the driving speed of the belt roll can be determined by obtaining the number of pulses output by the PLC.

實施中,獲取該升降機構對該皮帶卷的驅動轉速,可包括: 獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量;以及, 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,包括:根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。需要說明的是,這裡的增量是指Δt對應的脈衝數量的變化值,因而增量可為正的變化值,也可為負的變化值。 In implementation, obtaining the driving speed of the lifting mechanism for the belt roll may include: Obtain the first number of pulses corresponding to the current lifting speed, which is the number of pulses corresponding to the driving speed used by the lifting mechanism to control the belt roll; and, According to the driving speed and the target radius, adjusting the lifting speed of the clamping mechanism includes: outputting a second number of pulses according to the driving speed, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses. , adjust the lifting speed of the clamping mechanism, where the second pulse number is the sum of the increments of the pulse number corresponding to the first pulse data and Δt when assuming that the lifting speed remains unchanged. It should be noted that the increment here refers to the change value of the number of pulses corresponding to Δt, so the increment can be a positive change value or a negative change value.

通過獲取夾持機構從第一位置下降(或上升)到第二位置中PLC輸出的脈衝數,並根據脈衝數通過增量補償方式,對速度進行補償,可平穩、準確地將升降運動的速度調整到目標升降速度。By obtaining the number of pulses output by the PLC when the clamping mechanism drops (or rises) from the first position to the second position, and compensates the speed through incremental compensation according to the number of pulses, the speed of the lifting movement can be smoothly and accurately adjusted. Adjust to target lifting speed.

在一些實施方式中,可通過編碼器回饋伺服電機的行程,使得速度調整更平穩、可控和準確。In some embodiments, the encoder can be used to feedback the stroke of the servo motor, making the speed adjustment smoother, controllable, and accurate.

實施中,該空中運輸車的升降機構控制方法還包括:獲取該升降機構中伺服電機的行程,並根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。During implementation, the control method of the lifting mechanism of the air transport vehicle also includes: obtaining the stroke of the servo motor in the lifting mechanism, and determining whether the lifting movement is normal based on the stroke and the number of second pulses. If it is normal, continue to issue the message. Next program command, if it is abnormal, stop issuing the next program command.

其中,在對速度進行補償的控制調整中,編碼器的回饋過程與前述說明相同/相似,可參照前述示意說明,這裡不展開。Among them, in the control adjustment for speed compensation, the feedback process of the encoder is the same/similar to the aforementioned description. Please refer to the aforementioned schematic description, which will not be elaborated here.

基於相同發明構思,本說明書實施例還提供一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接。Based on the same inventive concept, embodiments of this specification also provide a lifting mechanism control system for an aerial transport vehicle, which is applied to the lifting mechanism of an aerial transport vehicle to control a clamping mechanism to perform lifting movements, and a flexible belt is connected between the clamping mechanism and the lifting mechanism. .

如圖15所示,該空中運輸車的升降機構控制系統1000包括: 控制機構1010,用於啟動升降機構中的伺服電機,以驅動該夾持機構進行升降運動; 檢測機構1030,用於獲取該升降運動的速度值; 其中,該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制; 其中,該分段控制包括: 啟動階段中,當檢測機構1030檢測到該升降運動的速度值達到第一閾值時,控制機構1010控制該升降運動進入加速階段; 加速階段中,控制機構1010對該升降運動進行加速控制,並當檢測機構1030檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,控制機構1010對該升降運動進行減速控制,並當檢測機構1030檢測到該升降運動的速度值減速到第三閾值時,控制機構1010控制該升降運動進入平穩階段; 平穩階段中,控制機構1010按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 As shown in Figure 15, the lifting mechanism control system 1000 of the air transport vehicle includes: The control mechanism 1010 is used to start the servo motor in the lifting mechanism to drive the clamping mechanism to perform lifting movements; The detection mechanism 1030 is used to obtain the speed value of the lifting movement; Wherein, the control mechanism and the detection mechanism are also used for coordinated segmented control based on the speed value of the lifting movement; Among them, the segmented control includes: In the startup phase, when the detection mechanism 1030 detects that the speed value of the lifting motion reaches the first threshold, the control mechanism 1010 controls the lifting motion to enter the acceleration phase; In the acceleration stage, the control mechanism 1010 performs acceleration control on the lifting movement, and when the detection mechanism 1030 detects that the speed value of the lifting movement accelerates to the second threshold, controls the lifting movement to enter the deceleration stage; In the deceleration stage, the control mechanism 1010 performs deceleration control on the lifting movement, and when the detection mechanism 1030 detects that the speed value of the lifting movement decelerates to the third threshold, the control mechanism 1010 controls the lifting movement to enter a stable stage; In the stable phase, the control mechanism 1010 controls the lifting movement according to a preset stable control strategy so that the clamping mechanism stops at the set position.

通過在控制系統中,基於檢測機構即時獲取的速度資訊,對夾持機構進行即時分段控制,可保障升降平穩性,同時優化升降時長,可在相對較短的時間內有效的平穩下放夾持機構,有效縮短晶圓生產中搬運週期,提高半導體工廠的生產效率。In the control system, based on the speed information obtained by the detection mechanism, real-time segmented control of the clamping mechanism can ensure the stability of lifting and lowering, and at the same time optimize the lifting time, so that the clamp can be effectively and smoothly lowered in a relatively short period of time. The holding mechanism effectively shortens the handling cycle in wafer production and improves the production efficiency of semiconductor factories.

在一些實施方式中,該控制機構包括PLC控制器,該檢測機構與該PLC控制器電連接; 該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制,包括:該PLC控制器和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制。 In some embodiments, the control mechanism includes a PLC controller, and the detection mechanism is electrically connected to the PLC controller; The control mechanism and the detection mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion, including: the PLC controller and the detecting mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion. .

通過採用PLC作為控制機構的控制核心,PLC更簡便、易操作,可更改性強。By using PLC as the control core of the control mechanism, PLC is simpler, easier to operate, and highly changeable.

在一些實施方式中,該夾持機構上設置第一對射感測器和第二對射感測器,該第一對射感測器設置於該第二對射感測器的上方,該第二對射感測器用於檢測該夾持機構是否停止在該設定位置,該第一對射感測器用於檢測該夾持機構停止在異常位置,該第一對射感測器和該第二對射感測器與該PLC控制器點連接; 該PLC控制器還用於:獲取該第一對射感測器輸出的第一信號和該第二對射感測器輸出的第二信號,以及根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係。 In some embodiments, a first through-beam sensor and a second through-beam sensor are provided on the clamping mechanism, the first through-beam sensor is disposed above the second through-beam sensor, and the The second through-shooting sensor is used to detect whether the clamping mechanism stops at the set position. The first through-shooting sensor is used to detect whether the clamping mechanism stops at an abnormal position. The first through-shooting sensor and the third through-shooting sensor Two on-shooting sensors are connected to the PLC controller; The PLC controller is also used to: obtain the first signal output by the first beam sensor and the second signal output by the second beam sensor, and determine the first signal and the second signal according to the first signal and the second signal. The relationship between the clamping mechanism and this set position.

通過夾持機構上的兩組感測器對平穩階段進行控制,可提高平穩階段控制的平穩性和縮短平穩階段的時長,優化整個上升或下降的時長。Controlling the stationary phase through two sets of sensors on the clamping mechanism can improve the stability of the stationary phase control and shorten the duration of the stationary phase, optimizing the entire ascent or descent duration.

在一些實施方式中,該伺服電機與該PLC控制器電連接,該PLC控制器還用於按預設的脈衝數量驅動升降機構中的伺服電機,以及根據該脈衝數量確定該升降運動的速度值。In some embodiments, the servo motor is electrically connected to the PLC controller, and the PLC controller is also used to drive the servo motor in the lifting mechanism according to a preset number of pulses, and determine the speed value of the lifting movement based on the number of pulses. .

在一些實施方式中,該伺服電機為包含有行程編碼器的伺服電機,該行程編碼器與該PLC控制器電連接; 該PLC控制器還用於:獲取該行程編碼器回饋的伺服電機行程資料,以及根據該伺服電機行程資料和該脈衝數量,確定該升降運動是否正常。 In some embodiments, the servo motor is a servo motor including a stroke encoder, and the stroke encoder is electrically connected to the PLC controller; The PLC controller is also used to: obtain the servo motor stroke data fed back by the stroke encoder, and determine whether the lifting movement is normal based on the servo motor stroke data and the number of pulses.

在一些實施方式中,本說明書提供的任意一個實施例中,該PLC控制器與報警電路電連接; 當確定該升降運動屬於非正常時,該PLC控制器還用於:停止向該伺服電機的驅動器發送驅動指令,和/或發出語音警報,和/或展示警報資訊。 In some embodiments, in any of the embodiments provided in this specification, the PLC controller is electrically connected to the alarm circuit; When it is determined that the lifting movement is abnormal, the PLC controller is also used to: stop sending driving instructions to the driver of the servo motor, and/or issue a voice alarm, and/or display alarm information.

在一些實施方式中,本說明書提供的任意一個實施例中,該柔性皮帶的原點位置處設置有第一位置感測器,該第一位置感測器與該PLC控制器電連接; 該PLC控制器還用於:在按預設的脈衝數量驅動升降機構中的伺服電機前,獲取該第一位置感測器的輸出結果,以確定該柔性皮帶是否位於該原點位置。 In some embodiments, in any of the embodiments provided in this specification, a first position sensor is provided at the origin of the flexible belt, and the first position sensor is electrically connected to the PLC controller; The PLC controller is also used to: before driving the servo motor in the lifting mechanism according to a preset number of pulses, obtain the output result of the first position sensor to determine whether the flexible belt is at the origin position.

基於相同發明構思,本說明書實施例還提供一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,優選地,用於升降運動的速度補償,其中該夾持機構與該升降機構之間柔性皮帶連接。Based on the same inventive concept, embodiments of this specification also provide a lifting mechanism control system for an aerial transport vehicle, which is applied to the lifting mechanism of the aerial transport vehicle to control the clamping mechanism to perform lifting movements, preferably for speed compensation of the lifting movements, wherein the A flexible belt is connected between the clamping mechanism and the lifting mechanism.

如圖16所示,該空中運輸車的升降機構控制系統2000包括: 第一控制模組2020,用於在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度; 第一調整模組2040,用於根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 As shown in Figure 16, the lifting mechanism control system 2000 of the air transport vehicle includes: The first control module 2020 is used to obtain the outer diameter speed corresponding to the belt roll of the flexible belt during the lifting movement of the clamping mechanism; The first adjustment module 2040 is used to adjust the lifting speed of the clamping mechanism according to the outer diameter speed, so as to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position.

在一些實施方式中,獲取該柔性皮帶的皮帶卷對應的外徑速度,包括:獲取該升降機構對該皮帶卷的驅動轉速; 根據該外徑速度調整該夾持機構的升降速度,包括: 獲取該驅動轉速對應的該皮帶卷的目標半徑; 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,其中該目標半徑與該升降速度滿足以下關係: ; 其中,n為圈數,y為柔性皮帶的厚度,Δt為皮帶卷每圈轉動時間差,V為夾持機構的升降速度。 In some embodiments, obtaining the outer diameter speed corresponding to the belt roll of the flexible belt includes: obtaining the driving speed of the lifting mechanism for the belt roll; adjusting the lifting speed of the clamping mechanism according to the outer diameter speed, including: obtaining The driving speed corresponds to the target radius of the belt roll; according to the driving speed and the target radius, the lifting speed of the clamping mechanism is adjusted, where the target radius and the lifting speed satisfy the following relationship: ; Among them, n is the number of turns, y is the thickness of the flexible belt, Δt is the rotation time difference of the belt roll per turn, and V is the lifting speed of the clamping mechanism.

在一些實施方式中,獲取該升降機構對該皮帶卷的驅動轉速,包括:獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量; 調整該夾持機構的升降速度,包括: 根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。 In some embodiments, obtaining the driving speed of the belt roll by the lifting mechanism includes: obtaining the first number of pulses corresponding to the current lifting speed. The first pulse number is the driving speed used by the lifting mechanism to control the belt roll. The corresponding number of pulses; Adjust the lifting speed of the clamping mechanism, including: According to the driving speed, a second number of pulses is output, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses, and the lifting speed of the clamping mechanism is adjusted, where the second number of pulses is when assuming that the When the lifting speed remains unchanged, the sum of the increment of the number of pulses corresponding to the first pulse data and Δt.

在一些實施方式中,該空中運輸車的升降機構控制系統還包括:編碼器,該編碼器用於獲取該升降機構中伺服電機的行程; 該第一控制模組還用於根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。 In some embodiments, the lifting mechanism control system of the aerial transport vehicle also includes: an encoder, the encoder is used to obtain the stroke of the servo motor in the lifting mechanism; The first control module is also used to determine whether the lifting movement is normal based on the stroke and the second pulse number. If it is normal, continue to issue the next program command. If it is abnormal, stop issuing the next program command.

以上僅為本發明之較佳實施例,並非用來限定本發明之實施範圍,如果不脫離本發明之精神和範圍,對本發明進行修改或者等同替換,均應涵蓋在本發明申請專利範圍的保護範圍當中。The above are only preferred embodiments of the present invention and are not intended to limit the implementation scope of the present invention. If the present invention is modified or equivalently substituted without departing from the spirit and scope of the present invention, the protection shall be covered by the patent scope of the present invention. within the range.

1:空中運輸車 2:升降機構 3:柔性皮帶 4:夾持機構 5:目標物體 6:皮帶軸 1000:空中運輸車的升降機構控制系統 1010:控制機構 1030:檢測機構 2000:空中運輸車的升降機構控制系統 2020:第一控制模組 2040:第一調整模組 1: Air transport vehicle 2:Lifting mechanism 3:Flexible belt 4: Clamping mechanism 5: Target object 6:Belt shaft 1000: Lifting mechanism control system of air transport vehicle 1010:Control mechanism 1030:Testing agency 2000: Lifting mechanism control system for air transport vehicles 2020: The first control module 2040: First Adjustment Module

圖1為本發明實施例所提供的空中運輸車的升降機構與夾持機構之間的結構示意圖; 圖2為本發明實施例所提供的空中運輸車中進行勻速升降運動的示意圖; 圖3為本發明實施例所提供的空中運輸車的升降機構控制方案中進行分段控制的示意圖; 圖4為本發明實施例所提供的空中運輸車的升降機構控制方案中分段控制的示意圖; 圖5為本發明實施例所提供的空中運輸車的升降機構控制方案中分段控制的示意圖; 圖6為本發明實施例所提供的空中運輸車的升降機構控制方法的流程圖; 圖7為本發明實施例所提供的空中運輸車的升降機構控制方法中加速下降的示意圖; 圖8為本發明實施例所提供的空中運輸車的升降機構控制方法中勻速下降的示意圖; 圖9為本發明實施例所提供的空中運輸車的升降機構控制方法中減速下降的示意圖; 圖10為本發明實施例所提供的空中運輸車的升降機構控制方法中平穩下降的示意圖; 圖11為本發明實施例所提供的編碼器回饋檢測的示意圖; 圖12為本發明實施例所提供的編碼器對各分段控制進行回饋檢測的示意圖; 圖13為本發明實施例所提供的空中運輸車的升降機構控制方法的流程圖; 圖14為本發明實施例所提供的空中運輸車的升降機構控制方法中速度補償的示意圖; 圖15為本發明實施例所提供的空中運輸車的升降機構控制系統的示意圖; 圖16為本發明實施例所提供的空中運輸車的升降機構控制系統的示意圖。 Figure 1 is a schematic structural diagram between the lifting mechanism and the clamping mechanism of the aerial transport vehicle provided by the embodiment of the present invention; Figure 2 is a schematic diagram of the air transport vehicle performing uniform lifting and lowering movements according to the embodiment of the present invention; Figure 3 is a schematic diagram of segmented control in the lifting mechanism control scheme of the aerial transport vehicle provided by the embodiment of the present invention; Figure 4 is a schematic diagram of segmented control in the lifting mechanism control scheme of the aerial transport vehicle provided by the embodiment of the present invention; Figure 5 is a schematic diagram of segmented control in the lifting mechanism control scheme of the aerial transport vehicle provided by the embodiment of the present invention; Figure 6 is a flow chart of the control method of the lifting mechanism of the aerial transport vehicle provided by the embodiment of the present invention; Figure 7 is a schematic diagram of accelerated descent in the lifting mechanism control method of an aerial transport vehicle provided by an embodiment of the present invention; Figure 8 is a schematic diagram of a uniform descent in the lifting mechanism control method of an air transport vehicle provided by an embodiment of the present invention; Figure 9 is a schematic diagram of deceleration and descent in the lifting mechanism control method of an aerial transport vehicle provided by an embodiment of the present invention; Figure 10 is a schematic diagram of a smooth descent in the lifting mechanism control method of an aerial transport vehicle provided by an embodiment of the present invention; Figure 11 is a schematic diagram of encoder feedback detection provided by an embodiment of the present invention; Figure 12 is a schematic diagram of the encoder performing feedback detection on each segment control provided by the embodiment of the present invention; Figure 13 is a flow chart of the control method of the lifting mechanism of the air transport vehicle provided by the embodiment of the present invention; Figure 14 is a schematic diagram of speed compensation in the lifting mechanism control method of an aerial transport vehicle provided by an embodiment of the present invention; Figure 15 is a schematic diagram of the lifting mechanism control system of the aerial transport vehicle provided by the embodiment of the present invention; Figure 16 is a schematic diagram of the lifting mechanism control system of the aerial transport vehicle provided by the embodiment of the present invention.

1:空中運輸車 1: Air transport vehicle

2:升降機構 2:Lifting mechanism

3:柔性皮帶 3:Flexible belt

4:夾持機構 4: Clamping mechanism

5:目標物體 5: Target object

Claims (20)

一種空中運輸車的升降機構控制方法,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制方法包括:在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度; 根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 A method for controlling the lifting mechanism of an air transport vehicle. The lifting mechanism of an air transport vehicle is used to control a clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The method for controlling the lifting mechanism of an air transport vehicle includes: : During the lifting movement of the clamping mechanism, obtain the outer diameter speed corresponding to the belt roll of the flexible belt; Adjust the lifting speed of the clamping mechanism according to the outer diameter speed to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position. 如請求項1所述的空中運輸車的升降機構控制方法,獲取該柔性皮帶的皮帶卷對應的外徑速度,包括:獲取該升降機構對該皮帶卷的驅動轉速; 根據該外徑速度調整該夾持機構的升降速度,包括: 獲取該驅動轉速對應的該皮帶卷的目標半徑; 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,其中該目標半徑與該升降速度滿足以下關係: ; 其中,n為圈數,y為柔性皮帶的厚度,Δt為皮帶卷轉動一圈的時間差,V為夾持機構的升降速度。 According to the control method of the lifting mechanism of the air transport vehicle described in claim 1, obtaining the outer diameter speed corresponding to the belt roll of the flexible belt includes: obtaining the driving speed of the belt roll by the lifting mechanism; adjusting the belt roll according to the outer diameter speed. The lifting speed of the clamping mechanism includes: obtaining the target radius of the belt roll corresponding to the driving speed; adjusting the lifting speed of the clamping mechanism according to the driving speed and the target radius, where the target radius and the lifting speed satisfy the following relation: ; Among them, n is the number of turns, y is the thickness of the flexible belt, Δt is the time difference for the belt roll to rotate once, and V is the lifting speed of the clamping mechanism. 如請求項2所述的空中運輸車的升降機構控制方法,獲取該升降機構對該皮帶卷的驅動轉速,包括:獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量; 調整該夾持機構的升降速度,包括: 根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。 According to the control method of the lifting mechanism of the air transport vehicle described in claim 2, obtaining the driving speed of the belt roll by the lifting mechanism includes: obtaining the first number of pulses corresponding to the current lifting speed, and the first pulse number is for The lifting mechanism controls the number of pulses corresponding to the driving speed of the belt roll; Adjust the lifting speed of the clamping mechanism, including: According to the driving speed, a second number of pulses is output, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses, and the lifting speed of the clamping mechanism is adjusted, where the second number of pulses is when assuming that the When the lifting speed remains unchanged, the sum of the increment of the number of pulses corresponding to the first pulse data and Δt. 如請求項3所述的空中運輸車的升降機構控制方法,該空中運輸車的升降機構控制方法還包括: 獲取該升降機構中伺服電機的行程; 根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。 As claimed in claim 3, the lifting mechanism control method of an air transport vehicle further includes: Obtain the stroke of the servo motor in the lifting mechanism; According to the stroke and the number of second pulses, it is determined whether the lifting movement is normal. If it is normal, continue to issue the next program command. If it is abnormal, stop issuing the next program command. 一種空中運輸車的升降機構控制方法,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間採用柔性皮帶連接,該空中運輸車的升降機構控制方法包括: 當空中運輸車在軌道中運行到預定位置時,啟動升降機構對夾持機構的驅動,以使夾持機構進行升降運動; 獲取該升降運動的速度值,並根據該升降運動的速度值進行分段控制; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 A method for controlling the lifting mechanism of an air transport vehicle. The lifting mechanism of an air transport vehicle is used to control a clamping mechanism to perform lifting movements. The clamping mechanism and the lifting mechanism are connected by a flexible belt. The method for controlling the lifting mechanism of an air transport vehicle. include: When the aerial transport vehicle reaches a predetermined position in the track, the lifting mechanism is started to drive the clamping mechanism so that the clamping mechanism performs lifting movement; Obtain the speed value of the lifting motion and perform segmented control based on the speed value of the lifting motion; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position. 如請求項5所述的空中運輸車的升降機構控制方法,啟動升降機構對夾持機構的驅動,包括:按預設的脈衝數量驅動升降機構中的伺服電機,其中該伺服電機用於驅動該柔性皮帶,以通過控制該柔性皮帶進行釋放或捲繞對夾持機構的驅動; 獲取該升降運動的速度值,包括:獲取該脈衝數量,並根據該脈衝數量確定該升降運動的速度值。 As claimed in claim 5, the method for controlling the lifting mechanism of an air transport vehicle starts the lifting mechanism to drive the clamping mechanism, including: driving the servo motor in the lifting mechanism according to a preset number of pulses, wherein the servo motor is used to drive the a flexible belt to drive the clamping mechanism by controlling the flexible belt to release or wind; Obtaining the speed value of the lifting motion includes: obtaining the number of pulses, and determining the speed value of the lifting motion based on the number of pulses. 如請求項6所述的空中運輸車的升降機構控制方法,該空中運輸車的升降機構控制方法還包括: 獲取行程編碼器回饋的伺服電機行程資料; 根據該伺服電機行程資料和該脈衝數量,確定該夾持機構的升降運動是否正常。 As claimed in claim 6, the lifting mechanism control method of an air transport vehicle further includes: Obtain the servo motor stroke data fed back by the stroke encoder; According to the servo motor stroke data and the number of pulses, determine whether the lifting movement of the clamping mechanism is normal. 如請求項5所述的空中運輸車的升降機構控制方法,該分段控制還包括:勻速階段中,對該升降運動進行勻速控制,當該勻速階段的時長達到第四閾值時,控制該升降運動進入該減速階段; 其中,當在加速階段中檢測到該升降運動的速度值加速到該第二閾值時,控制該升降運動進入勻速階段。 As for the control method of the lifting mechanism of the air transport vehicle described in claim 5, the segmented control also includes: performing uniform speed control on the lifting movement during the uniform speed phase, and when the duration of the uniform speed phase reaches the fourth threshold, controlling the lifting motion. The lifting movement enters this deceleration stage; Wherein, when it is detected in the acceleration phase that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the uniform speed phase. 如請求項5所述的空中運輸車的升降機構控制方法,該空中運輸車的升降機構控制方法還包括: 獲取第一對射感測器輸出的第一信號和第二對射感測器輸出的第二信號,該第一對射感測器用於檢測該夾持機構停止在異常位置,該第二對射感測器用於檢測該夾持機構是否停止在該設定位置; 根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係。 As claimed in claim 5, the lifting mechanism control method of an air transport vehicle further includes: Obtain the first signal output by the first through-beam sensor and the second signal output by the second through-beam sensor. The first through-beam sensor is used to detect that the clamping mechanism stops at an abnormal position, and the second through-beam sensor is used to detect that the clamping mechanism stops at an abnormal position. The radiation sensor is used to detect whether the clamping mechanism stops at the set position; The relationship between the clamping mechanism and the set position is determined according to the first signal and the second signal. 如請求項9所述的空中運輸車的升降機構控制方法,根據該第一信號和該第二信號確定該夾持機構與該設定位置之間的關係,包括: 當確定該第一信號和該第二信號符合預設的判定條件時,確定該夾持機構停止在該設定位置。 As claimed in claim 9, the method for controlling the lifting mechanism of an aerial transport vehicle determines the relationship between the clamping mechanism and the set position based on the first signal and the second signal, including: When it is determined that the first signal and the second signal meet the preset determination conditions, it is determined that the clamping mechanism stops at the set position. 一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制系統包括: 第一控制模組,用於在該夾持機構的升降運動中,獲取該柔性皮帶的皮帶卷對應的外徑速度; 第一調整模組,用於根據該外徑速度調整該夾持機構的升降速度,以控制該夾持機構在不同分段控制中按預設的目標升降速度進行升降運動; 其中,該分段控制包括: 啟動階段中,當檢測到該升降運動的速度值達到第一閾值時,控制該升降運動進入加速階段; 加速階段中,對該升降運動進行加速控制,並當檢測到該升降運動的速度值加速到第二閾值時,控制該升降運動進入減速階段; 減速階段中,對該升降運動進行減速控制,並當檢測到該升降運動的速度值減速到第三閾值時,控制該升降運動進入平穩階段; 平穩階段中,按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 A lifting mechanism control system for an air transport vehicle, which is applied to the lifting mechanism of the air transport vehicle to control the clamping mechanism to perform lifting movements. The clamping mechanism is connected to the lifting mechanism by a flexible belt. The lifting mechanism control system of the air transport vehicle includes : The first control module is used to obtain the outer diameter speed corresponding to the belt roll of the flexible belt during the lifting movement of the clamping mechanism; The first adjustment module is used to adjust the lifting speed of the clamping mechanism according to the outer diameter speed to control the lifting movement of the clamping mechanism according to the preset target lifting speed in different segmented controls; Among them, the segmented control includes: In the starting phase, when it is detected that the speed value of the lifting motion reaches the first threshold, the lifting motion is controlled to enter the acceleration phase; In the acceleration phase, the lifting motion is accelerated and controlled, and when it is detected that the speed value of the lifting motion accelerates to the second threshold, the lifting motion is controlled to enter the deceleration phase; In the deceleration stage, the lifting movement is decelerated and controlled, and when it is detected that the speed value of the lifting movement decelerates to the third threshold, the lifting movement is controlled to enter a stable stage; In the stable phase, the lifting movement is controlled according to the preset stable control strategy so that the clamping mechanism stops at the set position. 如請求項11所述的空中運輸車的升降機構控制系統,獲取該柔性皮帶的皮帶卷對應的外徑速度,包括:獲取該升降機構對該皮帶卷的驅動轉速; 根據該外徑速度調整該夾持機構的升降速度,包括: 獲取該驅動轉速對應的該皮帶卷的目標半徑; 根據該驅動轉速和該目標半徑,調整該夾持機構的升降速度,其中該目標半徑與該升降速度滿足以下關係: ; 其中,n為圈數,y為柔性皮帶的厚度,Δt為皮帶卷轉動一圈的時間差,V為夾持機構的升降速度。 As claimed in claim 11, the lifting mechanism control system of an air transport vehicle obtains the outer diameter speed corresponding to the belt roll of the flexible belt, including: obtaining the driving speed of the belt roll by the lifting mechanism; adjusting the belt roll according to the outer diameter speed. The lifting speed of the clamping mechanism includes: obtaining the target radius of the belt roll corresponding to the driving speed; adjusting the lifting speed of the clamping mechanism according to the driving speed and the target radius, where the target radius and the lifting speed satisfy the following relation: ; Among them, n is the number of turns, y is the thickness of the flexible belt, Δt is the time difference for the belt roll to rotate once, and V is the lifting speed of the clamping mechanism. 如請求項12所述的空中運輸車的升降機構控制系統,獲取該升降機構對該皮帶卷的驅動轉速,包括:獲取當前該升降速度對應的第一脈衝數量,該第一脈衝數量為用於該升降機構控制該皮帶卷的驅動轉速對應的脈衝數量; 調整該夾持機構的升降速度,包括: 根據該驅動轉速,輸出第二脈衝數量,以使該升降機構在該第二脈衝數量的作用下驅動該皮帶卷轉動,調整該夾持機構的升降速度,其中該第二脈衝數量為當假設該升降速度不變時,該第一脈衝資料與Δt對應的脈衝數量的增量之和。 As claimed in claim 12, the lifting mechanism control system of an air transport vehicle, obtaining the driving speed of the belt roll by the lifting mechanism includes: obtaining the first number of pulses corresponding to the current lifting speed, and the first pulse number is for The lifting mechanism controls the number of pulses corresponding to the driving speed of the belt roll; Adjust the lifting speed of the clamping mechanism, including: According to the driving speed, a second number of pulses is output, so that the lifting mechanism drives the belt roll to rotate under the action of the second number of pulses, and the lifting speed of the clamping mechanism is adjusted, where the second number of pulses is when assuming that the When the lifting speed remains unchanged, the sum of the increment of the number of pulses corresponding to the first pulse data and Δt. 如請求項13所述的空中運輸車的升降機構控制系統,該空中運輸車的升降機構控制系統還包括:編碼器,該編碼器用於獲取該升降機構中伺服電機的行程; 該第一控制模組還用於根據該行程與該第二脈衝數量,確定該升降運動是否正常,若為正常則繼續下發下一程式指令,若為異常則停止下發下一程式指令。 The lifting mechanism control system of an aerial transport vehicle as described in claim 13, the lifting mechanism control system of an aerial transport vehicle further includes: an encoder, the encoder is used to obtain the stroke of the servo motor in the lifting mechanism; The first control module is also used to determine whether the lifting movement is normal based on the stroke and the second pulse number. If it is normal, continue to issue the next program command. If it is abnormal, stop issuing the next program command. 一種空中運輸車的升降機構控制系統,應用於空中運輸車的升降機構控制夾持機構進行升降運動,該夾持機構與該升降機構之間柔性皮帶連接,該空中運輸車的升降機構控制系統包括: 控制機構,用於啟動升降機構中的伺服電機,以驅動該夾持機構進行升降運動; 檢測機構,用於檢測該升降運動的速度值; 其中,該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制; 其中,該分段控制包括: 啟動階段中,當該檢測機構檢測到該升降運動的速度值達到第一閾值時,該控制機構控制該升降運動進入加速階段; 加速階段中,該控制機構對該升降運動進行加速控制,並當該檢測機構檢測到該升降運動的速度值加速到第二閾值時,該控制機構控制該升降運動進入減速階段; 減速階段中,該控制機構對該升降運動進行減速控制,並當該檢測機構檢測到該升降運動的速度值減速到第三閾值時,該控制機構控制該升降運動進入平穩階段; 平穩階段中,該控制機構按預設的平穩控制策略對該升降運動進行控制,以使該夾持機構停止在設定位置。 A lifting mechanism control system for an air transport vehicle, which is applied to the lifting mechanism of the air transport vehicle to control the clamping mechanism to perform lifting movements. The clamping mechanism is connected to the lifting mechanism by a flexible belt. The lifting mechanism control system of the air transport vehicle includes : A control mechanism used to start the servo motor in the lifting mechanism to drive the clamping mechanism to perform lifting movements; A detection mechanism is used to detect the speed value of the lifting movement; Wherein, the control mechanism and the detection mechanism are also used for coordinated segmented control based on the speed value of the lifting movement; Among them, the segmented control includes: In the startup phase, when the detection mechanism detects that the speed value of the lifting motion reaches the first threshold, the control mechanism controls the lifting motion to enter the acceleration phase; In the acceleration stage, the control mechanism performs acceleration control on the lifting movement, and when the detection mechanism detects that the speed value of the lifting movement accelerates to the second threshold, the control mechanism controls the lifting movement to enter the deceleration stage; In the deceleration stage, the control mechanism performs deceleration control on the lifting movement, and when the detection mechanism detects that the speed value of the lifting movement decelerates to the third threshold, the control mechanism controls the lifting movement to enter a stable stage; In the stable phase, the control mechanism controls the lifting movement according to the preset stable control strategy so that the clamping mechanism stops at the set position. 如請求項15所述的空中運輸車的升降機構控制系統,該控制機構包括PLC控制器,該檢測機構與該PLC控制器電連接; 該控制機構和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制,包括:該PLC控制器和該檢測機構還用於根據該升降運動的速度值進行協同的分段控制。 As for the lifting mechanism control system of the air transport vehicle described in claim 15, the control mechanism includes a PLC controller, and the detection mechanism is electrically connected to the PLC controller; The control mechanism and the detection mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion, including: the PLC controller and the detecting mechanism are also used to perform coordinated segmented control based on the speed value of the lifting motion. . 如請求項16所述的空中運輸車的升降機構控制系統,該伺服電機與該PLC控制器電連接,該PLC控制器還用於按預設的脈衝數量驅動升降機構中的伺服電機,以及根據該脈衝數量確定該升降運動的速度值。As for the lifting mechanism control system of an air transport vehicle described in claim 16, the servo motor is electrically connected to the PLC controller, and the PLC controller is also used to drive the servo motor in the lifting mechanism according to a preset number of pulses, and according to The number of pulses determines the speed of the lifting movement. 如請求項17所述的空中運輸車的升降機構控制系統,該伺服電機為包含有行程編碼器的伺服電機,該行程編碼器與該PLC控制器電連接; 該PLC控制器還用於:獲取該行程編碼器回饋的伺服電機行程資料,以及根據該伺服電機行程資料和該脈衝數量,確定該升降運動是否正常。 As for the lifting mechanism control system of an air transport vehicle described in claim 17, the servo motor is a servo motor including a stroke encoder, and the stroke encoder is electrically connected to the PLC controller; The PLC controller is also used to: obtain the servo motor stroke data fed back by the stroke encoder, and determine whether the lifting movement is normal based on the servo motor stroke data and the number of pulses. 如請求項18所述的空中運輸車的升降機構控制系統,該PLC控制器與報警電路電連接; 當確定該升降運動屬於非正常時,該PLC控制器還用於:停止向該伺服電機的驅動器發送驅動指令,和/或發出語音警報,和/或展示警報資訊。 As for the lifting mechanism control system of the air transport vehicle described in claim 18, the PLC controller is electrically connected to the alarm circuit; When it is determined that the lifting movement is abnormal, the PLC controller is also used to: stop sending driving instructions to the driver of the servo motor, and/or issue a voice alarm, and/or display alarm information. 如請求項16至19中任一項所述的空中運輸車的升降機構控制系統,該柔性皮帶的原點位置處設置有第一位置感測器,該第一位置感測器與該PLC控制器電連接; 該PLC控制器還用於:在按預設的脈衝數量驅動升降機構中的伺服電機前,獲取該第一位置感測器的輸出結果,以確定該柔性皮帶是否位於該原點位置。 As in the lifting mechanism control system of an air transport vehicle according to any one of claims 16 to 19, a first position sensor is provided at the origin of the flexible belt, and the first position sensor is controlled by the PLC. electrical connection; The PLC controller is also used to: before driving the servo motor in the lifting mechanism according to a preset number of pulses, obtain the output result of the first position sensor to determine whether the flexible belt is at the origin position.
TW111143128A 2022-01-26 2022-11-11 Method and system for controlling the lifting mechanism of an overhead hoist transport vehicle TW202337812A (en)

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