TW202337680A - Resin film heat treatment device and resin film heat treatment method capable of achieving cost reduction of heat treatment of a resin film - Google Patents

Abstract

The present invention provides a resin film heat treatment device and a resin film heat treatment method, so as to achieve cost reduction of heat treatment of a resin film. A resin film heat treatment device (10) includes: an annular belt (11) formed of a metal sheet; a belt driving mechanism (12) that drives the annular belt (11) to travel along a predetermined travel path; a heating furnace (15) arranged to cover a part of the travel path of the annular belt (11); a resin film pasting machine (14), which is disposed on the upstream side of the heating furnace (15), supplies a resin film (51) to the annular belt (11), and adheres the resin film (51) to the annular belt (11); and a resin film recovery machine (16), which is disposed on the downstream side of the heating furnace (15) to peel and recover the resin film (51) from the annular belt (11).

Description

Resin film heat treatment device and resin film heat treatment method

The invention relates to a resin film heat treatment device and a resin film heat treatment method.

Japanese Patent Application Publication No. 2005-103989 discloses a method for producing a thermoplastic liquid crystal polymer film. In the method for producing a thermoplastic liquid crystal polymer film disclosed in this publication, a film made of a thermoplastic polymer capable of forming an optically anisotropic melt phase (hereinafter referred to as a thermoplastic liquid crystal polymer film) is bonded to the sheet. The state of the support is continuously heat-treated, and then the thermoplastic liquid crystal polymer film is separated from the support. Here, the following content is disclosed: a thermoplastic liquid crystal polymer film in a state where it is bonded to a support at a temperature of -15° C. or more and less than the melting point (Tm) of the thermoplastic liquid crystal polymer film for 5 to 60 seconds. The heat treatment causes the thermal expansion coefficient of the thermoplastic liquid crystal polymer film to be higher than that before heat treatment. In this publication, a vertically long thermoplastic liquid crystal polymer film unrolled from a unwinding roller is fed to a heating roller in a state of overlapping with a sheet-shaped support made of metal foil unrolled from the unwinding roller, and is heated by the heat roller. They are pressed and joined to produce a laminated body. Then, the laminated body is sent to a heat treatment device for heat treatment, and then the laminated body is separated into a thermoplastic liquid crystal polymer film and a support, thereby obtaining a thermoplastic liquid crystal polymer film with an increased thermal expansion coefficient. In this publication, the thickness of the sheet-like support is preferably in the range of 7 to 200 μm, and more preferably in the range of 7 to 75 μm. [Prior art documents] [Patent Document]

Patent Document 1: Japanese Patent Application Publication No. 2005-103989

[Problem to be solved by invention] In addition, the thermoplastic liquid crystal polymer film cannot be heat-treated alone. It needs to be adhered to a sheet-like support and heat-treated as described above, and a sheet-like support needs to be prepared. [A solution to the problem]

The resin film heat treatment device disclosed here includes: an endless belt formed of a metal sheet; a belt drive mechanism that causes the endless belt to travel along a predetermined traveling path; and a heating furnace that covers a portion of the traveling path of the endless belt. configuration; a resin film pasting machine, which is on the upstream side of the heating furnace, supplies resin film to the endless belt, and adheres the resin film to the endless belt; and a resin film recycling machine, which is on the downstream side of the heating furnace, peeling off the endless belt. Recycle resin film. According to this resin film heat treatment apparatus, the heat treatment of the resin film is continuously performed on the circulating endless belt. The endless belt loops can be used continuously for a long time. Therefore, the cost of heat treatment of the resin film is kept low.

Here, the endless belt may be made of stainless steel. The resin film to be heat-treated may be a liquid crystal polymer film, for example. The resin film pasting machine may also include a preheating device for heating the endless belt. In addition, the resin film pasting machine may include a mechanism for overlapping another piece on the endless belt and the resin film. Here, the other piece may also be a polyimide film.

In the heat treatment method of the resin film disclosed here, a belt furnace is used. The belt furnace has: a metal endless belt; a belt drive mechanism that causes the endless belt to travel along a predetermined travel path; and a heating furnace that Arranged in a manner that covers part of the traveling path of the annular belt. The heat treatment method of the resin film includes the following steps. On the upstream side of the heating furnace, the resin film is supplied so as to overlap the endless belt, the resin film is pressed against the endless belt, and the resin film is adhered to the endless belt; a heat treatment step in which the resin film is elongated and heated in response to thermal expansion of the endless belt in a heating furnace; and On the downstream side of the heating furnace, the resin film is peeled off from the endless belt and recovered. Furthermore, the resin film attached to the endless belt is heat-treated while the endless belt is circulated through the step of attaching the resin film, the step of heat treatment, and the step of recycling.

According to this heat treatment method, the heat treatment of the resin film is continuously performed on the circulating endless belt. The endless belt loops can be used continuously for a long time. Therefore, the cost of heat treatment of the resin film is kept low.

Here, the resin film before heat treatment may be prepared in a state of being wound around a winding shaft, taken out from the winding shaft, and supplied so as to overlap an endless belt on the upstream side of the heating furnace. In addition, in the step of collecting, the resin film may be peeled off from the endless belt and wound around a winding shaft.

The resin film may also be a thermoplastic liquid crystal polymer film. The endless belt can also be made of stainless steel. In the step of adhering the resin film to the endless belt, another piece may be stacked on the resin film overlapping the endless belt, and the resin film may be pressed against the endless belt via the other piece. Here, the other piece may also be a polyimide film.

Hereinafter, one of the typical embodiments of the present disclosure will be described in detail with reference to the drawings. In addition, in the following drawings, the same reference numerals are attached|subjected to the members and parts which have the same function, and are demonstrated. In addition, the dimensional relationships (length, width, thickness, etc.) in each figure do not reflect actual dimensional relationships.

"Resin Film Heat Treatment Device 10" FIG. 1 is a side view schematically showing the resin film heat treatment apparatus 10 . The resin film heat treatment device 10 disclosed here includes an endless belt 11 , a belt driving mechanism 12 , a resin film pasting machine 14 , a heating furnace 15 , and a resin film recovery machine 16 .

〈Endless belt 11〉 The endless belt 11 is formed from sheet metal. Examples of the material of the metal sheet constituting the endless belt 11 include aluminum, copper, stainless steel, titanium, iron, chromium steel, nickel, and the like. In addition, it may have a surface roughness suitable for adhering a resin film such as a thermoplastic liquid crystal polymer film. It is preferable that even if the endless belt 11 travels using the belt driving mechanism 12, the surface remains smooth. Furthermore, in the heat treatment of the resin film 51 , the resin film 51 is elongated in accordance with the thermal expansion of the endless belt 11 in the heating furnace 15 . From this point of view, the metal sheet constituting the endless belt 11 can have a moderate thermal expansion coefficient. In this way, the material used for the endless belt 11 can be selected considering corrosion resistance, durability, smoothness, and thermal expansion rate required for heat treatment. The width of the endless belt 11 may be wider than the width of the adhered resin film 51 .

〈Belt drive mechanism 12〉 The belt drive mechanism 12 is a mechanism that causes the endless belt 11 to travel along a predetermined travel path. In this embodiment, the belt drive mechanism 12 includes a plurality of pulleys 12a to 12d around which the endless belt 11 is wound along a predetermined travel path, and a motor 12f that drives one of the pulleys 12b. Here, arrows C1 to C3 in FIG. 1 respectively indicate the forward rotation direction of the endless belt 11 . For example, the conveying speed of the endless belt 11 is adjusted by controlling the rotation speed of the motor 12f. From this point of view, a servo motor can be used for the motor 12f.

The belt drive mechanism 12 may also include a tensioner for maintaining the tension of the endless belt 11 . The structure of the tensioner is not particularly limited, and various structures can be applied. The position where the tensioner is installed in the belt drive mechanism 12 is not particularly limited as long as it is a position that does not interfere with the heat treatment of the resin film 51 . For example, in the area where the endless belt 11 passes through the heating furnace, a moderate tension can be applied to the endless belt 11 . In this case, a tensioner may be provided on the route of the endless belt 11 through the heating furnace. Here, the pulleys 12 a to 12 d of the belt driving mechanism 12 may be of a so-called convex type in which the central portion in the axial direction is appropriately raised. By using a convex pulley, the endless belt 11 can be prevented from deflecting and meandering.

〈Resin film pasting machine 14〉 The resin film pasting machine 14 is arranged on the upstream side of the heating furnace 15 . The resin film pasting machine 14 is a device that supplies the resin film 51 to the endless belt 11 and adheres the resin film 51 to the endless belt 11 . In this embodiment, the resin film pasting machine 14 has a supply part 14a which supplies the resin film 51, and a pasting part 14b which presses the resin film 51 to the endless belt 11.

〈Resin film 51〉 Here, the heat-treated resin film 51 may be a thermoplastic resin. In this embodiment, the heat-treated resin film 51 is a thermoplastic liquid crystal polymer film. The liquid crystal polymer film is not particularly limited to thermoplastic liquid crystal polymer. For example, the liquid crystal polymer film disclosed in Japanese Patent Application Publication No. 2005-103989 can be used. The type, width, and thickness of the resin film 51 can be determined according to various uses and requirements. For example, the width of the thermoplastic liquid crystal polymer film is 200 mm, 300 mm, 500 mm, etc., and the thickness of the thermoplastic liquid crystal polymer film is 10 μm to several tens of μm, etc., and can be appropriately determined according to the application.

<Supply part 14a> In this embodiment, the resin film 51 before heat treatment is prepared in a state of being wound around the roll 51a of the winding shaft 51b. The resin film 51 before heat treatment is previously formed into a vertically elongated strip-shaped film. Such a resin film 51 is, for example, a thermoplastic resin, and is formed by extrusion molding in which the resin is melted and extruded from a die of a predetermined shape. In the supply part 14a, the resin film 51 before heat treatment is drawn out from the roll 51a toward the endless belt 11.

〈Adhesive part 14b〉 The adhesive portion 14b is a portion where the resin film 51 before heat treatment is adhered to the endless belt 11. The sticking part 14b includes a roller 14b1 and a pair of rollers 14b2. In this embodiment, the resin film pasting machine 14 includes a preheating device. Furthermore, the resin film pasting machine 14 includes a mechanism 14 c for overlapping another piece 52 on the endless belt 11 and the resin film 51 .

The roller 14b1 is a roller that guides the resin film 51 before heat treatment drawn out from the roll 51a toward the endless belt 11 so that it may overlap the endless belt 11. The resin film 51 before heat treatment is overlapped on the surface of the endless belt 11 by the roller 14b1. After that, it is fed to a pair of rollers 14b2.

The pair of rollers 14b2 is a member that adheres the resin film 51 before heat treatment to the endless belt 11. In this embodiment, the pair of rollers 14b2 includes preheating means. The pair of rollers 14b2 includes a preheating device, so that the surface of the resin film 51 before heat treatment is melted and adhered to the endless belt 11. The preheating device can, for example, heat the endless belt 11 . The preheating device may be constituted by a heating wire attached to the roller 14b2 on the endless belt 11 side. In addition, when the roller 14b2 on the endless belt 11 side rotates, it may be comprised with the heater which applies heat to the roller 14b2 at the position which does not contact the endless belt 11. In addition, the member for bonding the resin film 51 before heat treatment to the endless belt 11 is in the form of a roller in this embodiment, and continuously presses the endless belt 11 conveying the resin film 51 before heat treatment with low friction.

〈Mechanism 14c that overlaps another piece of 52〉 In addition, if the resin film 51 before heat treatment is directly passed between the pair of rollers 14b2 after being overlapped on the endless belt 11, the resin film 51 may be excessively melted and tightly adhere to the rollers 14b2. On the other hand, in this embodiment, a mechanism 14c for overlapping the other piece 52 is provided. The mechanism 14c for overlapping the other sheet 52 supplies the other sheet 52 onto the resin film 51 after the resin film 51 before heat treatment is overlapped on the endless belt 11 and before passing through the pair of bonding rollers 14b2. Thereby, the sheet 52 is sandwiched between the pair of rollers 14b2 in a state overlapping the resin film 51. Thereby, the resin film 51 before heat treatment does not come into direct contact with the pair of rollers 14b2.

Therefore, the resin film 51 before heat treatment is not easily in close contact with the roller 14b2, and the resin film 51 is not easily damaged. From this point of view, the material used for the sheet 52, the thickness of the sheet 52, and the like can be appropriately selected. For example, a polyimide film can be used as the sheet 52 . In addition, a polyimide film is exemplified as the other sheet 52 of the film as a cushioning material, but the polyimide film may be replaced by a film having required heat resistance. However, when the resin film 51 before heat treatment is overlapped on the endless belt 11 and passes directly between the pair of rollers 14b2 without the phenomenon that the resin film 51 is in close contact with the rollers 14b2, the other piece 52 does not need to be overlapped. Agency 14c.

For example, in the knowledge obtained by the present inventors, when both of the pair of rollers 14b2 are made of metal, the film as the other sheet 52 can be sandwiched between the roller 14b2 and the resin film 51. Thereby, the resin film 51 is laminated|stacked on the endless belt 11 more uniformly. Furthermore, according to the findings obtained by the present inventors, the same result can be obtained by using one roller 14b2 of the pair of rollers 14b2 as a resin roller and the other roller 14b2 as a metal. In this case, the mechanism 14c for overlapping the other piece 52 does not need to be provided.

〈Heating furnace 15〉 The heating furnace 15 is arranged to cover part of the traveling path of the endless belt 11 . In this embodiment, the traveling path between the pulleys 12a to 12b is composed of a long straight line. The heating furnace 15 has a channel-shaped furnace body 15a in this linear portion so as to cover the endless belt 11. In the heating furnace 15, a heater 15b is provided in the furnace body 15a.

The heater 15b may be a ceramic heater or a far-infrared heater, for example. In addition, the heater 15b may include an air blower and blow hot air to the resin film 51 attached to the endless belt 11 and conveyed. In addition, although illustration is omitted, the heating furnace 15 may be provided with a gas supply port and a gas discharge port to adjust the atmosphere of the internal space. For example, the resin film 51 can be heat-treated in an inert gas atmosphere such as nitrogen. In addition, a partition 15c such as a heat insulating wall may be provided inside the heating furnace 15. By providing the partition 15c on the traveling path so as to partition the space inside the heating furnace 15, the temperature and atmosphere can be adjusted for each space divided by the partition. For example, the temperature inside the heating furnace 15 can be increased or decreased in steps along the traveling path. In addition, the temperature conditions inside the heating furnace 15 can be appropriately determined depending on the material and conveying speed of the resin film 51 to be heat-treated.

The endless belt 11 is heated in the heating furnace 15 and stretches according to the thermal expansion coefficient of the material used for the endless belt 11 . When the endless belt 11 stretches, the resin film 51 adhered to the endless belt 11 stretches accordingly. When the resin film 51 is heated and stretched appropriately, the heat resistance of the resin film 51 is improved. From this viewpoint, the thermal expansion coefficient of the endless belt 11 may be larger than the thermal expansion coefficient of the resin film 51 before heat treatment.

For example, in the heat treatment of a liquid crystal polymer film, thermal energy is applied to the liquid crystal polymer film, so that the copolymerized fine structure is changed into a stronger structure, and the heat deformation temperature of the film becomes higher. In addition, by lowering the temperature of the heat treatment step by step, the heat deformation temperature of the liquid crystal polymer film can be increased step by step. The resin film heat treatment apparatus 10 can adjust the conveyance speed of the endless belt 11, the atmosphere and temperature in the heating furnace 15, and can adjust the residence time for each atmosphere, etc. Thereby, the conveyed endless belt 11 and the resin film 51 can be adjusted to a target temperature. Furthermore, in the resin film heat treatment apparatus 10 , in addition to applying thermal energy to the liquid crystal polymer film, the liquid crystal polymer film stretches as the endless belt 11 thermally expands. Thereby, the thermal expansion coefficient of the liquid crystal polymer film can be adjusted.

The liquid crystal polymer film can be used as a flexible electronic circuit board. By the above-mentioned heat treatment, the heat resistance of the liquid crystal polymer film is improved, and the difference between the thermal expansion coefficient of the liquid crystal polymer film and the thermal expansion coefficient of the laminate made of metal foil and the mounting member can be reduced. As a result, the reliability of the electronic circuit is improved. When the resin film 51 to be heat-treated is a liquid crystal polymer film, the material used for the endless belt 11 can be selected from the viewpoint of improving the heat resistance of the liquid crystal polymer film and adjusting the thermal expansion coefficient. From this viewpoint, the endless belt 11 is preferably a stainless steel or aluminum belt, for example.

〈Resin film recycling machine 16〉 The resin film recovery machine 16 is a device that peels off the endless belt 11 on the downstream side of the heating furnace 15 and recovers the resin film 51 . The resin film recovery machine 16 includes a pair of rollers 16a, 16b and a winding roller 16c. The pair of rollers 16 a and 16 b serve as a base point for peeling the resin film 51 from the endless belt 11 . The winding roller 16 c is a roller for winding the resin film 51 peeled off from the endless belt 11 . The resin film 51 is peeled off from the endless belt 11 after passing through the pair of rollers 16a and 16b, and is set in the resin film recovery machine 16 in a state of being wound around the winding roller 16c. In addition, when the endless belt 11 can be peeled off even without the roller 16b on the lower side, the roller 16b may not be needed. The resin film recovery machine 16 rotates the winding roller 16c in conjunction with the rotation of the endless belt 11. The roller 16 c may be provided with a winding shaft 61 for winding the resin film 51 peeled off from the endless belt 11 . The resin film 51 is wound around the winding shaft 61 by rotating the winding roller 16c in conjunction with the movement of the endless belt 11 .

In this manner, according to the resin film heat treatment apparatus 10 disclosed here, the resin film 51 can be heat treated while the endless belt 11 is sequentially circulated through the resin film pasting machine 14, the heating furnace 15, and the resin film recovery machine 16. In this case, the resin film 51 can be continuously heat-treated while circulating the endless belt 11 . You may include the cleaning part 18 in the traveling path of the endless belt 11, and the cleaning part 18 may clean the surface of the endless belt 11 after collecting the resin film 51 and before pasting the resin film 51. The cleaning part 18 may press a cleaner against the surface of the endless belt 11, for example.

As the cleaner, for example, a member such as a non-woven fabric or a sponge may be used. In addition, the cleaner may be a roller-shaped member. As the cleaner, for example, a cleaning roller manufactured by Rayon Industrial Co., Ltd. can be used. Moreover, the inspection part 19 provided with an inspection device may be included in the traveling path of the endless belt 11, and the inspection device may inspect the endless belt 11 after collecting the resin film 51 and before pasting the resin film 51.

For example, the inspection unit 19 can inspect the smoothness of the endless belt 11 . For example, the traveling endless belt 11 may be irradiated with mesh-shaped light and the pattern of light irradiation may be observed to detect abnormalities in the smoothness of the endless belt 11 . When the resin film 51 is made of a material that is difficult to peel off, a coating device 20 may be provided in the traveling path of the endless belt 11 , and the coating device 20 may apply a release agent after the resin film 51 is collected and before the resin film 51 is pasted. .

According to this resin film heat treatment apparatus 10, the endless belt 11 circulates sequentially through the resin film pasting machine 14, the heating furnace 15, and the resin film recovery machine 16. Furthermore, the heat treatment of the resin film 51 is continuously performed on the circulating endless belt 11 . The endless belt has 11 cycles and can be used continuously for a long time. Therefore, the cost of heat treatment of the resin film 51 is kept low.

Therefore, the endless belt 11 can have the required durability. In the heat treatment of the liquid crystal polymer film, the endless belt 11 can be moderately elongated by thermal expansion in the heating furnace 15 . From this point of view, the material used for the endless belt 11 is preferably stainless steel, for example. Among them, stainless steel having a thermal expansion coefficient suitable for the heat treatment of the liquid crystal polymer film can be used. Examples of the stainless steel include SUS304, SUS632J1, etc., but are not particularly limited. Furthermore, the endless belt 11 can be repeatedly used for heat treatment of the resin film 51 . Therefore, it is possible to have a required thickness considering durability. From this point of view, the thickness of the stainless steel used for the endless belt 11 is, for example, about 0.3 mm to 1.0 mm (for example, 0.6 mm, etc.).

The resin film heat treatment apparatus 10 disclosed here has been described above. As described above, the resin film heat treatment apparatus 10 includes the metal endless belt 11 , the belt drive mechanism 12 that makes the endless belt 11 travel along a predetermined travel path, and the heating furnace 15 that covers the travel of the endless belt 11 The path is configured in a local way. The endless belt 11, the belt drive mechanism 12, and the heating furnace 15 constitute a so-called belt furnace.

The heat treatment method of the resin film implemented by the resin film heat treatment apparatus 10 includes step S1 of sticking the resin film 51 to the endless belt 11 , heat treatment step S2 , and step S3 of peeling off the endless belt 11 to recover the resin film 51 .

In the step S1 of attaching the resin film 51 to the endless belt 11 , the resin film 51 is supplied on the upstream side of the heating furnace 15 of the belt furnace so as to overlap the endless belt 11 . Then, the resin film 51 is pressed against the endless belt 11 to adhere the resin film 51 to the endless belt 11 . In the heat treatment step S2, the resin film 51 is elongated and heated in accordance with the thermal expansion of the endless belt 11 in the heating furnace 15. Step S3 of peeling off the endless belt 11 and recovering the resin film 51 is performed on the downstream side of the heating furnace 15 . In this way, in the heat treatment method of the resin film disclosed here, the resin adhered to the endless belt 11 can be recycled while the endless belt 11 is cycled through the steps of adhering the resin film 51 to the endless belt 11 , the heat treatment step, and the recovery step. The film 51 passes through the heating furnace 15 and undergoes heat treatment.

According to this resin film heat treatment method, the heat treatment of the resin film 51 is continuously performed on the circulating endless belt 11 . The endless belt has 11 cycles and can be used continuously for a long time. Therefore, the cost of heat treatment of the resin film 51 is kept low.

As shown in FIG. 1 , the resin film 51 before heat treatment is prepared in a state of being wound around the winding shaft 51 b, and is taken out from the winding shaft 51 b, and is supplied with the resin so as to overlap the endless belt 11 on the upstream side of the heating furnace 15 Film 51. Therefore, the strip-shaped resin film 51 can be continuously heat-treated. In addition, in the recycling step, as shown in FIG. 1 , the resin film 51 may be peeled off from the endless belt 11 and wound around the winding shaft 61 . Thereby, since the heat-treated resin film 51 is wound around the winding shaft 61, the processing of the recovered resin film 51 becomes easy. The heat treatment method of the resin film can be appropriately applied to the heat treatment of the thermoplastic liquid crystal polymer film. In this case, the endless belt 11 may be made of stainless steel as appropriate.

In the step S1 of pasting the resin film 51 to the endless belt 11, as shown in FIG. 51 is pressed against the endless belt 11. Therefore, when the resin film 51 is adhered to the endless belt 11, the resin film 51 is less likely to be damaged. The other piece 52 may be a polyimide film. A polyimide film is preferable, for example, when the resin film 51 to be heat-treated is a liquid crystal polymer film.

In addition, here, another sheet 52 is overlapped on the resin film 51 overlapped on the endless belt 11, but this process does not need to be performed unless otherwise mentioned. For example, when the resin film 51 is not easily damaged even without this treatment, when the damage to the resin film 51 is eliminated by subsequent heat treatment, or when the resin film 51 is attached to the endless belt 11 in step S1, the resin film 51 is not easily damaged. If there is no problem even if the film 51 is slightly damaged, the other piece 52 may not be overlapped on the resin film 51 overlapped with the endless belt 11 .

The resin film 51 is exemplified in a strip-shaped form and is adhered to the endless belt 11 in a roll-to-roll manner. For the resin film 51, for example, a resin film of a predetermined size may be adhered to a belt-shaped base material, pressed and transferred to the endless belt 11, and then introduced into a heating furnace. Thereafter, it may be peeled off from the endless belt 11 just after leaving the heating furnace. In this case, the endless belt 11 may be stopped appropriately and the resin film may be peeled off. In this case, the scraper may be used to continuously peel off the resin film along the endless belt 11 . In addition, the resin film may be transferred to another base material while the endless belt 11 is rotated. In this way, unless otherwise mentioned, the resin film 51 is not limited to the form of a belt and is adhered to the endless belt 11 in a roll-to-roll manner.

The invention disclosed here has been described in detail above, but these are only examples and do not limit the scope of the patent application. In addition, various changes can be made to the disclosure here, and each component and each process mentioned here can be appropriately omitted or appropriately combined as long as no particular problem arises.

The disclosure here includes the following items.

Item 1: A resin film heat treatment device, wherein, The resin film heat treatment device includes: An endless belt formed from sheet metal; a belt drive mechanism that causes the endless belt to travel along a predetermined travel path; A heating furnace configured to cover part of the traveling path of the endless belt; A resin film pasting machine, which supplies a resin film to the endless belt on the upstream side of the heating furnace and adheres the resin film to the endless belt; and A resin film recovery machine is provided on the downstream side of the heating furnace, which peels off the endless belt and recovers the resin film.

Item 2: The resin film heat treatment device according to item 1, wherein, The endless belt is made of stainless steel.

Item 3: The resin film heat treatment device according to item 1 or 2, wherein, The resin film is a liquid crystal polymer film.

Item 4: The resin film heat treatment apparatus according to any one of items 1 to 3, wherein, The resin film pasting machine includes a preheating device for heating the endless belt.

Item 5: The resin film heat treatment apparatus according to any one of items 1 to 4, wherein: The resin film pasting machine includes a mechanism for overlapping another piece on the endless belt and the resin film.

Item 6: The resin film heat treatment device according to item 5, wherein, The other piece is a polyimide film.

Item 7: The resin film heat treatment apparatus according to any one of items 1 to 6, wherein, A cleaner is provided in the traveling path of the endless belt, and the cleaner cleans the surface of the endless belt after recovering the resin film and before pasting the resin film.

Item 8: The resin film heat treatment device according to any one of items 1 to 7, wherein: An inspection device is provided along the traveling path of the endless belt, and the inspection device inspects the endless belt after recovering the resin film and before pasting the resin film.

Item 9: The resin film heat treatment apparatus according to any one of items 1 to 8, wherein: A coating device is provided in the traveling path of the endless belt. After recovering the resin film and before pasting the resin film, the coating device applies a release agent to the endless belt.

Item 10: A heat treatment method for a resin film, wherein: This heat treatment method uses a belt furnace that has: a metal endless belt; a belt drive mechanism that makes the endless belt travel along a predetermined travel path; and a heating furnace that covers the travel of the endless belt. The path is configured in a local way, The heat treatment method includes the following steps: On the upstream side of the heating furnace, a resin film is supplied to overlap the endless belt, the resin film is pressed against the endless belt, and the resin film is adhered to the endless belt; a heat treatment step in which the resin film is elongated and heated in response to thermal expansion of the endless belt in the heating furnace; and On the downstream side of the heating furnace, the resin film is peeled off from the endless belt and recovered, While the endless belt is cycled through the steps of attaching the resin film, the heat treatment step, and the recycling step, the resin film attached to the endless belt is passed through the heating furnace to undergo heat treatment.

Item 11: The heat treatment method according to item 10, wherein, The resin film before heat treatment is prepared in a state of being wound around a winding shaft, is pulled out from the winding shaft, and is supplied to the upstream side of the heating furnace so as to overlap the endless belt.

Item 12: The heat treatment method according to item 10 or 11, wherein, In the step of recovering, the resin film is peeled off from the endless belt and wound around a winding shaft.

Item 13: The heat treatment method according to any one of items 10 to 12, wherein, The resin film is a thermoplastic liquid crystal polymer film.

Item 14: The heat treatment method according to any one of items 10 to 13, wherein, The endless belt is made of stainless steel.

Item 15: The heat treatment method according to any one of items 10 to 14, wherein, In the step of adhering the resin film to the endless belt, another piece is overlapped on the resin film overlapping the endless belt, and the resin film is pressed against the endless belt through the other piece.

Item 16: The heat treatment method according to item 15, wherein, The other piece is a polyimide film.

10:Resin film heat treatment device 11: Ring belt 12:With drive mechanism 12a～12d: pulley 12f: motor 14: Resin film pasting machine 14a: Supply Department 14b: Pasting part 14b1:Roller 14b2:Roller 14c: Overlap another piece of 52 body 15:Heating furnace 15a: Furnace body 15b: heater 15c: Divider 16:Resin film recycling machine 16a, 16b: roller 16c:Roller 18:Cleaning Department 19:Inspection Department 20: Coating device 51:Resin film 51a:Reel 51b: Winding shaft 52:piece 61: Winding shaft C1～C3: arrow S1～S3: steps

FIG. 1 is a side view schematically showing the resin film heat treatment apparatus 10 .

10:Resin film heat treatment device

11: Ring belt

12:With drive mechanism

12a~12d: pulley

12f: motor

14: Resin film pasting machine

14a: Supply Department

14b: Pasting part

14b1:Roller

14b2:Roller

14c: Overlap another piece of 52 body

15:Heating furnace

15a: Furnace body

15b: heater

15c: Divider

16:Resin film recycling machine

16a, 16b: roller

16c:Roller

18:Cleaning Department

19:Inspection Department

20: Coating device

51:Resin film

51a:Reel

51b: Winding shaft

52:piece

61: Winding shaft

C1~C3: arrow

S1~S3: steps

Claims (16)

A resin film heat treatment device, wherein, The resin film heat treatment device includes: An endless belt formed from sheet metal; a belt drive mechanism that causes the endless belt to travel along a predetermined travel path; A heating furnace configured to cover part of the traveling path of the endless belt; A resin film pasting machine, which supplies a resin film to the endless belt on the upstream side of the heating furnace and adheres the resin film to the endless belt; and A resin film recovery machine is provided on the downstream side of the heating furnace, which peels off the endless belt and recovers the resin film. The resin film heat treatment device according to claim 1, wherein, The endless belt is made of stainless steel. The resin film heat treatment device according to claim 1, wherein, The resin film is a liquid crystal polymer film. The resin film heat treatment device according to claim 1, wherein, The resin film pasting machine includes a preheating device for heating the endless belt. The resin film heat treatment device according to claim 1, wherein, The resin film pasting machine includes a mechanism for overlapping another piece on the endless belt and the resin film. The resin film heat treatment device according to claim 5, wherein, The other piece is a polyimide film. The resin film heat treatment device according to claim 1, wherein, A cleaner is provided in the traveling path of the endless belt, and the cleaner cleans the surface of the endless belt after recovering the resin film and before pasting the resin film. The resin film heat treatment device according to claim 1, wherein, An inspection device is provided in the traveling path of the endless belt, and the inspection device inspects the endless belt after recovering the resin film and before pasting the resin film. The resin film heat treatment device according to any one of claims 1 to 8, wherein, A coating device is provided in the traveling path of the endless belt. After recovering the resin film and before pasting the resin film, the coating device applies a release agent to the endless belt. A heat treatment method for a resin film, wherein: This heat treatment method uses a belt furnace that has: a metal endless belt; a belt drive mechanism that makes the endless belt travel along a predetermined travel path; and a heating furnace that covers the travel of the endless belt. The path is configured in a local way, The heat treatment method includes the following steps: The steps of supplying a resin film so as to overlap the endless belt on the upstream side of the heating furnace, pressing the resin film against the endless belt, and adhering the resin film to the endless belt; a heat treatment step in which the resin film is elongated and heated in response to thermal expansion of the endless belt in the heating furnace; and on the downstream side of the heating furnace, peeling off the endless belt and recovering the resin film, While the endless belt is cycled through the steps of attaching the resin film, the heat treatment step, and the recycling step, the resin film attached to the endless belt is passed through the heating furnace to undergo heat treatment. The heat treatment method of a resin film according to claim 10, wherein, The resin film before heat treatment is prepared in a state of being wound around a winding shaft, is pulled out from the winding shaft, and is supplied to the upstream side of the heating furnace so as to overlap the endless belt. The heat treatment method of a resin film according to claim 10, wherein, In the step of recovering, the resin film is peeled off from the endless belt and wound around a winding shaft. The heat treatment method of a resin film according to claim 10, wherein, The resin film is a thermoplastic liquid crystal polymer film. The heat treatment method of a resin film according to claim 10, wherein, The endless belt is made of stainless steel. The heat treatment method of a resin film according to any one of claims 10 to 14, wherein, In the step of adhering the resin film to the endless belt, another piece is overlapped on the resin film overlapping the endless belt, and the resin film is pressed against the endless belt through the other piece. The heat treatment method of a resin film as described in claim 15, wherein, The other piece is a polyimide film.