TW202336442A - Probe apparatus with a track - Google Patents

Abstract

A probe apparatus includes a chuck configured to support a wafer, a track surrounding the chuck, a tester disposed on the track and having a probe. The tester is configured to move around the wafer along a circumferential direction. The probe apparatus also includes a processing unit in communication with the tester and configured to control a movement of the tester.

Description

Probe device with track

This application claims priority to U.S. Patent Application Nos. 17/690,646 and 17/690,133 (that is, the priority date is "March 9, 2022"), the contents of which are incorporated herein by reference in their entirety.

The present disclosure relates to a probe device. In particular, it relates to a probe device including a track.

Wafer probers are used to test the electrical characteristics of devices under test (DUTs) (e.g., integrated circuit (IC) components) at the wafer level to check whether the DUT meets product specifications. To inspect multiple inspection points or portions over the entire surface of a wafer, current wafer probers enable probe movement along the x-, y-, and z-axes relative to the wafer, and enable the wafer relative to The probe moves along the x-axis and y-axis.

The inspection process may include a series of operations that move the probe and wafer to inspect multiple inspection points. Therefore, the entire process can be time-consuming. It is desired to provide a probe device and a wafer inspection method that enable multiple inspection points on the entire surface of the wafer to be inspected from more directions than current wafer detectors.

The above description of "prior art" is only to provide background technology, and does not admit that the above description of "prior art" reveals the subject matter of the present disclosure. It does not constitute prior art of the present disclosure, and any description of the above "prior art" None should form any part of this case.

One aspect of the present disclosure provides a probe device. The probe device includes a chuck configured to support a wafer, a track surrounding the chuck, and a tester disposed on the track and having a probe. The tester is configured to move in a circumferential direction around the wafer. The probe device also includes a processing unit in communication with the tester and configured to control a movement of the tester.

Another aspect of the present disclosure provides a probe device. The probe device includes a chuck configured to support a wafer, a track surrounding the chuck, and a tester disposed on the track and having a probe. The probe device also includes a processing unit in communication with the tester, the processing unit being configured to move the tester circumferentially around the wafer such that the probe moves from a first portion on the wafer to the wafer Part 2 of the above.

Another aspect of the present disclosure provides a wafer inspection method. The wafer inspection method includes: moving a probe of a tester in at least one direction relative to a portion of a wafer, and moving the tester circumferentially around the wafer so that the probe moves from a portion of the wafer to a portion of the wafer. The part moves to the next part on the wafer.

By providing a track around the chuck, the tester can move circumferentially over the wafer via the track. The probe can move relative to the wafer in more directions than current wafer probers, and the probe's flexibility is improved. Therefore, the entire surface of the wafer can be inspected faster.

In addition, since the movement of the tester and/or probe can be controlled by algorithms or computer-executable instructions, human error can be avoided or minimized.

The technical features and advantages of the present disclosure have been summarized rather broadly above so that the detailed description of the present disclosure below may be better understood. Other technical features and advantages that constitute the subject matter of the patentable scope of the present disclosure will be described below. It should be understood by those of ordinary skill in the art that the concepts and specific embodiments disclosed below can be readily used to modify or design other structures or processes to achieve the same purposes of the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs should also understand that such equivalent constructions cannot depart from the spirit and scope of the present disclosure as defined in the appended patent application scope.

Specific language will now be used to describe the embodiments, or examples, of the present disclosure illustrated in the drawings. It should be understood that there is no intention to limit the scope of the present disclosure. Any changes or modifications to the described embodiments, and any further applications of the principles described herein, are deemed to be commonly made by one of ordinary skill in the art to which this disclosure relates. Reference numbers may be repeated throughout the embodiments, but this does not necessarily mean that features of one embodiment apply to another embodiment even if they share the same reference number.

It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers or sections, these elements, elements, regions, layers or sections are not limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the inventive concept.

The terminology used herein is for describing particular embodiments only and is not intended to limit the concepts of the invention. As used herein, the singular forms "a", "an" and "the" also include the plural forms unless the context clearly dictates otherwise. It will be further understood that the terms "comprises" and "includes", when used in this specification, indicate the presence of stated features, integers, steps, operations, elements or components, but do not exclude the presence or addition of one or more other Characteristic, integer, step, operation, element, component, or group thereof.

FIG. 1 is a block diagram illustrating a probe device 1 according to some embodiments of the present disclosure. FIG. 2 is a schematic diagram illustrating a probe device 1 according to some embodiments of the present disclosure.

The probe device 1 can be used to test the electrical characteristics of a device under test (DUT) (eg, an integrated circuit (IC) component) at the wafer level to check whether the DUT meets product specifications.

Referring to FIGS. 1 and 2 , the probe device 1 may include a tester 11 , a chuck 12 , a track 13 , a processing unit 14 , a sensing unit 15 , a memory unit 16 and a communication unit 17 . Wafer 20 may be placed on chuck 12 .

The tester 11 can be arranged on the track 13 . In some embodiments, the tester 11 may include a roller, a wheel, or another object that enables the tester 11 to move on the track 13 . In some embodiments, tester 11 may include one or more sockets 114 and one or more balls 115 rotatably retained in one or more sockets 114 . In some embodiments, tester 11 may include a ball joint or a universal joint. For example, the rolling direction of sphere 115 may be omnidirectional.

Sphere 115 may engage track 13 . Sphere 115 may be mounted on track 13 . The track 13 may include a guide path or a rolling path for rolling the ball 115 and enabling the movement of the tester 11 . For example, tester 11 may be configured to move around wafer 20 on track 13 in a circumferential direction "c". In some embodiments, tester 11 may be configured to move in a circular motion around wafer 20 . For example, tester 11 may be configured to move along the entire circumference of wafer 20 . In some embodiments, tester 11 may be configured to move around wafer 20 in a clockwise direction, as shown in FIG. 2 . However, in other embodiments, tester 11 may be configured to move around wafer 20 in a counterclockwise direction.

Tester 11 may be configured to provide electrical signals to wafer 20 through probes 112 . In some embodiments, probe 112 may be configured relative to wafer 20 along at least one of direction “x”, direction “y”, and direction “z” (or x-axis, y-axis, and z-axis). Move in one direction.

Chuck 12 may be configured to support wafer 20 . In some embodiments, chuck 12 may be configured to move in at least one of direction x and direction y (or x-axis and y-axis) relative to probe 112 in direction x and direction y. Move wafer 20 in at least one direction.

In some embodiments, the movement of the tester 11 (such as the movement along the circumferential direction c), the movement of the probe 112 (such as the movement along the direction x, the movement along the direction y, and the movement along the direction z) and the chuck 12 The movements (such as movement along direction x and movement along direction y) can be independent of each other.

For example, the movement of the tester 11, the movement of the probe 112, and the movement of the chuck 12 may be performed individually or independently. For example, the movement of the tester 11, the movement of the probe 112, and the movement of the chuck 12 can be performed simultaneously or separately as needed. For example, the movement of the tester 11, the movement of the probe 112, and the movement of the chuck 12 can be performed continuously or sequentially as needed. For example, the movement of the tester 11 , the movement of the probe 112 and the movement of the chuck 12 may be controlled by the processing unit 14 respectively.

The track 13 may surround the chuck 12 and the wafer 20 on the chuck 12 . In some embodiments, track 13 may define a rolling path for ball 115 . In some embodiments, track 13 may define a circumferential direction c for movement of tester 11 .

The processing unit 14 may communicate with the tester 11 , the probe 112 , and/or the chuck 12 . The processing unit 14 may control the movement of the tester 11 , the movement of the probe 112 , and/or the movement of the chuck 12 .

In some embodiments, processing unit 14 may control movement of tester 11 , movement of probe 112 , and/or movement of chuck 12 independently, individually, or separately. For example, the processing unit 14 may control the movement of the tester 11 , the movement of the probe 112 , and/or the movement of the chuck 12 simultaneously or continuously as needed.

Processing unit 14 may be configured to perform the wafer inspection process of the present disclosure. For example, processing unit 14 may be configured to move tester 11 , probe 112 , and/or chuck 12 to inspect multiple inspection points or portions across the entire surface of wafer 20 .

Processing unit 14 may be configured to execute algorithms or computer-executable instructions stored in memory, such as memory unit 16 or another medium. For example, the processing unit 14 may be configured to cause a series of operational steps to be executed on the probe device 1 or other programmable device to produce a computer-executed step such that instructions are provided for executing the flowchart (described in accordance with FIG. 4 ). The steps specified in the operation.

In some embodiments, processing unit 14 may include (or may be) a processor (eg, central processing unit (CPU), graphics processing unit (GPU), microprocessing unit (MCU), application specific integrated circuit (ASIC) ) or similar unit) or a controller.

The sensing unit 15 can communicate with the processing unit 14. In some embodiments, the sensing unit 15 can also communicate with the tester 11, the probe 112, and/or the chuck 12. In some embodiments, the sensing unit 15 may be configured to detect whether the tester 11 deviates from the circumferential direction c. For example, the sensing unit 15 may be configured to detect displacement, tilt, rotation, or other movement of the tester 11 . For example, sensing unit 15 may be configured to detect movement of tester 11 relative to track 13 , chuck 12 , and/or wafer 20 .

In some embodiments, the sensing unit 15 may be configured to measure the offset direction “c′” of the tester 11 relative to the circumferential direction c, for example, the circumferential direction c is the predetermined or required direction of movement of the tester 11 . For example, the offset direction c' is the offset between the moving direction of the tester 11 and the circumferential direction c.

For example, the sensing unit 15 may be configured to measure the offset angle of the tester 11 relative to the circumferential direction c. For example, the sensing unit 15 may be configured to measure the offset distance of the tester 11 relative to the circumferential direction c.

In some embodiments, the sensing unit 15 may be configured to transmit the detection result (including the offset direction c′) to the processing unit 14 through the communication unit 17. In some embodiments, the processing unit 14 may be configured to receive the detection result (including the offset direction c'), and then adjust the movement of the tester 11 according to the detection result (including the offset direction c'). For example, the processing unit 14 may be configured to adjust the movement direction, angle, distance of the tester 11 .

In some embodiments, the sensing unit 15 may include a rangefinder, a LiDAR, or other sensors configured to detect environmental information about the tester 11 and output the information.

Memory unit 16 may be configured to store algorithms or computer-executable instructions of processing unit 14 . Memory unit 16 may also be configured to store data, such as the traces of tester 11 , probe 112 , and/or chuck 12 . The memory unit 16 may also be configured to store the detection results of the sensing unit 15 .

In some embodiments, the memory unit 16 may include random access memory (RAM), read only memory (ROM), hard disk, and removable memory device, which may include MS card, memory card, pen drive, External hard drive, etc.

The communication unit 17 may be configured to send/receive data to/from the probe device 1 via wired or wireless technologies such as Wi-Fi, mobile network, Bluetooth or similar technologies. In some embodiments, the communication unit 17 may include a wireless communication transceiver. For example, the communication unit 17 may include a transmitter, a receiver, an antenna, etc.

Although there are seven units in the probe device 1, the disclosure is not limited thereto. For example, in some embodiments, there may be any number of units in the probe device 1 . In addition, in some embodiments, the probe device 1 may also interact with other hardware and/or software components not depicted in FIGS. 1 and 2 . For example, the probe device 1 can interact with one or more external user interface devices, such as a keyboard, a mouse, a display screen, a touch screen, etc.

This disclosure may be embodied as a system, method, computer program, or any combination thereof. Accordingly, the present disclosure may take the form of an entirely hardware embodiment, an entirely software embodiment (including firmware, resident software, microinstructions, etc.), or an embodiment that combines software and hardware aspects, which embodiments may generally be used herein. Called a "unit", "module" or "system". Furthermore, the disclosure may take the form of a computer program embodied in any tangible medium of expression that embodies computer-usable program code.

This disclosure may be described in the general context of algorithms or computer-executable instructions (such as programs) being executed by a computer. Typically, a program includes routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present disclosure may also be implemented in a distributed computing environment, where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, programs may be located on local and remote computer storage media, including memory storage devices.

Figure 3 is a schematic diagram illustrating a portion of a probe device according to some embodiments of the present disclosure. In some embodiments, the tester 11 in FIG. 3 may be part of the probe device 1 in FIG. 2 .

In some embodiments, the tester 11 may include a probe card 111 , one or more probes (or probe pins) 112 , and a camera 113 .

The DUT of wafer 20 may be disposed below the tester 11 . Wafer 20 may be placed on chuck 12 . The chuck 12 may include an adjuster 121 for moving the chuck 12 and enabling movement of the chuck 12 (movement in direction x and direction y as shown in Figure 2).

The tester 11 can provide electrical signals to test the DUT of the wafer 20 . Electrical signals may be delivered to the DUT by contacting one or more pads (or test pads) 201 on the DUT of the wafer 20 with one or more probes 112 . Camera 113 can capture an image of the DUT after probe 112 contacts pad 201.

The number of probes 112 can be adjusted according to requirements and is not limited to this disclosure.

Camera 113 may be configured to capture images of the DUT of wafer 20 . In some embodiments, camera 113 may be configured to capture images of the DUT of wafer 20 during the wafer inspection process of the present disclosure. In some embodiments, camera 113 may be configured to capture images of the DUT of wafer 20 in situ.

In some embodiments, the camera 113 may include one or more lenses (such as objective lens, zoom lens, relay lens, image lens, condenser lens, etc.), one or more light sources (such as low-power light source, external light source, near-infrared light source, etc.). light source, etc.), a charge coupled device (CCD), a complementary metal oxide semiconductor (CMOS) image sensor, or one or more signal converters (such as analog/digital (A/D) converters). In some embodiments, camera 113 may be omitted.

The DUT of wafer 20 may be a wafer that has completed front-end manufacturing. Wafer 20 may include a plurality of DUTs.

In some embodiments of the present disclosure, in addition to the wafer 20 , another DUT may be disposed under the tester 11 to undergo a process of testing electrical characteristics. Examples of such a DUT are a semiconductor package, a conductor substrate, a circuit, a memory cell (such as a dynamic random access memory cell (DRAM cell)), etc. The systems and methods of the present disclosure can be applied to any DUT to test electrical characteristics.

FIG. 4 is a flowchart illustrating a wafer inspection method 40 according to some embodiments of the present disclosure.

Wafer inspection method 40 may be performed by processing unit 14 .

Step or operation S41 is to move the probe in at least one direction relative to a portion of the wafer.

For example, as shown in FIG. 5 , points or portions 20 a , 20 b , 20 c , 20 d , and 20 e on wafer 20 represent predetermined portions to be detected or detected by probe 112 . On portion 20a, probe 112 may be along at least one of direction “x1”, direction “y1”, and direction “z1” (or x-axis, y-axis, and z-axis) relative to portion 20a of wafer 20 direction movement. In some embodiments, movement of probe 112 may be controlled by a processing unit (such as processing unit 14 in Figure 2).

Step or operation S42 is to move the tester circumferentially around the wafer so that the probe moves from one part of the wafer to the next part of the wafer.

For example, as shown in Figure 5, a tester (tester 11 in Figure 2) moves circumferentially around wafer 20 (along track 13 in Figure 2). Therefore, the probe 112 of the tester moves in the circumferential direction c1 from the portion 20a to the portion 20b. In some embodiments, the movement of the tester may be controlled by a processing unit (such as processing unit 14 in Figure 2).

Step or operation S43 is to detect whether the tester deviates from the circumferential direction.

For example, a sensing unit (such as sensing unit 15 in FIG. 2 ) may be configured to detect displacement, tilt, rotation, or other movement of tester 11 . For example, the sensing unit may be configured to detect movement of the tester 11 relative to the track 13 , the chuck 12 , and/or the wafer 20 shown in FIG. 2 .

If it is detected that the tester deviates from the circumferential direction (eg, circumferential direction c1), the wafer inspection method 40 proceeds to step or operation S44 to measure an offset direction relative to the circumferential direction.

For example, as shown in FIG. 5 , a sensing unit (such as the sensing unit 15 in FIG. 2 ) may be configured to measure the deflection direction c1 ′ of the tester 11 relative to the circumferential direction c1 .

Then, the wafer inspection method 40 proceeds to step or operation S45 to adjust the movement of the tester according to the offset direction.

For example, the sensing unit may be configured to transmit the detection result (including the offset direction c1 ′) to the processing unit 14 through a communication unit (such as the communication unit 17 in FIG. 2 ). The processing unit 14 may be configured to receive the detection result (including the offset direction c1'), and then adjust the movement of the tester 11 according to the detection result (including the offset direction c1'). For example, the processing unit 14 may be configured to adjust the movement direction, angle, distance of the tester 11 .

If it is detected that the tester deviates from the circumferential direction (eg, circumferential direction c1), the wafer inspection method 40 proceeds to step or operation S46, and repeats S41 and S42 until all predetermined portions on the wafer are inspected.

For example, as shown in Figure 5, on portion 20b, probe 112 may be along at least one of direction "x2", direction "y2", and direction "z2" (or x-axis, y-axis, and z-axis). The direction moves relative to portion 20b of wafer 20. The tester (tester 11 in FIG. 2 ) then moves circumferentially around the wafer 20 (along the track 13 in FIG. 2 ). Therefore, the probe 112 of the tester moves in the circumferential direction c2 from the portion 20b to the portion 20c.

On portion 20c, probe 112 may be relative to the portion of wafer 20 along at least one of direction “x3”, direction “y3”, and direction “z3” (or x-axis, y-axis, and z-axis). 20c mobile. The tester (tester 11 in FIG. 2 ) then moves circumferentially around the wafer 20 (along the track 13 in FIG. 2 ). Therefore, the probe 112 of the tester moves in the circumferential direction c3 from the portion 20c to the portion 20d.

At portion 20d, probe 112 may be oriented relative to portion 20d of wafer 20 in at least one of direction “x4”, direction “y4”, and direction “z4” (or x-axis, y-axis, and z-axis) Move.

In some embodiments, probe 112 may be configured to move in a clockwise direction around wafer 20 . Parts 20a, 20b, 20c and 20d are sequentially inspected or tested. In some other embodiments, probe 112 may be configured to move in a counterclockwise direction around wafer 20 . Parts 20d, 20c, 20b and 20a are sequentially inspected or tested.

In some embodiments, portions 20a, 20b, 20c, and 20d may be inspected or tested at intervals. For example, the order of the parts can differ from the order shown above and can be adjusted as needed.

There may be any number of predetermined portions on wafer 20 . After all predetermined portions on the wafer 20 are inspected, the wafer inspection method 40 proceeds to step or operation S47 to move the tester in the radial direction to move the probe to the central portion of the wafer.

For example, as shown in FIG. 5 , a tester (tester 11 in FIG. 2 ) moves in the radial direction r of the wafer 20 . Accordingly, the probe 112 of the tester moves in the radial direction r from the portion 20d to the central portion 20e.

On the central portion 20e, the probe 112 may be positioned along the direction “x5”, the direction “y5”, and the direction “z5” (or the x-axis, y-axis, and z-axis) relative to the central portion 20e of the wafer 20 Move in at least one direction.

In some embodiments, central portion 20e may be inspected or tested between any two portions 20a, 20b, 20c, and 20d.

According to some embodiments of the present disclosure, a track 13 is provided around the chuck 12 , and the tester 11 can move around the wafer 20 along the circumferential direction (eg, circumferential directions c, c1, c2, and c3) through the track 13. The probe 112 can move relative to the wafer 20 in more directions than current wafer probers, and the flexibility of the probe 112 is improved. Therefore, the entire surface of wafer 20 can be inspected more quickly.

In addition, since the movement of the tester 11 and/or the probe 112 can be controlled by algorithms or computer-executable instructions, human errors can be avoided or minimized.

Any reference to a method in the specification shall apply mutatis mutandis to systems capable of executing the method. Any reference in the specification to a system shall apply mutatis mutandis to methods executable by that system.

FIG. 6 is a block diagram illustrating the processing unit 14 of the probe device 1 according to some embodiments of the present disclosure.

The processing unit 14 may include a processor 140, a network interface (I/F) 141, an input/output (I/O) device 142, a storage device 143, and a memory communicatively coupled through a bus 147 or other interconnection communication mechanism. 144.

In some embodiments, one or more operations or functions of probe device 1 are implemented by processor 140, which is programmed to perform such operations and functions. One or more of I/F 141 , I/O device 142 , storage device 143 , and memory 144 are operable to receive instructions, data, design rules, netlists, layouts, models, and other parameters for use by processor 140 handle.

I/F 141 may be coupled to bus 147 to connect processor 140 to the Internet.

The I/O device 42 may include an input device, an output device, or a combined input/output device for enabling a user to interact with the probe device 1 . Input devices include, for example, a keyboard, keypad, mouse, trackball, trackpad, or cursor direction keys for communicating information and commands to the processor 140 . Output components include, for example, displays, printers, speech synthesizers, etc., used to deliver information to users.

A storage device 143, such as a magnetic disk or an optical disk, may be coupled to the bus 147 for storing data or instructions.

The memory 144 may include RAM, ROM, hard disk, and removable memory device, which may include MS card, memory card, pen drive, external hard disk, etc. Memory 144 may include user space 145 and kernel 146. Memory 144 may be coupled to bus 147 to store data or instructions for execution by processor 140 . In some embodiments, memory 144 may also be used to store temporary variables or other intermediate information during the execution of instructions executed by processor 140 .

One aspect of the present disclosure provides a probe device. The probe device includes a chuck configured to support a wafer, a track surrounding the chuck, and a tester disposed on the track and having a probe. The tester is configured to move in a circumferential direction around the wafer. The probe device also includes a processing unit in communication with the tester and configured to control a movement of the tester.

Another aspect of the present disclosure provides a probe device. The probe device includes a chuck configured to support a wafer, a track surrounding the chuck, and a tester disposed on the track and having a probe. The probe device also includes a processing unit in communication with the tester, the processing unit being configured to move the tester circumferentially around the wafer such that the probe moves from a first portion on the wafer to the wafer Part 2 of the above.

Another aspect of the present disclosure provides a wafer inspection method. The wafer inspection method includes: moving a probe of a tester in at least one direction relative to a portion of a wafer, and moving the tester circumferentially around the wafer so that the probe moves from a portion of the wafer to a portion of the wafer. The part moves to the next part on the wafer.

By providing a track around the chuck, the tester can move circumferentially over the wafer via the track. The probe can move relative to the wafer in more directions than current wafer probers, and the probe's flexibility is improved. Therefore, the entire surface of the wafer can be inspected faster.

In addition, since the movement of the tester and/or probe can be controlled by algorithms or computer-executable instructions, human error can be avoided or minimized.

Although the disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and substitutions can be made without departing from the spirit and scope of the disclosure as defined by the claimed claims. For example, many of the processes described above may be implemented in different ways and may be substituted for many of the processes described above with other processes or combinations thereof.

Furthermore, the scope of the present application is not limited to the specific embodiments of the process, machinery, manufacture, material compositions, means, methods and steps described in the specification. Those skilled in the art will understand from the disclosure of this disclosure that existing or future developed processes, machines, manufacturing, etc. can be used in accordance with the disclosure to have the same function or achieve substantially the same results as the corresponding embodiments described herein. A material composition, means, method, or step. Accordingly, such processes, machines, manufacturing, material compositions, means, methods, or steps are included in the patentable scope of this application.

1: Probe device 11:Tester 12:Chuck 13: Orbit 14: Processing unit 15: Induction unit 16:Memory unit 17: Communication unit 20:wafer 20a: Section 20b: Part 20c:Part 20d: part 20e:Part 20e:Central part 40:Wafer inspection method 111: Probe card 112:Probe 113:Camera 114:Slot 115: Sphere 121:Regulator 140: Processor 141:Network interface (I/F) 142: Input/output (I/O) device 143:Storage device 144:Memory 145:User space 146: Kernel 147:Bus 201: Mat c: Circumferential direction c': offset direction c1: Circumferential direction c2: Circumferential direction c3: Circumferential direction r: radial direction S41: Steps (operations) S42: Steps (operations) S43: Steps (operations) S44: Steps (operations) S45: Steps (operations) S46: Steps (operations) S47: Steps (operations) x: direction x1: direction x2: direction x3: direction x4: direction x5: direction y: direction y1: direction y2: direction y3: direction y4: direction y5: direction z: direction z1: direction z2: direction z3: direction z4: direction z5: direction

The disclosure content of this application can be more fully understood by referring to the embodiments and the patent scope combined with the drawings. The same element symbols in the drawings refer to the same elements. FIG. 1 is a block diagram illustrating a probe device according to some embodiments of the present disclosure. FIG. 2 is a schematic diagram illustrating a probe device according to some embodiments of the present disclosure. Figure 3 is a schematic diagram illustrating a portion of a probe device according to some embodiments of the present disclosure. FIG. 4 is a flow chart illustrating a wafer inspection method according to some embodiments of the present disclosure. FIG. 5 is a schematic diagram illustrating a wafer according to some embodiments of the present disclosure. FIG. 6 is a block diagram illustrating a processing unit of a probe device according to some embodiments of the present disclosure.

1: Probe device

11:Tester

12:Chuck

13: Orbit

14: Processing unit

15: Induction unit

16:Memory unit

17: Communication unit

20:wafer

112:Probe

114:Slot

115: Sphere

c: Circumferential direction

c': offset direction

x: direction

y: direction

z: direction

Claims (12)

A probe device including: a chuck configured to support a wafer; a track surrounding the chuck; a tester disposed on the track and having a probe, wherein the tester is configured to move around the wafer in a circumferential direction; and A processing unit communicates with the tester and is configured to control a movement of the tester. The probe device of claim 1, wherein the probe is configured to move in at least one direction relative to the wafer. The probe device of claim 2, wherein the processing unit is configured to control a movement of the probe. The probe device of claim 3, wherein the movement of the probe is independent of the movement of the tester. The probe device of claim 4, wherein the processing unit is configured to move the probe and the tester simultaneously. The probe device of claim 4, wherein the processing unit is configured to continuously move the probe and the tester. The probe device of claim 1, wherein the chuck is configured to move in at least one direction to move the wafer relative to the probe. The probe device of claim 7, wherein the processing unit is configured to control a movement of the chuck. The probe device of claim 1, wherein the tester includes a slot and a sphere rotatably held by the slot. The probe device as described in claim 1 further includes: A sensing unit is configured to detect whether the tester deviates from the circumferential direction. The probe device of claim 10, wherein the sensing unit is further configured to measure a deflection direction of the tester relative to the circumferential direction. The probe device of claim 11, wherein the processing unit is further configured to adjust the movement of the tester according to the offset direction.