TW202323741A - cooling system - Google Patents

Abstract

The cooling system S1 according to one embodiment of the present invention comprises: a refrigeration cycle device 10 that circulates a natural refrigerant; a first cooling liquid circulation device 20 that circulates first cooling liquid cooled by the natural refrigerant; and a second cooling liquid flow device 30 that allows passage of second cooling liquid cooled by the first cooling liquid circulated by the first cooling liquid circulation device 20.

Description

cooling system

Embodiments of the present invention relate to a cooling system, in which a coolant is cooled by a refrigerant circulated by a refrigerating cycle device.

Recently, a refrigeration cycle apparatus using a natural refrigerant has attracted attention. Compared with common chlorofluorocarbon refrigerants, the ozone layer destruction coefficient and global warming coefficient of natural refrigerants are very low. Therefore, natural refrigerants are very useful from the viewpoint of environmental protection.

Examples of natural refrigerants include: ammonia, carbon dioxide, air, oxygen, nitrogen, and the like. Among them, carbon dioxide, air, oxygen, and nitrogen have extremely low boiling points, and can be cooled in the ultra-low temperature range.

As a refrigeration cycle apparatus using a natural refrigerant, an air refrigeration cycle apparatus using air is known (for example, WO2018/070893A1). Such an air refrigeration cycle device has already been used in large-scale freezers and the like.

In addition, the air refrigerated circulation device has recently attracted attention for its application to storage banks for novel coronavirus vaccines that require ultra-low temperature storage.

The indirect expansion cooling system generally uses the refrigerant circulated by the refrigeration cycle device to cool the coolant circulated by the coolant circulation device, and uses the cooled coolant to cool the temperature-controlled object. For example, the above-mentioned air refrigeration cycle device can also be used in an indirect expansion cooling system.

However, as mentioned above, the boiling point of the air used as the refrigerant is extremely low. For example, depending on the setting of the cooling temperature during expansion such as -70° C. or below, the type of cooling liquid circulated by the cooling liquid circulation device may be limited.

In some cases, because of the above limitations, it may be mandatory to select an undesirable type of coolant for a product or manufacturing equipment that is to be temperature controlled. The fact that the degree of freedom of choice of the cooling liquid is limited is one of the reasons why the adoption of the cooling system using the air refrigeration cycle device is delayed. For example, coolants that can be used in the ultra-low temperature range of around -100°C contain silicon oil. However, siloxanes in silicone oil may cause breakage of electronic parts. Therefore, for example, semiconductor manufacturing equipment will avoid the use of cooling machines that use silicone oil.

Moreover, natural refrigerants have concerns about toxicity, flammability, and high pressure. Due to such concerns, adoption of a refrigerating cycle device using a natural refrigerant and a cooling system using the refrigerating cycle device may be delayed.

Moreover, the cooling temperature of the extremely low-temperature refrigerant is sometimes over-designed for the temperature-controlled object. In this case, the cooled coolant can also be heated by a heater to adjust to the required temperature range. However, such adjustment is unnecessary from the viewpoint of suppressing energy consumption.

In view of the above circumstances, the object of the present invention is to provide a cooling system that can effectively cool the temperature-controlled object through the cooling liquid cooled by the natural refrigerant circulated by the refrigeration cycle device. [Means to solve the problem]

A cooling system according to an embodiment of the present invention includes: a refrigerating cycle device that circulates a natural refrigerant, a first cooling liquid circulation device that circulates a first cooling liquid cooled by the natural refrigerant, and a first cooling liquid circulation device that circulates the first cooling liquid cooled by the above-mentioned natural refrigerant. 1. A second cooling liquid circulation device through which the second cooling liquid cooled by the first cooling liquid circulated by the cooling liquid circulation device circulates.

In this cooling system, by deliberately installing the first cooling liquid circulation device between the refrigeration cycle device and the second cooling liquid circulation device, compared with the case where the second cooling liquid is directly cooled by the natural refrigerant, the natural refrigerant has less effect on the second cooling liquid. 2 The cooling efficiency of the coolant is intentionally reduced. Thereby, when the second cooling liquid is directly cooled by the natural refrigerant, the restriction on the degree of freedom of selection of the type of the second cooling liquid can be relaxed. Therefore, while the first coolant is selected from the viewpoint of direct cooling by the natural refrigerant, the temperature-controlled object can be cooled by the second coolant selected from the viewpoint of, for example, a temperature-controlled object. Moreover, compared with the case where the second coolant is directly cooled by the natural coolant, the cooling efficiency of the second coolant by the natural coolant is intentionally lowered, so that the temperature range of the second coolant can be adjusted to the desired level without using a heater. temperature range. Thereby, energy consumption can be suppressed and the temperature-controlled object can be cooled in a required temperature range. In addition, the physical distance between the refrigeration cycle device and the second coolant circulation device can be increased. Furthermore, the exposure of the natural refrigerant to the second cooling liquid can be avoided, and the natural refrigerant can be prevented from flowing into the temperature-controlled object side. Thereby, even if there are concerns about the toxicity, flammability, and high pressure of the natural refrigerant, the temperature-controlled object can be cooled while avoiding the influence of the concerns. Therefore, the temperature-controlled object can be effectively cooled by the cooling liquid cooled by the natural refrigerant circulated by the refrigerating cycle device.

The type of the first cooling liquid may be different from the type of the second cooling liquid. In this case, for example, the cooling liquid that needs to be cooled by the natural refrigerant without hindering the operation can be selected as the first cooling liquid, and the cooling liquid that needs to be different from the first cooling liquid for the temperature controlled object can be selected as the second cooling liquid, Thereby, the temperature-controlled object can be effectively cooled.

The above-mentioned refrigeration cycle device and the above-mentioned first cooling liquid circulation device are connected by a first heat exchanger, and the above-mentioned first cooling liquid is cooled by the above-mentioned natural refrigerant in the above-mentioned first heat exchanger, and the above-mentioned first cooling liquid circulation device and The second coolant circulating device is connected by a second heat exchanger, and the second coolant is cooled by the first coolant in the second heat exchanger, and the first coolant circulation device is: Consists of a first flow path, a second flow path, and a pump; the first flow path is used to connect to: the discharge port of the first heat exchanger that discharges the first cooling liquid, and is used to receive the first cooling fluid. The receiving port of the above-mentioned second heat exchanger for cooling liquid; the above-mentioned second flow path is used to connect: the discharge port of the above-mentioned second heat exchanger for discharging the above-mentioned first cooling liquid, and the outlet for receiving the above-mentioned first cooling liquid The receiving port of the above-mentioned first heat exchanger; the above-mentioned pump is used to generate the driving force for circulating the above-mentioned first cooling liquid. In this case, the very simple first coolant circulation device can reduce the manufacturing cost and effectively cool the temperature-controlled object.

It is also possible to connect the above-mentioned first flow path and the above-mentioned second flow path with an internal heat exchanger. The first cooling liquid received by the receiving port exchanges heat with the first cooling liquid discharged from the discharge port of the second heat exchanger and not yet received by the receiving port of the first heat exchanger. In this case, by suppressing the temperature difference between the natural refrigerant in the first heat exchanger and the first coolant, the load on the first heat exchanger can be reduced, enabling highly reliable operation.

The first cooling liquid circulation device further includes a bypass flow path connecting the first flow path and the second flow path and allowing the first cooling liquid to flow. In this case, by suppressing the temperature difference between the first coolant and the second coolant in the second heat exchanger, the load on the second heat exchanger can be reduced, enabling highly reliable operation. Compared with the case where the second cooling liquid is directly cooled by the natural cooling medium, it is easier to reduce the cooling efficiency of the second cooling liquid by the natural cooling medium. Thereby, the degree of freedom of selection of the type of the second coolant can be increased.

The first coolant circulation device further includes: a branch flow path branched from the second flow path and connected to the second flow path at a position upstream of the branch position; switch. In this case, cooling can be performed in a temperature range higher than that of the second heat exchanger by the third heat exchanger. In this way, the application mode and application range of the cooling system can be expanded.

The third heat exchanger is connected to a third coolant circulation device for circulating a third coolant, and the third coolant is cooled by the first coolant in the third heat exchanger. The cooling temperature of natural refrigerants with extremely low boiling points such as air, carbon dioxide, and oxygen may be excessively designed for temperature control objects. In this case, in this structure, by allocating the refrigerating capacity between the second heat exchanger and the third heat exchanger, overcooling can be avoided and the refrigerating capacity can be effectively used.

The second coolant circulation device is connected to the third heat exchanger, and the second coolant is cooled in the second heat exchanger after being cooled in the third heat exchanger. In this case, by gradually cooling the second coolant through the third heat exchanger and the second heat exchanger, and suppressing the temperature difference between the first coolant and the second coolant in the second heat exchanger, it is possible to The load on the second heat exchanger is reduced, enabling highly reliable operation.

The first coolant is silicon oil, and the second coolant is ether liquid.

The above-mentioned refrigerating cycle device may be an air refrigerating cycle device.

According to the present invention, the temperature-controlled object can be effectively cooled by the cooling liquid cooled by the natural refrigerant circulated by the refrigerating cycle device.

Hereinafter, each embodiment will be described in detail with reference to the drawings.

<First Embodiment> FIG. 1 is a diagram schematically showing a cooling system S1 according to the first embodiment. The cooling system S1 shown in FIG. 1 is provided with: a refrigeration cycle device 10 for circulating a natural refrigerant, a first cooling liquid circulation device 20 for circulating a first cooling liquid, and a second cooling liquid circulation device for circulating a second cooling liquid. device 30.

The refrigeration cycle device 10 and the first coolant cycle device 20 are connected by a first heat exchanger 40 . The first coolant circulation device 20 and the second coolant circulation device 30 are connected by a second heat exchanger 50 .

The natural refrigerant circulated in the refrigeration cycle device 10 cools the first coolant circulated in the first coolant cycle device 20 in the first heat exchanger 40 . The first coolant circulated by the first coolant circulation device 20 cools the second coolant circulated by the second coolant circulation device 30 in the second heat exchanger 50 .

After the second coolant is cooled by the first coolant in the second heat exchanger 50 , it is sent to a temperature-controlled object not shown. The second coolant returns to the second heat exchanger 50 after cooling the temperature-controlled object.

The temperature-controlled object may be a wafer, for example. In this case, the second coolant may pass through the stage on which the wafer is placed and cool the wafer through the stage. The second coolant can also return to the second heat exchanger 50 after passing through the platform. However, the temperature-controlled object is not particularly limited, for example, it may be a space in a chamber.

The refrigerating cycle apparatus 10 circulates air which is a natural refrigerant in this embodiment. That is, the refrigeration cycle device 10 is an air refrigerant cycle device.

In the refrigeration cycle device 10 , a compressor 11 , a cooler 12 , a recovery heat exchanger 13 , and an expander 14 are connected by a refrigerant circulation passage 15 so that air circulates in this order. After the air is compressed by the compressor 11 , it is gradually cooled by the cooler 12 and the recovery heat exchanger 13 , and then flows into the expander 14 . The air is then expanded by the expander 14 and exits the expander 14 . The refrigeration cycle device 10 cools the air expanded by the expander 14 to below -70°C, specifically -70°C to -110°C, and then flows it into the first heat exchanger 40 . However, the refrigerating cycle apparatus 10 can cool down the air to the range of -10°C or higher and -70°C or lower.

The above-mentioned first heat exchanger 40 is connected to the downstream side of the expander 14 of the refrigerant circulation passage 15 , and the air expanded by the expander 14 and cooled down flows into the first heat exchanger 40 . After cooling the first coolant in the first heat exchanger 40 , the air flows out of the first heat exchanger 40 to the compressor 11 .

The air flowing out of the first heat exchanger 40 exchanges heat with the air flowing out of the cooler 12 in the recovery heat exchanger 13 before returning to the compressor 11 . Accordingly, the air that has not flowed into the expander 14 is gradually cooled in the cooler 12 and the recovery heat exchanger 13 . The cooler 12 may also cool the high-pressure air flowing out from the compressor 11 with, for example, cooling water. The cooler 12 may be a liquid-cooled cooler or an air-cooled cooler, and is not particularly limited.

The compressor 11 and the expander 14 are connected to a drive shaft 16A of a common motor 16 . Accordingly, the compressor 11 and the expander 14 are rotated in conjunction with the rotation of the drive shaft 16A.

The portion of the refrigerant circulation passage 15 downstream of the compressor 11 and upstream of the cooler 12 , and the portion of the refrigerant circulation passage 15 downstream of the expander 14 and upstream of the position connected to the recovery heat exchanger 13 The part is connected with a thermal bypass flow path 17 for circulating air, and a regulating valve 18 for controlling the flow of air is provided on the thermal bypass flow path 17 . Thereby, by opening the regulator valve 18 , the high-temperature air can pass through the heat bypass flow path 17 and mix with the air flowing out from the first heat exchanger 40 . By this operation, freezing of the air on the downstream side of the first heat exchanger 40 can be suppressed.

In this embodiment, although the refrigeration cycle device 10 is an air refrigerant cycle device, it may be another type of device. The refrigerating cycle device 10 may be a refrigerating cycle device using carbon dioxide, oxygen, nitrogen, butane, propane, isobutane, propylene, or the like as a natural refrigerant.

The first coolant circulation device 20 has a first flow path 21 , a second flow path 22 , and a first coolant pump 23 . The first flow path 21 is used to connect the discharge port of the first heat exchanger 40 for discharging the first cooling liquid, and the receiving port of the second heat exchanger 50 for receiving the first cooling liquid. The second flow path 22 is used to connect the discharge port of the second heat exchanger 50 for discharging the first cooling liquid, and the receiving port of the first heat exchanger 40 for receiving the first cooling liquid.

The first coolant pump 23 is used to generate driving force to circulate the first coolant. Although the first coolant pump 23 is provided on the second flow path 22, its arrangement position is not particularly limited. After the first coolant is discharged from the first coolant pump 23 , it flows into the first heat exchanger 40 and is cooled by low-temperature air. Then, the first coolant flowing out of the first heat exchanger 40 flows into the second heat exchanger 50 to cool the second coolant. Then, the second coolant flowing out of the second heat exchanger 50 is circulated in the first heat exchanger 40 via the first coolant pump 23 .

In this embodiment, the temperature of the air expanded by the expander 14 is lowered to -70° C. or lower, specifically, to -70° C. to -110° C., and then flows into the first heat exchanger 40 as described above. Therefore, the first coolant is not particularly limited as long as it is a heat medium that does not cause problems even if it is cooled in the temperature range of -70°C to -110°C. In this embodiment, silicone oil is used as an example. By mixing silicone oil with hydrocarbon additives, the operating temperature range can be reduced to -120°C.

The second coolant circulation device 30 has a supply-side flow path 31 , a return-side flow path 32 , and a second coolant pump 33 . The supply-side channel 31 is connected to a discharge port of the second heat exchanger 50 for discharging the second cooling liquid, and sends the second cooling liquid to the temperature-controlled object side. The return side channel 32 is connected to the receiving port of the second heat exchanger 50 for receiving the second coolant, and sends the second coolant that has cooled the temperature-controlled object to the second heat exchanger 50 .

The second coolant pump 33 is used to generate driving force to circulate the second coolant. Although the second coolant pump 33 is provided on the return-side flow path 32, its arrangement position is not particularly limited. After the second coolant is discharged from the second coolant pump 33 , it flows into the second heat exchanger 50 and is cooled by the first coolant. Then, the second coolant flowing out of the second heat exchanger 50 flows into the second heat exchanger 50 via the second coolant pump 33 after cooling the temperature-controlled object.

In the present embodiment, the type of the second cooling liquid is different from the type of the first cooling liquid. Specifically, an ether liquid is used as the second coolant. For example, the freezing point of the first coolant is lower than the freezing point of the second coolant. For example, the dynamic viscosity of the first coolant is lower than that of the second coolant. For example, the dynamic viscosity of the first cooling liquid at -70° C. or lower is lower than that of the second cooling liquid.

As mentioned above, the first coolant is obtained by cooling in the temperature range of -70°C to -110°C. In this case, the second cooling liquid is also cooled by the first cooling liquid in a temperature range of -70°C to -110°C or a temperature range close to this temperature range. However, the second coolant is not directly cooled by the low-temperature air at -70°C~-110°C. Therefore, the second coolant is allowed to have milder low-temperature characteristics than the low-temperature characteristics required for the first coolant directly cooled by low-temperature air. As a result, in the present embodiment, as a candidate for the second cooling liquid, a heat medium other than silicone oil having excellent low-temperature characteristics can be selected, and an ether liquid is selected as the second cooling liquid. The second coolant may be a fluorine-based liquid, a fluoroether-based liquid, an aqueous glycol solution, or the like.

The second cooling liquid may be a liquid containing hydrofluoroether or a liquid containing perfluoropolyether. The second coolant is not particularly limited. For example, the second coolant can also be silicon oil. However, silicone oils can sometimes be avoided due to possible silicone problems. On the other hand, ether or fluorine based fluids are generally chemically inert and do not present the problem of siloxane formation. By using ether or fluorine liquid as the second coolant, the application range of the cooling system S1 capable of ultra-low temperature cooling can be expanded.

The cooling system S1 of the present embodiment described above includes: a refrigeration cycle device 10 that circulates a natural refrigerant; a first cooling liquid circulation device 20 that circulates a first cooling liquid cooled by a natural refrigerant; The second coolant circulation device 30 through which the second coolant cooled by the first coolant circulated by the first coolant circulation device 20 flows.

In this cooling system S1, by deliberately disposing the first cooling liquid circulation device 20 between the refrigeration cycle device 10 and the second cooling liquid circulating device 30, compared with the case where the second cooling liquid is directly cooled by the natural refrigerant, The cooling efficiency of the natural refrigerant to the second coolant is intentionally lowered. Thereby, when the second cooling liquid is directly cooled by the natural refrigerant, the restriction on the degree of freedom of selection of the type of the second cooling liquid can be relaxed. Therefore, while selecting the type of the first cooling liquid from the viewpoint of direct cooling by the natural refrigerant, the temperature-controlled object can be cooled by the second cooling liquid selected from the viewpoint of, for example, the desired temperature-controlled object. In this embodiment, silicon oil is specifically selected as the first cooling liquid. On the other hand, ether liquid is selected as the second cooling liquid. Although its characteristics at low temperatures may not be as good as silicon oil, it is generally better for temperature-controlled objects. ideal.

Moreover, compared with the case where the second coolant is directly cooled by the natural coolant, the cooling efficiency of the second coolant by the natural coolant is intentionally lowered, so that the temperature range of the second coolant can be adjusted to the desired level without using a heater. temperature range. Thereby, energy consumption can be suppressed and the temperature-controlled object can be cooled in a required temperature range. That is to say, most natural refrigerants have a very low boiling point, and the refrigeration capacity output by natural refrigerants is often overdesigned for temperature-controlled objects. The temperature of the second coolant is adapted to the temperature range required by the temperature-controlled object.

In addition, the physical distance between the refrigeration cycle device 10 and the second coolant circulation device 30 can be increased. Furthermore, the exposure of the natural refrigerant to the second cooling liquid can be avoided, and the natural refrigerant can be prevented from flowing into the temperature-controlled object side. Thereby, even if there are concerns about the toxicity, flammability, and high pressure of the natural refrigerant, the temperature-controlled object can be cooled while avoiding the influence of the concerns.

With the cooling system S1 of the present embodiment, the temperature-controlled object can be effectively cooled by the cooling liquid cooled by the natural refrigerant circulated in the refrigeration cycle device 10 .

The first coolant circulation device 20 of this embodiment has: a first flow path 21, a second flow path 22, and a first coolant pump 23; in detail, only the first flow path 21 and the second flow path 22 and the first coolant pump 23. Thereby, the manufacturing cost can be reduced and the temperature-controlled object can be effectively cooled by the very simple first cooling liquid circulation device 20 .

<Second Embodiment> The second embodiment will be described below. Among the constituent parts of the present embodiment, the same structures as those of the first embodiment are denoted by the same reference numerals to omit repeated explanations. FIG. 2 is a diagram schematically showing a cooling system S2 according to the second embodiment. In the cooling system S2 shown in FIG. 2 , the structure of the first coolant circulation device 20 is different from that of the first embodiment.

Specifically, the first flow path 21 and the second flow path 22 are connected by an internal heat exchanger 24 . In the internal heat exchanger 24, the first coolant discharged from the discharge port of the first heat exchanger 40 and not yet received by the receiving port of the second heat exchanger 50 is discharged from the discharge port of the second heat exchanger 50. And the first coolant that has not been received by the receiving port of the first heat exchanger 40 performs heat exchange.

In the second embodiment described above, by suppressing the temperature difference between the natural refrigerant in the first heat exchanger 40 and the first coolant, the load on the first heat exchanger 40 can be reduced, and high reliability can be achieved. run.

<Third Embodiment> The following describes the third embodiment. Among the components of the present embodiment, the same structures as those of the first and second embodiments are denoted by the same reference numerals to omit overlapping descriptions. FIG. 3 is a diagram schematically showing a cooling system S3 according to a third embodiment. In the cooling system S3 shown in FIG. 3 , the structure of the first coolant circulation device 20 is different from that of the first and second embodiments.

Specifically, the first cooling liquid circulation device 20 further includes a bypass flow path 25 that connects the first flow path 21 and the second flow path 22 and allows the first cooling liquid to flow therethrough. In this structure, the first coolant returning from the second heat exchanger 50 to the first heat exchanger 40 branches into the first heat exchanger 40 side and the bypass flow path 25 . The first cooling liquid cooled in the first heat exchanger 40 and the first cooling liquid bypassing the first heat exchanger 40 are combined at the downstream side of the first heat exchanger 40 . This raises the temperature of the first coolant flowing into the second heat exchanger 50 .

In the third embodiment described above, by suppressing the temperature difference between the first coolant and the second coolant in the second heat exchanger 50, the load on the second heat exchanger 50 can be reduced, and high reliability can be achieved. Sexual operation. Compared with the case where the second cooling liquid is directly cooled by the natural cooling medium, it is easier to reduce the cooling efficiency of the second cooling liquid by the natural cooling medium. Thereby, the degree of freedom of selection of the type of the second coolant can be increased.

<Fourth embodiment> The fourth embodiment will be described below. Among the components of the present embodiment, the same structures as those of the first to third embodiments are denoted by the same reference numerals to omit repeated descriptions. FIG. 4 is a diagram schematically showing a cooling system S4 according to a fourth embodiment. In the cooling system S4 shown in FIG. 4 , the structure of the first coolant circulation device 20 is different from those of the first to third embodiments.

Specifically, the first coolant circulation device 20 further includes: a branch flow path 26 branched from the second flow path 22 and connected to the second flow path 22 at a position P2 upstream of the branch position P1; The third heat exchanger 60 on the flow path 26 .

A third coolant circulation device 70 for circulating a third coolant is connected to the third heat exchanger 60 . The third coolant is cooled by the first coolant in the third heat exchanger 60 . Since the third cooling liquid is cooled by the first cooling liquid that has not passed through the first heat exchanger 40 , the restriction on low-temperature characteristics is more relaxed than that of the second cooling liquid. Therefore, a different type of heat medium from the second cooling liquid may be selected as the third cooling liquid. For example, the third coolant may be an aqueous solution of ethylene glycol. However, the third coolant may also be silicone oil, ether liquid or fluorine liquid.

In the fourth embodiment described above, the third heat exchanger 60 can perform cooling in a temperature range higher than that of the second heat exchanger 50 . In this way, the application mode and application range of the cooling system can be expanded.

The cooling temperature of natural refrigerants with extremely low boiling points such as air, carbon dioxide, and oxygen may be excessively designed for temperature control objects. In this case, in this structure, by allocating the refrigerating capacity between the second heat exchanger 50 and the third heat exchanger 60, overcooling can be avoided and the refrigerating capacity can be effectively used.

<Fifth Embodiment> The fifth embodiment will be described below. Among the components of the present embodiment, the same structures as those of the first to fourth embodiments are denoted by the same reference numerals, and duplicated descriptions are omitted. FIG. 5 is a diagram schematically showing a cooling system S5 according to a fifth embodiment. In the cooling system S5 shown in FIG. 5 , the structure of the first coolant circulation device 20 is different from those of the first to fourth embodiments.

Specifically, in the present embodiment, the second coolant circulation device 30 is connected to the second heat exchanger 50 and the third heat exchanger 60 . After the second cooling liquid is cooled by the first cooling liquid in the third heat exchanger 60 , the second cooling liquid is further cooled by the first cooling liquid in the second heat exchanger 50 . Similar to the fourth embodiment, the third heat exchanger 60 is provided on the branch flow path 26, and the branch flow path 26 branches from the second flow path 22, and is connected to the The second flow path 22 .

The first cooling liquid circulation device 20 has a groove portion 27 which can store a certain amount of the first cooling liquid in the middle of the second flow path 22, and the first cooling liquid pump 23 pumps the first cooling liquid in the groove portion 27. Inhale and expel. The downstream side end portion of the branch flow path 26 is fluidly connected to the groove portion 27 .

A first distribution regulating valve 21A is provided in the first flow path 21 . A second distribution regulating valve 26A is provided in the branch flow path 26 . By adjusting the opening degrees of the first distribution regulating valve 21A and the second distribution regulating valve 26A, the flow rate of the first coolant flowing into the second heat exchanger 50 and the flow rate of the first coolant flowing into the third heat exchanger 60 can be adjusted. 2 Coolant flow.

The second coolant circulation device 30 has a groove 34 in the middle of the return side flow path 32 that can store a certain amount of the second coolant, and a second coolant that sucks and discharges the second coolant in the groove 34. Coolant pump 33 . The return side channel 32 is connected to the third heat exchanger 60 at a portion between the second coolant pump 33 and the second heat exchanger 50 . A high-temperature flow path 35 through which the second cooling liquid in the groove portion 34 flows is connected to the groove portion 34 , and the high-temperature flow path 35 has a heater 36 for heating the flowing second cooling liquid.

On the other hand, a low-temperature regulator valve 31A is provided in the supply-side channel 31 . The low-temperature control valve 31A is used to control and block the flow rate of the second coolant flowing toward the temperature-controlled object through the supply-side flow path 31 . Further, a medium-temperature flow path 37 is connected to a position downstream of the third heat exchanger 60 and upstream of the second heat exchanger 50 in the return-side flow path 32 . A medium temperature regulating valve 38 is provided in the medium temperature flow path 37 . In the present embodiment, by providing the above-mentioned plurality of flow paths or valve parts, it is possible to switch, for example, to a mode of supplying a low-temperature second coolant from the supply-side flow path 31 to a temperature-controlled object, or a mode of supplying a low-temperature second coolant from the medium-temperature flow path 37. The mode of supplying the temperature-controlled object with the second coolant having a higher temperature than the above-mentioned low-temperature second coolant, and supplying the temperature-controlled object from the high-temperature flow path 35 with the second coolant having a temperature higher than the medium-temperature flow path 37 2 The mode of the 2nd coolant with a higher coolant temperature.

In the fifth embodiment described above, by gradually cooling the second cooling liquid through the third heat exchanger 60 and the second heat exchanger 50, the first cooling liquid and the second cooling liquid in the second heat exchanger 50 are suppressed. The temperature difference of the cooling liquid can reduce the load on the second heat exchanger 50, enabling highly reliable operation.

Although the above has been described with respect to each embodiment of the present invention, the present invention is not limited to the above-mentioned embodiment. For example, the embodiments described below may also be adopted.

＜Other Embodiments＞ The embodiment shown in FIG. 6 differs from the second embodiment in that the first coolant circulation device 20 of the cooling system S2 of the second embodiment further includes: a flow regulating flow path 28, and The flow regulating valve 29 of the road 28. The flow rate adjustment flow path 28 is connected to the upstream side and the downstream side of the portion of the second flow path 22 connected to the internal heat exchanger 24 . The flow rate regulating valve 29 is for regulating the flow rate of the first cooling liquid discharged from the second heat exchanger 50 and flowing through the flow rate regulating channel 28 . The opening degree of the flow regulating valve 29 is controlled by a controller not shown. The controller may also be constituted by a computer having a CPU, ROM, and the like.

In the embodiment shown in FIG. 6 , on the downstream side of the internal heat exchanger 24 of the first flow path 21 , there is a device for detecting the temperature of the first cooling fluid flowing through the upstream side of the second heat exchanger 50 . The first temperature sensor 71. In the second cooling liquid circulation device 30, a second coolant for detecting the upstream part of the temperature-controlled object is provided on the downstream side of the part connected to the second heat exchanger 50 of the supply side flow path 31. The second temperature sensor 72 for the temperature of the liquid.

In the embodiment shown in FIG. 6 , when the temperature of the first cooling liquid detected by the first temperature sensor 71 is greater than the predetermined target temperature of the first cooling liquid, the flow regulating valve 29 is controlled so that the opening of the flow regulating valve 29 When the temperature of the first coolant detected by the first temperature sensor 71 is lower than the target temperature of the first coolant, the flow regulating valve 29 is controlled to make the opening of the flow regulating valve 29 smaller. Or in the embodiment shown in FIG. 6, when the temperature of the second cooling liquid detected by the second temperature sensor 72 is greater than the predetermined second cooling liquid target temperature, the flow regulating valve 29 is controlled so that the flow regulating valve 29 The opening degree becomes larger, and when the temperature of the second cooling liquid detected by the second temperature sensor 72 is lower than the target temperature of the second cooling liquid, the flow regulating valve 29 is controlled so that the opening degree of the flow regulating valve 29 becomes small. Thereby, it is easy to control the temperature of the temperature-controlled object at a required temperature and suppress energy consumption. In particular, the latter can effectively improve the responsiveness of temperature control when the temperature of the second cooling liquid that exchanges heat with the temperature-controlled object has a large temperature fluctuation.

The embodiment shown in FIG. 7 differs from the third embodiment in that the first coolant circulation device 20 of the cooling system S3 of the third embodiment further includes a flow rate regulating valve 25A provided in the bypass flow path 25 . The flow rate adjustment valve 25A is used to adjust the flow rate of the first coolant flowing through the bypass channel 25 . The opening degree of the flow regulating valve 25A is controlled by a controller not shown. The controller may also be constituted by a computer having a CPU, ROM, and the like.

In the embodiment shown in FIG. 7 , a first temperature sensor 71 and a second temperature sensor 72 are provided similarly to the structure shown in FIG. 6 . The first temperature sensor 71 is used to detect the temperature of the first coolant flowing through a portion of the first flow path 21 downstream of the position connected to the bypass flow path 25 .

In the embodiment shown in FIG. 7 , when the temperature of the first coolant detected by the first temperature sensor 71 is greater than the predetermined target temperature of the first coolant, the flow regulating valve 25A is controlled so that the opening of the flow regulating valve 25A When the temperature of the first coolant detected by the first temperature sensor 71 is lower than the target temperature of the first coolant, the flow regulating valve 25A is controlled to increase the opening degree of the flow regulating valve 25A. Or in the embodiment shown in FIG. 7, when the temperature of the second cooling liquid detected by the second temperature sensor 72 is greater than the predetermined second cooling liquid target temperature, the flow regulating valve 25A is controlled so that the flow regulating valve 25A When the opening becomes smaller and the temperature of the second coolant detected by the second temperature sensor 72 is lower than the target temperature of the second coolant, the flow regulating valve 25A is controlled to increase the opening of the flow regulating valve 25A. Thereby, it is easy to control the temperature of the temperature-controlled object at a required temperature and suppress energy consumption. In particular, the latter can effectively improve the responsiveness of temperature control when the temperature of the second cooling liquid that exchanges heat with the temperature-controlled object has a large temperature fluctuation.

10: Refrigeration cycle device 11: Compressor 12: Cooler 13: Recovery heat exchanger 14: Expander 15: Refrigerant circulation path 16: Motor 16A: Drive shaft 17: Thermal bypass flow path 18: regulating valve 20: The first coolant circulation device 21: 1st channel 22: Second channel 23: 1st coolant pump 30: The second coolant circulation device 31: supply side flow path 32: return side flow path 33: 2nd coolant pump 40: 1st heat exchanger 50: 2nd heat exchanger

[ Fig. 1 ] is a diagram schematically showing a cooling system according to a first embodiment. [ Fig. 2 ] is a diagram schematically showing a cooling system according to a second embodiment. [ Fig. 3 ] is a diagram schematically showing a cooling system according to a third embodiment. [ Fig. 4 ] is a diagram schematically showing a cooling system according to a fourth embodiment. [ Fig. 5 ] is a diagram schematically showing a cooling system according to a fifth embodiment. [ Fig. 6 ] is a diagram schematically showing a cooling system of another embodiment. [ Fig. 7 ] is a diagram schematically showing a cooling system of another embodiment.

10: Refrigeration cycle device

11: Compressor

12: Cooler

13: Recovery heat exchanger

14: Expander

15: Refrigerant circulation path

16: Motor

16A: Drive shaft

17: Thermal bypass flow path

18: regulating valve

20: The first coolant circulation device

21: 1st channel

22: Second channel

23: 1st coolant pump

30: The second coolant circulation device

31: supply side flow path

32: return side flow path

33: 2nd coolant pump

40: 1st heat exchanger

50: 2nd heat exchanger

S1: cooling system

Claims (10)

A cooling system having: A refrigeration cycle device that circulates a natural refrigerant, A first cooling liquid circulation device that circulates the first cooling liquid cooled by the above-mentioned natural refrigerant, and a second coolant circulation device for circulating the second coolant cooled by the first coolant circulated by the first coolant circulation device. The cooling system according to claim 1, wherein the type of the first cooling liquid is different from the type of the second cooling liquid. The cooling system according to claim 1, wherein the above-mentioned refrigeration cycle device and the above-mentioned first cooling liquid circulation device are connected by a first heat exchanger, and the above-mentioned first cooling liquid is transferred to the above-mentioned first heat exchanger by the above-mentioned natural refrigerant cool down, The first cooling liquid circulation device and the second cooling liquid circulation device are connected by a second heat exchanger, and the second cooling liquid is cooled by the first cooling liquid in the second heat exchanger, The above-mentioned first coolant circulation device is composed of: a first flow path, a second flow path, and a pump; The first flow path is used to connect: the discharge port of the first heat exchanger for discharging the first cooling liquid, and the receiving port of the second heat exchanger for receiving the first cooling liquid; The second flow path is used to connect: the discharge port of the second heat exchanger for discharging the first cooling liquid, and the receiving port of the first heat exchanger for receiving the first cooling liquid; The pump is used to generate a driving force for circulating the first coolant. The cooling system according to claim 3, wherein the first flow path is connected to the second flow path by an internal heat exchanger, In the above-mentioned internal heat exchanger, the above-mentioned first coolant discharged from the discharge port of the above-mentioned first heat exchanger and not yet received by the receiving port of the above-mentioned second heat exchanger and the discharge port of the above-mentioned second heat The first coolant discharged and not yet received by the receiving port of the first heat exchanger performs heat exchange. The cooling system according to claim 3, wherein the above-mentioned first coolant circulation device further has a bypass flow path, The bypass flow path connects the first flow path and the second flow path and allows the first coolant to flow. The cooling system according to claim 3, wherein the first coolant circulation device further includes: a branch flow path branched from the second flow path and connected to the second flow path at a position upstream of the branch position, and The third heat exchanger installed in the above-mentioned branch flow path. The cooling system according to claim 6, wherein the third heat exchanger is connected to a third cooling liquid circulating device for circulating the third cooling liquid, The third cooling liquid is cooled by the first cooling liquid in the third heat exchanger. The cooling system according to claim 6, wherein the second coolant circulation device is connected to the third heat exchanger, The second coolant is cooled in the second heat exchanger after being cooled in the third heat exchanger. The cooling system as claimed in item 1, wherein the first coolant is silicon oil, The above-mentioned second coolant is an ether liquid. The cooling system according to claim 1, wherein the refrigeration cycle device is an air refrigeration cycle device.

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