TW202321149A - Microwave artificial diamond production device including a reaction container and a microwave emitting module - Google Patents
Microwave artificial diamond production device including a reaction container and a microwave emitting module Download PDFInfo
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本創作係涉及一種人造鑽石的生產裝置,尤指一種利用微波電漿化學氣相沉積法(Microwave Plasma Chemical Vapor Deposition,簡稱MPCVD)生產人造鑽石的裝置。The invention relates to a device for producing artificial diamonds, especially a device for producing artificial diamonds using Microwave Plasma Chemical Vapor Deposition (MPCVD).
現有技術中的MPCVD人造鑽石生產裝置具有一反應腔及一微波發射模組。反應腔內設置有一鑽石載台;微波發射模組朝反應腔發射2.45GHz的微波,且微波會在鑽石載台處形成的區域性駐波強電場。於生產人造鑽石時,將一鑽石晶種置於鑽石載台上,並且將高濃度甲烷注入反應腔內,此時微波發射模組發射的微波能量會將鑽石晶種周圍的甲烷氣體加熱至極高溫並形成電漿球,使甲烷氣體中的碳原子受電漿作用而附著於鑽石晶種上,進而使鑽石晶種逐漸生長成為體積較大的人造鑽石。The MPCVD artificial diamond production device in the prior art has a reaction chamber and a microwave emitting module. A diamond carrier is set in the reaction chamber; the microwave emitting module emits 2.45GHz microwaves towards the reaction chamber, and the microwaves will form a strong regional standing wave electric field at the diamond carrier. When producing artificial diamonds, a diamond seed crystal is placed on a diamond carrier, and high-concentration methane is injected into the reaction chamber. At this time, the microwave energy emitted by the microwave emission module will heat the methane gas around the diamond crystal seed to extremely high temperature. And form a plasma ball, so that the carbon atoms in the methane gas are attached to the diamond seed by the action of the plasma, and then the diamond seed gradually grows into a larger artificial diamond.
為了強化人造鑽石生產裝置的生產效率,台灣第TWI734405B號專利案揭露了一種具有圓極化管及聚焦機構及的人造鑽石生產裝置,微波由圓極化管轉換成圓極化微波後,再以聚焦機構聚焦在鑽石晶種處,使鑽石晶種周圍能夠穩定形成電漿球,以提高人造鑽石的生產效率。In order to strengthen the production efficiency of the artificial diamond production device, Taiwan Patent No. TWI734405B discloses a synthetic diamond production device with a circularly polarized tube and a focusing mechanism. After the microwave is converted from the circularly polarized tube into circularly polarized microwave, the The focusing mechanism focuses on the diamond seed, so that plasma balls can be stably formed around the diamond seed, so as to improve the production efficiency of artificial diamonds.
然而,根據台灣第TWI734405B號專利案所設計出的人造鑽石生產裝置在實際測試時發現,圓極化微波雖然有助於穩定形成電漿球,但同時也容易因為阻抗不匹配而在反應腔內多次反射,使得反應腔中形成複雜的多重反射駐波,進而破壞鑽石晶種周圍的電漿球穩定性,導致生產效率下降。簡單來說,根據台灣第TWI734405B號專利案所設計出的人造鑽石生產裝置雖然理論上能夠提高人造鑽石的生產效率,但實際運作時卻會因為反應腔內累積過多無用的微波能量,而導致鑽石生產效率無法達到預期水準。However, according to the actual test of the artificial diamond production device designed according to Taiwan Patent No. TWI734405B, it was found that although circularly polarized microwaves are helpful for the stable formation of plasma balls, they are also prone to breakdown in the reaction chamber due to impedance mismatch. Multiple reflections lead to the formation of complex multiple reflection standing waves in the reaction chamber, which in turn destroys the stability of the plasma ball around the diamond seed crystal, resulting in a decrease in production efficiency. To put it simply, although the artificial diamond production device designed according to Taiwan Patent No. TWI734405B can theoretically improve the production efficiency of artificial diamonds, in actual operation, it will cause the diamond Production efficiency can not meet the expected level.
因此,現有技術的人造鑽石生產裝置及其微波發射模組實有待加以改良。Therefore, the prior art artificial diamond production device and its microwave emitting module really need to be improved.
有鑑於前述之現有技術的缺點及不足,本創作提供一種能避免反應腔內發生微波多次反射的微波人造鑽石生產裝置。In view of the aforementioned shortcomings and deficiencies of the prior art, the invention provides a microwave artificial diamond production device that can avoid multiple reflections of microwaves in the reaction chamber.
為達到上述的創作目的,本創作所採用的技術手段為設計一種微波人造鑽石生產裝置,包含: 一反應容器,其為一中空體,該反應容器上具有一微波視窗,該微波視窗用於供外部的微波穿透至該反應容器內,該反應容器具有 一鑽石載台,其設於該反應容器內,並且界定出一聚焦區域; 一微波發射模組,其設於該反應容器外,並且朝該反應容器的該微波視窗發射圓極化微波,該微波發射模組包含依序連接的一模式轉換管、一導向管、一第一導波管及一第一線極化微波源,該微波發射模組還具有一第二導波管及一第一匹配負載,其中 該模式轉換管連具有 一圓極化開口,其位於該模式轉換管的一端,並且朝向該反應容器的該微波視窗; 一線極化開口,其位於該模式轉換管的另一端;當外部的線極化微波從該線極化開口進入該模式轉換管,該線極化微波會被轉換成圓極化微波並從該圓極化開口射出;當外部的圓極化微波從該圓極化開口進入該模式轉換管,該圓極化微波會被轉換成線極化微波並從該線極化開口射出; 該導向管具有: 一主開口,其位於該導向管的一端,並且連接該模式轉換管的該線極化開口; 一第一開口; 一第二開口,其位於該導向管的管壁;該第二開口的方向與該第一開口的方向非平行; 該第一導波管的一端連接該導向管的該第一開口,另一端連接該第一線極化微波源; 該第一線極化微波源產生線極化微波,該線極化微波被該模式轉換管轉換成圓極化微波並且經由該模式轉換管的該圓極化開口朝該反應容器的該微波視窗發射; 該第二導波管的一端連接該導向管的該第二開口; 該第一匹配負載設於該第二導波管; 一微波透鏡,其設於該微波發射模組的該模式轉換管的該圓極化開口及該反應容器的該鑽石載台之間;該微波透鏡將該微波發射模組所發射的圓極化微波聚集於該鑽石載台的該聚焦區域。 In order to achieve the above creative purposes, the technical means used in this creation is to design a microwave artificial diamond production device, including: A reaction vessel, which is a hollow body, has a microwave window on the reaction vessel, and the microwave window is used to allow external microwaves to penetrate into the reaction vessel, and the reaction vessel has a diamond carrier, which is arranged in the reaction vessel and defines a focus area; A microwave emitting module, which is arranged outside the reaction container, and emits circularly polarized microwaves toward the microwave window of the reaction container, the microwave emitting module includes a mode conversion tube, a guide tube, and a first connected in sequence A waveguide and a first linearly polarized microwave source, the microwave transmitting module also has a second waveguide and a first matching load, wherein The mode conversion tube with a circular polarization opening, which is located at one end of the mode conversion tube and faces the microwave window of the reaction vessel; A linear polarization opening, which is located at the other end of the mode conversion tube; when external linearly polarized microwaves enter the mode conversion tube from the linearly polarized opening, the linearly polarized microwaves will be converted into circularly polarized microwaves and transmitted from the The circularly polarized opening is emitted; when the external circularly polarized microwave enters the mode conversion tube from the circularly polarized opening, the circularly polarized microwave will be converted into a linearly polarized microwave and emitted from the linearly polarized opening; The guide tube has: a main opening, which is located at one end of the guide tube and is connected to the linear polarization opening of the mode conversion tube; a first opening; a second opening, which is located on the tube wall of the guide tube; the direction of the second opening is not parallel to the direction of the first opening; One end of the first waveguide is connected to the first opening of the guide pipe, and the other end is connected to the first linearly polarized microwave source; The first linearly polarized microwave source generates linearly polarized microwaves, which are converted into circularly polarized microwaves by the mode conversion tube and directed towards the microwave window of the reaction vessel through the circularly polarized opening of the mode conversion tube emission; One end of the second waveguide is connected to the second opening of the guide tube; the first matching load is arranged on the second waveguide; A microwave lens, which is arranged between the circular polarization opening of the mode conversion tube of the microwave transmitting module and the diamond stage of the reaction vessel; the microwave lens circularly polarizes the radiation emitted by the microwave transmitting module Microwaves are focused on the focused area of the diamond stage.
本創作的優點在於,藉由在微波發射模組設置模式轉換管、導向管以及第一匹配負載,當反應容器中的圓極化微波因阻抗不匹配等各種原因發生反射時,反射的圓極化微波能夠被模式轉換管再次轉換回線極化微波,然後經由導向管的第二開口射出至第一匹配負載,並且在第一匹配負載處被轉換成熱能。藉此,本創作能疏導反應容器中無用的微波能量,防止反應容器中形成複雜的多重反射駐波,進而具有保持鑽石晶種周圍的電漿球穩定性並提高鑽石生產效率之功效。The advantage of this creation is that by setting the mode conversion tube, the guide tube and the first matching load in the microwave transmitting module, when the circularly polarized microwave in the reaction vessel is reflected due to various reasons such as impedance mismatch, the reflected circular pole The polarized microwaves can be converted back to linearly polarized microwaves by the mode conversion tube, and then emitted to the first matching load through the second opening of the guide tube, where they are converted into heat energy. In this way, the invention can divert the useless microwave energy in the reaction vessel and prevent complex multiple reflection standing waves from forming in the reaction vessel, thereby maintaining the stability of the plasma ball around the diamond seed crystal and improving the diamond production efficiency.
具體來說,第一線極化微波源所發射的線極化微波會經由導向管進入模式轉換管,被轉換成圓極化微波後射入反應容器內輔助形成鑽石。反應容器內反射的圓極化微波則會被模式轉換管再度轉換成線極化微波,但此線極化微波(下稱反射微波)被模式轉換管轉換兩次後,其電場角度會垂直於原始發射的線極化微波,故反射微波已經無法循原本的第一開口離開導向管,因此傳統的台灣第TWI734405B號專利案的反應腔內會累積過多無用的微波能量。而本創作的導向管上具有與第一開口非平行的第二開口,故反射微波能夠從第二開口離開導向管,藉此疏導反應容器中無用的微波能量。Specifically, the linearly polarized microwaves emitted by the first linearly polarized microwave source will enter the mode conversion tube through the guide tube, be converted into circularly polarized microwaves, and then be injected into the reaction vessel to assist in the formation of diamonds. The circularly polarized microwaves reflected in the reaction vessel will be converted into linearly polarized microwaves again by the mode conversion tube, but after the linearly polarized microwaves (hereinafter referred to as reflected microwaves) are converted twice by the mode conversion tube, the electric field angle will be perpendicular to Originally emitted linearly polarized microwaves, reflected microwaves can no longer leave the guide tube through the original first opening, so too much useless microwave energy will accumulate in the reaction chamber of the traditional Taiwan No. TWI734405B patent. However, the guide tube of the present invention has a second opening that is not parallel to the first opening, so reflected microwaves can leave the guide tube through the second opening, thereby channeling useless microwave energy in the reaction vessel.
進一步而言,所述之微波人造鑽石生產裝置,其中該微波發射模組具有一第二線極化微波源,其設置於該第二導波管的另一端;一第二匹配負載,其設置於該第一導波管。Further, the microwave synthetic diamond production device, wherein the microwave transmitting module has a second linearly polarized microwave source, which is set at the other end of the second waveguide; a second matching load, which is set in the first waveguide.
進一步而言,所述之微波人造鑽石生產裝置,其中該微波發射模組的該導向管為圓管;該微波發射模組的該第一導波管及該第二導波管為方管。Further, in the microwave synthetic diamond production device, the guide tube of the microwave transmitting module is a circular tube; the first wave guiding tube and the second wave guiding tube of the microwave transmitting module are square tubes.
進一步而言,所述之微波人造鑽石生產裝置,其中該導向管的該第一開口位於該導向管相對該主開口的一端;該微波發射模組具有一方轉圓連接管,其連接於該第一導波管及該導向管的該第一開口之間;該方轉圓連接管的管內壁由方形逐漸轉變成圓型。Further, in the microwave synthetic diamond production device, the first opening of the guide tube is located at the end of the guide tube opposite to the main opening; the microwave emitting module has a round connecting tube connected to the first Between a waveguide and the first opening of the guide pipe; the inner wall of the square-to-circle connecting pipe gradually changes from square to round.
進一步而言,所述之微波人造鑽石生產裝置,其中該導向管的該第一開口位於該導向管相對該主開口的一端;該微波發射模組具有一連接套管,其套設於該導向管外,該第二導波管連接該連接套管的外壁面;該連接套管上具有一轉換孔,其從該連接套管的外壁面貫穿至內壁面,並且為一長孔;該轉換孔的相對二開口分別連接該導向管的該第二開口及該第二導波管,並且該轉換孔的寬度朝該第二開口漸縮。Further, in the microwave synthetic diamond production device, the first opening of the guide tube is located at the end of the guide tube opposite to the main opening; the microwave emitting module has a connecting sleeve, which is sleeved on the guide tube Outside the tube, the second waveguide is connected to the outer wall of the connecting sleeve; the connecting sleeve has a conversion hole, which penetrates from the outer wall of the connecting sleeve to the inner wall, and is a long hole; the conversion Two opposite openings of the hole are respectively connected to the second opening of the guiding tube and the second waveguide, and the width of the conversion hole is tapered toward the second opening.
進一步而言,所述之微波人造鑽石生產裝置,其中該轉換孔的相對二孔壁為階梯狀而使該轉換孔的寬度朝該第二開口漸縮。Furthermore, in the microwave synthetic diamond production device, the two opposite walls of the transition hole are stepped so that the width of the transition hole tapers toward the second opening.
進一步而言,所述之微波人造鑽石生產裝置,其中該微波發射模組具有一連接套管,其套設於該導向管外,該第二導波管連接該連接套管的外壁面;該連接套管上具有一轉換孔,其從該連接套管的外壁面貫穿至內壁面,並且為一長孔;該轉換孔的相對二開口分別連接該導向管的該第二開口及該第二導波管,並且該轉換孔的寬度朝該第二開口漸縮。Further, in the microwave synthetic diamond production device, the microwave emitting module has a connecting sleeve, which is sheathed outside the guide tube, and the second waveguide is connected to the outer wall of the connecting sleeve; the There is a conversion hole on the connection sleeve, which penetrates from the outer wall surface of the connection sleeve to the inner wall surface, and is a long hole; the two opposite openings of the conversion hole are connected to the second opening and the second opening of the guide tube respectively. The waveguide, and the width of the transition hole is tapered toward the second opening.
進一步而言,所述之微波人造鑽石生產裝置,其中該轉換孔的相對二孔壁為階梯狀而使該轉換孔的寬度朝該第二開口漸縮。Furthermore, in the microwave synthetic diamond production device, the two opposite walls of the transition hole are stepped so that the width of the transition hole tapers toward the second opening.
進一步而言,所述之微波人造鑽石生產裝置,其中該導向管的該第一開口位於該導向管的管壁;該微波發射模組具有一連接套管,其套設於該導向管外,該第二導波管連接該連接套管的外壁面;該連接套管上具有二轉換孔;各該轉換孔從該連接套管的外壁面貫穿至內壁面,並且為一長孔;其中一該轉換孔的相對二開口分別連接該導向管的該第一開口及該第一導波管;另一該轉換孔的相對二開口分別連接該導向管的該第二開口及該第二導波管;各該轉換孔的寬度朝該導向管的外壁面漸縮。Further, in the microwave synthetic diamond production device, wherein the first opening of the guide tube is located on the tube wall of the guide tube; the microwave emitting module has a connecting sleeve, which is sleeved outside the guide tube, The second waveguide is connected to the outer wall of the connecting sleeve; the connecting sleeve has two conversion holes; each of the conversion holes penetrates from the outer wall of the connecting sleeve to the inner wall, and is a long hole; one of them The opposite two openings of the conversion hole are respectively connected to the first opening of the guide tube and the first waveguide; the opposite two openings of the other conversion hole are respectively connected to the second opening of the guide tube and the second waveguide tube; the width of each transition hole is tapered toward the outer wall of the guide tube.
進一步而言,所述之微波人造鑽石生產裝置,其中該導向管的該第一開口的開口方向垂直於該第二開口的開口方向。Furthermore, in the microwave synthetic diamond production device, the opening direction of the first opening of the guide tube is perpendicular to the opening direction of the second opening.
請參閱圖1、圖2及圖4所示,本發明之微波人造鑽石生產裝置包含一反應容器10、一微波發射模組及一微波透鏡13。Please refer to FIG. 1 , FIG. 2 and FIG. 4 , the microwave synthetic diamond production device of the present invention includes a
反應容器10為一中空體,反應容器10上具有一微波視窗11,微波視窗11用於供外部的微波穿透至反應容器10內,微波視窗11具體來說設置於反應容器10的外殼上。反應容器10具有一鑽石載台12,其設於反應容器10內。鑽石載台12的頂面上界定出一聚焦區域121。The
微波發射模組設於反應容器10外,並且朝反應容器10發射圓極化微波。微波發射模組包含一模式轉換管21、一導向管22、一第一導波管31、一第一線極化微波源32、一第二導波管41及一第一匹配負載43;以及在本實施例中,進一步包含一方轉圓連接管23、一連接套管24、一第二線極化微波源42及一第二匹配負載33。其中模式轉換管21、導向管22、第一導波管31及第一線極化微波源32沿一微波路徑依序連接。The microwave emitting module is disposed outside the
具體來說,本實施例的微波發射模組具有一微波疊加組件20、一第一微波組件30及一第二微波組件40,第一微波組件30及第二微波組件40朝微波疊加組件20發射線極化微波,兩微波組件30、40發射的微波於微波疊加組件20重疊後共同進入反應容器10內。Specifically, the microwave transmitting module of this embodiment has a
請配合參閱圖2至圖4所示,微波疊加組件20包含前述之模式轉換管21、導向管22、方轉圓連接管23及連接套管24;第一微波組件30包含前述之第一導波管31、第一線極化微波源32及第二匹配負載33;第二微波組件40包含前述之第二導波管41、第二線極化微波源42及第一匹配負載43。Please refer to Fig. 2 to Fig. 4, the
前述之模式轉換管21的兩端分別具有一圓極化開口211(如圖4所示)及一線極化開口212。圓極化開口211位於模式轉換管21的下端,並且朝向該反應容器10的微波視窗11。線極化開口212位於模式轉換管21的上端。模式轉換管21可視微波的行進方向而將線極化微波轉換成圓極化微波,或者將圓極化微波轉換成線極化微波。Both ends of the aforementioned
具體來說,當外部的線極化微波從線極化開口212進入上端的模式轉換管21,線極化微波會被轉換成圓極化微波並從下端的圓極化開口211射出。當外部的圓極化微波從下端的圓極化開口211進入模式轉換管21,圓極化微波會被轉換成線極化微波並從上端的線極化開口212射出。Specifically, when external linearly polarized microwaves enter the upper
前述之導向管22具有一主開口221、一第一開口222及一第二開口223。在本實施例中,主開口221及第一開口222分別位於導向管22的下端及上端,主開口221連接模式轉換管21的線極化開口212。第二開口223位於導向管22的管壁,即第二開口223的方向與第一開口222的方向非平行,且具體來說,第二開口223的方向與第一開口222的方向相互垂直。導向管22較佳地為一圓管,即主開口221及第一開口222均為圓形。The
前述之方轉圓連接管23設於導向管22的上端並且連接第一開口222。方轉圓連接管23的管內壁由方形逐漸轉變成圓形,而使方轉圓連接管23的兩端分別形成一方形連接開口231及一圓形連接開口232。圓形連接開口232連接導向管22的第一開口222。The aforementioned square-to-
請配合參閱圖2、圖3及圖5所示,前述之連接套管24套設於導向管22外,連接套管24上形成有一轉換孔241,轉換孔241從連接套管24的外壁面貫穿至內壁面,並且為上下延伸的長孔,但轉換孔241的延伸方向不以此為限。轉換孔241於內壁面之開口連接導向管22的第二開口223,並且轉換孔241的寬度朝第二開口223漸縮。在本實施例中,轉換孔241的相對二孔壁為階梯狀,而使轉換孔241的寬度呈階梯狀漸縮。本實施例中的連接套管24與導向管22為一體成形,但在其他較佳實施例中,連接套管24是獨立於導向管22的管體,並透過焊接等方式設置於導向管22。Please refer to Fig. 2, Fig. 3 and Fig. 5, the
請配合參閱圖2至圖4所示,前述之第一導波管31較佳地為方管,其一端連接方轉圓連接管23的方形連接開口231,也就是說,第一導波管31是透過方轉圓連接管23連接導向管22的第一開口222。Please refer to Figures 2 to 4, the aforementioned
第一導波管31的另一端連接前述之第一線極化微波源32。第一線極化微波源32產生TE10線極化微波81,TE10線極化微波81通過方轉圓連接管23、導向管22及模式轉換管21後,被模式轉換管21轉換成TE11圓極化模式微波83並且經由模式轉換管21的圓極化開口211朝反應容器10的微波視窗11發射。The other end of the
第二匹配負載33設置於該第一導波管31,且具體來說,第一導波管31上設置有一循環器34,當第一導波管31內出現逆向朝第一線極化微波源32前進的微波(即後述第二線極化微波源42所產生的微波,被反應容器10反射,經過模式轉換管21,會經由導向管22,通過方轉圓連接管23,朝第一線極化微波源32前進),循環器34會將逆向的微波導引至第二匹配負載33,並且使微波於第二匹配負載33處轉換為熱能,藉此保護第一線極化微波源32不受逆向的微波影響,同時可消除裝置內無用的微波能量。The
前述之第二導波管41較佳地為方管,其一端連接連接套管24之轉換孔241於外壁面之開口,也就是說,第二導波管41是透過連接套管24連接導向管22的第二開口223。第二導波管41的另一端連接前述之第二線極化微波源42。The aforementioned
第二線極化微波源42產生TE10線極化微波91,TE10線極化微波91通過導向管22及模式轉換管21後,被模式轉換管21轉換成TE11圓極化模式微波93並且經由模式轉換管21的圓極化開口211朝反應容器10的微波視窗11發射。在其他較佳的實施例中,第二線極化微波源42可視情況省略。The second linearly polarized
前述之第一匹配負載43設置於第二導波管41,且具體來說,第二導波管41上設置有一循環器44,當第二導波管41內出現逆向朝第二線極化微波源42前進的微波(即第一線極化微波源32所產生的微波,被反應容器10反射,經過模式轉換管21後,因電場方向而無法通過方轉圓連接管23,而會經由導向管22朝第二線極化微波源42前進),循環器44將第二導波管41內的逆向微波導引至第一匹配負載43以保護第二線極化微波源42並且消除裝置內無用的微波能量。The aforesaid
前述之微波透鏡13設置於微波發射模組的模式轉換管21的圓極化開口211及反應容器10的鑽石載台12之間,微波透鏡13將微波發射模組所發射的圓極化微波聚集於鑽石載台12的聚焦區域121。在本實施例中,微波透鏡13設於反應容器10外,並且位於微波發射模組的模式轉換管21的圓極化開口211及反應容器10的微波視窗11之間。微波透鏡13較佳地為一介質凸透鏡,但其他凸凹透鏡的適當組合亦可達到相同的類似的微波聚集功效。The
本創作於使用時,將鑽石晶種A置於鑽石載台12的聚焦區域121。第一線極化微波源32會使第一導波管31內產生TE10線極化微波81,TE10線極化微波81經由方轉圓連接管23進入導向管22後,在導向管22內被轉換成TE11線極化微波82;同時,第二線極化微波源42會使第二導波管41內產生TE10線極化微波91,TE10線極化微波91在通過連接套管24的轉換孔241後,在導向管22內形成TE11線極化微波92。When the invention is used, the diamond seed crystal A is placed in the
最後,源自第一線極化微波源32的TE11線極化微波82與源自第二線極化微波源42的TE11線極化微波92共同向下穿過模式轉換管21,被模式轉換管21分別轉換成TE11圓極化模式微波83及TE11圓極化模式微波93,並且被微波透鏡13集中後,穿過微波視窗11,聚焦至聚焦區域121以生產人造鑽石。Finally, the TE11 linearly
當TE11圓極化模式微波83、93於反應容器10內發生反射時,源自第一線極化微波源32的微波反射後會經由第二開口223進入第二導波管41,最終被第一匹配負載43消耗轉換成熱量,同時源自第二線極化微波源42的微波反射後會經由第一開口222進入第一導波管31,最終被第二匹配負載33消耗轉換成熱量,具體過程詳述如下:When the TE11 circularly
當源自第一線極化微波源32的TE11圓極化模式微波83發生反射時,TE11圓極化模式微波83會向上穿過模式轉換管21並且在導向管22內形成TE11線極化微波82’。然而,TE11線極化微波82’被模式轉換管21轉換兩次後,其電場角度會垂直於線極化微波TE11線極化微波82,因此TE11線極化微波82’無法從第一開口222返回第一導波管31,但會從第二開口223進入第二導波管41,並且被第一匹配負載43消耗轉換成熱量。而源自第二線極化微波源42的TE11圓極化模式微波93發生反射時的狀況大致相同,也就是源自第二線極化微波源42的反射微波雖然無法返回第二導波管41,但可經由第一導波管31被第二匹配負載33消耗轉換成熱量。When the TE11 circularly polarized mode microwave 83 from the first linearly polarized
本創作的另一優點在於,圓極化微波模式較一般廣泛使用線極化微波模式的微波場型分佈較均勻,且本創作可以同時設置第一線極化微波源32及第二線極化微波源42,還可以藉由將兩個微波源產生的圓極化微波功率疊加而增加人造鑽石於載台上的成長速度。Another advantage of this creation is that the microwave field pattern distribution of the circularly polarized microwave mode is more uniform than that of the generally widely used linearly polarized microwave mode, and this creation can simultaneously set the first linearly polarized
請配合參閱圖6至圖9所示,本創作的第二實施例與第一實施例大致相同,差異在於導向管22A的第一開口222A位於導向管22A的管壁;此外,連接套管24A上具有二轉換孔241A,其中一轉換孔241A的相對二開口分別連接導向管22A的第一開口222A及第一導波管31A,另一轉換孔241A的相對二開口分別連接導向管22A的第二開口223A及第二導波管41A。Please refer to Fig. 6 to Fig. 9, the second embodiment of the present invention is substantially the same as the first embodiment, the difference is that the
綜上所述,本創作藉由設置模式轉換管21、導向管22以及第一匹配負載43,當源自第一線極化微波源32的TE11圓極化模式微波83,從反應容器10中的圓極化微波因阻抗不匹配等各種原因發生反射時,反射的圓極化微波能夠被模式轉換管21再次轉換回線極化微波,然後經由導向管22的第二開口223射出至第一匹配負載43,並且在第一匹配負載43處被轉換成熱能。藉此,本創作能疏導反應容器10中無用的微波能量,防止反應容器10中形成複雜的多重反射駐波,進而具有保持鑽石晶種A周圍的電漿球穩定性並提高鑽石生產效率之功效。To sum up, the invention provides the
以上所述僅是本創作的較佳實施例而已,並非對本創作做任何形式上的限制,雖然本創作已以較佳實施例揭露如上,然而並非用以限定本創作,任何所屬技術領域中具有通常知識者,在不脫離本創作技術方案的範圍內,當可利用上述揭示的技術內容作出些許更動或修飾為等同變化的等效實施例,但凡是未脫離本創作技術方案的內容,依據本創作的技術實質對以上實施例所作的任何簡單修改、等同變化與修飾,均仍屬於本創作技術方案的範圍內。The above description is only a preferred embodiment of this creation, and does not impose any formal restrictions on this creation. Although this creation has been disclosed as above with a preferred embodiment, it is not used to limit this creation. Anyone in the technical field has Ordinary knowledgeable persons, without departing from the scope of this creative technical solution, may use the technical content disclosed above to make some changes or modify them into equivalent embodiments with equivalent changes. However, any content that does not deviate from this creative technical solution, according to The technical essence of the creation Any simple modification, equivalent change and modification made to the above embodiments still belong to the scope of the technical solution of the creation.
10:反應容器
11:微波視窗
12:鑽石載台
121:聚焦區域
13:微波透鏡
20:微波疊加組件
21:模式轉換管
211:圓極化開口
212:線極化開口
22:導向管
221:主開口
222:第一開口
223:第二開口
23:方轉圓連接管
231:方形連接開口
232:圓形連接開口
24:連接套管
241:轉換孔
30:第一微波組件
31:第一導波管
32:第一線極化微波源
33:第二匹配負載
34:循環器
40:第二微波組件
41:第二導波管
42:第二線極化微波源
43:第一匹配負載
44:循環器
81:TE10線極化微波
82:TE11線極化微波
82’:TE11線極化微波
83:TE11圓極化模式微波
91:TE10線極化微波
92:TE11線極化微波
93:TE11圓極化模式微波
22A:導向管
222A:第一開口
223A:第二開口
24A:連接套管
241A:轉換孔
31A:第一導波管
41A:第二導波管
A:鑽石晶種
10: Reaction vessel
11:Microwave window
12:Diamond carrier
121: Focus area
13:Microwave lens
20:Microwave stacking components
21: Mode conversion tube
211: circular polarization opening
212: Linear polarization opening
22: guide tube
221: main opening
222: first opening
223: second opening
23: Square to round connecting pipe
231: square connection opening
232: round connection opening
24: Connection sleeve
241: conversion hole
30: The first microwave assembly
31: The first waveguide
32: The first line polarized microwave source
33: Second matching load
34:Circulator
40:Second Microwave Assembly
41: Second waveguide
42: Second line polarized microwave source
43: First matching load
44:Circulator
81: TE10 line polarized microwave
82: TE11 line polarized microwave
82': TE11 line polarized microwave
83:TE11 Circular Polarization Mode Microwave
91: TE10 line polarized microwave
92: TE11 line polarized microwave
93: TE11 Circular
圖1係本創作的第一實施例的立體外觀圖。 圖2係本創作的第一實施例的立體元件分解圖。 圖3係本創作的第一實施例的部分元件立體剖視示意圖。 圖4係本創作的第一實施例的縱向局部剖視示意圖。 圖5係本創作的第一實施例的橫向剖視示意圖。 圖6係本創作的第二實施例的立體外觀圖。 圖7係本創作的第二實施例的立體元件分解圖。 圖8係本創作的第二實施例的縱向剖視示意圖。 圖9係本創作的第二實施例沿圖8的A-A割面線的橫向剖視示意圖。 Fig. 1 is the three-dimensional appearance diagram of the first embodiment of this creation. Fig. 2 is an exploded view of three-dimensional components of the first embodiment of the invention. FIG. 3 is a perspective cross-sectional schematic view of some components of the first embodiment of the invention. Fig. 4 is a schematic longitudinal partial sectional view of the first embodiment of the invention. FIG. 5 is a schematic cross-sectional view of the first embodiment of the invention. Fig. 6 is the three-dimensional appearance view of the second embodiment of the invention. FIG. 7 is an exploded view of the three-dimensional components of the second embodiment of the invention. Fig. 8 is a schematic longitudinal sectional view of the second embodiment of the present invention. FIG. 9 is a schematic cross-sectional view of the second embodiment of the invention along the section line A-A of FIG. 8 .
10:反應容器 10: Reaction vessel
20:微波疊加組件 20:Microwave stacking components
21:模式轉換管 21: Mode conversion tube
22:導向管 22: guide tube
23:方轉圓連接管 23: Square to round connecting pipe
24:連接套管 24: Connection sleeve
30:第一微波組件 30: The first microwave assembly
31:第一導波管 31: The first waveguide
32:第一線極化微波源 32: The first line polarized microwave source
33:第二匹配負載 33: Second matching load
34:循環器 34:Circulator
40:第二微波組件 40:Second Microwave Assembly
41:第二導波管 41: Second waveguide
42:第二線極化微波源 42: Second line polarized microwave source
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