CN116695088A - Microwave artificial diamond production device - Google Patents
Microwave artificial diamond production device Download PDFInfo
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- CN116695088A CN116695088A CN202210172289.XA CN202210172289A CN116695088A CN 116695088 A CN116695088 A CN 116695088A CN 202210172289 A CN202210172289 A CN 202210172289A CN 116695088 A CN116695088 A CN 116695088A
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 64
- 239000010432 diamond Substances 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims abstract description 113
- 230000010287 polarization Effects 0.000 claims abstract description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a microwave artificial diamond production device, which comprises a reaction container and a microwave emission module. The reaction vessel is used for placing a diamond seed crystal. The microwave transmitting module comprises a mode converting tube, a guiding tube, a first waveguide tube, a first linearly polarized microwave source, a second waveguide tube and a first matching load which are connected in sequence. The mode switching tube is connected to the reaction vessel and can switch microwaves back and forth between a circular polarization mode and a linear polarization mode. The guide tube has a first opening and a second opening which are non-parallel and are respectively connected with the first waveguide tube and the second waveguide tube. The first linearly polarized microwave source is arranged on the first waveguide, and the first matching load is arranged on the second waveguide. Therefore, useless reflected microwave energy in the reaction vessel is absorbed by the first matching load, and the diamond production efficiency is improved.
Description
Technical Field
The present invention relates to an apparatus for producing artificial diamond, and more particularly, to an apparatus for producing artificial diamond by microwave plasma chemical vapor deposition (Microwave Plasma Chemical Vapor Deposition, abbreviated as MPCVD).
Background
The prior art MPCVD artificial diamond production device is provided with a reaction cavity and a microwave emission module. A diamond carrying platform is arranged in the reaction cavity; the microwave transmitting module transmits microwaves of 2.45GHz towards the reaction cavity, and the microwaves can form regional standing wave strong electric fields at the diamond carrier. When the artificial diamond is produced, a diamond seed crystal is placed on the diamond carrier, and high-concentration methane is injected into the reaction cavity, at this time, the microwave energy emitted by the microwave emitting module can heat the methane gas around the diamond seed crystal to extremely high temperature and form a plasma ball, so that carbon atoms in the methane gas are attached to the diamond seed crystal under the action of plasma, and the diamond seed crystal is gradually grown into the artificial diamond with larger volume.
In order to enhance the production efficiency of the artificial diamond production device, taiwan patent No. 734405B discloses an artificial diamond production device with a circular polarization tube, a focusing mechanism and a focusing mechanism, wherein microwaves are converted into circular polarized microwaves by the circular polarization tube and then focused at a diamond seed crystal by the focusing mechanism, so that plasma balls can be stably formed around the diamond seed crystal, and the production efficiency of the artificial diamond is improved.
However, the artificial diamond production apparatus designed according to taiwan patent No. 734405B finds that, during practical testing, circularly polarized microwaves are helpful to form plasma balls stably, but are also easily reflected in the reaction chamber for multiple times due to impedance mismatch, so that complex multiple reflection standing waves are formed between the microwave emission module and the reaction chamber, thereby damaging stability of the plasma balls around the diamond seed crystal, and reducing production efficiency. In short, although the artificial diamond production apparatus designed according to taiwan patent No. 734405B can theoretically improve the production efficiency of artificial diamond, the production efficiency of diamond cannot reach the expected level due to excessive and useless microwave energy accumulated in the reaction chamber during actual operation.
Therefore, the prior art artificial diamond production apparatus and the microwave emitting module thereof are in fact to be improved.
Disclosure of Invention
In view of the foregoing drawbacks and deficiencies of the prior art, the present invention provides a microwave artificial diamond production apparatus capable of avoiding multiple reflections of microwaves in a reaction chamber to form complex multiple reflection standing waves between a microwave emitting module and the reaction chamber.
In order to achieve the above object, the present invention provides a microwave artificial diamond production device, comprising:
a reaction vessel which is a hollow body and is provided with a microwave window for the external microwave to penetrate into the reaction vessel, the reaction vessel is provided with
A diamond stage disposed within the reaction vessel and defining a focusing region;
a microwave transmitting module, which is arranged outside the reaction vessel and transmits circularly polarized microwaves towards the microwave window of the reaction vessel, the microwave transmitting module comprises a mode conversion tube, a guide tube, a first waveguide tube and a first linearly polarized microwave source which are connected in sequence, the microwave transmitting module also comprises a second waveguide tube and a first matching load, wherein
The mode switching tube has
A circular polarized opening at one end of the mode converting tube and facing the microwave window of the reaction vessel;
a linear polarization opening at the other end of the mode switching tube; when external linear polarized microwaves enter the mode conversion tube from the linear polarized opening, the linear polarized microwaves are converted into circular polarized microwaves and are emitted from the circular polarized opening; when external circularly polarized microwaves enter the mode conversion tube from the circularly polarized opening, the circularly polarized microwaves are converted into linearly polarized microwaves and are emitted from the linearly polarized opening;
the guide tube has:
a main opening at one end of the guide tube and connected to the linearly polarized opening of the mode switching tube;
a first opening;
a second opening located at the pipe wall of the guide pipe; the direction of the second opening is not parallel to the direction of the first opening;
one end of the first waveguide tube is connected with the first opening of the guide tube, and the other end of the first waveguide tube is connected with the first linearly polarized microwave source;
the first linearly polarized microwave source generates linearly polarized microwaves, which are converted into circularly polarized microwaves by the mode converting tube and emitted toward the microwave window of the reaction vessel through the circularly polarized opening of the mode converting tube;
one end of the second waveguide pipe is connected with the second opening of the guide pipe;
the first matching load is arranged on the second waveguide pipe;
a microwave lens arranged between the circular polarized opening of the mode conversion tube of the microwave emission module and the diamond carrier of the reaction container; the microwave lens gathers the circularly polarized microwaves emitted by the microwave emitting module in the focusing area of the diamond carrier.
Further, the microwave artificial diamond production device is characterized in that the microwave emission module is provided with a second linearly polarized microwave source which is arranged at the other end of the second waveguide; a second matching load is disposed on the first waveguide.
Further, in the microwave artificial diamond production device, the guide tube of the microwave emission module is a circular tube; the first waveguide and the second waveguide of the microwave transmitting module are square tubes.
Further, the first opening of the guide pipe is positioned at one end of the guide pipe opposite to the main opening; the microwave emission module is provided with a turning round connecting pipe which is connected between the first waveguide pipe and the first opening of the guide pipe; the inner wall of the square-to-round connecting pipe is gradually changed into a round shape from a square shape.
Further, the first opening of the guide pipe is positioned at one end of the guide pipe opposite to the main opening; the microwave transmitting module is provided with a connecting sleeve which is sleeved outside the guide pipe, and the second waveguide pipe is connected with the outer wall surface of the connecting sleeve; the connecting sleeve is provided with a conversion hole which penetrates from the outer wall surface to the inner wall surface of the connecting sleeve and is a long hole; the two opposite openings of the conversion hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe, and the width of the conversion hole is gradually reduced towards the second opening.
Further, in the apparatus for producing a microwave artificial diamond, two opposite walls of the conversion hole are stepped so that the width of the conversion hole is tapered toward the second opening.
Furthermore, the microwave artificial diamond production device is characterized in that the microwave emission module is provided with a connecting sleeve which is sleeved outside the guide pipe, and the second waveguide pipe is connected with the outer wall surface of the connecting sleeve; the connecting sleeve is provided with a conversion hole which penetrates from the outer wall surface to the inner wall surface of the connecting sleeve and is a long hole; the two opposite openings of the conversion hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe, and the width of the conversion hole is gradually reduced towards the second opening.
Further, in the apparatus for producing a microwave artificial diamond, two opposite walls of the conversion hole are stepped so that the width of the conversion hole is tapered toward the second opening.
Further, the microwave artificial diamond production device, wherein the first opening of the guide pipe is positioned on the pipe wall of the guide pipe; the microwave transmitting module is provided with a connecting sleeve which is sleeved outside the guide pipe, and the second waveguide pipe is connected with the outer wall surface of the connecting sleeve; the connecting sleeve is provided with two conversion holes; each conversion hole penetrates from the outer wall surface to the inner wall surface of the connecting sleeve and is a long hole; wherein the two opposite openings of one of the conversion holes are respectively connected with the first opening of the guide pipe and the first waveguide pipe; the two opposite openings of the other switching hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe; the width of each conversion hole is gradually reduced towards the outer wall surface of the guide pipe.
Further, the microwave artificial diamond production device, wherein the opening direction of the first opening of the guide tube is perpendicular to the opening direction of the second opening.
The invention has the advantages that by arranging the mode conversion tube, the guide tube and the first matching load on the microwave transmitting module, when circularly polarized microwaves in the reaction container are reflected due to various reasons such as impedance mismatch, the reflected circularly polarized microwaves are converted into circularly polarized microwaves again by the mode conversion tube, then are emitted to the first matching load through the second opening of the guide tube, and are converted into heat energy at the first matching load. Therefore, the invention can drain the useless microwave energy in the reaction vessel, prevent the formation of complex multiple reflection standing waves in the reaction vessel, further have the effects of keeping the stability of the plasma sphere around the diamond seed crystal and improving the diamond production efficiency.
Specifically, the linearly polarized microwave emitted by the first linearly polarized microwave source enters the mode conversion tube through the guide tube, is converted into circularly polarized microwave, and is injected into the reaction vessel to assist in forming diamond. The circularly polarized microwaves reflected in the reaction vessel are converted into linearly polarized microwaves again by the mode converting tube, but after the linearly polarized microwaves (hereinafter referred to as reflected microwaves) are converted by the mode converting tube twice, the electric field angle of the linearly polarized microwaves is perpendicular to that of the originally transmitted linearly polarized microwaves, so that the reflected microwaves cannot leave the guide tube along the original first opening, and therefore excessive useless microwave energy can be accumulated in the reaction chamber of the conventional taiwan TWI734405B patent. Whereas the guide tube of the present invention has a second opening that is non-parallel to the first opening so that reflected microwaves can leave the guide tube from the second opening, thereby channeling unwanted microwave energy in the reaction vessel.
Drawings
Fig. 1 is a perspective view of a first embodiment of the present invention.
Fig. 2 is an exploded view of a first embodiment of the present invention.
Fig. 3 is a schematic perspective cross-sectional view of a part of the elements of the first embodiment of the present invention.
Fig. 4 is a schematic view in longitudinal partial section of a first embodiment of the invention.
Fig. 5 is a schematic cross-sectional view of a first embodiment of the present invention.
Fig. 6 is a perspective view of a second embodiment of the present invention.
Fig. 7 is an exploded view of a solid element of a second embodiment of the present invention.
Fig. 8 is a schematic longitudinal sectional view of a second embodiment of the present invention.
Fig. 9 is a schematic cross-sectional view of a second embodiment of the present invention taken along section line A-A of fig. 8.
Detailed Description
The technical means adopted by the invention to achieve the preset aim are further described below by matching the specification, the drawings and the preferred embodiments of the invention.
Referring to fig. 1, 2 and 4, the microwave artificial diamond production apparatus of the present invention comprises a reaction vessel 10, a microwave emitting module and a microwave lens 13.
The reaction vessel 10 is a hollow body, the reaction vessel 10 is provided with a microwave window 11, the microwave window 11 is used for penetrating external microwaves into the reaction vessel 10, and the microwave window 11 is specifically arranged on the shell of the reaction vessel 10. The reaction vessel 10 has a diamond stage 12 disposed within the reaction vessel 10. The top surface of the diamond stage 12 defines a focusing region 121.
The microwave transmitting module is disposed outside the reaction vessel 10, and transmits circularly polarized microwaves toward the reaction vessel 10. The microwave transmitting module comprises a mode converting tube 21, a guiding tube 22, a first waveguide tube 31, a first linearly polarized microwave source 32, a second waveguide tube 41 and a first matching load 43; and in this embodiment, further comprises a one-turn round connection tube 23, a connection sleeve 24, a second linearly polarized microwave source 42 and a second matching load 33. Wherein the mode switching tube 21, the guide tube 22, the first waveguide tube 31, and the first linearly polarized microwave source 32 are sequentially connected along a microwave path.
Specifically, the microwave transmitting module of the present embodiment has a microwave superposition assembly 20, a first microwave assembly 30 and a second microwave assembly 40, the first microwave assembly 30 and the second microwave assembly 40 transmit linearly polarized microwaves towards the microwave superposition assembly 20, and the microwaves transmitted by the two microwave assemblies 30 and 40 enter the reaction vessel 10 together after the microwaves are superposed by the microwave superposition assembly 20.
Referring to fig. 2 to 4, the microwave superposition assembly 20 includes the mode conversion tube 21, the guide tube 22, the square-round connection tube 23 and the connection sleeve 24; the first microwave assembly 30 comprises the first waveguide 31, the first linearly polarized microwave source 32 and the second matching load 33; the second microwave assembly 40 includes the aforementioned second waveguide 41, second linearly polarized microwave source 42 and first matching load 43.
The mode switching tube 21 has a circular polarized opening 211 (shown in fig. 4) and a linear polarized opening 212 at both ends thereof. The circularly polarized opening 211 is located at the lower end of the mode switching tube 21 and faces the microwave window 11 of the reaction vessel 10. A linearly polarized opening 212 is located at the upper end of the mode switching tube 21. The mode converting pipe 21 converts linearly polarized microwaves into circularly polarized microwaves or converts circularly polarized microwaves into linearly polarized microwaves depending on the traveling direction of the microwaves.
Specifically, when external linearly polarized microwaves enter the mode conversion tube 21 at the upper end from the linearly polarized opening 212, the linearly polarized microwaves are converted into circularly polarized microwaves and are emitted from the circularly polarized opening 211 at the lower end. When external circularly polarized microwaves enter the mode converting tube 21 from the circularly polarized opening 211 at the lower end, the circularly polarized microwaves are converted into linearly polarized microwaves and are emitted from the linearly polarized opening 212 at the upper end.
The guide tube 22 has a main opening 221, a first opening 222 and a second opening 223. In the present embodiment, the main opening 221 and the first opening 222 are respectively located at the lower end and the upper end of the guide tube 22, and the main opening 221 is connected to the linearly polarized opening 212 of the mode switching tube 21. The second opening 223 is located on the wall of the guide tube 22, i.e. the direction of the second opening 223 is not parallel to the direction of the first opening 222, and specifically, the direction of the second opening 223 is perpendicular to the direction of the first opening 222. The guide tube 22 is preferably a circular tube, i.e., the main opening 221 and the first opening 222 are both circular.
The square-round connection pipe 23 is provided at the upper end of the guide pipe 22 and is connected to the first opening 222. The inner wall of the square-round connecting pipe 23 is gradually changed from square to round, so that both ends of the square-round connecting pipe 23 are respectively formed with a square connecting opening 231 and a round connecting opening 232. The circular connection opening 232 connects with the first opening 222 of the guide tube 22.
Referring to fig. 2, 3 and 5, the connecting sleeve 24 is sleeved outside the guiding tube 22, a converting hole 241 is formed on the connecting sleeve 24, and the converting hole 241 penetrates from the outer wall surface to the inner wall surface of the connecting sleeve 24 and is a vertically extending long hole, but the extending direction of the converting hole 241 is not limited thereto. The switching hole 241 is connected to the second opening 223 of the guide tube 22 at an opening of the inner wall surface, and the width of the switching hole 241 is tapered toward the second opening 223. In the present embodiment, the opposite two walls of the conversion hole 241 are stepped, so that the width of the conversion hole 241 is tapered stepwise. The connecting sleeve 24 is integrally formed with the guide tube 22 in the present embodiment, but in other preferred embodiments, the connecting sleeve 24 is a tube body independent of the guide tube 22 and is provided to the guide tube 22 by welding or the like.
Referring to fig. 2 to 4, the first waveguide 31 is preferably a square tube, and one end of the square tube is connected to the square connection opening 231 of the square-to-round connection tube 23, that is, the first waveguide 31 is connected to the first opening 222 of the guide tube 22 through the square-to-round connection tube 23.
The other end of the first waveguide 31 is connected to the first linearly polarized microwave source 32. The first linearly polarized microwave source 32 generates the TE10 linearly polarized microwave 81, and the TE10 linearly polarized microwave 81 is converted into the TE11 circularly polarized mode microwave 83 by the mode conversion tube 21 after passing through the square-turn circular connection tube 23, the guide tube 22 and the mode conversion tube 21 and is emitted toward the microwave window 11 of the reaction vessel 10 through the circular polarized opening 211 of the mode conversion tube 21.
The second matching load 33 is disposed on the first waveguide 31, and specifically, a circulator 34 is disposed on the first waveguide 31, when microwaves reversely traveling toward the first linearly polarized microwave source 32 occur in the first waveguide 31 (i.e., microwaves generated by the second linearly polarized microwave source 42, which will be described later, are reflected by the reaction vessel 10, pass through the mode conversion tube 21, and travel toward the first linearly polarized microwave source 32 via the guide tube 22 through the square-round connection tube 23), the circulator 34 guides the reversely traveling microwaves to the second matching load 33, and converts the microwaves into heat energy at the second matching load 33, thereby protecting the first linearly polarized microwave source 32 from the reverse microwaves, and eliminating useless microwave energy in the apparatus.
The second waveguide 41 is preferably a square tube, and one end thereof is connected to the opening of the transition hole 241 of the connection sleeve 24 on the outer wall surface, that is, the second waveguide 41 is connected to the second opening 223 of the guide tube 22 through the connection sleeve 24. The other end of the second waveguide 41 is connected to the aforementioned second linearly polarized microwave source 42.
The second linearly polarized microwave source 42 generates TE10 linearly polarized microwaves 91, and the TE10 linearly polarized microwaves 91 are converted into TE11 circularly polarized microwaves 93 by the mode conversion tube 21 after passing through the guide tube 22 and the mode conversion tube 21, and are emitted toward the microwave window 11 of the reaction vessel 10 through the circularly polarized opening 211 of the mode conversion tube 21. In other preferred embodiments, the second linearly polarized microwave source 42 may be omitted as appropriate.
The first matching load 43 is disposed on the second waveguide 41, and specifically, a circulator 44 is disposed on the second waveguide 41, when microwaves reversely traveling toward the second linearly polarized microwave source 42 occur in the second waveguide 41 (i.e., microwaves generated by the first linearly polarized microwave source 32 are reflected by the reaction vessel 10, cannot pass through the square-round connection pipe 23 due to the direction of the electric field after passing through the mode conversion pipe 21, and travel toward the second linearly polarized microwave source 42 via the guide pipe 22), the circulator 44 guides the reverse microwaves in the second waveguide 41 to the first matching load 43 to protect the second linearly polarized microwave source 42 and eliminate useless microwave energy in the apparatus.
The microwave lens 13 is disposed between the circular polarized opening 211 of the mode converting tube 21 of the microwave emitting module and the diamond stage 12 of the reaction vessel 10, and the microwave lens 13 gathers the circular polarized microwaves emitted by the microwave emitting module in the focusing area 121 of the diamond stage 12. In this embodiment, the microwave lens 13 is disposed outside the reaction vessel 10 and between the circular polarized opening 211 of the mode switching tube 21 of the microwave transmitting module and the microwave window 11 of the reaction vessel 10. The microwave lens 13 is preferably a dielectric convex lens, but other suitable combinations of convex-concave lenses can achieve the same similar microwave focusing effect.
In use, the present invention places diamond seed A in focal region 121 of diamond stage 12. The first linearly polarized microwave source 32 generates TE10 linearly polarized microwave 81 in the first waveguide 31, and the TE10 linearly polarized microwave 81 enters the guide tube 22 through the square-to-round connection tube 23 and is converted into TE11 linearly polarized microwave 82 in the guide tube 22; meanwhile, the second linearly polarized microwave source 42 generates TE10 linearly polarized microwaves 91 in the second waveguide 41, and the TE10 linearly polarized microwaves 91 form TE11 linearly polarized microwaves 92 in the guide pipe 22 after passing through the conversion hole 241 of the connection sleeve 24.
Finally, the TE11 linearly polarized microwaves 82 from the first linearly polarized microwave source 32 and the TE11 linearly polarized microwaves 92 from the second linearly polarized microwave source 42 pass through the mode converting tube 21 together, are converted into TE11 circularly polarized mode microwaves 83 and TE11 circularly polarized mode microwaves 93 by the mode converting tube 21, respectively, and are focused by the microwave lens 13, and then pass through the microwave window 11 to be focused to the focusing region 121 to produce the artificial diamond.
When the TE11 circularly polarized microwaves 83 and 93 are reflected in the reaction vessel 10, the microwaves from the first linearly polarized microwave source 32 enter the second waveguide 41 through the second opening 223 and are finally consumed by the first matching load 43 to be converted into heat, and the microwaves from the second linearly polarized microwave source 42 enter the first waveguide 31 through the first opening 222 and are finally consumed by the second matching load 33 to be converted into heat, which is described in detail as follows:
when the TE11 circularly polarized mode microwave 83 from the first linearly polarized microwave source 32 is reflected, the reflected TE11 circularly polarized mode microwave 83 passes upward through the mode switching tube 21 and forms TE11 linearly polarized microwave 82' within the guide tube 22. However, after the TE11 linearly polarized microwave 82 'is converted twice by the mode converting tube 21, the electric field angle thereof is perpendicular to the linearly polarized microwave TE11 linearly polarized microwave 82, so that the TE11 linearly polarized microwave 82' cannot return to the first waveguide 31 from the first opening 222, but enters the second waveguide 41 from the second opening 223 and is consumed by the first matching load 43 to be converted into heat.
The condition of the reflected TE11 circularly polarized mode microwave 93 from the second linearly polarized microwave source 42 is about the same, that is, the reflected TE11 circularly polarized mode microwave 93 passes upward through the mode converting tube 21 and forms TE11 linearly polarized microwave 92 'in the guiding tube 22, and the TE11 linearly polarized microwave 92' can be consumed by the second matching load 33 to be converted into heat via the first waveguide 31 although not returning to the second waveguide 41.
Another advantage of the present invention is that the circularly polarized microwave mode is more uniformly distributed than the microwave mode that is widely used in the linearly polarized microwave mode, and the present invention can simultaneously set the first linearly polarized microwave source 32 and the second linearly polarized microwave source 42, and can increase the growth rate of the artificial diamond on the stage by superposing the circularly polarized microwave power generated by the two microwave sources.
Referring to fig. 6 to 9, the second embodiment of the present invention is substantially the same as the first embodiment, except that the first opening 222A of the guide tube 22A is located on the wall of the guide tube 22A; the connecting sleeve 24A has two switching holes 241A, wherein two opposite openings of one switching hole 241A are respectively connected to the first opening 222A and the first waveguide 31A of the guide tube 22A, and two opposite openings of the other switching hole 241A are respectively connected to the second opening 223A and the second waveguide 41A of the guide tube 22A.
In summary, by providing the mode conversion tube 21, the guide tube 22 and the first matching load 43, when the TE11 circularly polarized mode microwave 83 from the first linearly polarized microwave source 32 is reflected from the circularly polarized microwave in the reaction vessel 10 due to various reasons such as impedance mismatch, the reflected circularly polarized microwave can be converted back into the circularly polarized microwave again by the mode conversion tube 21, and then emitted to the first matching load 43 through the second opening 223 of the guide tube 22, and converted into heat energy at the first matching load 43. Therefore, the invention can drain useless microwave energy in the reaction vessel 10, prevent complex multiple reflection standing waves from forming in the reaction vessel 10, further have the effects of keeping the stability of the plasma balls around the diamond seed crystal A and improving the diamond production efficiency.
The present invention is not limited to the above-mentioned embodiments, but is not limited to the above-mentioned embodiments, and any person skilled in the art can make some changes or modifications to the equivalent embodiments without departing from the scope of the technical solution of the present invention, but any simple modification, equivalent changes and modifications to the above-mentioned embodiments according to the technical substance of the present invention are still within the scope of the technical solution of the present invention.
Claims (10)
1. A microwave artificial diamond production device, comprising:
a reaction vessel which is a hollow body and is provided with a microwave window for the external microwave to penetrate into the reaction vessel, the reaction vessel is provided with
A diamond stage disposed within the reaction vessel and defining a focusing region;
a microwave transmitting module, which is arranged outside the reaction vessel and transmits circularly polarized microwaves towards the microwave window of the reaction vessel, the microwave transmitting module comprises a mode conversion tube, a guide tube, a first waveguide tube and a first linearly polarized microwave source which are connected in sequence, the microwave transmitting module also comprises a second waveguide tube and a first matching load, wherein
The mode switching tube has
A circular polarized opening at one end of the mode converting tube and facing the microwave window of the reaction vessel;
a linear polarization opening at the other end of the mode switching tube; when external linear polarized microwaves enter the mode conversion tube from the linear polarized opening, the linear polarized microwaves are converted into circular polarized microwaves and are emitted from the circular polarized opening; when external circularly polarized microwaves enter the mode conversion tube from the circularly polarized opening, the circularly polarized microwaves are converted into linearly polarized microwaves and are emitted from the linearly polarized opening;
the guide tube has:
a main opening at one end of the guide tube and connected to the linearly polarized opening of the mode switching tube;
a first opening;
a second opening located at the pipe wall of the guide pipe; the direction of the second opening is not parallel to the direction of the first opening;
one end of the first waveguide tube is connected with the first opening of the guide tube, and the other end of the first waveguide tube is connected with the first linearly polarized microwave source;
the first linearly polarized microwave source generates linearly polarized microwaves, which are converted into circularly polarized microwaves by the mode converting tube and emitted toward the microwave window of the reaction vessel through the circularly polarized opening of the mode converting tube;
one end of the second waveguide pipe is connected with the second opening of the guide pipe;
the first matching load is arranged on the second waveguide pipe;
a microwave lens arranged between the circular polarized opening of the mode conversion tube of the microwave emission module and the diamond carrier of the reaction container; the microwave lens gathers the circularly polarized microwaves emitted by the microwave emitting module in the focusing area of the diamond carrier.
2. The apparatus for manufacturing a microwave artificial diamond according to claim 1, wherein the microwave emitting module has
A second linearly polarized microwave source disposed at the other end of the second waveguide; the second linearly polarized microwave source generates linearly polarized microwaves, which are converted into circularly polarized microwaves by the mode converting tube and emitted toward the microwave window of the reaction vessel through the circularly polarized opening of the mode converting tube;
a second matching load is disposed on the first waveguide.
3. The microwave artificial diamond production device according to claim 1 or 2, wherein,
the guide tube of the microwave transmitting module is a circular tube;
the first waveguide and the second waveguide of the microwave transmitting module are square tubes.
4. The apparatus for producing microwave artificial diamond according to claim 3, wherein,
the first opening of the guide tube is positioned at one end of the guide tube opposite to the main opening;
the microwave emission module is provided with a turning round connecting pipe which is connected between the first waveguide pipe and the first opening of the guide pipe; the inner wall of the square-to-round connecting pipe is gradually changed into a round shape from a square shape.
5. The apparatus for producing microwave artificial diamond according to claim 3, wherein,
the first opening of the guide tube is positioned at one end of the guide tube opposite to the main opening;
the microwave transmitting module is provided with a connecting sleeve which is sleeved outside the guide pipe, and the second waveguide pipe is connected with the outer wall surface of the connecting sleeve; the connecting sleeve is provided with
A switching hole penetrating from the outer wall surface to the inner wall surface of the connecting sleeve and being a long hole; the two opposite openings of the conversion hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe, and the width of the conversion hole is gradually reduced towards the second opening.
6. The apparatus of claim 5, wherein the opposite walls of the conversion hole are stepped such that the width of the conversion hole tapers toward the second opening.
7. The apparatus of claim 4, wherein the microwave emitting module has a connection sleeve, which is sleeved outside the guide pipe, and the second waveguide is connected to the outer wall surface of the connection sleeve; the connecting sleeve is provided with
A switching hole penetrating from the outer wall surface to the inner wall surface of the connecting sleeve and being a long hole; the two opposite openings of the conversion hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe, and the width of the conversion hole is gradually reduced towards the second opening.
8. The apparatus of claim 7, wherein the opposite walls of the conversion hole are stepped such that the width of the conversion hole tapers toward the second opening.
9. The apparatus for producing microwave artificial diamond according to claim 3, wherein,
the first opening of the guide pipe is positioned on the pipe wall of the guide pipe;
the microwave transmitting module is provided with a connecting sleeve which is sleeved outside the guide pipe, and the second waveguide pipe is connected with the outer wall surface of the connecting sleeve; the connecting sleeve is provided with
A second conversion hole; each conversion hole penetrates from the outer wall surface to the inner wall surface of the connecting sleeve and is a long hole; wherein the two opposite openings of one of the conversion holes are respectively connected with the first opening of the guide pipe and the first waveguide pipe; the two opposite openings of the other switching hole are respectively connected with the second opening of the guide pipe and the second waveguide pipe; the width of each conversion hole is gradually reduced towards the outer wall surface of the guide pipe.
10. The apparatus for producing microwave artificial diamond according to claim 1 or 2, wherein the opening direction of the first opening of the guide tube is perpendicular to the opening direction of the second opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210172289.XA CN116695088A (en) | 2022-02-24 | 2022-02-24 | Microwave artificial diamond production device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210172289.XA CN116695088A (en) | 2022-02-24 | 2022-02-24 | Microwave artificial diamond production device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116695088A true CN116695088A (en) | 2023-09-05 |
Family
ID=87824431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210172289.XA Pending CN116695088A (en) | 2022-02-24 | 2022-02-24 | Microwave artificial diamond production device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116695088A (en) |
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2022
- 2022-02-24 CN CN202210172289.XA patent/CN116695088A/en active Pending
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