TW202316100A - Detection device for plasma processing equipment and plasma processing equipment - Google Patents

Abstract

The invention discloses a detection device for plasma processing equipment and the plasma processing equipment, the detection device comprises a consumption ring and a detection module, the consumption ring comprises a first material and a second material, the first material has a first color, and the second material has a second color different from the first color. The detection module is detachably connected with the manipulator, the detection module comprises a color sensor module, the color sensor module is used for detecting the color change of the consumption ring, and the method is simple and accurate in detection and does not cause pollution to the cavity.

Description

Detection device for plasma processing equipment, plasma processing equipment, operation method, and calculation method

The invention relates to a detection device for plasma processing equipment, as well as plasma processing equipment, an operation method, and an operation method.

The steps of manufacturing semiconductor elements generally include: photolithography, etching, ashing, ion implantation, thin film deposition and other processes. In the existing manufacturing process of semiconductor elements, plasma can be used to etch and form patterns on the surface of the wafer.

Plasma processing equipment, such as etching equipment, generally sets focus rings, edge rings and other rings around the base to adjust the concentration of plasma around the base, thus ensuring that the surrounding area of the base is stable during the etching process. etching uniformity. However, as the number of etching processes increases, the etching gas will not only etch the surface of the wafer during the process, but also etch the upper surfaces of the focus ring, edge ring and other rings, which will cause the thickness of these rings to gradually decrease. If the thickness of the ring is reduced, the etching process will deteriorate at the edge of the wafer, and the etching uniformity at the edge will deteriorate. At this time, it is necessary to replace the focus ring with a new one to ensure the process quality at the edge.

But how to detect the consumption of these consumed ring bodies has always been a pain point in this field. The existing detection methods have the following disadvantages: 1. The corrosion of the consumable ring is judged by measuring the height difference of the consumable ring. This method needs to measure the height difference, so a reference value is required. The position will be slightly displaced, so the reference value will change, so the measured height difference will have a large error, and a series of algorithms are required. 2. The sensor is arranged in the cavity, which will bring pollution to the inside of the cavity and affect the process quality. 3. The sensor is placed outside, and the measurement window is set at the position corresponding to the sensor in the cavity. However, as the number of etchings increases, the measurement window is easy to attach pollutants, thereby reducing the measurement accuracy of the sensor.

Therefore, there is a need for a detection method that can accurately determine the consumption of the consumption ring without affecting the quality of the manufacturing process.

The purpose of the present invention is to solve the above problems, and provide a detection device capable of accurately judging the consumption of a consumable ring, as well as a plasma processing device, an operation method, and an operation method including the detection device.

The present invention provides a detection device for plasma processing equipment. The plasma processing equipment includes: a cavity, a base and a manipulator, and the base is placed in the cavity to support a wafer to be processed. , the manipulator can extend into the cavity to take out the wafer; The detection device includes: a consumption ring, the consumption ring is placed around the base; the consumption ring includes a first material and a second material, the first material has a first color, and the second material has a color different from the first color a second color; the first material is exposed on the upper surface of the sacrificial ring, the second material is not exposed on the upper surface; A detection module, the detection module is detachably connected with the manipulator, the detection module includes a color sensor module, and the color sensor module is used to detect the change of the color of the consumption ring.

Optionally, both the first material and the second material are ring-shaped, and the first material is located above the second material.

Optionally, both the first material and the second material are ring-shaped, the first material has a circular groove opening downward, and the second material is embedded into the groove through stress.

Optionally, the consumption ring further includes a warning material ring, the color of the warning material ring is different from that of the first material, and the warning material ring is placed between the first material and the second material.

Optionally, the first material is different from the second material, the first material is selected from silicon, silicon carbide or aluminum oxide, and the second material is selected from silicon, silicon carbide or aluminum oxide.

Optionally, the detection module further includes an upper part, a lower part and a connecting part, the connecting part is used for connecting the upper part and the lower part, and the lower part is disc-shaped.

Optionally, there is an accommodating part between the upper part and the lower part, and the accommodating part is used for accommodating the arm of the manipulator.

Optionally, the detection module also includes a rechargeable battery, a controller, a signal transmitter and a charging connector electrically connected to the color sensor module; the rechargeable battery is used to power the color sensor module, the controller 1. The signal transmitter supplies power, the controller is used to receive the detection data of the color sensor module and calculate it, the signal transmitter is used to send the calculation result of the controller to the terminal, and the charging connector is used to charge the rechargeable battery .

Optionally, the signal transmission mode of the signal transmitter is wireless transmission.

Optionally, the rechargeable battery, the controller, the signal transmitter and the charging connector are integrated into the inner space formed by the upper part, the lower part and the connection part or integrated on the upper surface of the upper part

Optionally, the rechargeable battery, controller, signal transmitter and charging connector are integrated in the color sensor module.

Optionally, there are four color sensor modules, which are placed in the circumferential direction of the lower surface of the lower part, and the intervals between the color sensor modules in the circumferential direction are the same.

Optionally, a circular track is provided on the lower surface of the lower part, and the circular track is arranged along the circumference of the lower part, and the color sensor module can move along the circular track.

Optionally, the lower surface of the lower part is provided with an annular groove that opens downward, and steps are respectively provided on both sides of the opening of the annular groove; the color sensor module also includes a driving component, a transmission components, a rotating wheel and a bracket for supporting the rotating wheel, the driving part drives the rotating wheel to rotate through the transmission part; the rotating wheel is placed in the annular groove and supported by the step.

Further, the present invention also discloses a plasma processing equipment, the plasma processing equipment includes: a cavity, a base, and a manipulator, the base is placed in the cavity to support the wafer to be processed , the manipulator can extend into the cavity to take out the wafer; The above-mentioned detection device is also included, and the detection device is used for detecting the consumption of the consumable ring, and judging whether it needs to be replaced according to the consumption of the consumable ring.

Further, the present invention also discloses a detection device operating method comprising the following steps: the plasma processing equipment finishes the process; the manipulator carries the detection module into the cavity; and the color sensor module detects the color of the consumable ring and Obtain detection data, the detection module receives the detection data of the color sensor module and performs calculation, and sends the calculation result to the terminal.

Optionally, the present invention also discloses an operation method for the above operation method, the operation method specifically includes: comparing the detection data with the pre-stored color value corresponding to the second material, and judging the detection Whether the material matches the color value of the second material.

Optionally, the present invention also discloses an operation method for the above operation method, the operation method specifically includes: obtaining the detection data of two adjacent detections, the two detection data are respectively the first data and the second data; compare the second data with the first data, and judge whether the second data is equal to the first data.

The detection device of the present invention solves the problem in the prior art that it is impossible to accurately judge the consumption of the consumable ring, and has the following advantages: the detection device includes a consumable ring and a detection module, the consumable ring includes a first material and a second material, and the The first material has a first color and the second material has a second color different from the first color. The detection module is detachably connected with the manipulator, the detection module includes a color sensor module, and the color sensor module is used to detect the change of the color of the consumption ring, and the detection method is simple and accurate , and will not bring pollution to the cavity.

Embodiments of the detection device of the present invention will be specifically described below with reference to the accompanying drawings.

FIG. 1 is a schematic structural view of the plasma processing equipment of the present invention. Plasma processing equipment can be, for example, plasma etching equipment. There are mainly two types of existing etching equipment: inductively coupled plasma etching equipment and capacitively coupled plasma etching equipment. Taking capacitively coupled plasma etching equipment as an example, as shown in Figure 1, the The plasma processing equipment includes: a chamber body 100, a base 103, a manipulator 106 and a detection device, the chamber body 100 has a substantially cylindrical side wall 101, and a transmission port 102 is arranged on the side wall 101, and the manipulator 106 Entering and exiting the chamber 100 from the transfer port 102 , the manipulator 106 is used for transferring wafers, and is also used for loading and unloading inspection devices. The base 103 is placed in the cavity 100 to support the wafer to be processed, and the base 103 is also used as the lower electrode; the base is also provided with an electrode 109 for providing electrostatic adsorption; the cavity 100 is provided with A shower head 104 opposite to the base 103, the shower head 104 is connected to the gas source 105, used to supply reaction gas into the cavity 100, and at the same time as the upper electrode of the cavity 100, the upper electrode and the lower electrode A reaction zone is formed between the electrodes. At least one radio frequency power supply is applied to one of the upper electrode or the lower electrode through a matching network, and a radio frequency electric field is generated between the upper electrode and the lower electrode to dissociate the reaction gas into plasma, which contains A large number of active particles such as electrons, ions, excited atoms, molecules and free radicals, the above-mentioned active particles can undergo various physical and chemical reactions with the surface of the wafer to be processed, so that the morphology of the wafer surface changes and the etching process is completed . A pump 107 is also provided below the vacuum cavity 100 to discharge the reaction by-products out of the cavity to maintain the vacuum environment of the cavity. A plasma confinement ring 108 is set between the reaction area and the non-reaction area. The plasma confinement ring 108 is provided with an exhaust channel. By reasonably setting the ratio of depth to width of the exhaust channel, the reaction gas can be discharged while realizing Confining the plasma in the reaction area between the upper and lower electrodes, avoiding the leakage of the plasma into the non-reaction area and causing damage to the components in the non-reaction area.

As shown in Figure 1, the detection device includes: a consumption ring 300 and a detection module 200, the consumption ring 300 is placed around the base 103, and the detection module 200 is detachably connected to the manipulator 106 .

As shown in FIG. 1 , the consumable ring 300 includes a first material 301 and a second material 302, the first material 301 has a first color, and the second material 302 has a second color different from the first color; The first material 301 is exposed on the upper surface of the consumable ring 300, the second material 302 is not exposed on the upper surface, and both the first material 301 and the second material 302 are annular with a certain thickness, The first material 301 is placed on the upper surface of the second material 302 . The thickness of the first material 301 depends on whether the consumption of the thickness will affect the process quality, that is, the consumption of the thickness of the first material 301 has little influence on the process quality.

As shown in Figure 1, the detection module 200 includes a color sensor module 401, the color sensor module 401 is used to detect the color change of the consumption ring 300, due to the first material 301 and the second The colors of the materials 302 are different, so once the first material 301 is corroded and consumed, the color sensor module 401 will detect the color change of the consumption ring 300, indicating that the first material 301 has been corroded, and the thickness of the consumption ring 300 Since the thickness of the consumable ring 300 is reduced, its function of adjusting the plasma concentration around the base 103 will be weakened, which will affect the process quality of the wafer edge during the next etching process, and then it needs to be replaced. New consumption ring to solve the above problems.

Fig. 2 is a sectional view along the line AA' in Fig. 1 of the present invention. As shown in FIG. 2 , the detection module 200 further includes an upper part 201 , a lower part 202 and a connecting part 203 , and the connecting part 203 is used for connecting the upper part 201 and the lower part 202 . Fig. 3 is the bottom view of the manipulator of the present invention, as can be seen from Fig. 3, manipulator 106 has two arms 1061, and described lower part 202 is disc-shaped, and the lower surface of described lower part 202 is provided with four A color sensor module 401, the color sensor module 401 is placed in the circumferential direction of the lower surface of the lower part 202, and the interval between each of the color sensor modules 401 in the circumferential direction The same or different, the advantage of this is: if the consumption ring 300 is corroded too fast in a certain orientation, it is possible that the consumption ring 300 in this orientation is first consumed to the requirement of being replaceable, if only one color sense is set If the tester module 401 is used, it is likely that the replacement time will be missed and the quality of the next process will be affected.

From FIG. 2 , the cross-sections of the upper part, the lower part and the connecting part are in the shape of an "I", and the color sensor module 401 is located on the lower surface of the lower part 202 and directly above the consumption ring 300 . There is an accommodation part between the upper part 201 and the lower part 202, and the accommodation part is used to accommodate the arm 1061 of the manipulator 106. The arm 1061 can be inserted into the accommodation part, and the detection module 200 can be loaded as a whole. In the cavity 100, at the same time, the manipulator 106 can also be used for loading and unloading wafers. In this way, the detection module 200 can be loaded into and out of the cavity 100 like a wafer, and its setting does not have any impact on the cavity, so it will not affect the quality of the process. The color sensor module 401 of the detection module 200 It will not be affected by etching gas or pollutants, which can ensure the accuracy of measurement.

2, the detection module 200 also includes a rechargeable battery 402 electrically connected to the color sensor module 401, a controller 403, a signal transmitter 404 and a charging connector 405, and the rechargeable battery 402 is used to give color perception The detector module 401, the controller 403, and the signal transmitter 404 are used for power supply, the controller 403 is used to receive the detection data of the color sensor module 401 and calculate, and the signal transmitter 404 is used to use the controller 403 The calculation result is sent to the terminal, and the charging connector 405 is used to charge the rechargeable battery 402 . The terminal can be a console of a plasma processing device or a mobile communication device, such as a mobile phone or a tablet computer. For the setting position, optionally, the rechargeable battery 402, the controller 403, the signal transmitter 404 and the charging connector 405 are integrated in the inner space formed by the upper part 201, the lower part 202 and the connecting part 203; optional The rechargeable battery 402 , the controller 403 , the signal transmitter 404 and the charging connector 405 are integrated in the color sensor module 401 , such two arrangements can prevent the carried particles from polluting the inside of the chamber 100 . Also optionally, it may also be integrated on the upper surface of the upper part 201 .

The method of operation of the detection device. After the process ends, the manipulator 106 enters from the transfer port 102 to transport the wafer out of the cavity 100, and then the manipulator 106 loads the detection module 200 into the cavity 100, and the color in the color sensor module 401 The sensor works and emits a light beam to the consumption ring 300, the surface of the consumption ring 300 reflects the light beam, the color sensor receives the signal of the reflected light, and converts the light signal into an electrical signal to form detection data, and the controller 403 receives The detection data are combined and calculated, and the specific calculation process is: compare the detection data with the color value corresponding to the second material 302 stored in the controller 403 in advance, and judge whether the detection data is consistent with the color value of the second material 302 The numerical value is matched, and the matching result is transmitted to the signal transmitter 404, and the signal transmitter 404 sends the operation result to the terminal, and the staff can see the detection result at the terminal, if the result shows that it matches the color value of the second material 302, then the working The personnel then perform the step of replacing the consumable ring 300, and if they do not match, continue to use the existing consumable ring 300. The detection method does not need to accurately calculate the thickness of the consumable ring 300 , the method is simple, and the detection accuracy will not decrease with the increase of the number of processes, and it will not bring pollution to the inside of the cavity 100 and affect the process quality.

As an optional operation method of the detection device, before the manufacturing process, the manipulator 106 loads the detection module 200 into the cavity 100, and the color sensor in the color sensor module 401 works to emit light to the consumption ring 300. The light beam is reflected by the surface of the consumption ring 300, the color sensor receives the signal of the reflected light, and converts the light signal into an electrical signal to form detection data, and the controller 403 records the detection data to form a first value, Then the first value corresponds to the color value of the first material 301. After the process is completed, the manipulator 106 enters from the transfer port 102 to transfer the wafer out of the cavity 100, and then the manipulator 106 detects the module 200 Loaded into the cavity, the color sensor in the color sensor module 401 works, and emits a light beam to the consumption ring 300, and the surface of the consumption ring 300 reflects the light beam, and the color sensor receives the signal of the reflected light, and transmits the light beam The signal is converted into an electrical signal to form detection data, and the controller 403 receives the detection data to form a second value, then the second value corresponds to the color value of the second material 302, and then calculates, the specific calculation process is: Comparing the second data with the first data to obtain a calculation result, when the second data is different from the first data, it means that the consumption ring 300 needs to be replaced, the controller 403 transmits the calculation result to the signal transmitter 404, and the signal The transmitter 404 sends the calculation result to the terminal, and the staff can see the detection result at the terminal to decide whether to replace the consumption ring 300 .

Since the detection result of the present invention is not real-time detection, there is the following problem: after the end of one process, the measurement result shows that the first material 301 has not been consumed, so the next process is carried out. During this process, the first material 301 is completely corroded. , so there will be part of the process quality decay during this process, and the replacement of the consumable ring 300 after the process is over will lag behind, which affects the quality of this process. Fig. 4 is a structural schematic diagram of another embodiment of the consumption ring of the present invention, as shown in Fig. 4, as an optional embodiment, the consumption ring 300 also includes a warning material ring 303, and the warning material ring 303 is placed in the Between the first material 301 and the second material 302 , optionally, the color of the warning material ring 303 is different from that of the first material 301 , or different from the colors of both the first material 301 and the second material 302 . The warning material 303 has a certain thickness, which is equal to the thickness of the consumable ring 300 consumed by one or more processes. Although such a thickness is not accurate enough, it can be calculated according to multiple processes, so that the early warning can be obtained after measurement. When the material ring is 303, it is judged whether it is necessary to replace the consumable ring according to the time of the next process.

For the layered sacrificial ring 300 as shown in FIG. 4 , the layers need to be bonded by an adhesive layer, but the adhesive layer will bring pollutants into the cavity 100 during the manufacturing process, thereby affecting the manufacturing process quality. Fig. 5 is a schematic structural view of another embodiment of the consumable ring of the present invention, the first material 301 and the second material 302 are both ring-shaped, and the first material 301 has a circular groove opening downwards, The second material 302 is embedded into the groove through stress, thus avoiding the problem of bonding with an adhesive layer. FIG. 6 is a schematic structural view of another embodiment of the consumable ring of the present invention, and an early warning material ring 303 is sandwiched between the first material 301 and the second material 302 .

Choice of consumable ring 300 material. The consumable ring 300 selects the material of the consumable ring commonly used in the prior art, such as silicon, silicon carbide or aluminum oxide. These materials will not pollute the cavity after corrosion, and the color of silicon is gray gold, and the color of silicon carbide is Gray and white, the color of aluminum oxide is yellow. The first material and the second material can therefore each be selected from two different materials.

Fig. 7 is a schematic structural view of another embodiment of the detection module of the present invention. In the embodiment shown in Figure 2, four color sensor modules 401 are used, but the consumption status of the consumption ring 300 in four directions can only be measured, and the four color sensor modules 401 will also bring to rise in cost. As an optional embodiment, the lower surface of the lower part 202 is provided with an annular track 406, the annular track 406 is arranged along the circumference of the lower part 202, there is one color sensor module 401, and It can move along the circular track 406 . When the detection device is running, each time the color sensor module 401 runs a circle on the circular track 406, it is judged whether the consumption ring 300 has been consumed to a thickness that needs to be replaced in a certain direction, which increases the accuracy.

Fig. 8 is a schematic structural diagram of another embodiment of the detection module of the present invention. As an optional implementation, the lower surface of the lower part 202 is provided with an annular groove 500 opening downward, and steps 501 are respectively provided on both sides of the opening of the annular groove 500; the color sensor The module 401 also includes a driving part, a transmission part, a rotating wheel 408 and a bracket 407 for supporting the rotating wheel 408, and the driving part drives the rotating wheel 408 to rotate through the transmission part; the rotating wheel 408 is placed on the In the annular groove 500 and supported by the step 501. When the detection device is running, each time the color sensor module 401 runs around the annular groove 500, it is judged whether the consumption ring 300 has been consumed to a thickness that needs to be replaced in a certain orientation.

It should be noted that, in the embodiments of the present invention, the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientations or positional relationships indicated by "radial", "circumferential", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments, rather than indicating or implying that the referred device or element must have a specific orientation, are constructed and operate in a particular orientation and therefore are not to be construed as limiting the invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components or the interaction relationship between two components. Those with ordinary knowledge in the technical field can understand the specific meanings of the above terms in the present invention according to specific situations.

Although the content of the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as limiting the present invention. Various modifications and alterations to the present invention will become apparent to those of ordinary skill in the art after reading the foregoing disclosure. Therefore, the protection scope of the present invention should be defined by the appended patent application scope.

100: cavity 101: side wall 102: transmission port 103: base 104: sprinkler head 105: gas source 106: Manipulator 1061: arm 107: pump 108: Plasma confinement ring 109: electrode 200: detection module 201: upper part 202: the lower part 203: connection part 300: consumption ring 301: first material 302: second material 303: Early warning materials 401: Color sensor module 402: rechargeable battery 403: Controller 404: Signal Transmitter 405: charging connector 406: Ring track 407: bracket 408: Turning wheel 500: Ring groove 501: steps

FIG. 1 is a schematic structural view of the plasma processing equipment of the present invention. Fig. 2 is a sectional view along the line AA' in Fig. 1 of the present invention. Fig. 3 is a bottom view of the manipulator of the present invention. Fig. 4 is a structural schematic diagram of another embodiment of the consumption ring of the present invention. Fig. 5 is a structural schematic diagram of another embodiment of the consumption ring of the present invention. Fig. 6 is a schematic structural diagram of another embodiment of the consumption ring of the present invention. Fig. 7 is a schematic structural view of another embodiment of the detection module of the present invention. Fig. 8 is a schematic structural diagram of another embodiment of the detection module of the present invention.

100: cavity

101: side wall

102: transmission port

103: base

104: sprinkler head

105: gas source

106: Manipulator

107: pump

108: Plasma confinement ring

109: electrode

200: detection module

201: upper part

202: the lower part

300: consumption ring

301: first material

302: second material

401: Color sensor module

Claims (18)

A detection device for plasma processing equipment, the plasma processing equipment includes: a cavity, a base and a manipulator, the base is placed in the cavity for supporting a wafer to be processed, the The manipulator can reach into the cavity and take out the wafer; Wherein, the detection device for plasma processing equipment includes: A consumption ring, the consumption ring is placed around the base; the consumption ring includes a first material and a second material, the first material has a first color, and the second material has a color different from the first color a second color; the first material is exposed on the upper surface of the sacrificial ring, the second material is not exposed on the upper surface; and A detection module, the detection module is detachably connected with the manipulator, the detection module includes a color sensor module, and the color sensor module is used to detect the color change of the consumption ring. The detection device for plasma processing equipment as claimed in claim 1, wherein the first material and the second material are ring-shaped, and the first material is located above the second material. The detection device for plasma processing equipment as claimed in claim 1, wherein the first material and the second material are ring-shaped, and the first material has a circular groove opening downward, the The second material is embedded into the groove by stress. The detection device for plasma processing equipment as described in claim 2 or 3, wherein the consumption ring further includes a warning material ring, the color of the warning material ring is different from the first material, and the warning material ring is placed between the first material and the second material. The detection device for plasma processing equipment as claimed in claim 1 or 2, wherein the material of the first material is different from the second material, the first material is selected from silicon, silicon carbide or aluminum oxide, the second The second material is selected from silicon, silicon carbide or alumina. The detection device for plasma processing equipment according to claim 1, wherein the detection module further includes an upper part, a lower part and a connecting part, and the connecting part is used to connect the upper part and the lower part , the lower part is disc-shaped. The inspection device for plasma processing equipment as claimed in Claim 6, wherein there is a housing portion between the upper part and the lower part, and the housing part is used to accommodate the arm of the manipulator. The detection device for plasma processing equipment as described in Claim 7, wherein the detection module further includes a rechargeable battery electrically connected to the color sensor module, a controller, a signal transmitter and a Charging connector; the rechargeable battery is used to supply power to the color sensor module, the controller, and the signal transmitter, the controller is used to receive and calculate a detection data of the color sensor module, and the signal transmitter is used to The calculation result of the controller is sent to a terminal, and the charging connector is used for charging the rechargeable battery. The detection device for plasma processing equipment as claimed in Claim 8, wherein the signal transmission method of the signal transmitter is wireless transmission. The detection device for plasma processing equipment as claimed in claim 8, wherein the rechargeable battery, the controller, the signal transmitter and the charging connector are integrated into the upper part, the lower part and the connecting part The inner space may be integrated into the upper surface of the upper part. The detection device for plasma processing equipment as claimed in claim 8, wherein the rechargeable battery, the controller, the signal transmitter and the charging connector are integrated in the color sensor module. The detection device for plasma processing equipment as claimed in claim 6, wherein there are four color sensor modules, which are placed on the lower surface of the lower part on the circumference, and each of the color sensor modules The intervals in the circumferential direction are the same. The detection device for plasma processing equipment as claimed in claim 11, wherein, the lower surface of the lower part is provided with an annular track, and the annular track is arranged along the circumference of the lower part, and the color sensor module Can move along the circular track. The detection device for plasma processing equipment as claimed in claim 11, wherein the lower surface of the lower part is provided with an annular groove opening downward, and a step is respectively arranged on both sides of the opening of the annular groove; The color sensor module also includes a driving part, a transmission part, a rotating wheel and a support for supporting the rotating wheel, the driving part drives the rotating wheel to rotate through the transmission part; the rotating wheel is placed on the in the annular groove and supported by the step. A plasma processing equipment, the plasma processing equipment comprises: a chamber, a base and a manipulator, the base is placed in the chamber for supporting a wafer to be processed, the manipulator can be inserted into removing the wafer from the cavity; Among them, it also includes a detection device for plasma processing equipment as described in any of the claims 1-14, the detection device for plasma processing equipment is used to detect the consumption of the consumption ring, and according to the consumption ring It is necessary to judge whether it needs to be replaced according to the consumption situation. A method for operating the detection device as described in Claim 1-14, including the following steps: The plasma processing equipment ends the process; The manipulator carries the detection module into the cavity; The color sensor module detects the color of the consumption ring and obtains detection data, the detection module receives the detection data of the color sensor module and performs calculation, and sends the calculation result to the terminal. The operating method of the detection device as claimed in claim 16, wherein the operation includes the following steps: The detection data is compared with the pre-stored color value corresponding to the second material, and it is judged whether the detection data matches the color value of the second material. The operating method of the detection device as claimed in claim 16, wherein the operation includes the following steps: Obtain the detection data of two adjacent detections, the two detection data are respectively a first data and a second data; and Comparing the second data with the first data to determine whether the second data is equal to the first data.

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